CN208328101U - A kind of vertical chemical vapor deposition stove furnace bottom heating device - Google Patents
A kind of vertical chemical vapor deposition stove furnace bottom heating device Download PDFInfo
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- CN208328101U CN208328101U CN201820997534.XU CN201820997534U CN208328101U CN 208328101 U CN208328101 U CN 208328101U CN 201820997534 U CN201820997534 U CN 201820997534U CN 208328101 U CN208328101 U CN 208328101U
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- furnace bottom
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- chemical vapor
- deposition stove
- vapor deposition
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Abstract
The utility model discloses a kind of vertical chemical vapor deposition stove furnace bottom heating devices, including furnace bottom cover board, the lower section of furnace bottom cover board is equipped with insulating layer, the upper surface of insulating layer opens up fluted, heater element is equipped in groove, the both ends of heater element are separately connected a heating electrode, one end of heating electrode is connect with heater element, the other end for heating electrode is stretched out from the bottom of furnace bottom insulating layer, and the other end for heating electrode is fixed in electrode mounting base, the bottom of insulating layer is equipped with air inlet, furnace bottom cover board is equipped with gas outlet, gas outlet is connect with air inlet by burner hearth admission line.The utility model solves the problems, such as that current gaseous phase deposition stove fire box temperature uniformity difference and bottom temperature are relatively low.
Description
Technical field
The utility model belongs to gaseous phase deposition stove furnace bottom technical field of heating, is related to a kind of vertical chemical vapor deposition stove furnace
Bottom heating device.
Background technique
The C/C composite material applied at present is produced by a kind of chemical vapor deposition stove equipment, by workpiece carbon fiber
Precast body is put into chemical vapor deposition stove, and organic carbon source gas is passed through under high temperature and vacuum state, passes through splitting for gas
Carbon atom is deposited on the inside of workpiece by solution reaction, is kept workpiece fine and close, is formed a kind of new material (i.e. C/C composite material)；C/C is multiple
Condensation material has the characteristics that big intensity, high temperature resistant, specific gravity are small, is widely used in aerospace, photovoltaic and high-tech area, mesh
Preceding to be in state to be popularized, market conditions are good.
The chemical vapor deposition stove equipment primary structure of current state is vertical cylinder；Mainly by furnace bottom, stove top case,
The composition such as circumference side surface body, vacuum system, wherein furnace bottom, stove top case and circumference side surface body three parts are all compound knots
Structure, all has high temperature resistant, good heat preservation effect, and shell has enough stiffness and strength using structure steel fabrication；It will be to be processed
Workpiece is placed on furnace bottom and occupies the burner hearth useful space, and charging method is divided into charging and lower two kinds of charging；Heating element peace
Mounted in the centre of workpiece and circumference side heatproof insulating layer, workpiece and cracking gas are heated by the hyperthermia radiation of heater element
Body is realized to the deposition compact of workpiece, is passed through in furnace into the mixed reaction gas in furnace by furnace bottom pipeline, after reaction cracking
Exhaust gas pass through vacuum equipment from the exhaust outlet of bell and be discharged.
Performance of the performance of C/C composite material depending on chemical vapor deposition stove, the main maximum temperature including in burner hearth,
Heating and falling temperature gradient, the placement position of workpiece in temperature uniformity, burner hearth in burner hearth effective district are passed through gaseous mixture in burner hearth
Pressure the etc. when uniformity of body, the velocity of discharge of reaction cracking exhaust gas, vacuum degree and deposition in burner hearth in burner hearth.Mesh
Preceding existing chemical vapor deposition stove is primarily present following deficiency: 1. fire box temperature uniformities are poor；2. bottom temperature is relatively low；3.
Production efficiency is not high.
The heating element of existing chemical vapor deposition stove is mainly divided to metallic heating element and two kinds of nonmetallic heating element；Gold
Belong to heating element to be mainly fixed on burner hearth circumference refractory material with the state of band or silk, nonmetallic heating element is mainly with round tube
Or the state of pole is drawn electricity by roof of the furnace and is fixed in burner hearth circumference refractory material.Pass through burner hearth inner periphery heating element
To radiant heating is formed inside entire burner hearth, the temperature of burner hearth center portion depends mainly on the radiation of circumference heater element for fever, and
Heat has certain gradient along the direction of radiation, and with the increasing of distance, temperature gradient is being increased, in this way in size of burner hearth
When larger, the temperature of burner hearth center portion and the temperature difference of burner hearth circumference it is whole will thus to form burner hearth beyond the range allowed
The deficiency of temperature uniformity；
The air inlet pipeline of existing chemical vapor deposition stove is mainly distributed on furnace bottom, and the introducing of reaction gas is mainly from floor tube
Road is passed through in furnace, in order to which the gas density introduced in burner hearth is evenly distributed, according to furnace bottom place workpiece the case where, it is uniform in furnace bottom
Arrange pipeline, burner hearth is bigger, arranges that the quantity of pipeline is more, and in this case, furnace bottom introduces pipeline and furnace bottom to workpiece
Supporting point so that furnace bottom is formed more hot short dot and point of heat transfer, it is relatively low to form bottom temperature；
Normal-temperature reaction gas is entered by furnace bottom, can also bottom temperature be caused to reduce；
It is maximum in the middle and lower part workpiece bulk density of burner hearth, it recepts the caloric larger；The gas for introducing burner hearth is uniform by furnace bottom
The pipeline of distribution needs to absorb a large amount of heat when constantly entering；It is relatively low to form bottom temperature；
Based on the special construction at vertical gaseous phase deposition stove bottom, the method that tradition only sets side wall heating element be cannot achieve to furnace
The raising of thorax middle and lower part and bottom temperature.
Utility model content
The purpose of the utility model is to provide a kind of vertical chemical vapor deposition stove furnace bottom heating devices, solve current gas
Phase cvd furnace fire box temperature uniformity difference and the relatively low problem of bottom temperature.
The utility model the technical scheme adopted is that a kind of vertical chemical vapor deposition stove furnace bottom heating device, including
Furnace bottom cover board, the lower section of furnace bottom cover board are equipped with insulating layer, and the upper surface of insulating layer opens up fluted, and fever member is equipped in groove
Part, the both ends of heater element are separately connected a heating electrode, and the one end for heating electrode is connect with heater element, heat electrode
The other end is stretched out from the bottom of furnace bottom insulating layer, and the other end for heating electrode is fixed in electrode mounting base, the bottom of insulating layer
Portion is equipped with air inlet, and furnace bottom cover board is equipped with gas outlet, and gas outlet is connect with air inlet by burner hearth admission line.
The utility model is also characterized by
The both ends of furnace bottom cover board pass through bolt and the furnace bottom cage connection for being located at insulating layer bottom respectively.
The bottom of insulating layer is equipped with temperature control thermocouple, and the junction of temperature control thermocouple and insulating layer is equipped with thermocouple sealing
Body.
It is set in insulating layer there are two cylinder is protected, two heating electrodes are separately positioned in two protection cylinders.
Air inlet and air outlet are located on same vertical line.
The utility model has the beneficial effects that heating skill using furnace bottom by the furnace bottom in vertical chemical vapor deposition stove
Art, heating speed is fast, and hot surface load is big, hence it is evident that the temperature for improving burner hearth bottom and middle and lower part passes through joint temperature control and tune
Section, improves the uniformity of burner hearth internal temperature, increases the furnace volume of vertical chemical vapor deposition stove, improve product matter
Amount and production efficiency bring apparent economic benefit for enterprise.
Detailed description of the invention
Fig. 1 is a kind of structural representation of vertical chemical vapor deposition stove furnace bottom heating device of the utility model.
In figure, 1. furnace bottom cover boards, 2. insulating layers, 3. grooves, 4. heater elements, 5. heating electrodes, 6. electrode mounting bases,
7. air inlet, 8. gas outlets, 9. bolts, 10. temperature control thermocouples, 11. thermocouple seals, 12. protection cylinders, 13. furnace bottom shells.
Specific embodiment
The utility model is described in detail with reference to the accompanying drawings and detailed description.
A kind of vertical chemical vapor deposition stove furnace bottom heating device of the utility model, as shown in Figure 1, include furnace bottom cover board 1,
The lower section of furnace bottom cover board 1 is equipped with insulating layer 2, and the outside of insulating layer 2 is wrapped by furnace bottom shell 13, and the upper surface of insulating layer 2 is opened
Equipped with groove 3, heater element 4 is equipped in groove 3, the both ends of heater element 4 are separately connected a heating electrode 5, heat electrode 5
One end connect with heater element 4, heat electrode 5 the other end from the bottom of furnace bottom insulating layer 2 stretch out furnace bottom shell 13, and
The other end of heating electrode 5 is fixed in electrode mounting base 6, and the bottom (outside of furnace bottom shell 13) of insulating layer 2 is equipped with air inlet
Mouth 7, furnace bottom cover board 1 are equipped with gas outlet 8, and gas outlet 8 is connect with air inlet 7 by burner hearth admission line.
The both ends of furnace bottom cover board 1 pass through bolt 9 respectively and connect with the furnace bottom shell 13 for being located at 2 bottom of insulating layer.
The bottom of insulating layer 2 is equipped with temperature control thermocouple 10, and temperature control thermocouple 10 and the junction of insulating layer 2 are equipped with thermocouple
Seal 11.
It is set in insulating layer 2 there are two cylinder 12 is protected, two heating electrodes 5 are separately positioned in two protection cylinders 12.
Air inlet 7 and gas outlet 8 are located on same vertical line.And air inlet 7 and gas outlet 8 are located in gaseous phase deposition stove
On mandrel line.
The function of each component part is as follows in a kind of vertical chemical vapor deposition stove furnace bottom heating device of the utility model:
Furnace bottom cover board 1: it is used to support workpiece to be processed in gaseous phase deposition stove burner hearth, and protection is risen to furnace bottom insulating layer 2 and is made
With.
Air inlet 7: connecting external air source and gaseous phase deposition stove burner hearth admission line by air inlet 7, participates in burner hearth deposition
The mixed gas of reaction enters burner hearth by air inlet, prevents from being directly open in furnace bottom, reduces the whole heat transfer and heat dissipation of furnace bottom
Point quantity reduces furnace bottom heat and conducts and scatter and disappear outward；
Temperature-control heat couple 10: dynamically track detects the real time temperature of the utility model heating device, certainly by intelligence instrument
Dynamic control and displays temperature；
Thermocouple seal 11: being sealed by the outer tube to temperature control thermocouple 10 with furnace bottom shell 13, and gas phase is kept
Vacuum degree in cvd furnace burner hearth simultaneously prevents furnace heat excessive, and thermocouple seal 11 is mounted on the flange of furnace bottom shell 13
On；
Heat electrode 5: connection external power supply and internal heating element, heating electrode 5 are mounted in electrode mounting base 6, protect
Card and furnace sealing, to protect vacuum degree in burner hearth and prevent furnace heat excessive；
Cylinder 12 is protected, protection cylinder 12 is mounted on inside the insulating layer 2 of furnace bottom, and furnace bottom insulating layer 2 and heating electrode 5 are protected
Get up, protection heating electrode 5 is not influenced by burner hearth carbon source atmosphere；
Heater element 4, the cylindrical structure of heater element 4, is process by C/C composite material or graphite material, fixed
On heating electrode 5, between the topmost and furnace bottom cover board 1 of furnace bottom insulating layer 2, this position is conducive to fever member for integral installation
Diffusion of the part 4 to 4 self heat of radiation of burner hearth heat and heater element, is not influenced by burner hearth deposition reaction atmosphere, can be with
It is continuously burner hearth bottom additional heat；
Gas outlet 8, the deposition reaction gas entered inside burner hearth enter in burner hearth by the preheating of heater element 4
Participate in deposition reaction.
A kind of the characteristics of vertical chemical vapor deposition stove furnace bottom heating device of the utility model is, main function be solve it is vertical
The problem of formula gaseous phase deposition stove fire box temperature uniformity difference caused by furnace bottom and burner hearth middle and lower part temperature are relatively low in process of production,
Due to vertical gaseous phase deposition stove special structure and feature, the fire box temperature uniformity difference that occurs in previous practical application
Problem, the vertical gaseous phase deposition stove furnace bottom heating device of the utility model can solve this problem, by installing furnace bottom in furnace bottom
Heating technique device, additional heat improve the temperature of vertical gaseous phase deposition stove burner hearth bottom and middle and lower part, and furnace bottom is heated skill
Original heating element combined regulating of art device and vertical gaseous phase deposition stove, can solve this problem.
The present apparatus is mounted on the furnace bottom of vertical gaseous phase deposition stove, in the suitable position processing mounting holes and fixation of furnace bottom
Orchid, at masonry heater bottom when refractory insulating layer 2, in the groove of the reserved installation heater element 4 in 2 upper surface of insulating layer, in heater element 4
Around reserve heat-dissipating space and expansion distance, heating electrode 5, temperature-control heat couple 10 are connected with control power supply, can be realized pair
Furnace bottom additional heat to improve the temperature of furnace bottom and burner hearth middle and lower part, and realizes the raising of fire box temperature uniformity.
Claims (5)
1. a kind of vertical chemical vapor deposition stove furnace bottom heating device, it is characterised in that: including furnace bottom cover board (1), furnace bottom cover board
(1) lower section is equipped with insulating layer (2), and the upper surface of insulating layer (2) opens up fluted (3), and heater element is equipped in groove (3)
(4), the both ends of heater element (4) are separately connected a heating electrode (5), and the one end and heater element (4) for heating electrode (5) are even
It connects, the other end for heating electrode (5) is stretched out from the bottom of furnace bottom insulating layer (2), and the other end for heating electrode (5) is fixed on electricity
In pole mounting base (6), the bottom of insulating layer (2) is equipped with air inlet (7), and furnace bottom cover board (1) is equipped with gas outlet (8), gas outlet
(8) it is connect with air inlet (7) by burner hearth admission line.
2. a kind of vertical chemical vapor deposition stove furnace bottom heating device according to claim 1, it is characterised in that: the furnace
The both ends of bottom plate (1) pass through bolt (9) respectively and connect with the furnace bottom shell (13) for being located at insulating layer (2) bottom.
3. a kind of vertical chemical vapor deposition stove furnace bottom heating device according to claim 1, it is characterised in that: the guarantor
The bottom of warm layer (2) is equipped with temperature control thermocouple (10), and it is close that the junction of temperature control thermocouple (10) and insulating layer (2) is equipped with thermocouple
It seals body (11).
4. a kind of vertical chemical vapor deposition stove furnace bottom heating device according to claim 1, it is characterised in that: the guarantor
It is set in warm layer (2) there are two cylinder (12) are protected, two heating electrodes (5) are separately positioned in two protection cylinders (12).
5. a kind of vertical chemical vapor deposition stove furnace bottom heating device according to claim 1, it is characterised in that: it is described into
Port (7) and gas outlet (8) are located on same vertical line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820997534.XU CN208328101U (en) | 2018-06-27 | 2018-06-27 | A kind of vertical chemical vapor deposition stove furnace bottom heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820997534.XU CN208328101U (en) | 2018-06-27 | 2018-06-27 | A kind of vertical chemical vapor deposition stove furnace bottom heating device |
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| Publication Number | Publication Date |
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| CN208328101U true CN208328101U (en) | 2019-01-04 |
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| CN201820997534.XU Active CN208328101U (en) | 2018-06-27 | 2018-06-27 | A kind of vertical chemical vapor deposition stove furnace bottom heating device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113124683A (en) * | 2020-01-15 | 2021-07-16 | 株洲弗拉德科技有限公司 | Vacuum vapor deposition furnace with feeder |
| CN114855145A (en) * | 2022-05-17 | 2022-08-05 | 天津得瑞伯机电设备有限公司 | Chemical vapor deposition furnace |
| CN115094402A (en) * | 2022-06-24 | 2022-09-23 | 清华大学 | Vertical double-temperature-zone-double-channel chemical vapor deposition equipment |
-
2018
- 2018-06-27 CN CN201820997534.XU patent/CN208328101U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113124683A (en) * | 2020-01-15 | 2021-07-16 | 株洲弗拉德科技有限公司 | Vacuum vapor deposition furnace with feeder |
| CN114855145A (en) * | 2022-05-17 | 2022-08-05 | 天津得瑞伯机电设备有限公司 | Chemical vapor deposition furnace |
| CN115094402A (en) * | 2022-06-24 | 2022-09-23 | 清华大学 | Vertical double-temperature-zone-double-channel chemical vapor deposition equipment |
| CN115094402B (en) * | 2022-06-24 | 2023-04-11 | 清华大学 | Vertical double-temperature-zone-double-channel chemical vapor deposition equipment |
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