CN208350298U - A kind of universal helium inspection equipment convenient for being detected to different product - Google Patents
A kind of universal helium inspection equipment convenient for being detected to different product Download PDFInfo
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- CN208350298U CN208350298U CN201820978690.1U CN201820978690U CN208350298U CN 208350298 U CN208350298 U CN 208350298U CN 201820978690 U CN201820978690 U CN 201820978690U CN 208350298 U CN208350298 U CN 208350298U
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- helium
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- upper mold
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Abstract
The utility model relates to the technical fields of helium inspection, disclose a kind of universal helium inspection equipment convenient for detecting to different product, including body and a variety of different types of detection carriers, there is monitor station on body, when detection carrier, which is fixed on, carries out helium inspection on monitor station, helium inspection instrument vacuum tube is connected on detection carrier for placing the test chamber of product to be checked;The pressing upper mold of the test chamber for covering detection carrier is additionally provided on body, pressing upper mold is moved up and down relative to monitor station, and pressing upper mold has the pressing chamber of downwardly facing opening, and pressing chamber is communicated with the helium input pipe of input helium;When pressing upper mold capping test chamber, pressing chamber and test chamber are in closed environment, and the product to be checked isolation pressing chamber and helium being placed in test chamber examine instrument vacuum tube;Helium input pipe inputs helium, detects whether there is helium by Nitrogen Detector, so that the airtightness to product judges that structure is simple, is conveniently replaceable different detection carriers and detects different products, versatility is high.
Description
Technical field
The utility model relates to the technical field of helium inspection, especially a kind of universal helium inspection convenient for being detected to different product
Equipment.
Background technique
Helium inspection is to examine instrument by helium come a kind of mode of the airtightness of testing product, and primary operational process is to examined workpiece
It is filled with the helium of certain pressure intensity after evacuation, is the vacuum tank with certain vacuum degree requirement, vacuum tank and helium outside examined workpiece
Inspection instrument leak detection mouth connects.
Helium inspection during, when product it is closed not exclusively, helium can through product reach product outside vacuum environment, into
And detected by helium inspection instrument, realize the detection to product airtightness.
However it currently, fixes, is not easy due to being filled with the die cavity of pressing upper mold of helium in the airtightness detection to product
Replacement, therefore, product detected is just more single, and inconvenience detects a variety of different products, and practicability is lower.
Utility model content
The utility model proposes a kind of examine equipment convenient for the universal helium that detects to different product, it is intended to solve existing skill
The problem that the type of the product of helium inspection equipment detection is single in art, practicability is lower.
The utility model is realized in this way a kind of universal helium convenient for detecting to different product examines equipment, including machine
Body and a variety of different types of detection carriers have the inspection of the detection carrier for fixing different types on the body
Scaffold tower, the body is interior to have the helium inspection instrument vacuum tube for being connected to Nitrogen Detector, when the detection carrier is fixed on the inspection
When carrying out helium inspection on scaffold tower, the first helium inspection instrument vacuum tube is connected on the detection carrier for placing the inspection of product to be checked
Survey chamber;Positioned at the top of the monitor station, the pressure of the test chamber for covering the detection carrier is additionally provided on the body
Mould is closed, the pressing upper mold is moved up and down relative to the monitor station, and the pressing upper mold has the pressing chamber of downwardly facing opening,
The pressing chamber is communicated with the helium input pipe of input helium;When the pressing upper mold covers the test chamber, the pressing
The pressing chamber of upper mold be located in the test chamber periphery, makes the pressing chamber and the test chamber in closed environment, is placed on institute
It states the product to be checked in test chamber and completely cuts off the pressing chamber and helium inspection instrument vacuum tube.
Further, the pressing upper mold has the lower end surface arranged downward, and the lower end surface of the pressing upper mold is convexly equipped with
It is disposed around the pressing rubber ring of the pressing chamber periphery, when the pressing chamber be located in the test chamber periphery, the pressing
Rubber ring is connected to the test chamber periphery.
Further, multiple pin shafts are convexly equipped on the monitor station, the bottom of the different types of detection carrier has
Multiple pin holes corresponding with the pin shaft, when the detection carrier is fixed on the monitor station, multiple pin hole difference
It is embedded in the pin hole of detection carrier, the bottom of the detection carrier abuts the upper surface of the monitor station.
Further, the monitor station has the upper surface of the fixed detection carrier, the upper end mask of the monitor station
There is the station of multiple fixed test carriers, the monitor station is connect with the body activities, and the monitor station is relative to the machine
Body rotation makes the lower section that upper mold is pressed described in the different station faces respectively.
Further, one end of the helium inspection instrument vacuum tube is equipped with vacuum adapter, and the vacuum adapter is relative to institute
Monitor station is stated to move up and down, it is described when one of station on the monitor station turns to the underface of the pressing upper mold
Vacuum adapter move up it is concordant with the upper surface of the monitor station, it is solid on helium inspection instrument vacuum tube and one of station
The test chamber of the fixed detection carrier is connected to
Further, the bottom of the detection carrier has the detection mouth for being connected to test chamber, the vacuum adapter tool
Have and is connected to helium inspection instrument vacuum tube and upwardly opening transfer tube, when the helium inspection instrument vacuum tube is connected to the test chamber, institute
State the opening of transfer tube described in detection mouth face.
Further, the vacuum adapter has the upper surface towards the pressing upper mold, the vacuum adapter
Upper surface is convexly equipped with the bottom rubber ring for the opening for being disposed around the transfer tube, and the helium inspection instrument vacuum tube and the test chamber connect
When logical, the bottom rubber ring is connected to the bottom of the detection carrier, and is disposed around the detection mouth periphery.
Further, there are multiple test chambers, multiple test chambers are connected to the inspection jointly on the detection carrier
Survey mouth.
Further, the body has the compression cylinder for driving the pressing upper mold to move up and down, the pressing upper mold
It is fixedly connected with the compression cylinder.
Compared with prior art, a kind of universal helium inspection convenient for detecting to different product provided by the utility model is set
Standby, different detection carriers is fixed on monitor station corresponding to place different products to be checked, be no longer confined to single production
Product examine is surveyed, also, the pressing chamber for pressing upper mold need to only be located in test chamber and realize closing, be not required to when replacing product to be checked
Pressing upper mold is replaced, it is easy to operate, when needing to carry out helium inspection, product to be checked is placed in test chamber, makes production to be checked
Product separate helium inspection instrument vacuum tube and pressing chamber, input helium by helium input pipe, helium is filled with pressing chamber, when product to be checked goes out
Existing position airtightness is insufficient and when gas leakage, helium enters in helium inspection instrument vacuum tube, and by examining the helium that instrument vacuum tube is connected to helium
Gas detector test arrives, to learn that the airtightness of product is poor, even if to correct the manufacturing process of product;Without detecting
Then prove that the airtightness of product is good to helium.The type for solving the product of helium inspection equipment detection in the prior art is single, real
With the lower problem of property.
Detailed description of the invention
Fig. 1 is that a kind of universal helium convenient for detecting to different product provided by the embodiment of the utility model is examining equipment just
The schematic perspective view in face;
Fig. 2 is a kind of back convenient for the universal helium inspection equipment detected to different product provided by the embodiment of the utility model
The schematic perspective view in face;
Fig. 3 is a kind of back convenient for the universal helium inspection equipment detected to different product provided by the embodiment of the utility model
Schematic perspective view inside face;
Fig. 4 is a kind of figure convenient for the universal helium inspection equipment detected to different product provided by the embodiment of the utility model
Enlarged diagram at 3A;
Fig. 5 is a kind of pressure convenient for the universal helium inspection equipment detected to different product provided by the embodiment of the utility model
Close the schematic perspective view of mould;
Fig. 6 is a kind of inspection convenient for the universal helium inspection equipment detected to different product provided by the embodiment of the utility model
Survey the schematic perspective view of carrier.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
The realization of the utility model is described in detail below in conjunction with specific embodiment.
The same or similar label correspond to the same or similar components in the attached drawing of the present embodiment;In retouching for the utility model
In stating, it is to be understood that if the orientation or positional relationship for having the instructions such as term " on ", "lower", "left", "right" is based on attached drawing
Shown in orientation or positional relationship, be merely for convenience of describing the present invention and simplifying the description, rather than indication or suggestion institute
The device or element of finger must have a particular orientation, be constructed and operated in a specific orientation, therefore position pass is described in attached drawing
The term of system only for illustration, should not be understood as the limitation to this patent, for those of ordinary skill in the art and
Speech, can understand the concrete meaning of above-mentioned term as the case may be.
It is preferred embodiment provided by the utility model referring to figs. 1 to shown in Fig. 6.
A kind of universal helium convenient for detecting to different product provided in this embodiment examines equipment, for different products
It realizes helium inspection, to check the airtightness of product, makes product when in use will not gas leakage.
It is provided in this embodiment it is a kind of examine equipment convenient for the universal helium that detects to different product, including body 11 and
A variety of different types of detection carriers 13 have the monitor station 12 of the detection carrier 13 for fixing different types on body 11,
There is the helium inspection instrument vacuum tube for being connected to Nitrogen Detector 15 in body 11, carried out when detection carrier 13 is fixed on monitor station 12
When helium is examined, the first helium inspection instrument vacuum tube is connected on detection carrier 13 for placing the test chamber 131 of product 16 to be checked;Positioned at inspection
The top of scaffold tower 12 is additionally provided with the pressing upper mold 14 of the test chamber 131 for covering detection carrier 13, pressing on body 11
Upper mold 14 is moved up and down relative to monitor station 12, and pressing upper mold 14 has the pressing chamber 141 of downwardly facing opening, and pressing chamber 141 is connected to
There is the helium input pipe of input helium, when the pressing upper mold 14 covers the test chamber 131, the pressure of the pressing upper mold 14
Closing chamber 141 be located in 131 periphery of test chamber, place the pressing chamber 141 in closed environment, with the test chamber 131
Product to be checked 16 in the test chamber 131 completely cuts off the pressing chamber 141 and examines instrument vacuum tube with the helium.
In this way, different detection carriers 13 is fixed on monitor station 12 corresponding to place different products to be checked 16,
It is no longer confined to single product testing, also, 141 need of pressing chamber for pressing upper mold 14 be located in test chamber 131 and realize closing
, it does not need to replace pressing upper mold 14 when replacing product 16 to be checked, it is easy to operate, it, will when needing to carry out helium inspection
Product 16 to be checked is placed in test chamber 131, and product 16 to be checked is made to separate helium inspection instrument vacuum tube and pressing chamber 141, defeated by helium
Enter pipe input helium, helium is filled with pressing chamber 141, when product 16 to be checked occur that position airtightness is insufficient and when gas leakage, helium into
Enter in helium inspection instrument vacuum tube, and detected by examining the Nitrogen Detector 15 that instrument vacuum tube is connected to helium, to learn product
Airtightness is poor, even if to correct the manufacturing process of product;Prove that the airtightness of product is good without detecting helium then.
Also, pressing upper mold 14 has the lower end surface arranged downward, and the lower end surface of pressing upper mold 14, which is convexly equipped with, is disposed around pressure
The pressing rubber ring for closing 141 periphery of chamber, when pressing chamber 141 be located in 131 periphery of test chamber, pressing rubber ring is connected to detection
131 periphery of chamber causes detection structure inaccurate to prevent from leaking air when detecting, meanwhile, in corresponding detection carrier 13
Periphery form the pressfitting groove circle to lower recess, for pressing rubber ring insertion, guarantee good closed environment.
Also, multiple pin shafts are convexly equipped on monitor station 12, the bottom of different types of detection carrier 13 has multiple and pin
The corresponding pin hole of axis, when detection carrier 13 is fixed on monitor station 12, multiple pin holes are respectively embedded in the pin of detection carrier 13
In hole, the bottom of detection carrier 13 abuts the upper surface of monitor station 12, in this way, in replacement detection will be to different products to be checked
16 when being detected, and only need to be will test carrier 13 and be removed, the detection carrier 13 more renewed, and the pin hole being allowed to and pin shaft contraposition are solid
Fixed, easy to operate, replacement is quick.
In addition, monitor station 12 has the upper surface of fixed test carrier 13, the upper surface of monitor station 12 in the present embodiment
Station with multiple fixed test carriers 13, monitor station 12 are flexibly connected with body 11, and monitor station 12 is relative to 11 turns of body
The dynamic lower section for making different station faces press upper mold 14 respectively, in this way, can be by new production to be checked while carrying out helium inspection
Product 16 assemble, and so that the helium of next round is examined, save the time, accelerate efficiency.
Specifically, the quantity of station is two, it is symmetrically arranged, in this way, the station of side, which is placed in specific, carries out helium
Inspection, the station of the other side carry out the assembly of product 16 to be checked.
Also, one end that helium examines instrument vacuum tube is equipped with vacuum adapter 151, and vacuum adapter 151 is relative to monitor station 12
It moves up and down, when one of station on monitor station 12 turns to the underface of pressing upper mold 14, vacuum adapter 151 is upward
Movement is concordant with the upper surface of monitor station 12, and helium examines the detection of detection carrier 13 fixed on instrument vacuum tube and one of station
Chamber 131 is connected to, in this way, different stations can be docked with the movement of monitor station 12 by mobile vacuum adapter 151,
To be detected.
Specifically, the bottom of detection carrier 13 has the detection mouth 133 for being connected to test chamber 131, vacuum adapter 151 has
Have and is connected to helium inspection instrument vacuum tube and upwardly opening transfer tube, when helium inspection instrument vacuum tube is connected to test chamber 131, detection mouth
The opening of 133 face transfer tubes, to realize that the test chamber 131 of the detection carrier 13 detected and helium examine instrument vacuum tube
Connection.
The detection through-hole 121 of perforation monitor station 12, above-mentioned vacuum adapter are respectively provided at each station of monitor station 12
151 be moved upwardly by docking detection mouth 133 when, vacuum adapter 151 insertion detection through-hole 121, make the upper end of vacuum adapter 151
Face is concordant with the upper surface of monitor station 12, in order to each station accurate contraposition of monitor station 12.
Also, vacuum adapter 151 has the upper surface towards pressing upper mold 14, and the upper surface of vacuum adapter 151 is convex
Bottom rubber ring equipped with the opening for being disposed around transfer tube, when helium inspection instrument vacuum tube is connected to test chamber 131, bottom rubber ring
It is connected to the bottom of detection carrier 13, and is disposed around 133 periphery of detection mouth, is prevented from the gas that detection mouth 133 comes out from gap
It leaks out, guarantees the accuracy of detection.
In the present embodiment, detecting has multiple test chambers 131 on carrier 13, and multiple test chambers 131 are connected to detection jointly
Mouth 133, in this way, can detect simultaneously to the airtightness of multiple products 16 to be checked, detection efficiency is high.
Also, the compression cylinder 112 that there is body 11 driving pressing upper mold 14 to move up and down, presses upper mold 14 and compresses
Cylinder 112 is fixedly connected, and is controlled pressing upper mold 14 by compression cylinder 112 and is compressed downwards, realizes pressing chamber 141 and test chamber
131 it is closed, meanwhile, body 11 is additionally provided with the docking cylinder that moves up and down of driving vacuum adapter 151, and docking cylinder is fixed to be connected
It connects in the lower end of vacuum adapter 151 to drive vacuum adapter 151 to move up and down, the side of vacuum adapter 151 is outwardly
Extend and extend downwardly and connect with helium inspection instrument vacuum tube, is connected to the transfer tube of vacuum adapter 151 with helium monitor, realizes
Detection to helium.
In addition, chamber 142 is included in the pressing that the bottom of chamber both ends of pressing chamber 141 are formed with downwardly facing opening, when the pressing button of chamber 141 is set
At 131 periphery of test chamber, the connection sheet that the two sides for the product to be checked 16 being put into test chamber 131 upwardly extend is placed in both ends
Pressing is included in chamber 142, so that product to be checked 16 provided in this embodiment is stablized and is placed in test chamber 131, also, logical
It crosses to press to be included in and be connected to helium input pipe, helium is provided.
Helium input pipe is connected to gasing pump, and the helium pressure of detection helium pressure is provided on helium input pipe
Monitoring element and the helium pressure electromagnetic valve for adjusting that helium pressure is adjusted, thus realize to the monitoring of helium pressure with
And adjust, in the present embodiment, before carrying out helium inspection, pressing upper mold 14 is snapped on monitoring carrier, and vacuum adapter 151 is not right
It connects detection mouth 133, after air pump is first passed through air for a period of time by helium input pipe, then vacuum adapter 151 is docked at inspection
The detection mouth 133 of the bottom of carrier 13 is surveyed, air pump is passed through helium, carries out helium inspection;In this way, be first passed through air for a period of time and be in order to
The hole location of the air leak position of product 16 to be checked is set to become larger, the helium after being allowed to is easier to penetrate and detect from air leak position, makes helium
The accuracy of inspection is higher.
In the present embodiment, the above-mentioned compression cylinder 112 of control, docking cylinder driving movement and detection are additionally provided on body 11
The control cabinet 111 that platform 12 rotates, between the operation that compression cylinder 112, docking cylinder and monitor station 12 are controlled by control cabinet 111
Every, realize that automation helium is examined, quickening helium inspection efficiency, while helium pressure electromagnetic valve for adjusting adjusting helium is controlled by control cabinet 111
The input pressure of gas and air prevents the excessive damage product 16 to be checked of pressure, and is shown by the helium pressure on body 11
Table shows the pressure size of helium, and helium pressure shows that table and helium pressure monitoring element are electrically connected;In addition, on body 11
It is additionally provided with unqualified indicator light, to indicate 16 airtightness of product to be checked is not up to standard.
Also, in the present embodiment, product 16 to be checked is the top cover of battery, and the position that predominantly detects of product 16 to be checked is two sides
Pole and middle part explosion chip architecture, it is then recessed in test chamber 131 that there are three embedding for above-mentioned pole and explosion chip architecture respectively
Chamber 132 is included in the detection entered, and above-mentioned detection mouth 133 is then connected to detection and is included in chamber 132, and the pole and rupture disk of two sides will press
Chamber 141 and helium inspection instrument vacuum tube partition are closed, to detect to the airtightness of pole and rupture disk.
Meanwhile detection is included in the periphery pad of chamber 132 equipped with detection rubber ring, detection rubber ring is connected on battery cap,
The airtightness for guaranteeing detection position, avoids gas leakage.
The above is only the preferred embodiments of the present utility model only, is not intended to limit the utility model, all practical at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the utility model within novel spirit and principle
Within the scope of shield.
Claims (9)
1. a kind of universal helium convenient for detecting to different product examines equipment, which is characterized in that including body and a variety of differences
The detection carrier of type has the monitor station of the detection carrier for fixing different types, the body on the body
It is interior that there is the helium inspection instrument vacuum tube for being connected to Nitrogen Detector, when the detection carrier is fixed on progress helium inspection on the monitor station
When, the helium inspection instrument vacuum tube is connected on the detection carrier for placing the test chamber of product to be checked;Positioned at the detection
The top of platform is additionally provided with the pressing upper mold of the test chamber for covering the detection carrier, in the pressing on the body
Mould is moved up and down relative to the monitor station, and the pressing upper mold has the pressing chamber of downwardly facing opening, and the pressing chamber is communicated with
Input the helium input pipe of helium;When the pressing upper mold covers the test chamber, the pressing chamber button of the pressing upper mold is set
In the test chamber periphery, makes the pressing chamber and the test chamber in closed environment, be placed on to be checked in the test chamber
Product completely cuts off the pressing chamber and the helium examines instrument vacuum tube.
2. a kind of universal helium convenient for detecting to different product as described in claim 1 examines equipment, which is characterized in that described
Pressing upper mold has the lower end surface arranged downward, and the lower end surface of the pressing upper mold, which is convexly equipped with, is disposed around the pressing chamber periphery
Rubber ring is pressed, when the pressing chamber be located in the test chamber periphery, the pressing rubber ring is connected to the test chamber
Periphery.
3. a kind of universal helium convenient for detecting to different product as described in claim 1 examines equipment, which is characterized in that described
Multiple pin shafts are convexly equipped on monitor station, the bottom of the different types of detection carrier has multiple pins corresponding with the pin shaft
Hole, when the detection carrier is fixed on the monitor station, multiple pin holes are respectively embedded in the pin hole of detection carrier,
The bottom of the detection carrier abuts the upper surface of the monitor station.
4. a kind of universal helium convenient for detecting to different product as described in any one of claims 1 to 3 examines equipment, feature
It is, the monitor station has the upper surface of the fixed detection carrier, and the upper surface of the monitor station has multiple fixed inspections
The station of carrier is surveyed, the monitor station is connect with the body activities, and the monitor station makes respectively relative to body rotation
The lower section of upper mold is pressed described in the different station faces.
5. a kind of universal helium convenient for detecting to different product as claimed in claim 4 examines equipment, which is characterized in that described
One end that helium examines instrument vacuum tube is equipped with vacuum adapter, and the vacuum adapter is moved up and down relative to the monitor station, described
When one of station on monitor station turns to the underface of the pressing upper mold, the vacuum adapter moves up and institute
The upper surface for stating monitor station is concordant, the detection of the fixed detection carrier on the helium inspection instrument vacuum tube and one of station
Chamber connection.
6. a kind of universal helium convenient for detecting to different product as claimed in claim 5 examines equipment, which is characterized in that described
The bottom of detection carrier has the detection mouth for being connected to test chamber, and the vacuum adapter, which has, is connected to helium inspection instrument vacuum tube simultaneously
Upwardly opening transfer tube, when the helium inspection instrument vacuum tube is connected to the test chamber, transfer tube described in the detection mouth face
Opening.
7. a kind of universal helium convenient for detecting to different product as claimed in claim 6 examines equipment, which is characterized in that described
Vacuum adapter has a upper surface towards the pressing upper mold, the upper surface of the vacuum adapter be convexly equipped be disposed around it is described
The bottom rubber ring of the opening of transfer tube, when the helium inspection instrument vacuum tube is connected to the test chamber, the bottom rubber ring is supported
It connects in the bottom of the detection carrier, and is disposed around the detection mouth periphery.
8. a kind of universal helium convenient for detecting to different product as described in any one of claims 1 to 3 examines equipment, feature
It is that there are multiple test chambers on the detection carrier, multiple test chambers are connected to the detection mouth jointly.
9. a kind of universal helium convenient for detecting to different product as described in any one of claims 1 to 3 examines equipment, feature
It is, the body has the compression cylinder for driving the pressing upper mold to move up and down, the pressing upper mold and the compression gas
Cylinder is fixedly connected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201820978690.1U CN208350298U (en) | 2018-06-25 | 2018-06-25 | A kind of universal helium inspection equipment convenient for being detected to different product |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201820978690.1U CN208350298U (en) | 2018-06-25 | 2018-06-25 | A kind of universal helium inspection equipment convenient for being detected to different product |
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ID=64881790
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CN201820978690.1U Expired - Fee Related CN208350298U (en) | 2018-06-25 | 2018-06-25 | A kind of universal helium inspection equipment convenient for being detected to different product |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108444652A (en) * | 2018-06-25 | 2018-08-24 | 深圳市瑞德丰精密制造有限公司 | A kind of universal helium convenient for being detected to different product examines equipment |
CN110037387A (en) * | 2019-05-15 | 2019-07-23 | 李晓亮 | The rotating disc type vacuum heating forming machine improved efficiency |
CN110542516A (en) * | 2019-09-11 | 2019-12-06 | 东野精机(昆山)有限公司 | High-speed helium mass spectrometer leak detection sorting system and sorting method thereof |
-
2018
- 2018-06-25 CN CN201820978690.1U patent/CN208350298U/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108444652A (en) * | 2018-06-25 | 2018-08-24 | 深圳市瑞德丰精密制造有限公司 | A kind of universal helium convenient for being detected to different product examines equipment |
CN108444652B (en) * | 2018-06-25 | 2023-07-25 | 常州瑞德丰精密技术有限公司 | Universal helium detection equipment convenient for detecting different products |
CN110037387A (en) * | 2019-05-15 | 2019-07-23 | 李晓亮 | The rotating disc type vacuum heating forming machine improved efficiency |
CN110542516A (en) * | 2019-09-11 | 2019-12-06 | 东野精机(昆山)有限公司 | High-speed helium mass spectrometer leak detection sorting system and sorting method thereof |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190108 Termination date: 20200625 |
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