CN208328092U - A kind of evaporation boat of vacuum coating equipment - Google Patents
A kind of evaporation boat of vacuum coating equipment Download PDFInfo
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- CN208328092U CN208328092U CN201820403377.5U CN201820403377U CN208328092U CN 208328092 U CN208328092 U CN 208328092U CN 201820403377 U CN201820403377 U CN 201820403377U CN 208328092 U CN208328092 U CN 208328092U
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- electrode
- evaporation boat
- coating equipment
- vacuum coating
- baffle
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Abstract
In order to which the evaporation boat structure for solving existing vacuum coating equipment is complex, and the electrode at both ends is larger, so that cost is high, but the electrode at both ends is sheet type, so that the service life of the electrode at both ends is not grown, it is easy damaged problem, the utility model proposes a kind of evaporation boats of vacuum coating equipment, it uses first baffle, second baffle and pedestal cooperate for fixed plating membrane carrier, groove is respectively equipped in the first electrode and second electrode of evaporation boat simultaneously, in this way, it not only can effectively fix plating membrane carrier, the evaporation boat can be with one-pass molding simultaneously, structure is simple.Simultaneously as the structure of the groove in first electrode and second electrode, so that one times or more of the strength enhancing of two electrodes of the evaporation boat, the service life of electrode increases.
Description
Technical field
The utility model belongs to field of mechanical technique, is specifically related to a kind of vacuum coating equipment for vacuum coating equipment
Evaporation boat.
Background technique
Vacuum coating equipment refers to the equipment for carrying out plated film processing to workpiece under higher vacuum degree.Vacuum coating equipment includes
Evaporation source, existing evaporation type vacuum coating equipment are typically employed in evaporation boat both ends access electrode as evaporation source.
The all structures of evaporation in the prior art, for example, application No. is remember in the background technique of 200720094316.7 patents
A kind of structure of the existing evaporation boat carried adds to be evaporated as soon as having a pit in the centre of electrode in this pit
Material, folded up on the thermal evaporation electrode of vacuum chamber, when the vacuum degree of vacuum chamber has reached the degree to be evaporated, steam
The material of boat bottom is sent out first by thermal evaporation, chemical material is may cause during passing through upper layer of material and chemical change occurs,
Influence the purity of material.
To solve the above-mentioned problems, application No. is 200720094316.7 patents to propose a kind of improved heating evaporation
Boat, the evaporation boat are made of thin refractory metal piece, the heating sheet with venthole, and the centre of heating sheet is uniformly distributed
Aperture, second part is the extension box with hanging groove, equipped with the aluminum oxide ceramic lining of high temperature resistant, poor heat conductivity inside extension box
" crucible " is hung over extension box on heating sheet with hanging groove.The heating evaporation boat by making the material on upper layer first by thermal evaporation, into
And reduce the chemical change occurred in material evaporation process, but the heating evaporation boat of this spline structure there is also the problem of be:
1, extension box self-temperature is lower, and the material of heating evaporation has part that can spread under vacuum conditions and is attached to extension on heating sheet
On box, the evaporation effect of material is affected；2, extension box and heating sheet need different materials to process respectively, the knot of extension box and heating sheet
Structure is more complicated, and processing cost is higher.
Then application No. is 201320723278.2 patents to propose a kind of evaporation boat of vacuum coating equipment comprising boat
Body and electrode positioned at boat body both ends have auxiliary heating sheet on boat body, and auxiliary heating sheet and boat body are formed for placing evaporation
The accommodation space of raw material, the bottom part of heating sheet or is all connected with boat body, and evaporation boat and auxiliary heating sheet are using conductive
Material is made.Although the evaporation boat of the vacuum coating equipment solves problem above, but the heating sheet assisted is separate structure, knot
Structure is complex.And the electrode at both ends is larger, so that cost is high, but the electrode at both ends is sheet type, so that both ends
The service life of electrode do not grow, be easy breakage.
Utility model content
In order to solve problem above, the utility model proposes a kind of evaporation boat of vacuum coating equipment, use first baffle,
Second baffle and pedestal cooperate for fixed plating membrane carrier, while in the first electrode and second electrode of evaporation boat respectively
Equipped with groove, in this way, not only can effectively fix plating membrane carrier, while the evaporation boat can be with one-pass molding, structure is simple.Together
When, due to the structure of the groove in first electrode and second electrode, so that the strength enhancing of two electrodes of the evaporation boat one
Times or more, the service life of electrode increases.
A kind of evaporation boat of vacuum coating equipment comprising: first electrode (1), second electrode (2), first baffle (3), base
Seat (4), second baffle (5), groove (6), it is characterised in that: one end of first electrode (1) and second electrode (2) respectively with two
Parallel second baffle (5) is connected, and second baffle (5) and first electrode (1) and second electrode (2) are orthogonal respectively, and two
Parallel second baffle (5) is vertical with pedestal (4) respectively to be connect, and pedestal (4) is vertically connected with the first baffle of N-shaped (3) respectively,
It is equipped on first electrode (1) and second electrode (2) equipped with rectangular recess (6).
Further, the evaporation boat of the vacuum coating equipment is made of dystectic metal material.
Still more preferably, the evaporation boat of the vacuum coating equipment uses stainless steel, tungsten or titanium alloy.
Further, the first electrode (1) and second electrode (2) are rectangle, and length is 50mm~80mm, wide
Degree is 3mm~5mm.
Further, the first electrode (1) and second electrode (2) is vertical with second baffle (5) connect, and junction
Using rounded corners.
Further, the length of the rectangular recess (6) in the first electrode (1) is 25mm~35mm, and width is
1mm~3mm.
Further, the second baffle (2) is rectangle sheet metal, and the length is 7mm~10mm, width 3mm
~5mm.
Further, the joint angle of the first baffle (3) of the N-shaped also uses rounded structure.
The usage mode of the evaporation boat of the vacuum coating equipment of the utility model is: evaporation boat is located in vacuum coating equipment
In, and the anode and cathode connected with the mains respectively in first electrode (1) and second electrode (2), material to be plated is transferred to plating
In membrane carrier, plating membrane carrier is the metal shell open at one end of inner containment iron wire suede, will plate the open end face of membrane carrier
First baffle (3), plate the open end of membrane carrier upward.When plated film starts, power supply is connected to the electrode power-up at evaporation boat both ends,
First baffle (3), pedestal (4) and second baffle (5) generate heat under the function of current, and Coating Materials is by thermal evaporation, and towards plated film
The evaporation of carrier openings direction, and appendix is on the lower workpiece to be coated of temperature.
It can be seen that the evaporation boat of the vacuum coating equipment using the utility model, the structure of the evaporation boat can not only have
The fixed plating membrane carrier of effect, while the evaporation boat can be with one-pass molding, structure is simple.Simultaneously as first electrode and second electrode
On groove structure so that one times or more of the strength enhancings of two electrodes of the evaporation boat, the service life of electrode increases.
Detailed description of the invention
Fig. 1 is the main view of the evaporation boat of the vacuum coating equipment of the utility model.
Fig. 2 is the left view of the evaporation boat of the vacuum coating equipment of the utility model.
Fig. 3 is the right view of the evaporation boat of the vacuum coating equipment of the utility model.
Fig. 4 is the rearview of the evaporation boat of the vacuum coating equipment of the utility model.
Fig. 5 is the top view of the evaporation boat of the vacuum coating equipment of the utility model.
Fig. 6 is the bottom view of the evaporation boat of the vacuum coating equipment of the utility model.
Main element symbol description
The following detailed description will be further explained with reference to the above drawings the utility model.
Specific embodiment
Case 1 is embodied:
It is as shown in Figure 1 the main view of the evaporation boat of vacuum coating equipment, is illustrated in figure 2 the evaporation boat of vacuum coating equipment
Left view is illustrated in figure 3 the right view of the evaporation boat of vacuum coating equipment, is illustrated in figure 4 the evaporation boat of vacuum coating equipment
Rearview is illustrated in figure 5 the top view of the evaporation boat of vacuum coating equipment, is illustrated in figure 6 the evaporation boat of vacuum coating equipment
Bottom view comprising: first electrode (1), second electrode (2), first baffle (3), pedestal (4), second baffle (5), groove
(6), it is characterised in that: the second baffle (5) parallel with two is connected respectively for one end of first electrode (1) and second electrode (2),
Second baffle (5) and first electrode (1) and second electrode (2) are orthogonal respectively, two parallel second baffles (5) respectively with
Pedestal (4) vertically connects, and pedestal (4) is vertically connected with the first baffle of N-shaped (3) respectively, first electrode (1) and second electrode
(2) it is equipped on equipped with rectangular recess (6).
The evaporation boat of the vacuum coating equipment uses the material of stainless steel, the first electrode (1) and second electrode
It (2) is rectangle, length 70mm, width 4mm.The first electrode (1) and second electrode (2) and second baffle
(5) vertical connection, and junction uses rounded corners.The length of rectangular recess (6) in the first electrode (1) is
30mm, width 2mm.The second baffle (2) is rectangle sheet metal, and the length is 8mm, width 4mm.The n
The joint angle of the first baffle (3) of type also uses rounded structure.
The usage mode of the evaporation boat of vacuum coating equipment in embodiment 1 is: evaporation boat is located in vacuum coating equipment,
And the anode and cathode connected with the mains respectively in first electrode (1) and second electrode (2), material to be plated is transferred to plated film and is carried
In body, plating membrane carrier is the metal shell open at one end of inner containment iron wire suede, and the open end for plating membrane carrier is faced the
One baffle (3), plates the open end of membrane carrier upward.When plated film starts, power supply is connected to be powered on to the electrode at evaporation boat both ends, and first
Baffle (3), pedestal (4) and second baffle (5) generate heat under the function of current, Coating Materials by thermal evaporation, and towards plating membrane carrier
Opening direction evaporation, and appendix is on the lower workpiece to be coated of temperature.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it should not be understood as limiting the scope of the patent of the utility model.It should be pointed out that for the common of this field
For technical staff, without departing from the concept of the premise utility, various modifications and improvements can be made, these all belong to
In the protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (8)
1. a kind of evaporation boat of vacuum coating equipment comprising: first electrode (1), second electrode (2), first baffle (3), pedestal
(4), second baffle (5), groove (6), it is characterised in that: one end of first electrode (1) and second electrode (2) is flat with two respectively
Capable second baffle (5) is connected, and second baffle (5) and first electrode (1) and second electrode (2) are orthogonal respectively, and two flat
Capable second baffle (5) is vertical with pedestal (4) respectively to be connect, and pedestal (4) is vertically connected with the first baffle of N-shaped (3) respectively, the
It is equipped on one electrode (1) and second electrode (2) equipped with rectangular recess (6).
2. the evaporation boat of vacuum coating equipment as described in claim 1, it is characterised in that: the evaporation boat of the vacuum coating equipment
It is made of dystectic metal material.
3. the evaporation boat of vacuum coating equipment as described in claim 1, it is characterised in that: the evaporation boat of the vacuum coating equipment
Using stainless steel, tungsten or titanium alloy.
4. the evaporation boat of vacuum coating equipment as described in claim 1, it is characterised in that: the first electrode (1) and second
Electrode (2) is rectangle, and length is 50mm~80mm, and width is 3mm~5mm.
5. the evaporation boat of vacuum coating equipment as described in claim 1, it is characterised in that: the first electrode (1) and second
Electrode (2) is vertical with second baffle (5) to be connect, and junction uses rounded corners.
6. the evaporation boat of vacuum coating equipment as described in claim 1, it is characterised in that: the length in the first electrode (1)
The length of square groove (6) is 25mm~35mm, and width is 1mm~3mm.
7. the evaporation boat of vacuum coating equipment as described in claim 1, it is characterised in that: the second baffle (5) is rectangular
Shape sheet metal, the length is 7mm~10mm, width is 3mm~5mm.
8. the evaporation boat of vacuum coating equipment as described in claim 1, it is characterised in that: the first baffle (3) of the N-shaped
Joint angle also uses rounded structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820403377.5U CN208328092U (en) | 2018-03-23 | 2018-03-23 | A kind of evaporation boat of vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820403377.5U CN208328092U (en) | 2018-03-23 | 2018-03-23 | A kind of evaporation boat of vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208328092U true CN208328092U (en) | 2019-01-04 |
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ID=64783703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820403377.5U Active CN208328092U (en) | 2018-03-23 | 2018-03-23 | A kind of evaporation boat of vacuum coating equipment |
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| Country | Link |
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| CN (1) | CN208328092U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113088891A (en) * | 2021-03-09 | 2021-07-09 | 中国电子科技集团公司第十一研究所 | Indium evaporation boat |
-
2018
- 2018-03-23 CN CN201820403377.5U patent/CN208328092U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113088891A (en) * | 2021-03-09 | 2021-07-09 | 中国电子科技集团公司第十一研究所 | Indium evaporation boat |
| CN113088891B (en) * | 2021-03-09 | 2023-03-03 | 中国电子科技集团公司第十一研究所 | Indium evaporation boat |
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