CN208219015U - A kind of crystal vacuum annealing furnace apparatus - Google Patents
A kind of crystal vacuum annealing furnace apparatus Download PDFInfo
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- CN208219015U CN208219015U CN201820679266.7U CN201820679266U CN208219015U CN 208219015 U CN208219015 U CN 208219015U CN 201820679266 U CN201820679266 U CN 201820679266U CN 208219015 U CN208219015 U CN 208219015U
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- vacuum
- crystal
- shell
- furnace
- vacuum pump
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- 239000013078 crystal Substances 0.000 title claims abstract description 41
- 238000000137 annealing Methods 0.000 title claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 239000000498 cooling water Substances 0.000 claims abstract description 9
- 239000011229 interlayer Substances 0.000 claims abstract description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 238000012544 monitoring process Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 229910052573 porcelain Inorganic materials 0.000 claims description 3
- 238000005262 decarbonization Methods 0.000 abstract description 3
- 238000001704 evaporation Methods 0.000 abstract description 3
- 230000008020 evaporation Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 230000003647 oxidation Effects 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- 238000007872 degassing Methods 0.000 abstract description 2
- 238000005238 degreasing Methods 0.000 abstract description 2
- 238000001291 vacuum drying Methods 0.000 abstract description 2
- 238000001816 cooling Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to crystal bar production fields, more particularly to a kind of crystal vacuum annealing furnace apparatus, including pedestal and set vacuum furnace body, vacuum pump and control cabinet on the base, the vacuum furnace body includes furnace tube and fire door, the furnace tube is made of first shell, second shell, heating element, thermal detector and vacuum degree measuring instrument, cooling water pipeline is equipped in the interlayer of the first shell and second shell, it is equipped with crystal rack in the center of the furnace tube and the inside of heating element, the thermal detector and vacuum degree measuring instrument are located in the crystal rack.A kind of crystal vacuum annealing furnace apparatus of the utility model, it is constituted using vacuum furnace body, vacuum pump and control cabinet, vacuum pump can guarantee the intracorporal vacuum degree of vacuum drying oven using three-level vacuum pump group, the generation that crystal can be prevented in bad phenomenons such as the oxidation and decarbonization of annealing process, degasification degreasing, oxide evaporations is avoided, plane of crystal brightness and mechanical property can be effectively improved.
Description
Technical field
The utility model relates to crystal bar production fields, and in particular to a kind of crystal vacuum annealing furnace apparatus.
Background technique
Crystalline material is widely used in each field such as semiconductor, aviation, laser and medical instrument, and crystal can be produced in production process
Raw stress just needs to make annealing treatment crystal to eliminate stress, and crystal annealing can not only eliminate stress, meanwhile, annealing is also
There is the function of activation donor and acceptor's impurity, i.e., allows them to enter by annealing some foreign atoms for being in interstitial site
Alternative site.
The annealing of crystal requires annealing furnace, and the annealing furnace of the prior art is since structure is simply without vacuum plant, in reality
The bad phenomenons such as oxidation and decarbonization, oxide evaporation, plane of crystal brightness and mechanics after annealing are easy to cause in the application on border
Performance is all poor.
Summary of the invention
The utility model in order to overcome the deficiencies of the prior art, and provide a kind of crystal vacuum annealing furnace apparatus.
In order to solve the above technical problems, the utility model uses following technical scheme:
A kind of crystal vacuum annealing furnace apparatus including pedestal and sets vacuum furnace body, vacuum pump and control on the base
Cabinet processed, the vacuum furnace body include furnace tube and fire door, and the furnace tube is by first shell, second shell, heating element, thermal detector
It is constituted with vacuum degree measuring instrument, cooling water pipeline is equipped in the interlayer of the first shell and second shell, in the furnace tube
Center and the inside of heating element be equipped with crystal rack, the thermal detector and vacuum degree measuring instrument are located at the crystal and place
In frame；The vacuum pump is connected to the side of the vacuum furnace body, is equipped with single-chip microcontroller and display, the list in the control cabinet
Piece machine and the thermal detector and vacuum degree measuring instrument communication connection, the display is for showing thermal detector and vacuum degree measuring instrument
The temperature and vacuum degree parameter of monitoring.
Preferably, the vacuum pump is three-level vacuum pump group.
Preferably, the heating element is molybdenum ribbon.
Preferably, the material of the crystal rack is 95 porcelain of high temperature resistant.
Compared with prior art, the utility model has the following beneficial effects:
A kind of crystal vacuum annealing furnace apparatus of the utility model is constituted, vacuum using vacuum furnace body, vacuum pump and control cabinet
Pump can guarantee the intracorporal vacuum degree of vacuum drying oven using three-level vacuum pump group, avoid oxidation and decarbonization of the crystal in annealing process, degasification
The generation of the bad phenomenons such as degreasing, oxide evaporation, can effectively improve plane of crystal brightness and mechanical property.
Detailed description of the invention
Fig. 1 is the utility model schematic perspective view；
Fig. 2 is the utility model schematic view of the front view.
Specific embodiment
With reference to the accompanying drawings and detailed description to the further details of explanation of the utility model: referring to Fig. 1-2, for solution
Certainly above-mentioned technical problem, the utility model use following technical scheme:
A kind of crystal vacuum annealing furnace apparatus, including pedestal 1 and the vacuum furnace body 2 being located on the pedestal 1, vacuum pump 3
With control cabinet 4, the vacuum furnace body 2 includes furnace tube 5 and fire door 6, and the furnace tube 5 is by first shell 7, second shell 8, heating
Element 9, thermal detector and vacuum degree measuring instrument are constituted, and cooling water pipe is equipped in the interlayer of the first shell 7 and second shell 8
Road is equipped with crystal rack 10, the thermal detector and vacuum monitor in the center of the furnace tube 5 and the inside of heating element 9
Instrument is located in the crystal rack 10；The vacuum pump 3 is connected to the side of the vacuum furnace body 2, sets in the control cabinet 4
There are single-chip microcontroller and display, the single-chip microcontroller and the thermal detector and vacuum degree measuring instrument communication connection, the display is used for
Show the temperature and vacuum degree parameter of thermal detector and vacuum degree measuring instrument monitoring.
Preferably, the vacuum pump 3 is three-level vacuum pump group.
Preferably, the heating element 9 is molybdenum ribbon.
Preferably, the material of the crystal rack 10 is 95 porcelain of high temperature resistant.
A kind of crystal vacuum annealing furnace apparatus of the utility model, is the device for crystal annealing, in use, crystal is put
It sets in crystal rack 10, after fire door 6 is closed, heating element 9 is started by control cabinet 4, the heating element 9 is molybdenum
Band can be heated to 1000 degree or so of high temperature, and vacuum pump 3 will come true sky in absorption in vacuum furnace body 2, for crystal annealing provide it is good
Good environment, for the cooling effect for improving the utility model, the utility model furnace tube 5 uses 8 shell of first shell 7 and second shell
Body structure is equipped with cooling water pipeline in the interlayer of the first shell 7 and second shell 8, if necessary to accelerate cooling, only needs
Recirculated cooling water is injected in cooling water pipeline, if only needing natural cooling, then without in cooling water pipeline
Recirculated cooling water is injected, due to being provided with thermal detector and vacuum degree measuring instrument in the furnace tube 5, due to single-chip microcontroller and the survey
Warm device and vacuum degree measuring instrument communication connection, temperature and vacuum degree in furnace tube 5 can carry out real-time display over the display, operate
Personnel carry out implementing monitoring and adjustment to device by the data that display is shown, the crystal annealed by utility model device
Its surface brightness and mechanical property can be effectively improved.
The above is only the preferred embodiment to the utility model, is not that other shapes are done to the utility model
The limitation of formula, any person skilled in the art are changed or are modified as possibly also with the technology contents of the disclosure above
With the equivalent embodiment of variation.But it is all without departing from the utility model content, according to the technical essence of the utility model
Any simple modification, equivalent change and modification made to the above embodiment still fall within the protection scope of the utility model.
Claims (4)
1. a kind of crystal vacuum annealing furnace apparatus, including pedestal and vacuum furnace body, vacuum pump and control on the base are set
Cabinet, it is characterised in that: the vacuum furnace body includes furnace tube and fire door, and the furnace tube is by first shell, second shell, heating unit
Part, thermal detector and vacuum degree measuring instrument are constituted, and cooling water pipeline is equipped in the interlayer of the first shell and second shell,
The center of the furnace tube and the inside of heating element are equipped with crystal rack, and the thermal detector and vacuum degree measuring instrument are located at described
In crystal rack；The vacuum pump is connected to the side of the vacuum furnace body, is equipped with single-chip microcontroller and display in the control cabinet
Device, the single-chip microcontroller and the thermal detector and vacuum degree measuring instrument communication connection, the display is for showing thermal detector and true
The temperature and vacuum degree parameter of reciprocal of duty cycle tester monitoring.
2. a kind of crystal vacuum annealing furnace apparatus according to claim 1, it is characterised in that: the vacuum pump is three-level
Vacuum pump group.
3. a kind of crystal vacuum annealing furnace apparatus according to claim 1, it is characterised in that: the heating element is molybdenum
Band.
4. a kind of crystal vacuum annealing furnace apparatus according to claim 1, it is characterised in that: the crystal rack
Material is 95 porcelain of high temperature resistant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820679266.7U CN208219015U (en) | 2018-05-08 | 2018-05-08 | A kind of crystal vacuum annealing furnace apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820679266.7U CN208219015U (en) | 2018-05-08 | 2018-05-08 | A kind of crystal vacuum annealing furnace apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208219015U true CN208219015U (en) | 2018-12-11 |
Family
ID=64510994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820679266.7U Active CN208219015U (en) | 2018-05-08 | 2018-05-08 | A kind of crystal vacuum annealing furnace apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208219015U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115369489A (en) * | 2022-07-29 | 2022-11-22 | 江西兆驰半导体有限公司 | Substrate slice anaerobic annealing furnace, annealing method and substrate slice |
-
2018
- 2018-05-08 CN CN201820679266.7U patent/CN208219015U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115369489A (en) * | 2022-07-29 | 2022-11-22 | 江西兆驰半导体有限公司 | Substrate slice anaerobic annealing furnace, annealing method and substrate slice |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A crystal vacuum annealing furnace device Granted publication date: 20181211 Pledgee: China Co. truction Bank Corp Hefei economic and Technological Development Zone Branch Pledgor: ANHUI KERUI SICHUANG CRYSTAL MATERIAL Co.,Ltd. Registration number: Y2024980008319 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |