CN208333064U - A kind of vacuum system being used to prepare in ceramic sintering furnace - Google Patents

Abstract

The utility model discloses a kind of vacuum systems being used to prepare in ceramic sintering furnace, including furnace body, vacuum meter, gas analyzer, oil diffusion pump, slide valve pump, oil mist filter and damping device, the lower end of furnace body is fixedly connected with multiple brackets, it is simple that this is used to prepare the vacuum system structure in ceramic sintering furnace, vacuum system starting, oil diffusion pump and slide valve pump are opened, the intracorporal air of furnace is drawn into the external world, due to slide valve pump inner rotator in the inner cavity of slide valve pump running track be complex-shaped closed curve, the high-speed rotation of rotor will lead to slide valve pump vibration；Two roller conflictings simultaneously support lifting vibration damper plate；Meanwhile two the 4th pistons are close to each other, drive pushes block lifting vibration damper plate, and the first spring in first support bar and the third spring in second support bar carry out damping again, and triplicity effectively carries out damping, substantially increases practicability.

Description

A kind of vacuum system being used to prepare in ceramic sintering furnace

Technical field

The utility model relates to vacuum system field, specially a kind of vacuum system being used to prepare in ceramic sintering furnace System.

Background technique

Vacuum system is by vacuum pump, PLC program control system, air accumulator, vacuum pipe, vacuum valve, overseas filters The complete vacuum system of the compositions such as assembly.Vacuum system is widely used in electronic semi-conductor's industry, photoelectricity backlight module, machining Etc. industries, vacuum pump be an important component of vacuum system, vacuum pump used in vacuum system is big currently on the market Mostly sliding vane rotary pump, under severe vacuum environment he be unable to satisfy requirement, need to install filter device additional, specification can only be reduced It uses, after technological innovation, slide valve pump occurs, under the premise of not reducing requirement, it has the firm long-life, resistance to Mill, and even if there is hard particles shape field trash, its pumping speed is not influenced yet, but the inner rotator of slide valve pump is bias Wheel, running track of the rotor in the inner cavity of slide valve pump is complex-shaped closed curve, if which results in slide valves not to have Good mass balance can generate biggish vibration in the running, influence coming into operation for vacuum system, for this purpose, it is proposed that A kind of vacuum system being used to prepare in ceramic sintering furnace.

Utility model content

The purpose of this utility model is to provide a kind of vacuum systems being used to prepare in ceramic sintering furnace, to solve The problems mentioned above in the background art.

To achieve the above object, the utility model provides the following technical solutions:

A kind of vacuum system being used to prepare in ceramic sintering furnace, including furnace body, vacuum meter, gas analyzer, oil Diffusion pump, slide valve pump, oil mist filter and damping device, the lower end of furnace body are fixedly connected with multiple brackets, and the side of furnace body Sidewall upper perforation is connected with vacuum meter, and the upper end of furnace body is fixedly connected with gas analyzer, side of the furnace body far from vacuum meter Perforation is connected with one end of oil diffusion pump, and one end of the other end perforation connection slide valve pump of oil diffusion pump, slide valve in the middle part of side wall The sidewall upper of the upper end of pump and furnace body, which penetrates through, to be connected, and the upper end of slide valve pump is fixedly connected with oil mist filter, and slide valve pump Lower end is fixedly connected with damping device,

The damping device is by shell, vibration damper plate, first support bar, L shape ram pot, first piston, spur rack, T shape liquid Pressure cylinder, second support bar, gear, capstan winch and hinge bar composition, the upper end of the vibration damper plate are fixedly connected with the lower end of slide valve pump, And the side wall of vibration damper plate and the inner sidewall of shell are slidably connected, shell is the uncovered structure of upper end opening, under the vibration damper plate Holding Symmetrical vertical connection, there are two the upper ends of first support bar, and the lower end of first support bar reaches the inner cavity of L shape ram pot simultaneously The upper center of vertical connection first piston, is socketed with the first spring in the first support bar, and the upper end of the first spring with The lower end of vibration damper plate connects, and the lower end of the first spring is connect with the upper end of L shape ram pot, the side wall and L shape of the first piston Vertical one section of the inner sidewall of ram pot is slidably connected, and laterally the inner bottom wall of one section of lower end and shell fixes company to L shape ram pot It connects, lateral one section of the inner sidewall of the L shape ram pot slidably connects second piston, and second piston is far from first support bar One end of spur rack is vertically connected in the middle part of the side wall of side, it is horizontal that L shape ram pot is run through in the opposite one end of two spur racks The same T shape ram pot laterally one section of inner cavity and the vertically side wall middle part of connection third piston, and T are reached to one section of side wall Lateral one section of the lower end of shape ram pot is fixedly connected with the inner bottom wall of shell, and the side wall and T shape ram pot of the third piston are horizontal It is slidably connected to one section of inner sidewall, second spring, and one end of second spring and L shape is socketed on the side wall of the spur rack Lateral one section of the inner sidewall connection of ram pot, the other end of second spring and the side wall of second piston connect, the T shape ram pot Vertical one section of inner sidewall slidably connects the 4th piston, and the upper center of the 4th piston is vertically connected with second support bar The upper end of lower end, the second support bar reaches the exocoel of T shape ram pot through the roof of T shape ram pot and connection pushes block In the middle part of lower end, and third spring being socketed in second support bar, the upper end of the third spring is connect with the lower end for pushing block, and The lower end of third spring is connect with the upper end of T shape ram pot, and the teeth of the spur rack sidewall upper are engaged with gear, and gear It is rotatably connected on the inner cavity rear wall of shell, the front side wall of the gear has been fixedly and coaxially connected capstan winch, and winds on capstan winch There is traction rope, the upper end of the traction rope connects the side lower end of hinge bar, and interior with shell in the middle part of the rear wall of hinge bar Chamber rear wall is hinged.

Preferably, the upper end of the vibration damper plate is fixedly connected with rubber layer.

Preferably, rubber seal is socketed on the side wall of the first piston.

Preferably, the hinge bar is rotatably connected to idler wheel far from one end of traction rope.

Compared with prior art, the utility model has the beneficial effects that this be used to prepare it is true in ceramic sintering furnace Empty system structure is simple, and vacuum system starting, oil diffusion pump and slide valve pump are opened, and the intracorporal air of furnace is drawn into the external world, by In slide valve pump inner rotator in the inner cavity of slide valve pump running track be complex-shaped closed curve, the high-speed rotation of rotor It will lead to slide valve pump vibration；

Slide valve pump is fixedly connected on the upper end of vibration damper plate, the effectively preliminary damping of the rubber layer of vibration damper plate upper end, meanwhile, it is sliding The vibration of valve pump operation presses vibration damper plate and moves downward, and two first support bars is driven to move downward, and presses first piston in L shape Slide downward in the inner cavity of ram pot, it is close to each other that the hydraulic oil in the hydraulic tube inner chamber of L shape presses two spur racks, on spur rack The teeth meshing gear at end, drives two gear rotations, and capstan winch tightening pulls traction rope, drives two hinge bars along hinge joint Rotation, two roller conflictings simultaneously support lifting vibration damper plate；

Meanwhile two spur racks is close to each other, pushes two the 4th pistons close to each other, drives second support bar upper end Push block lifting vibration damper plate, the first spring in first support bar is subtracted again with the third spring in second support bar Shake, triplicity effectively carry out damping, substantially increase practicability.

Detailed description of the invention

FIG. 1 is a schematic structural view of the utility model；

Fig. 2 is damping device structural schematic diagram.

In figure: furnace body 1, vacuum meter 2, gas analyzer 3, oil diffusion pump 4, slide valve pump 5, oil mist filter 6, damping device 7, shell 71, vibration damper plate 72, first support bar 73, L shape ram pot 74, first piston 75, spur rack 76, T shape ram pot 77, Two support rods 78, gear 79, capstan winch 710, hinge bar 711.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.

The utility model provides a kind of technical solution referring to FIG. 1-2:

A kind of vacuum system being used to prepare in ceramic sintering furnace, including furnace body 1, vacuum meter 2, gas analyzer 3, Oil diffusion pump 4, slide valve pump 5, oil mist filter 6 and damping device 7, the lower end of furnace body 1 are fixedly connected with multiple brackets, and furnace body 1 side sidewall upper perforation is connected with vacuum meter 2, and the upper end of furnace body 1 is fixedly connected with gas analyzer 3, and furnace body 1 is far from true Perforation is connected with one end of oil diffusion pump 4, and the other end perforation connection slide valve of oil diffusion pump 4 in the middle part of the side side wall of sky meter 2 One end of pump 5, the upper end of slide valve pump 5 and the sidewall upper of furnace body 1 are penetrated through and are connected, and the upper end of slide valve pump 5 is fixedly connected with mist of oil Filter 6, and the lower end of slide valve pump 5 is fixedly connected with damping device 7,

Damping device 7 is by shell 71, vibration damper plate 72, first support bar 73, L shape ram pot 74, first piston 75, spur rack 76, T shape ram pot 77, second support bar 78, gear 79, capstan winch 710 and hinge bar 711 form, the upper end of vibration damper plate 72 and cunning The lower end of valve pump 5 is fixedly connected, and the side wall of vibration damper plate 72 and the inner sidewall of shell 71 are slidably connected, and shell 71 is upper end opening Uncovered structure, the upper end of vibration damper plate 72 is fixedly connected with rubber layer, effective damping, the lower end Symmetrical vertical connection of vibration damper plate 72 There are two the upper ends of first support bar 73, and the lower end of first support bar 73 reaches the inner cavity of L shape ram pot 74 and vertically connects The upper center of first piston 75, the inner cavity of L shape ram pot 74 are contained with hydraulic oil, the first bullet are socketed in first support bar 73 Spring, and the upper end of the first spring is connect with the lower end of vibration damper plate 72, the lower end of the first spring and the upper end of L shape ram pot 74 connect It connects, side wall and vertical one section of the inner sidewall of L shape ram pot 74 of first piston 75 are slidably connected, and L shape ram pot 74 lateral one The lower end of section is fixedly connected with the inner bottom wall of shell 71, and rubber seal, sealing effect are socketed on the side wall of first piston 75 More preferably, lateral one section of the inner sidewall of L shape ram pot 74 slidably connects second piston, and second piston is far from first support bar 73 Side side wall in the middle part of be vertically connected with one end of spur rack 76, L shape ram pot is run through in the opposite one end of two spur racks 76 The side walls of 74 one section of transverse directions reach the inner cavity of same 77 one section of the transverse direction of T shape ram pot and vertically connect in the side wall of third piston Portion, and lateral one section of the lower end of T shape ram pot 77 is fixedly connected with the inner bottom wall of shell 71, the inner cavity of T shape ram pot 77 is held There is hydraulic oil, side wall and lateral one section of the inner sidewall of T shape ram pot 77 of third piston are slidably connected, on the side wall of spur rack 76 Be socketed with second spring, and laterally one section of inner sidewall is connect for one end of second spring and L shape ram pot 74, second spring it is another The connection of the side wall of one end and second piston, vertical one section of the inner sidewall of T shape ram pot 77 slidably connect the 4th piston, and the 4th The upper center of piston is vertically connected with the lower end of second support bar 78, and T shape ram pot 77 is run through in the upper end of second support bar 78 Roof reach the exocoel of T shape ram pot 77 and connection pushes in the middle part of the lower end of block, and be socketed with third in second support bar 78 Spring, the upper end of third spring are connect with the lower end for pushing block, and the lower end of third spring and the upper end of T shape ram pot 77 connect It connecing, the teeth of 76 sidewall upper of spur rack are engaged with gear 79, and gear 79 is rotatably connected on the inner cavity rear wall of shell 71, The front side wall of gear 79 has been fixedly and coaxially connected capstan winch 710, and traction rope is wound on capstan winch 710, the upper end connection of traction rope The side lower end of hinge bar 711, and, hinge bar 711 hinged with the inner cavity rear wall of shell 71 in the middle part of the rear wall of hinge bar 711 One end far from traction rope is rotatably connected to idler wheel, effectively contradicts and is lifted vibration damper plate 72.

Working principle: vacuum system starting, oil diffusion pump 4 and slide valve pump 5 are opened, and the air in furnace body 1 are drawn into outer Boundary, due to slide valve pump 5 inner rotator in the inner cavity of slide valve pump 5 running track be complex-shaped closed curve, rotor High-speed rotation will lead to the vibration of slide valve pump 5；

Slide valve pump 5 is fixedly connected on the upper end of vibration damper plate 72, the effectively preliminary damping of the rubber layer of 72 upper end of vibration damper plate, together When, the vibration that slide valve pump 5 is run presses vibration damper plate 72 and moves downward, and two first support bars 73 is driven to move downward, and presses the One piston 75 slide downward in the inner cavity of L shape ram pot 74, the hydraulic oil in 74 inner cavity of L shape ram pot press two spur racks 76 is close to each other, the teeth meshing gear 79 of 76 upper end of spur rack, and two gears 79 is driven to rotate, and the tightening of capstan winch 710, which pulls, leads Messenger drives two hinge bars 711 to rotate along hinge joint, and two roller conflictings simultaneously support lifting vibration damper plate 72；

Meanwhile two spur racks 76 is close to each other, pushes two the 4th pistons close to each other, drives second support bar 78 Upper end pushes block lifting vibration damper plate 72, and the first spring in first support bar 73 and the third spring in second support bar 78 are again Secondary carry out damping, triplicity effectively carry out damping, substantially increase practicability.

While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.

Claims (4)

1. a kind of vacuum system being used to prepare in ceramic sintering furnace, including furnace body (1), vacuum meter (2), gas analyzer (3), oil diffusion pump (4), slide valve pump (5), oil mist filter (6) and damping device (7), the lower end of furnace body (1) are fixedly connected with Multiple brackets, and the side sidewall upper perforation of furnace body (1) is connected with vacuum meter (2), the upper end of furnace body (1) is fixedly connected with gas Body analyzer (3), furnace body (1) are connected with one end of oil diffusion pump (4) far from perforation in the middle part of the side side wall of vacuum meter (2), and One end of other end perforation connection slide valve pump (5) of oil diffusion pump (4), the upper end of slide valve pump (5) and the sidewall upper of furnace body (1) Perforation connection, the upper end of slide valve pump (5) is fixedly connected with oil mist filter (6), and the lower end of slide valve pump (5) is fixedly connected with and subtracts It shakes device (7),

It is characterized by: the damping device (7) is by shell (71), vibration damper plate (72), first support bar (73), L shape ram pot (74), first piston (75), spur rack (76), T shape ram pot (77), second support bar (78), gear (79), capstan winch (710) It is formed with hinge bar (711), the upper end of the vibration damper plate (72) is fixedly connected with the lower end of slide valve pump (5), and vibration damper plate (72) The inner sidewall of side wall and shell (71) be slidably connected, shell (71) is the uncovered structure of upper end opening, the vibration damper plate (72) Lower end Symmetrical vertical connection there are two first support bar (73) upper end, and first support bar (73) lower end reach L shape liquid The inner cavity of pressure cylinder (74) and the upper center for vertically connecting first piston (75), are socketed with first on the first support bar (73) Spring, and the upper end of the first spring is connect with the lower end of vibration damper plate (72), the lower end of the first spring are upper with L shape ram pot (74) End connection, side wall and vertical one section of the inner sidewall of L shape ram pot (74) of the first piston (75) are slidably connected, and L shape liquid Lateral one section of the lower end of pressure cylinder (74) is fixedly connected with the inner bottom wall of shell (71), lateral one section of the L shape ram pot (74) Inner sidewall slidably connects second piston, and second piston is vertically connected with far from the side side wall middle part of first support bar (73) Lateral one section of the side of L shape ram pot (74) is run through in one end of spur rack (76), two opposite one end of the spur rack (76) Wall reaches lateral one section of the inner cavity of the same T shape ram pot (77) and vertically connects the side wall middle part of third piston, and T shape is hydraulic Lateral one section of the lower end of cylinder (77) is fixedly connected with the inner bottom wall of shell (71), the side wall and T shape ram pot of the third piston (77) laterally one section of inner sidewall is slidably connected, and is socketed with second spring, and second spring on the side wall of the spur rack (76) One end and L shape ram pot (74) laterally one section of inner sidewall connect, the other end of second spring and the side wall company of second piston It connects, vertical one section of the inner sidewall of T shape ram pot (77) slidably connects the 4th piston, and the upper center of the 4th piston is hung down The roof of T shape ram pot (77) is run through in the direct-connected lower end for being connected to second support bar (78), the upper end of the second support bar (78) It reaches the exocoel of T shape ram pot (77) and connection pushes in the middle part of the lower end of block, and be socketed with third bullet in second support bar (78) The upper end of spring, the third spring is connect with the lower end for pushing block, and the upper end of the lower end of third spring and T shape ram pot (77) Connection, the teeth of spur rack (76) sidewall upper are engaged with gear (79), and gear (79) is rotatably connected on shell (71) Inner cavity rear wall on, the front side wall of the gear (79) has been fixedly and coaxially connected capstan winch (710), and is wound on capstan winch (710) There is the rear wall middle part of traction rope, the side lower end of upper end connection hinge bar (711) of the traction rope, and hinge bar (711) It is hinged with the inner cavity rear wall of shell (71).

2. a kind of vacuum system being used to prepare in ceramic sintering furnace according to claim 1, it is characterised in that: institute The upper end for stating vibration damper plate (72) is fixedly connected with rubber layer.

3. a kind of vacuum system being used to prepare in ceramic sintering furnace according to claim 1, it is characterised in that: institute It states and is socketed with rubber seal on the side wall of first piston (75).

4. a kind of vacuum system being used to prepare in ceramic sintering furnace according to claim 1, it is characterised in that: institute It states hinge bar (711) and is rotatably connected to idler wheel far from one end of traction rope.