CN208261487U - High-pressure spray device is used in a kind of production of silica crucible - Google Patents
High-pressure spray device is used in a kind of production of silica crucible Download PDFInfo
- Publication number
- CN208261487U CN208261487U CN201820502722.0U CN201820502722U CN208261487U CN 208261487 U CN208261487 U CN 208261487U CN 201820502722 U CN201820502722 U CN 201820502722U CN 208261487 U CN208261487 U CN 208261487U
- Authority
- CN
- China
- Prior art keywords
- box
- fixed disk
- spray
- spray equipment
- silica crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007921 spray Substances 0.000 title claims abstract description 63
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 18
- 238000005507 spraying Methods 0.000 claims abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 19
- 241000220317 Rosa Species 0.000 claims abstract description 8
- 238000004140 cleaning Methods 0.000 abstract description 7
- 239000002699 waste material Substances 0.000 abstract description 4
- 238000004134 energy conservation Methods 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Abstract
The utility model discloses a kind of silica crucible production high-pressure spray devices, including spray equipment ontology, spray equipment ontology is equipped with spraying box, the side of spray equipment slidably connects chamber door, motor is fixed at the top of spray equipment ontology, fixed disk is fixedly connected with above spray equipment body interior, the bottom of fixed disk is equidistantly equipped with several tack, stud, the middle position of fixed disk slidably connects rotating disk, the utility model beneficial effect achieved is: it is practical that the utility model has the advantages of simple structure, it is used convenient for cleaning when crucible production, by being provided with rotating disk and fixed disk, it is convenient for moving up and down movable spray head by the tack, stud in fixed disk when in use, solve the problems, such as that existing nozzle angle is inflexible, substantially increase the cleannes of crucible production, by being provided with Rose Box and purifying box, by that will clean Water afterwards carries out secondary filter utilization, reduces the waste of water resource, energy conservation and environmental protection.
Description
Technical field
The utility model relates to a kind of spray equipment, specially a kind of silica crucible production high-pressure spray device belongs to
Spray equipment technical field.
Background technique
There is silica crucible strong high-purity, temperature tolerance, the big precision height of size, good heat preservation performance, energy saving, quality to stablize
The advantages that, application is more and more extensive, and the detection work of silica crucible is a highly important link, and the inspection of silica crucible
Survey develops towards on-site test direction, and silica crucible can be used below at 1450 degree, is divided to transparent and two kinds opaque, uses arc process
The translucent silica crucible of system is to draw large-diameter monocrystalline silicon, develops the essential basic material of large scale integrated circuit, when
The present, world semiconductor industrially developed country have used this crucible instead of small suprasil crucible, he has high-purity, temperature tolerance
By force, the advantages that big precision height of size, good heat preservation performance, energy saving, quality are stablized, it is high in the technique of the production and processing of crucible
Pressure spray makes to its clean one of important procedure, and existing spray equipment can not be such that movable spray head moves up and down when in use,
Can not solve the problems, such as that existing nozzle angle is inflexible, leverage crucible production cleannes, cannot by the water after cleaning into
Row secondary filter utilizes, and not can be reduced the waste of water resource, can not achieve energy conservation and environmental protection.
Utility model content
The utility model provides a kind of silica crucible production high-pressure spray device, by being provided with fixed disk and filtering
Case solves the problems, such as that existing spray equipment nozzle angle is inflexible and cannot recycle water resource.
In order to solve the above-mentioned technical problem, the utility model provides the following technical solution:
The utility model a kind of silica crucible production high-pressure spray device, including spray equipment ontology, the spray dress
Ontology is set equipped with spraying box, the side of the spray equipment ontology slidably connects chamber door, the top of the spray equipment ontology
It is fixed with motor, fixed disk is fixedly connected with above the spray equipment body interior, the bottom of the fixed disk is equidistant
Equipped with several tack, stud, the middle position of the fixed disk slidably connects rotating disk, the center location of the rotating disk with
The output end of motor is fixedly connected, and the rotation pan bottom is rotatably connected to several movable spray heads, the work by connector
Dynamic spray head is connect by spring with rotating disk close to one end of fixed disk, and the inner wall of the spraying box is equidistantly fixed equipped with several
Spray head, the lower section inside the spraying box are equipped with collecting-tank, are equipped with the first strainer among the collecting-tank, and the one of the spraying box
Side is fixed with Rose Box, and the inside of the Rose Box is equipped with purifying box, and the purifying box is connect by drainpipe with collecting-tank,
High-pressure hydraulic pump is fixedly connected at the top of the purifying box.
As a kind of preferred embodiment of the utility model, the panel of the chamber door is equipped with observation panel.
As a kind of preferred embodiment of the utility model, the purifying box and spraying box pass through drainpipe and high-pressure hydraulic pump
Connection.
As a kind of preferred embodiment of the utility model, several second strainers are equipped with inside the purifying box.
As a kind of preferred embodiment of the utility model, the one end of the movable spray head far from water jet and tack, stud are slided
Connection.
The utility model beneficial effect achieved is: it is practical that the utility model has the advantages of simple structure, when convenient for crucible production
Cleaning uses, and by being provided with rotating disk and fixed disk, is convenient for making movable spray head by the tack, stud in fixed disk when in use
It moves up and down, solves the problems, such as that existing nozzle angle is inflexible, the cleannes of crucible production are substantially increased, by being provided with
Filter box and purifying box carry out secondary filter utilization by the water after cleaning, reduce the waste of water resource, energy conservation and environmental protection.
Detailed description of the invention
Attached drawing is used to provide a further understanding of the present invention, and constitutes part of specification, practical with this
Novel embodiment is used to explain the utility model together, does not constitute limitations of the present invention.
In the accompanying drawings:
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the schematic diagram of internal structure of the utility model；
Fig. 3 is the rotating disk of the utility model and the structural schematic diagram of fixed disk；
Fig. 4 is the enlarged drawing at the utility model A.
In figure: 1, spray equipment ontology；2, spraying box；3, high-pressure hydraulic pump；4, motor；5, drainpipe；6, Rose Box；7, case
Door；8, tack, stud；9, fixed disk；10, rotating disk；11, movable spray head；12, spring；13, stationary nozzle；14, collecting-tank；15,
First strainer；16, purifying box；17, the second strainer.
Specific embodiment
It is illustrated below in conjunction with preferred embodiment of the attached drawing to the utility model, it should be understood that described herein excellent
It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
Embodiment
As shown in Figs 1-4, the utility model provides a kind of silica crucible production high-pressure spray device, including spray equipment
Ontology 1, spray equipment ontology 1 are equipped with spraying box 2, and the side of spray equipment ontology 1 slidably connects chamber door 7, spray equipment sheet
The top of body 1 is fixed with motor 4, and the top inside spray equipment ontology 1 is fixedly connected with fixed disk 9, the bottom of fixed disk 9
Several tack, stud 8 are equidistantly equipped with, the middle position of fixed disk 9 slidably connects rotating disk 10, the center location of rotating disk 10
It is fixedly connected with the output end of motor 4,10 bottom of rotating disk is rotatably connected to several movable spray heads 11 by connector, activity
Spray head 11 is connect by spring 12 with rotating disk 10 close to one end of fixed disk 9, and the inner wall of spraying box 2 is equidistantly solid equipped with several
Determine spray head 13, the lower section inside spraying box 2 is equipped with collecting-tank 14, it is equipped with the first strainer 15 among collecting-tank 14, the one of spraying box 2
Side is fixed with Rose Box 6, and the inside of Rose Box 6 is equipped with purifying box 16, and purifying box 16 is connected by drainpipe 5 and collecting-tank 14
It connects, the top of purifying box 16 is fixedly connected with high-pressure hydraulic pump 3.
The panel of chamber door 7 is equipped with observation panel, and convenient for the situation inside observation spraying box 2, purifying box 16 and spraying box 2 are equal
It is connect by drainpipe 5 with high-pressure hydraulic pump 3, convenient for recycling water resource, is equipped with several second strainers inside purifying box 16
17, convenient for sufficiently filtering water, extend the service life of high-pressure hydraulic pump 3, movable spray head 11 one end and round end far from water jet
Nail 8 is slidably connected, convenient for the angle of up and down adjustment movable spray head 11.
Specifically, silica crucible is placed on the first strainer 15 in collecting-tank 14, high-pressure hydraulic pump 3 and electricity are then opened
Water is sent at movable spray head 11 and stationary nozzle 13 by the power switch of machine 4, high-pressure hydraulic pump 3 by drainpipe 5, movable spray head 11
Cleaning is rinsed to crucible by spraying high pressure water with stationary nozzle 13, at the same time, motor 4 drives rotating disk 10 to rotate,
Rotating disk 10 drives movable spray head 11 to rotate, living under the action of tack, stud 8 when movable spray head 11 rotates at tack, stud 8
One end of dynamic spray head 11 is depressed by tack, stud 8, at this point, the water jet of movable spray head 11 moves upwards, when movable spray head 11 slips over
When tack, stud 8, the water jet of movable spray head 11 moves downward under the action of spring 12, is recycled with this, and movable spray head 11 can be with
It keeps moving up and down, keeps cleaning more thorough, the water after cleaning is drawn into purifying box 16 after progress secondary filter by high-pressure hydraulic pump 3
It uses, the waste of water resource is reduced with this.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this
Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art
For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic
It is equivalently replaced.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on,
It should be included within the scope of protection of this utility model.
Claims (5)
1. a kind of silica crucible production high-pressure spray device, including spray equipment ontology (1), which is characterized in that the spray
Device noumenon (1) is equipped with spraying box (2), and the side of the spray equipment ontology (1) slidably connects chamber door (7), the spray
It is fixed at the top of device noumenon (1) motor (4), the internal top of the spray equipment ontology (1) is fixedly connected with fixation
Disk (9), the bottom of the fixed disk (9) are equidistantly equipped with several tack, stud (8), the middle position sliding of the fixed disk (9)
It is connected with rotating disk (10), the center location of the rotating disk (10) is fixedly connected with the output end of motor (4), the rotating disk
(10) bottom is rotatably connected to several movable spray heads (11) by connector, and the movable spray head (11) is close to fixed disk (9)
One end connect with rotating disk (10) by spring (12), the inner wall of the spraying box (2) is equidistantly equipped with several stationary nozzles
(13), the internal lower section of the spraying box (2) is equipped with collecting-tank (14), and the first strainer is equipped among the collecting-tank (14)
(15), the side of the spraying box (2) is fixed with Rose Box (6), and the inside of the Rose Box (6) is equipped with purifying box (16),
The purifying box (16) is connect by drainpipe (5) with collecting-tank (14), is fixedly connected with height at the top of the purifying box (16)
Water pump (3).
2. a kind of silica crucible production high-pressure spray device according to claim 1, which is characterized in that the chamber door
(7) panel is equipped with observation panel.
3. a kind of silica crucible production high-pressure spray device according to claim 1, which is characterized in that the purifying box
(16) it is connect by drainpipe (5) with high-pressure hydraulic pump (3) with spraying box (2).
4. a kind of silica crucible production high-pressure spray device according to claim 1, which is characterized in that the purifying box
(16) internal to be equipped with several second strainers (17).
5. a kind of silica crucible production high-pressure spray device according to claim 1, which is characterized in that the adjustable spray
Head (11) is slidably connected far from one end of water jet with tack, stud (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820502722.0U CN208261487U (en) | 2018-04-10 | 2018-04-10 | High-pressure spray device is used in a kind of production of silica crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820502722.0U CN208261487U (en) | 2018-04-10 | 2018-04-10 | High-pressure spray device is used in a kind of production of silica crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208261487U true CN208261487U (en) | 2018-12-21 |
Family
ID=64676722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820502722.0U Expired - Fee Related CN208261487U (en) | 2018-04-10 | 2018-04-10 | High-pressure spray device is used in a kind of production of silica crucible |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208261487U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020224401A1 (en) * | 2019-05-08 | 2020-11-12 | 北京北方华创微电子装备有限公司 | Cleaning chamber and cleaning device |
| CN112691966A (en) * | 2020-11-24 | 2021-04-23 | 杨恒鑫 | Automatic cleaning device for machining |
-
2018
- 2018-04-10 CN CN201820502722.0U patent/CN208261487U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020224401A1 (en) * | 2019-05-08 | 2020-11-12 | 北京北方华创微电子装备有限公司 | Cleaning chamber and cleaning device |
| JP2022527664A (en) * | 2019-05-08 | 2022-06-02 | 北京北方華創微電子装備有限公司 | Cleaning chamber and cleaning equipment |
| CN112691966A (en) * | 2020-11-24 | 2021-04-23 | 杨恒鑫 | Automatic cleaning device for machining |
| CN112691966B (en) * | 2020-11-24 | 2022-06-07 | 衡阳星昱新材料科技有限公司 | Automatic cleaning device for machining |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181221 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |