CN208190819U - A kind of semiconductor manufacturing plant environmental monitoring system - Google Patents
A kind of semiconductor manufacturing plant environmental monitoring system Download PDFInfo
- Publication number
- CN208190819U CN208190819U CN201820706056.2U CN201820706056U CN208190819U CN 208190819 U CN208190819 U CN 208190819U CN 201820706056 U CN201820706056 U CN 201820706056U CN 208190819 U CN208190819 U CN 208190819U
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- Prior art keywords
- camera
- semiconductor manufacturing
- environmental monitoring
- manufacturing plant
- monitoring system
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Abstract
The utility model discloses a kind of semiconductor manufacturing plant environmental monitoring systems, its structure includes fixing seat, truss, screw, lamp group, camera, camera body shell, back seat shell, back seat bar, pasting board, connecting plate, expansion box, top cover, the lower end of fixing seat is connected with expansion box lower end, a kind of semiconductor manufacturing plant environmental monitoring system of the utility model, carry out using when, information will be transmitted in the memory card of circuit board upper end by conducting wire by imaging by camera, when needs are when controlling camera shooting, again by chance encounter shooting less than the case where, external remote control can be passed through, so that circuit board to control motor rotation, driving gear rotation is driven, drive the rotation of band moving gear by a series of cooperations so that latch item is gone up and down again, in camera shooting, shooting angle is being needed to limit In the case where can adjust camera by adjusting the height of picture pick-up device, shooting achieved the purpose that with this.
Description
Technical field
The utility model is a kind of semiconductor manufacturing plant environmental monitoring system, belongs to environment monitoring techniques field.
Background technique
In semiconductor integrated circuit manufacturing process, requirement of each process flow to the environmental condition of workshop is very
, the number of particle, the ratio etc. of polluted gas are polluted in air.
Prior art discloses application No. is a kind of semiconductor manufacturing plant environmental monitoring systems of CN201420147566.2
System, dedicated air sampling system, sampling environment record system and database, the environmental parameter being able to record when sampling and go through
History analysis is as a result, still the prior art is when camera is shot, sometimes in the limited angle system for needing to shoot, it is difficult to take
The picture needed.
Utility model content
In view of the deficienciess of the prior art, the utility model aim is to provide a kind of semiconductor manufacturing plant environmental monitoring
System, with the prior art of solution when camera is shot, sometimes in the limited angle system for needing to shoot, it is difficult to take needs
Picture the problem of.
To achieve the goals above, the utility model is achieved through the following technical solutions: a kind of semiconductors manufacture
Workshop condition monitoring system, structure include fixing seat, truss, screw, lamp group, camera, camera body shell, outside back seat
The lower end of shell, back seat bar, pasting board, connecting plate, expansion box, top cover, the fixing seat is connected with expansion box lower end, the screw
Lower end be threadedly coupled with top cover, the lower end of the truss is connected with the upper end of pasting board, and the lamp group is located at around camera,
The rear end of the camera body shell and the front end of back seat shell fit, and the back seat bar is integrated knot with back seat shell
Structure, the upper end of the pasting board are connected with the lower end of truss, and the expansion box is by the box enclosure, horizontal bevel gear, connecting rod, band of stretching
Moving gear, latch item, driving gear, bearing, vertical bevel gear, battery, circuit board, Wiring port, control motor form, it is described
Expansion box interior of shell is equipped with horizontal bevel gear and bearing, and the band moving gear is meshed with driving gear, and the band moving gear is logical
It crosses connecting rod to be connected with horizontal bevel gear, the vertical bevel gear is meshed with horizontal bevel gear, and the lower end of the circuit board is equipped with control
Motor processed, the upper end of the battery and the upper end of the inside of flexible box enclosure fit.
Further, the connecting plate is integrated with expansion box.
Further, the upper end of the truss and the upper end of fixing seat are parallel.
Further, the latch item is through inside truss.
Further, the fixing seat is rectangular parallelepiped structure, and length is 12cm, width 10cm.
Further, the connecting plate uses aluminum alloy material, and light-weight hardness is high.
Further, the back seat bar uses stainless steel material, and hardness height is unlikely to deform.
Beneficial effect
A kind of semiconductor manufacturing plant environmental monitoring system of the utility model is carrying out in use, will be led to by camera
Cross camera shooting information is transmitted in the memory card of circuit board upper end by conducting wire, when need control camera shoot when, again
By chance encounter shooting less than the case where, can by external remote control so that circuit board make control motor rotation, drive actively
Gear rotation, and driven the rotation of band moving gear by a series of cooperations so that latch item is gone up and down, when camera is shot,
Camera can be adjusted by adjusting the height of picture pick-up device in the case where needing shooting angle to limit, shooting is reached with this
Purpose.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other spies of the utility model
Sign, objects and advantages will become more apparent upon:
Fig. 1 is a kind of structural schematic diagram of semiconductor manufacturing plant environmental monitoring system of the utility model；
Fig. 2 is the structural schematic diagram of the utility model expansion box front view；
Fig. 3 is the structural schematic diagram of the utility model expansion box side view.
In figure: fixing seat -1, truss -2, screw -3, lamp group -4, camera -5, camera body shell -6, outside back seat
Shell -7, back seat bar -8, pasting board -9, connecting plate -10, expansion box -11, top cover -12, flexible box enclosure -1101, horizontal bevel gear -
1102, connecting rod -1103, band moving gear -1104, latch item -1105, driving gear -1106, bearing -1107, vertical bevel gear -
1108, battery -1109, circuit board -1110, Wiring port -1111, control motor -1112.
Specific embodiment
To be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, below
In conjunction with specific embodiment, the utility model is further described.
Fig. 1, Fig. 2 and Fig. 3 are please referred to, the utility model provides a kind of semiconductor manufacturing plant environmental monitoring system technical side
Case: its structure includes fixing seat 1, truss 2, screw 3, lamp group 4, camera 5, camera body shell 6, back seat shell 7, back seat
The lower end of bar 8, pasting board 9, connecting plate 10, expansion box 11, top cover 12, the fixing seat 1 is connected with 11 lower end of expansion box, described
The lower end of screw 3 is threadedly coupled with top cover 12, and the lower end of the truss 2 is connected with the upper end of pasting board 9, and the lamp group 4 is located at
Around camera 5, the rear end of the camera body shell 6 and the front end of back seat shell 7 fit, and the back seat bar 8 is with after
Seat shell 7 is integrated, and the upper end of the pasting board 9 is connected with the lower end of truss 2, the expansion box 11 by expansion box outside
Shell 1101, horizontal bevel gear 1102, connecting rod 1103, band moving gear 1104, latch item 1105, driving gear 1106, bearing 1107,
Vertical bevel gear 1108, battery 1109, circuit board 1110, Wiring port 1111, control motor 1112 form, outside the expansion box
Horizontal bevel gear 1102 and bearing 1107 are equipped with inside shell 1101, the band moving gear 1104 is meshed with driving gear 1106, institute
It states band moving gear 1104 to be connected by connecting rod 1103 with horizontal bevel gear 1102, the vertical bevel gear 1108 and horizontal bevel gear
1102 are meshed, and the lower end of the circuit board 1110 is equipped with control motor 1112, the upper end of the battery 1109 and expansion box
The upper end of the inside of shell 1101 fits, and the connecting plate 10 is integrated with expansion box 11, the upper end of the truss 2
Parallel with the upper end of fixing seat 1, for the latch item 1105 through inside truss 2, the fixing seat 1 is rectangular parallelepiped structure,
And length is 12cm, and width 10cm, the connecting plate 10 is using aluminum alloy material, and light-weight hardness is high, the back seat bar 8
Using stainless steel material, hardness height is unlikely to deform.
Structure made of truss 2 described in this patent is hinged at both ends each other as rod piece, truss are made of straight-bar
General plane or space structure with triangular element, truss member is primarily subjected to axial tension or pressure, so as to fill
Divide the intensity using material, save material than solid web girder when span is larger, mitigates self weight and increase rigidity, the connecting plate
10 be two that phases were separated or multiple structural members, is connected as the structural member of an entirety, its layout architecture very more to be had
Rectangular slab, polygon plate, sketch plate etc., type generally have angle brace connecting plate, tie-rod connecting plate, the horizontally-supported connecting plate of water, column
Between support connecting plate it is several.
It is carrying out in use, 1110 upper end of circuit board will be transmitted to by conducting wire for information by imaging by camera 5
In memory card, when needing when controlling camera shooting, and by chance encounter shooting less than the case where, can be by external distant
Control has driven driving gear 1106 to rotate so that circuit board 1110 to control the rotation of motor 1112, and has driven band moving gear
1104 rotations are by a series of cooperations so that latch item 1105 is gone up and down.
The utility model solves the prior art when camera is shot, the limited angle system shot sometimes in needs, it is difficult to
The problem of taking the picture of needs, the utility model are combined with each other by above-mentioned component, a kind of semiconductor of the utility model
Manufacturing shop environmental monitoring system is carrying out in use, electricity will be transmitted to by conducting wire for information by imaging by camera 5
In 1110 upper end memory card of road plate, when need control camera shooting when, and by chance encounter shooting less than the case where, can
To have driven driving gear 1106 to rotate, and band so that circuit board 1110 to control the rotation of motor 1112 by external remote control
The rotation of band moving gear 1104 has been moved by a series of cooperations so that latch item 1105 is gone up and down, in camera shooting, has been needed
Camera can be adjusted by adjusting the height of picture pick-up device in the case where wanting shooting angle to limit, the mesh of shooting is reached with this
's.
The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above, for
For those skilled in the art, it is clear that the present invention is not limited to the details of the above exemplary embodiments, and without departing substantially from this
In the case where the spirit or essential attributes of utility model, the utility model can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the utility model is by institute
Attached claim rather than above description limit, it is intended that will fall within the meaning and scope of the equivalent elements of the claims
All changes are embraced therein.It should not treat any reference in the claims as limiting related right
It is required that.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (5)
1. a kind of semiconductor manufacturing plant environmental monitoring system, it is characterised in that: its structure include fixing seat (1), truss (2),
Screw (3), camera (5), camera body shell (6), back seat shell (7), back seat bar (8), pasting board (9), connects lamp group (4)
The lower end of fishplate bar (10), expansion box (11), top cover (12), the fixing seat (1) is connected with expansion box (11) lower end, the spiral shell
The lower end of silk (3) is threadedly coupled with top cover (12), and the lower end of the truss (2) is connected with the upper end of pasting board (9), the lamp group
(4) it is located at around camera (5), the rear end of the camera body shell (6) and the front end of back seat shell (7) fit, institute
Back seat bar (8) to be stated to be integrated with back seat shell (7), the upper end of the pasting board (9) is connected with the lower end of truss (2),
The expansion box (11) by flexible box enclosure (1101), horizontal bevel gear (1102), connecting rod (1103), band moving gear (1104),
Latch item (1105), driving gear (1106), bearing (1107), vertical bevel gear (1108), battery (1109), circuit board
(1110), Wiring port (1111), control motor (1112) composition, the flexible box enclosure (1101) is internal to be equipped with horizontal bevel gear
(1102) it is meshed with bearing (1107), the band moving gear (1104) with driving gear (1106), the band moving gear
(1104) it is connected by connecting rod (1103) with horizontal bevel gear (1102), the vertical bevel gear (1108) and horizontal bevel gear
(1102) it is meshed, the lower end of the circuit board (1110) is equipped with control motor (1112), the upper end of the battery (1109)
It fits with the upper end of the inside of flexible box enclosure (1101).
2. a kind of semiconductor manufacturing plant environmental monitoring system according to claim 1, it is characterised in that: the connecting plate
(10) it is integrated with expansion box (11).
3. a kind of semiconductor manufacturing plant environmental monitoring system according to claim 1, it is characterised in that: the truss
(2) upper end is parallel with the upper end of fixing seat (1).
4. a kind of semiconductor manufacturing plant environmental monitoring system according to claim 1, it is characterised in that: the latch item
(1105) internal through truss (2).
5. a kind of semiconductor manufacturing plant environmental monitoring system according to claim 1, it is characterised in that: the fixing seat
It (1) is rectangular parallelepiped structure, and length is 12cm, width 10cm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820706056.2U CN208190819U (en) | 2018-05-11 | 2018-05-11 | A kind of semiconductor manufacturing plant environmental monitoring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820706056.2U CN208190819U (en) | 2018-05-11 | 2018-05-11 | A kind of semiconductor manufacturing plant environmental monitoring system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208190819U true CN208190819U (en) | 2018-12-04 |
Family
ID=64429917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820706056.2U Expired - Fee Related CN208190819U (en) | 2018-05-11 | 2018-05-11 | A kind of semiconductor manufacturing plant environmental monitoring system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208190819U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111107324A (en) * | 2019-12-31 | 2020-05-05 | 上海陛通半导体能源科技股份有限公司 | Monitoring device and monitoring method of wafer transmission system |
-
2018
- 2018-05-11 CN CN201820706056.2U patent/CN208190819U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111107324A (en) * | 2019-12-31 | 2020-05-05 | 上海陛通半导体能源科技股份有限公司 | Monitoring device and monitoring method of wafer transmission system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181204 |