CN208271845U - A kind of superposed type quartz supporting boat - Google Patents
A kind of superposed type quartz supporting boat Download PDFInfo
- Publication number
- CN208271845U CN208271845U CN201820527881.6U CN201820527881U CN208271845U CN 208271845 U CN208271845 U CN 208271845U CN 201820527881 U CN201820527881 U CN 201820527881U CN 208271845 U CN208271845 U CN 208271845U
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- China
- Prior art keywords
- boat
- bottom plate
- body bottom
- quartz
- boat body
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to semiconductor fabrication techniques field, especially a kind of superposed type quartz supporting boat.The superposed type quartz supporting boat, including boat body bottom plate, first support quartz pushrod, second support quartz pushrod and third support quartz pushrod, boat body plate upper surface is arc-shaped, boat body bottom base plate is provided with semi- cylindrical groove, boat body plate upper surface is evenly distributed with multiple limit holes being connected to semi- cylindrical groove, boat body plate upper surface is all around symmetrically arranged with 4 threaded holes, overlapping auxiliary body is movably installed in threaded hole, boat body bottom plate front end is provided with drawing device fixed mechanism, the long stripes through hole being connected to semi- cylindrical groove is symmetrically arranged at left and right sides of boat body bottom plate.A kind of superposed type quartz supporting boat provided by the utility model can reduce the site area of occupancy before SIOPS deposition processes by way of superposition, improve the treatment effeciency of SIOPS deposition.
Description
Technical field
The utility model relates to semiconductor fabrication techniques field, especially a kind of superposed type quartz supporting boat.
Background technique
The process deposited by SIPOS is needed in LPCVD system during production of semiconductor products, it is characterized in that in chip
Surface deposits one layer of SIPOS film, while the quartzy supporting boat surface quilt of bearing wafer by special gas under specific condition
One layer of SIPOS film is deposited, quartzy supporting boat need to remove surface SIPOS film through mixing acid soak after Multiple depositions.It passes
The quartz boat of system is using four quartz pushrods as anchor point, and chip is uniformly placed on quartz boat before SIPOS deposition processes, due to
The carrying capacity of single quartz boat is smaller, and when batch processing chip needs to use multiple quartz boats, between multiple quartz boats mutually solely
It is vertical, occupied ground when use；In addition, conventional quartz boat quartz pushrod after mix acid liquor repeatedly impregnates is corroded and attenuates, stability
It is deteriorated, is easily broken during passing in and out furnace.
Utility model content
The purpose of this utility model is to provide a kind of superposed type quartz supporting boats, overcome aforementioned the deficiencies in the prior art,
The site area occupied when reducing using multiple quartz boats, improves the stability of quartz boat.
The technical solution adopted by the utility model to solve its technical problems is that:
A kind of superposed type quartz supporting boat, including boat body bottom plate, the first support quartz pushrod, the second support quartz pushrod and third
Quartz pushrod is supported, the boat body plate upper surface is arc-shaped, and boat body bottom plate, which is mainly used for playing chip, to be fixed and supported, boat
The arcuate structure design of body bottom plate is conducive to enhance the limited support effect of its bottom surface stationarity and top, and boat body bottom base plate is set
It is equipped with semi- cylindrical groove, semi- cylindrical groove can not only ensure the uniformity that chip is handled in SIPOS deposition process, and
Be conducive to match when quartz boat overlaps up and down with the wafer shape on the quartz boat for being located at its underpart, boat body plate upper surface is equal
Even that multiple limit holes being connected to semi- cylindrical groove are distributed with, the length of limit hole is less than the diameter of chip to be processed, mainly
For fixed wafer and the position of chip is limited, boat body plate upper surface is all around symmetrically arranged with 4 threaded holes, threaded hole
It is inside movably installed with overlapping auxiliary body, overlapping auxiliary body is used to connect the quartz boat of each overlapping, and limits and be located at top
Quartz boat position, boat body bottom plate front end is provided with drawing device fixed mechanism, and drawing device fixed mechanism is for being fixed on
With the drawing device of pull quartz boat after processing before SIOPS deposition processes, the boat body bottom plate left and right sides is symmetrically arranged with and semicircle
The long stripes through hole of column type groove connection, long stripes through hole are used to enhance the aeration of boat body bottom plate.
Further, the overlapping auxiliary body includes the screw thread and set respectively that stock, multistage are independently disposed on stock
The nut stock bottom end being placed on every section of screw thread is screwed on by screw thread and is located on the quartz boat of bottom, the multistage spiral shell in the middle part of stock
Nut on line is respectively used to limit the position of superposed quartz boat.
Further, the drawing device fixed mechanism includes being set to the square aperture of boat body bottom plate front end and by rectangular
Opening lower surface extends to the pulling eye of boat body lower surface of base plate.
Further, the first support quartz pushrod is symmetrical set in the top of boat body bottom plate, the first support quartz
It is provided with equally distributed cutting on the opposite side of stick, cutting is used to make to playing limited support at left and right sides of chip
With stability of the enhancing chip in quartz boat.
Further, the limit hole in the cutting and boat body bottom plate on the first support quartz pushrod corresponds.
Further, connection function has been respectively and fixedly provided between rear end between the front end of described two first support quartz pushrods
Second support quartz pushrod.
Further, the third support quartz pushrod is set to each first support quartz pushrod and second and supports quartz pushrod
Between contact jaw and boat body bottom plate, it is acute angle that third, which supports quartz pushrod to support the angle of quartz pushrod with second, is conducive to enhancing the
Stability between three support quartz pushrods and the second support quartz pushrod.
The beneficial effects of the utility model are: compared with prior art, a kind of superposed type quartz of the utility model carries
Boat has the advantages that (1) boat body bottom plate top is arc-shaped, enhances the support limit of boat body bottom plate stationarity and top
Effect；(2) the semi- cylindrical groove of boat body bottom base plate can not only ensure that chip is handled uniform in SIPOS deposition process
Property, and be conducive to match when quartz boat overlaps up and down with the wafer shape on the quartz boat for being located at its underpart；(3) boat body bottom
Long stripes through hole is set at left and right sides of portion, enhances the aeration of boat body bottom plate；(4) the first support stone of boat body bottom plate top setting
Locations of structures relationship between English stick, the second support quartz pushrod and third support quartz pushrod is conducive to enhance top braces limit
Stability enhances the lifting capacity of quartz boat；(5) pass through setting overlapping auxiliary body, it is ensured that in each quartz boat lamination process mutually
Structural stability between phase reduces the occupied ground area of quartz boat before SIOPS deposition processes by way of superposition.
Detailed description of the invention
Fig. 1 is the utility model schematic perspective view；
Fig. 2 is the A of the utility model Fig. 1 to schematic perspective view；
Fig. 3 is the enlarged drawing that the utility model overlaps auxiliary body；
Fig. 4 is structural schematic diagram when the utility model is used；
Wherein, 1 boat body bottom plate, 2 first support quartz pushrods, 3 second support quartz pushrods, 4 thirds support quartz pushrod, 5 semicircles
Column type groove, 6 limit holes, 7 threaded holes, 8 long stripes through holes, 9 stocks, 10 screw threads, 11 nuts, 12 square apertures, 13 pulling eyes, 14
Cutting.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described.
In embodiment as shown in Figs 1-4, a kind of superposed type quartz supporting boat, including boat body bottom plate 1, first support quartz pushrod
2, the second support quartz pushrod 3 and third support quartz pushrod 4, and 1 upper surface of the boat body bottom plate is arc-shaped, and 1 bottom of boat body bottom plate is set
It is equipped with semi- cylindrical groove 5,1 upper surface of boat body bottom plate is evenly distributed with multiple limit holes 6 being connected to semi- cylindrical groove 5；
1 upper surface of boat body bottom plate is all around symmetrically arranged with 4 threaded holes 7, is movably installed with overlapping auxiliary machine in threaded hole 7
Structure, the overlapping auxiliary body include the screw thread 10 and be respectively arranged at every section of screw thread that stock 9, multistage are independently disposed on stock
On nut 11；1 front end of boat body bottom plate is provided with drawing device fixed mechanism, and the drawing device fixed mechanism includes being set to
The square aperture 12 of 1 front end of boat body bottom plate and the pulling eye 13 that 1 lower surface of boat body bottom plate is extended to by 12 lower surface of square aperture；Boat
The long stripes through hole 8 being connected to semi- cylindrical groove 5 is symmetrically arranged at left and right sides of body bottom plate 1；The first support quartz pushrod 2
It is symmetrical set in the top of boat body bottom plate 1, the first support quartz pushrod 2 is provided with equally distributed quarter on opposite side
Slot 14, first supports the limit hole 6 in cutting and boat body bottom plate 1 on quartz pushrod 2 to correspond, described two first supports
The second support quartz pushrod 3 is respectively and fixedly provided between the front end of quartz pushrod 2 between rear end, the third support quartz pushrod 4 is set to
It is each first support quartz pushrod 2 and second support quartz pushrod 3 contact jaw and boat body bottom plate 1 between, third support quartz pushrod 4 with
The angle of second support quartz pushrod 3 is acute angle.
Working principle: a kind of superposed type quartz supporting boat of the utility model, in use, chip to be processed is uniformly put
It is placed on the limit hole 6 of first quartzy supporting boat, 4 root long bar, 9 distal threaded portion is screwed on is held with first quartz respectively
In 4 threaded holes 7 for carrying boat, be screwed at the screw thread of 9 end of stock a nut 11 on every root long bar 9, by second
4 threaded holes of quartzy supporting boat are directed at 4 root long bars 9 and are inserted in, and 4 nuts 11 play support to second quartzy supporting boat and make
With, uniformly place chip to be processed in second quartzy supporting boat, and so on overlapping other quartzy supporting boats, when quartz is held
It carries when boat needs to be placed into SIOPS furnace and quickly removes nut 11 and extract quartzy supporting boat from stock 9 out.
Above-mentioned specific embodiment is only the specific case of the utility model, and the scope of patent protection of the utility model includes
But it is not limited to the product form and style of above-mentioned specific embodiment, it is any to meet the utility model claims book and any institute
Belong to the appropriate changes or modifications that the those of ordinary skill of technical field does it, should all fall into the patent protection of the utility model
Range.
Claims (7)
1. a kind of superposed type quartz supporting boat, including boat body bottom plate (1), the first support quartz pushrod (2), the second support quartz pushrod
(3) and third supports quartz pushrod (4), it is characterised in that: boat body bottom plate (1) upper surface is arc-shaped, boat body bottom plate (1) bottom
It is provided with semi- cylindrical groove (5), boat body bottom plate (1) upper surface, which is evenly distributed with, multiple to be connected to semi- cylindrical groove (5)
Limit hole (6), boat body bottom plate (1) upper surface are all around symmetrically arranged with 4 threaded holes (7), and activity is pacified in threaded hole (7)
Equipped with overlapping auxiliary body, boat body bottom plate (1) front end is provided with drawing device fixed mechanism, and boat body bottom plate (1) left and right sides is right
Title is provided with the long stripes through hole (8) being connected to semi- cylindrical groove (5).
2. a kind of superposed type quartz supporting boat as described in claim 1, it is characterised in that: the overlapping auxiliary body includes length
The screw thread (10) that bar (9), multistage are independently disposed on stock and the nut (11) being respectively arranged on every section of screw thread.
3. a kind of superposed type quartz supporting boat as described in claim 1, it is characterised in that: the drawing device fixed mechanism packet
It includes the square aperture (12) for being set to boat body bottom plate (1) front end and boat body bottom plate (1) is extended to by square aperture (12) lower surface
The pulling eye (13) of lower surface.
4. a kind of superposed type quartz supporting boat as described in claim 1, it is characterised in that: first support quartz pushrod (2)
It is symmetrical set in the top of boat body bottom plate (1), is provided with and is uniformly distributed on the opposite side of the first support quartz pushrod (2)
Cutting (14).
5. a kind of superposed type quartz supporting boat as claimed in claim 4, it is characterised in that: first support quartz pushrod (2)
On cutting and boat body bottom plate (1) on limit hole (6) correspond.
6. a kind of superposed type quartz supporting boat as claimed in claim 5, it is characterised in that: described two first support quartz pushrods
(2) the second support quartz pushrod (3) is respectively and fixedly provided between front end between rear end.
7. a kind of superposed type quartz supporting boat as claimed in claim 6, it is characterised in that: the third supports quartz pushrod (4)
It is set between each first support quartz pushrod (2) and the contact jaw and boat body bottom plate (1) of the second support quartz pushrod (3), third
Supporting quartz pushrod (4) and the angle of the second support quartz pushrod (3) is acute angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820527881.6U CN208271845U (en) | 2018-04-14 | 2018-04-14 | A kind of superposed type quartz supporting boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820527881.6U CN208271845U (en) | 2018-04-14 | 2018-04-14 | A kind of superposed type quartz supporting boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208271845U true CN208271845U (en) | 2018-12-21 |
Family
ID=64677272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820527881.6U Expired - Fee Related CN208271845U (en) | 2018-04-14 | 2018-04-14 | A kind of superposed type quartz supporting boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208271845U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109879586A (en) * | 2019-04-17 | 2019-06-14 | 浙江鸿达石英电子科技有限公司 | A kind of automatic positioning equipment applied to quartz products |
| CN117976587A (en) * | 2024-01-30 | 2024-05-03 | 浙江泓芯半导体有限公司 | Quartz boat for semiconductor device manufacturing equipment |
-
2018
- 2018-04-14 CN CN201820527881.6U patent/CN208271845U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109879586A (en) * | 2019-04-17 | 2019-06-14 | 浙江鸿达石英电子科技有限公司 | A kind of automatic positioning equipment applied to quartz products |
| CN117976587A (en) * | 2024-01-30 | 2024-05-03 | 浙江泓芯半导体有限公司 | Quartz boat for semiconductor device manufacturing equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181221 Termination date: 20210414 |