CN208295938U - A kind of removing equipment of not oxygen-containing combustible waste gases - Google Patents

A kind of removing equipment of not oxygen-containing combustible waste gases Download PDF

Info

Publication number
CN208295938U
CN208295938U CN201820818882.6U CN201820818882U CN208295938U CN 208295938 U CN208295938 U CN 208295938U CN 201820818882 U CN201820818882 U CN 201820818882U CN 208295938 U CN208295938 U CN 208295938U
Authority
CN
China
Prior art keywords
oxygen
reactor
waste gases
removing equipment
combustible waste
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201820818882.6U
Other languages
Chinese (zh)
Inventor
赵海波
田鑫
马琎晨
郑楚光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huazhong University of Science and Technology
Original Assignee
Huazhong University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huazhong University of Science and Technology filed Critical Huazhong University of Science and Technology
Priority to CN201820818882.6U priority Critical patent/CN208295938U/en
Application granted granted Critical
Publication of CN208295938U publication Critical patent/CN208295938U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E20/00Combustion technologies with mitigation potential
    • Y02E20/34Indirect CO2mitigation, i.e. by acting on non CO2directly related matters of the process, e.g. pre-heating or heat recovery

Landscapes

  • Incineration Of Waste (AREA)

Abstract

The utility model belongs to the processing of low concentration combustible waste gases and UTILIZATION OF VESIDUAL HEAT IN correlative technology field, and it discloses a kind of removing equipment of not oxygen-containing combustible waste gases, which includes burning chemistry chains system and exhaust treatment system;The burning chemistry chains system includes fuel reactor and air reactor, which includes condenser;The outlet of the fuel reactor and the air reactor is connected to the entrance of the condenser by valve;The fuel reactor and the air reactor carry out the switching between reactor by valve;The fuel reactor memory has the carrier of oxygen particle of oxidation state, and the carrier of oxygen particle of the oxidation state is used to aoxidize the not oxygen-containing combustible waste gases for entering the fuel reactor using self-contained Lattice Oxygen;The condenser is used to remove the vapor in the combustion product of fuel reactor generation.The removing equipment is more efficient, reduces costs, environmentally protective, farthest reduces the adverse effect to environment.

Description

A kind of removing equipment of not oxygen-containing combustible waste gases
Technical field
The utility model belongs to the processing of low concentration combustible waste gases and UTILIZATION OF VESIDUAL HEAT IN correlative technology field, more specifically, relating to And a kind of removing equipment of not oxygen-containing combustible waste gases.
Background technique
At this stage, production field is prepared in certain new materials, such as low oxygen-containing silicon crystal preparation, oxidation-reduction method prepare stone It is often needed during black alkene, chemical vapor deposition (Chemical vapor deposition, CVD) method preparation inorganic material etc. It is passed through reducibility gas (such as CO, H2、CH4Deng) it is used as reaction gas.In order to guarantee the purity of material, reaction gas is often slightly It is micro- excessive, therefore inevitably (may also contain containing low concentration imflammable gas in the tail gas of preparation process generation H2O、CO2, but be free of O2), this just needs to be further processed.
Currently, mainly include direct exhaust method, combustion method and condensing recovery method to the processing method of above-mentioned tail gas, but on State these methods and all there is problem to some extent, direct exhaust method not only causes the waste of the energy, also bring atmosphere pollution and Potential explosion danger;For direct combustion method, either lead to pure O2Burning or blowing air burning, since imflammable gas is dense Degree is very low, and burning all will not very sufficiently;The equipment investment cost of condensing recovery method is high, is unfavorable for controlling production cost.Correspondingly, There is a kind of technical needs for the removing equipment for developing efficient, low cost not oxygen-containing combustible waste gases for this field.
Utility model content
Aiming at the above defects or improvement requirements of the prior art, the utility model provides a kind of not oxygen-containing incendivity exhaust gas Removing equipment, based on the processing feature of the not oxygen-containing combustible waste gases of existing low concentration, study and devise it is a kind of efficiently and The removing equipment of the not oxygen-containing combustible waste gases of low cost.The removing equipment is not oxygen-containing to low concentration using burning chemistry chains method Combustible waste gases during realizing Efficient Conversion, can also be achieved the inherence separation to combustion product carbon dioxide, pure through compressing Carbon dioxide product after change can bring indirect to get a profit for enterprise.In addition, the fuel reactor and the air reaction Device is by using the copper-based carrier of oxygen as solid packing, and the heat that whole device theoretically may be implemented is controlled oneself, and gas is cut It changes through solenoid valve control, can largely improve the degree of automation, reduce the generation of operating cost and production accident Rate.
To achieve the above object, according to the one aspect of the utility model, a kind of not oxygen-containing incendivity exhaust gas is provided Equipment is removed, the removing equipment includes burning chemistry chains system and exhaust gas aftertreatment system, the burning chemistry chains system packet Air reactor and fuel reactor are included, the exhaust gas aftertreatment system includes condenser;There is reduction in the air reactor The carrier of oxygen particle of the carrier of oxygen particle of state, the reduction-state realizes its oxygen carrying capability again by the oxygen in draw air It is raw;The outlet of the fuel reactor and the air reactor is connected to the entrance of the condenser by valve;The fuel Reactor and the air reactor carry out the switching between reactor by valve;
The fuel reactor memory has the carrier of oxygen particle of oxidation state, and the carrier of oxygen particle of the oxidation state is used for itself The Lattice Oxygen of carrying aoxidizes the not oxygen-containing combustible waste gases for entering the fuel reactor to generate H2O and/or CO2;Institute The combustion product for stating fuel reactor enters the condenser, and the water that the condenser is used to remove in the combustion product steams Gas.
Further, the carrier of oxygen particle is the copper-based carrier of oxygen.
Further, the burning chemistry chains system further includes the first triple valve, the second triple valve, the first four-way valve and Two four-way valves, two of first four-way valve export the entrance and the fuel reaction that are connected to the air reactor The entrance of device, two entrance are connected to the outlet of second triple valve and the outlet of first triple valve;It is described The outlet of condenser is connected to the entrance of first triple valve and the entrance of second triple valve;Second four-way The two entrances of valve are separately connected the outlet of the air reactor and the outlet of the fuel reactor, in two outlet One is connected to the entrance of the condenser, another is connected with atmosphere.
Further, first triple valve, second triple valve, first four-way valve and second four-way valve It is solenoid electric valve.
Further, it is respectively used to via the carbon dioxide gas stream that the condenser flows out to the air reactor and institute Fuel reactor is stated to be purged.
Further, it is described removing equipment in reduction reaction time be equal to oxidation reaction time and purge time it With realized by controlling first triple valve, second triple valve, first four-way valve and second four-way valve Continuous processing of the removing equipment to not oxygen-containing combustible waste gases.
Further, the temperature in the fuel reactor is 300 DEG C~900 DEG C.
Further, the temperature in the fuel reactor is 700 DEG C~900 DEG C.
Further, the burning chemistry chains system is fixed bed in parallel perhaps bubbling bed reactor structure or be to go here and there Row fluidized-bed reactor structure.
Further, the removing equipment is fixed bed in parallel perhaps bubbling bed reactor structure or be interconnected fluidized Bed structure of reactor.
In general, the utility model the above technical solutions conceived by the present invention are compared with the prior art, The removing equipment of the not oxygen-containing incendivity exhaust gas provided mainly has the advantages that
1. the removing equipment, to the not oxygen-containing combustible waste gases of low concentration, realizes Efficient Conversion using burning chemistry chains method In the process, it can also be achieved the inherence separation to combustion product carbon dioxide, the carbon dioxide product through compressing after purification can be Enterprise brings indirect to get a profit.
2. the fuel reactor and the air reactor by using the copper-based carrier of oxygen as solid packing, theoretically The heat that whole device may be implemented is controlled oneself, and the switching of gas can be improved largely automatic by solenoid valve control Change degree reduces the incidence of operating cost and production accident.
3. the structure of the removing equipment is simple, compact, safe operation is easy, can be with smaller capital input and operation Cost realizes the safe and effective removing to the not oxygen-containing combustible waste gases of low concentration, can promote green, the energy-saving development of enterprise.
4. the removing equipment can more efficiently, energy conservation, greenly realize to the not oxygen-containing imflammable gas of low concentration Harmless treatment, and waste heat recycling can be carried out, farthest reduce the adverse effect to environment.
Detailed description of the invention
Fig. 1 is the structural representation of the removing equipment for the not oxygen-containing incendivity exhaust gas that the preferred embodiment of the utility model provides Figure.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which: R1- air reaction Device, R2- fuel reactor, the first triple valve of V1-, the second triple valve of V2-, the first four-way valve of V3-, the second four-way valve of V4-, C- are cold Condenser.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain The utility model is not used to limit the utility model.In addition, institute in the various embodiments of the present invention described below The technical characteristic being related to can be combined with each other as long as they do not conflict with each other.
Referring to Fig. 1, the removing equipment for the not oxygen-containing combustible waste gases that the preferred embodiment of the utility model provides, described Removing equipment combines chemical chain burning technology to remove micro not oxygen-containing combustible waste gases, and is efficient, economic, environmental protection, peace Entirely, it has been reliably achieved the removing of the not oxygen-containing combustible waste gases of low concentration.Wherein, burning chemistry chains are a kind of novel burning skills Art, the technology is by means of the carrier of oxygen in the oxidation and reduction of two reactors, and fuel and air are under the conditions of discontiguous, by oxygen Oxygen is transmitted in fuel by carrier to burn, and fuel conversion is high.
The removing equipment can efficient burning micro not oxygen-containing imflammable gas while, additionally it is possible to realize and burning produced Object CO2Inherent separation and enrichment, reduce the adverse effect to environment to the maximum extent.Specifically, the removing equipment packet Burning chemistry chains system and exhaust gas aftertreatment system are included, the burning chemistry chains system includes air reactor R1, fuel reaction Device R2, the first triple valve V1, the second triple valve V2, the first four-way valve V3, the second four-way valve V4;The exhaust gas aftertreatment system packet Condenser C is included, an entrance of the second four-way valve V4 is connected to the outlet of the air reactor R1, another entrance connects It is connected to the outlet of the fuel reactor R2, and the one outlet of the second four-way valve V4 is connected to entering for the condenser C Mouthful, another outlet is connected with atmosphere.Two outlets of the first four-way valve V3 are connected to the air reactor The entrance of the entrance of R1 and the fuel reactor R2, two entrance be connected to the second triple valve V2 outlet and The outlet of the first triple valve V1.The outlet of the condenser C is connected to the two entrances of the first triple valve V1 In one and the second triple valve V2 two entrances in one.
There is the carrier of oxygen particle of oxidation state in the fuel reactor R2, the carrier of oxygen can be the copper-based carrier of oxygen. In present embodiment, the temperature in the fuel reactor R2 is 300 DEG C~900 DEG C, preferably 700 DEG C~900 DEG C.Via institute It states the control of the first triple valve V1 and the first four-way valve V3 and leads to the not oxygen-containing combustible waste gases F1 of low concentration to be processed Enter in the fuel reactor R2, the carrier of oxygen in the fuel reactor R2 utilizes the Lattice Oxygen entrained by its own described Low concentration imflammable gas contained in not oxygen-containing combustible waste gases F1 aoxidizes and generates H2O or CO2Gas F4 is (if exhaust gas In contain only H2, only generate H2O;If containing only CO in exhaust gas, CO is only generated2;If containing H in exhaust gas2With CO or CH4, then Generate H2O and CO2Mixture);Combustion product F4 enters in the condenser C via the second four-way valve V4.
The condenser C is used to remove the vapor in the combustion product F4, to obtain the CO of high-purity2Air-flow F5. The CO2It is two strands of air-flows that air-flow F5, which is divided to, wherein one CO2Air-flow F5' enters the entrance of the first triple valve V1, another stock CO2Air-flow F5 " is passed through the entrance of the second triple valve V2, the CO2The air-flow F5' and CO2Air-flow F5 " is respectively as institute State the purge gas of fuel reactor R2 and the air reactor R1.
There is the carrier of oxygen particle in reduction-state in the air reactor R1, via the second triple valve V2 and institute The control for stating the first four-way valve V3 is passed through air draught F2 in the air reactor R1, the carrier of oxygen particle in reduction-state Restore its oxygen carrying capability by oxidation reaction.Meanwhile the air reactor R1 is exported outward by the second four-way valve V4 Oxygen debt air draught F3.
In present embodiment, the process that the carrier of oxygen of the oxidation state in the fuel reactor is reduced is exothermic reaction, The carrier of oxygen of reduction-state in the air reactor R1 is also exothermic reaction by the process of the dioxygen oxidation in air, passes through two The heat that person generates is self-holding come the heat for realizing the removing equipment;Certainly, in other embodiments, can also utilize above-mentioned two Generated waste heat is reacted to realize other purposes;The removing equipment can be two fixed beds or bubbling in parallel Bed reactor types, or be interconnected fluidized bed reactor form.
In present embodiment, the first triple valve V1, the second triple valve V2, the first four-way valve V3 and described Second four-way valve V4 is solenoid electric valve;In addition, anti-according to the scale of construction of not oxygen-containing combustible waste gases to be processed, the air Useful load, the running temperature etc. of the carrier of oxygen in device R1 and the fuel reactor is answered to come selective oxidation process, reduction process and blow Best Times needed for inswept journey, wherein the time of identical process in two reactors is the same, and relatively also due to oxidation process Former process is many fastly, for the continuous operation for realizing system, the reduction process time may make to be equal to oxidation process and purge The sum of time passes through the first triple valve V1, the second triple valve V2, the first four-way valve V3 and second four-way Valve V4's opens and closes to realize the removing equipment to the continuous processing of not oxygen-containing combustible waste gases.
During the removing equipment continuous operation, need to blow reactor before and after each reduction step It sweeps, to prevent directly contacting and influencing CO for air and low concentration combustibility tail gas2The purity and explosion danger of air-flow F5.Specifically , when the oxidation process of the carrier of oxygen in the air reactor R1 is completed, still restored in the fuel reactor R2 Process, the second triple valve V2 switches to CO at this time2Air-flow F5 " introduces CO2Air-flow F5 " enter the air reactor R1 into Row purge, the reduction process after the purge in the air reactor R1, in the fuel reactor R2 Also it completes, switches the first four-way valve V3 and the second four-way valve V4 simultaneously at this time, carried out in the air reactor R1 Reduction process, by introducing CO in the fuel reactor R22Air-flow F5' carries out purge;As the fuel reactor R2 In purge after, in the air reactor R1 still carry out reduction process, switch the second triple valve V2 at this time extremely Air draught F2 is introduced into air draught F2 into carrying out oxidation process in the fuel reactor R2;When the fuel reactor When oxidation process is completed in R2, the reduction process in air reactor R1 also terminates simultaneously, and the first triple valve V1 is cut at this time F5' is shifted to, the second triple valve V2 switches to F5 ", the air reactor R1 and the fuel reactor R2 and carries out CO2 Purge.After purge, while switching the first four-way valve V3 and the second four-way valve V4, and by described One triple valve V1 is connected to the not oxygen-containing flammable tail gas F1 of low concentration to be processed, and the second triple valve V2 is connected to air Air-flow F2, the air reactor R1 and fuel reactor R2 starts oxidation process and reduction process again respectively at this time, real It is now continuous to run without interruption.
The removing equipment of not oxygen-containing combustible waste gases provided by the utility model using burning chemistry chains method to low concentration not Oxygen-containing combustible waste gases during realizing Efficient Conversion, can also be achieved the inherence separation to combustion product carbon dioxide, through pressing The carbon dioxide product of contracting after purification can bring indirect to get a profit for enterprise.In addition, the fuel reactor and the air Reactor is by using the copper-based carrier of oxygen as solid packing, and the heat that whole device theoretically may be implemented is controlled oneself, and gas Switching by solenoid valve control, can largely improve the degree of automation, reduce operating cost and production accident Incidence.
As it will be easily appreciated by one skilled in the art that the above is only the preferred embodiment of the utility model only, not To limit the utility model, any modification made within the spirit and principle of the present invention, equivalent replacement and change Into etc., it should be included within the scope of protection of this utility model.

Claims (9)

1. a kind of removing equipment of not oxygen-containing combustible waste gases, it is characterised in that:
The removing equipment includes burning chemistry chains system and exhaust gas aftertreatment system, and the burning chemistry chains system includes air Reactor and fuel reactor, the exhaust gas aftertreatment system include condenser;There is reduction-state in the air reactor Carrier of oxygen particle, the carrier of oxygen particle of the reduction-state realize the regeneration of its oxygen carrying capability by oxidation reaction;The fuel is anti- The outlet of device and the air reactor is answered to be connected to the entrance of the condenser by valve;The fuel reactor and the sky Solid/liquid/gas reactions device carries out the switching between reactor by valve;
The fuel reactor memory has the carrier of oxygen particle of oxidation state, and the carrier of oxygen particle of the oxidation state is used to use itself The Lattice Oxygen of carrying aoxidizes the not oxygen-containing combustible waste gases for entering the fuel reactor to generate H2O and/or CO2;Institute The combustion product for stating fuel reactor enters the condenser, and the water that the condenser is used to remove in the combustion product steams Gas.
2. the removing equipment of not oxygen-containing combustible waste gases as described in claim 1, it is characterised in that: the carrier of oxygen particle is The copper-based carrier of oxygen.
3. the removing equipment of not oxygen-containing combustible waste gases as described in claim 1, it is characterised in that: the burning chemistry chains system System further includes the first triple valve, the second triple valve, the first four-way valve and the second four-way valve, two outlets of first four-way valve It is connected to the entrance of the air reactor and the entrance of the fuel reactor, two entrance is connected to described The outlet of second triple valve and the outlet of first triple valve;The outlet of the condenser is connected to first threeway The entrance of the entrance of valve and second triple valve;The two entrances of second four-way valve are separately connected the air reactor Outlet and the fuel reactor outlet, an entrance for being connected to the condenser in two outlet, another It is connected with atmosphere.
4. the removing equipment of not oxygen-containing combustible waste gases as claimed in claim 3, it is characterised in that: first triple valve, Second triple valve, first four-way valve and second four-way valve are solenoid electric valve.
5. the removing equipment of not oxygen-containing combustible waste gases as claimed in claim 3, it is characterised in that: via the condenser stream Carbon dioxide gas stream out is respectively used to purge the air reactor and the fuel reactor.
6. the removing equipment of not oxygen-containing combustible waste gases as claimed in claim 5, it is characterised in that: in the removing equipment also The time of original reaction is equal to the sum of time and purge time of oxidation reaction, by controlling first triple valve, described second Triple valve, first four-way valve and second four-way valve realize the removing equipment to the companies of not oxygen-containing combustible waste gases Continuous processing.
7. the removing equipment of not oxygen-containing combustible waste gases as claimed in any one of claims 1 to 6, it is characterised in that: the fuel Temperature in reactor is 300 DEG C~900 DEG C.
8. the removing equipment of not oxygen-containing combustible waste gases as claimed in claim 7, it is characterised in that: in the fuel reactor Temperature be 700 DEG C~900 DEG C.
9. the removing equipment of not oxygen-containing combustible waste gases as claimed in any one of claims 1 to 6, it is characterised in that: the chemistry Chain combustion system is interconnected fluidized bed reactor structure.
CN201820818882.6U 2018-05-30 2018-05-30 A kind of removing equipment of not oxygen-containing combustible waste gases Active CN208295938U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820818882.6U CN208295938U (en) 2018-05-30 2018-05-30 A kind of removing equipment of not oxygen-containing combustible waste gases

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820818882.6U CN208295938U (en) 2018-05-30 2018-05-30 A kind of removing equipment of not oxygen-containing combustible waste gases

Publications (1)

Publication Number Publication Date
CN208295938U true CN208295938U (en) 2018-12-28

Family

ID=64723088

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820818882.6U Active CN208295938U (en) 2018-05-30 2018-05-30 A kind of removing equipment of not oxygen-containing combustible waste gases

Country Status (1)

Country Link
CN (1) CN208295938U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112029540A (en) * 2020-07-27 2020-12-04 新奥科技发展有限公司 Chemical looping coal gasification system and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112029540A (en) * 2020-07-27 2020-12-04 新奥科技发展有限公司 Chemical looping coal gasification system and method

Similar Documents

Publication Publication Date Title
RU2349371C2 (en) Method for separation of waste gas or smoke produced in process of fuel oxidation, and extraction of carbon dioxide from it
CN105435600B (en) A kind of purification system and purification method of polluted gas
KR970020167A (en) Method of removing carbon dioxide from feedstock gas to subsequent process using nitrogen produced from air separation plant
CN103496672B (en) Device and process for preparing O2-CO2 mixed gas based on chemical-looping technology
CA2586381A1 (en) Configurations and methods for sox removal in oxygen-containing gases
US20130255550A1 (en) Method and apparatus for treatment of unburnts
CN108413421A (en) A kind of removing equipment of not oxygen-containing combustible waste gases
CN107143848A (en) A kind of coal gasification burning chemistry chains system in situ of coupling chemistry chain oxygen
CN208295938U (en) A kind of removing equipment of not oxygen-containing combustible waste gases
CN113669752B (en) Oxygen-enriched combustion method
Slimane et al. Production of hydrogen by superadiabatic decomposition of hydrogen sulfide
CA2867792A1 (en) Methods and apparatus for oxidation of unburnts
CN108011119B (en) Method and system for clean power generation and resource utilization of hydrogen-containing waste gas coupled fuel cell
CN107098312B (en) Method for preparing synthesis gas by using flue gas
CN101607859A (en) A kind of technology of employing coke-oven gas for production of methane
EP1448294B1 (en) Method of treating a regeneration gas from s-zorb process
CN101012929A (en) Coal-burning installation based on calcium sulphate oxygen carrier and coal burning method
CN216711600U (en) Containing H2S synthetic gas low-temperature chemical-looping desulfurization and sulfuric acid co-production system
CN205953536U (en) Active carbon preparation system
CN210934466U (en) Impurity removal system for oxygen-containing argon tail gas
CN211706407U (en) Desulfurization system
CN106190386B (en) Method for deeply removing organic sulfur from natural gas
CN113209793A (en) Purification system and purification process for chlorine-containing volatile organic compounds
JPS60174732A (en) Method for recovering waste gas of ethylene oxide production plant
CN111023119A (en) VOCs waste gas treatment method and treatment device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant