CN208188352U - Charged ion beam current strength measurement system - Google Patents
Charged ion beam current strength measurement system Download PDFInfo
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- CN208188352U CN208188352U CN201820714394.0U CN201820714394U CN208188352U CN 208188352 U CN208188352 U CN 208188352U CN 201820714394 U CN201820714394 U CN 201820714394U CN 208188352 U CN208188352 U CN 208188352U
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- intercept type
- vacuum pipe
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Abstract
Present disclose provides a kind of charged ion beam current strength measurement system, which includes beam transmission vacuum pipe, electromagnetic scanning equipment, ion beam spot detector, half intercept type beam detector, intercept type beam detector and exposed material；The outside of beam transmission vacuum pipe front end is arranged in electromagnetic scanning equipment；Ion beam spot detector, half intercept type beam detector, intercept type beam detector and exposed material are sequentially arranged in beam transmission vacuum pipe, and wherein the rear end of beam transmission vacuum pipe is arranged in exposed material.It is poor that the disclosure breaches measurement accuracy present in traditional aluminium foil sandwich survey beam technology, the problems such as easy ablation damage, the deficiencies of inconvenient benefit, conducting sample limit in sample and Faraday cup unitary design is also overcomed simultaneously, using a kind of survey beam technology of half intercept type, it is more suitable for high current, long-time, uses in different exposed material experiments.
Description
Technical field
This disclosure relates to charged ion irradiation field of material technology more particularly to a kind of charged ion beam current ionization meter system
System.
Background technique
Ion accelerator is the nuclear science device that high-speed ion beam is generated using manual method, is widely used at present
Nuclear physics, biology, life science, national defence, space flight and aviation and Material Field.Last century mid-term, ion accelerator are answered for the first time
Some new phenomenons, new effect have been continued to bring out with going deep into for research for material science, and have expedited the emergence of some new applications,
Such as synthesis of material modification, new function material and nuclear material irradiation evaluation and screening further excite the research heat of people
Feelings.The ion beam irradiation material generated using ion accelerator, can make the microstructure of material change, and then influence material
Physics, chemistry or even the mechanical performance of material, therefore ion accelerator is a kind of strong tool of investigation of materials.In ion beam
In the research of exposed material, ion beam current intensity (number of ions/cm2s) and ion irradiation dosage (number of ions/cm2) are two
Very crucial parameter, how in an experiment the two parameters of precise measurement just become an inevitable major issue.
Traditionally, ion beam current measurement, aluminium foil sandwich are generally carried out using aluminium foil sandwich joint Faraday cup at present
It is that three-layer parallel arranges, the aluminium film of the about several um of thickness, forward and backward aluminium foil biasing, intermediate aluminium foil connect ammeter, pass through connection
Faraday cup is closed, to realize the on-line measurement of line.But there are following technical disadvantages for this measuring system: one ion beam
Certain energy can be damaged by three layers of aluminum foil, therefore may be only available for the measurement of energetic ion line, can not carry out tens MeV
Ion beam current measurement.Secondly aluminium foil can not resist the bombardment of high power line for a long time, ablation easily occurs and pierces, therefore is measuring
High-power line has certain limitation.Thirdly ion beam irradiation can be such that aluminium foil electric property changes, and then influence beam current measurement
Stability." the real-time prison of small area ion beam irradiation small sample implantation dosage is mentioned in patent CN201510236343.2
Survey device and method ", using single Faraday cup carry out beam current measurement, the bottom of Faraday cup is detachable, be both sample stage and
Be line receiver, this inventive technique improves ion beam current measurement accuracy, but there is also obvious technical deficiencies: 1. by sample
Platform and Faraday cup are integrated, although simplifying system, bring many inconvenience for the installation of sample；2. Faraday cup bottom
As line receiver, it is desirable that have good conductive property, therefore the electric conductivity for treating exposed material requires, therefore the hair
It is bright that there is also certain limitations.
Utility model content
(1) technical problems to be solved
Present disclose provides a kind of charged ion beam current strength measurement systems, at least partly to solve skill set forth above
Art problem.
(2) technical solution
According to one aspect of the disclosure, a kind of charged ion beam current strength measurement system is provided, comprising: ion beam passes
Defeated vacuum pipe；Electromagnetic scanning equipment, the outside before the beam transmission vacuum pipe is set；Ion beam spot detector,
It is arranged inside the beam transmission vacuum pipe, it is adjacent with the electromagnetic scanning equipment；Half intercept type beam detector, if
It sets inside the beam transmission vacuum pipe, it is adjacent with the ion beam spot detector；The half intercept type Beams detection
Device is connect with external ammeter and voltmeter respectively；Intercept type beam detector is arranged in the beam transmission vacuum tube
It is adjacent with the half intercept type beam detector inside road；The intercept type beam detector respectively with external ammeter and
DC power supply connection；The inside of beam transmission vacuum pipe rear end is arranged in exposed material.
In some embodiments of the present disclosure, half intercept type beam detector includes: half intercept type line receiving barrel, described
Half intercept type line receiving barrel is equipped with bottom opening；The half intercept type line receiving barrel barrel is equipped with binding post；First screen
Ring is covered, is connect with the nozzle of the half intercept type line receiving barrel by insulating bar；First shading ring is equipped with binding post；
First electronics inhibits ring, is connect with first shading ring by insulating bar；First electronics inhibits ring to be equipped with binding post.
In some embodiments of the present disclosure, intercept type beam detector includes: intercept type line receiving barrel；The interception
Formula line receiving barrel barrel is equipped with binding post；Secondary shielding ring passes through insulation with the nozzle of the intercept type line receiving barrel
Bar connection；The secondary shielding ring is equipped with binding post；Second electronics inhibits ring, is connected with the secondary shielding ring by insulating bar
It connects；Second electronics inhibits ring to be equipped with binding post.
In some embodiments of the present disclosure, ion beam spot detector is equipped with X-Y graduation mark, the ion beam spot detection
Device and beam transfer direction are in 45 ° of angles；The ion beam spot detector can move in the vertical direction.
In some embodiments of the present disclosure, further includes: line observation window is arranged in the ion beam spot detector outside
Beam transmission vacuum pipe on.
In some embodiments of the present disclosure, ion beam spot detector, the half intercept type beam detector, the interception
Formula beam detector and the exposed material are centrally disposed on the central axis of beam transmission vacuum pipe.
In some embodiments of the present disclosure, electromagnetic scanning equipment includes two can be achieved line X-direction and Y-direction respectively
The quadrupole electromagnet of scanning.
(3) beneficial effect
It can be seen from the above technical proposal that the charged ion beam current strength measurement system of the disclosure at least have it is beneficial below
One of effect or in which a part:
(1) it is small to pass through the energy loss after half intercept type beam detector and intercept type beam detector respectively for ion beam,
It can be suitable for carrying out the measurement of low energy ion line.
(2) half intercept type beam detectors and intercept type beam detector can resist the bombardment of high power line for a long time,
It is not susceptible to damage, can be useful in the measurement of high-power line.
(3) the X-Y graduation mark that ion beam spot detector is equipped with, conducive to the size and shape of detection ion beam spot.
(4) charged ion beam current strength measurement system is treated radiative material electric conductivity and is not required, and can be suitable for various
The irradiation experiment of material.
Detailed description of the invention
Fig. 1 is the charged ion beam current strength measurement system structural schematic diagram of the embodiment of the present disclosure.
Fig. 2 is half intercept type beam detector structural schematic diagram in Fig. 1.
Fig. 3 is intercept type beam detector structural schematic diagram in Fig. 1.
[embodiment of the present disclosure main element symbol description in attached drawing]
1- electromagnetic scanning equipment；
2- beam transmission vacuum pipe；
3- ion beam spot detector；
4- line observation window；
Half intercept type beam detector of 5-；
The first shading ring of 5-1-；
The first electronics of 5-2- inhibits ring；
Half intercept type line receiving barrel of 5-3-；
5-4- bottom opening；
5-5,5-6,5-7- binding post；
6- intercept type beam detector；
6-1- secondary shielding ring；
The second electronics of 6-2- inhibits ring；
6-3- intercept type line receiving barrel；
6-4,6-5,6-6- binding post；
7- exposed material；
V1, V2Voltmeter；
I1, I2Ammeter.
Specific embodiment
Present disclose provides a kind of charged ion beam current strength measurement system, which includes beam transmission vacuum
Pipeline, electromagnetic scanning equipment, ion beam spot detector, half intercept type beam detector, intercept type beam detector and irradiation material
Material；The outside of beam transmission vacuum pipe front end is arranged in electromagnetic scanning equipment；Ion beam spot detector, half intercept
Formula beam detector, intercept type beam detector and exposed material are sequentially arranged in beam transmission vacuum pipe, wherein spoke
The rear end of beam transmission vacuum pipe is set according to material.The disclosure, which breaches traditional aluminium foil sandwich and surveys in beam technology, to be existed
Measurement accuracy it is poor, easy ablation damage the problems such as, while also overcome sample with it is inconvenient in Faraday cup unitary design
The deficiencies of benefit, conducting sample limitation, is more suitable for high current, long-time, different spokes using a kind of survey beam technology of half intercept type
According to being used in material experiment.
For the purposes, technical schemes and advantages of the disclosure are more clearly understood, below in conjunction with specific embodiment, and reference
The disclosure is further described in attached drawing.
Disclosure some embodiments will be done referring to appended attached drawing in rear and more comprehensively describe to property, some of but not complete
The embodiment in portion will be shown.In fact, the various embodiments of the disclosure can be realized in many different forms, and should not be construed
To be limited to this several illustrated embodiment；Relatively, these embodiments are provided so that the disclosure meets applicable legal requirement.
In an exemplary embodiment of the disclosure, a kind of charged ion beam current strength measurement system is provided.Fig. 1 is
The charged ion beam current strength measurement system structural schematic diagram of the embodiment of the present disclosure.As shown in Figure 1, the charged ion beam current of the disclosure is strong
Spending measuring system includes: beam transmission vacuum pipe 2, electromagnetic scanning equipment 1, ion beam spot detector 3, half intercept type line
Detector 5, intercept type beam detector 6 and exposed material；Electromagnetic scanning equipment 1 is arranged before beam transmission vacuum pipe 2
The outside at end；Specifically include two quadrupole electromagnets that line X-direction and Y-direction scanning can be achieved respectively.Ion beam spot detector 3
It is arranged inside beam transmission vacuum pipe 2, it is adjacent with electromagnetic scanning equipment 1；Ion beam spot detector 3 is carved equipped with X-Y
Line is spent, in favor of detecting the size and shape of ion beam spot；Ion beam spot detector 3 in the vertical direction can be in vertical direction
It is mobile, convenient for adjusting the angle of ion beam spot detector 3 and beam transfer direction；Half intercept type beam detector 5 setting from
Beamlet transmits inside vacuum pipe 2, adjacent with ion beam spot detector 3；Half intercept type beam detector 5 respectively with ammeter I1
With voltmeter V1Connection；Intercept type beam detector 6 is arranged inside beam transmission vacuum pipe 2, with half intercept type line
Detector 5 is adjacent；Intercept type beam detector 6 is connect with ammeter I2 and voltmeter V2 respectively；Exposed material is arranged in ion
The inside of beam transmission 2 rear end of vacuum pipe.Here ion beam spot detector 3, half intercept type beam detector 5, intercept type line
Detector 6 and exposed material 7 are centrally disposed on the central axis of beam transmission vacuum pipe 2.The charged ion beam current of the disclosure
Strength measurement system further include: the beam transmission vacuum pipe 2 in 3 outside of ion beam spot detector is arranged in line observation window 4
On.The angle in ion beam spot detector 3 and beam transfer direction is 45 °, 3 side of ion beam spot detector to line observation window 4, with
Convenient for observation.
Fig. 2 is half intercept type beam detector structural schematic diagram in Fig. 1.As shown in Fig. 2, half intercept type beam detector packet
Include: half intercept type line receiving barrel 5-3, the first shading ring 5-1 and the first electronics inhibit ring 5-2；Half intercept type line receiving barrel
5-3 is equipped with bottom opening 5-4, and half intercept type line receiving barrel 5-3 barrel is equipped with binding post 5-7；First shading ring 5-1 and half
The nozzle of intercept type line receiving barrel 5-3 is connected by insulating bar；First shading ring 5-1 is equipped with binding post 5-5；First electronics
Ring 5-2 is inhibited to connect with the first shading ring 5-1 by insulating bar；First electronics inhibits ring 5-2 to be equipped with binding post 5-6.It is above-mentioned
Insulating bar can be with Ceramics bar.
Fig. 3 is intercept type beam detector structural schematic diagram in Fig. 1.As shown in figure 3, intercept type beam detector includes:
Intercept type line receiving barrel 6-3, secondary shielding ring 6-1 and the second electronics inhibit ring 6-2；Intercept type line receiving barrel 6-3, bottom
Portion is that enclosed construction is not provided with bottom opening；Intercept type line receiving barrel 6-3 barrel is equipped with binding post 6-6；Secondary shielding ring
6-1 is connect with the nozzle of intercept type line receiving barrel 6-3 by insulating bar；Secondary shielding ring 6-1 is equipped with binding post 6-4；The
Two electronics inhibit ring 6-2 to connect with secondary shielding ring 6-1 by insulating bar；Second electronics inhibits ring 6-2 to be equipped with binding post 6-
5.Above-mentioned insulating bar can be with Ceramics bar.
In an exemplary embodiment of the disclosure, a kind of charged ion beam current strength measurement method is additionally provided, is wrapped
Include: step A: material to be irradiated is fixed, and can be fixed on specimen holder, debugs charged ion beam current strength measurement system to accord with
Requirement of experiment is closed, and introduces irradiation line；Wherein step A includes: step A1: respectively by ion beam spot detector, half intercept type
Beam detector and intercept type beam detector drop to the center of beam transmission vacuum pipe；Step A2: it opens respectively
The ammeter and DC power supply being connected with half intercept type beam detector and intercept type beam detector, and ensure to lead therebetween
It is electric good；Step A3: introducing irradiation line, adjusts ion beam spot size, shape and by the electromagnetic scanning equipment in the direction X-Y
Evenness is allowed to meet requirement of experiment, introduces irradiation line.Step B: when line is uniform, stable, ion beam spot detector is risen
Make it away from beam transmission vacuum pipe center；Half intercept type ion beam current detector and the detection of intercept type ion beam current
Device is that half intercept type ion beam current detector and intercept type ion beam current detector load by being connected with external DC power supply
A certain size back bias voltage V1And V2, inhibit secondary caused by ion beam bombardment.Step C: it is surveyed respectively using ammeter
Amount passes through the current value I of half intercept type beam detector and intercept type beam detector1And I2, and according to
Calculate k value；By the back bias voltage for adjusting half intercept type ion beam current detector and intercept type ion beam current detector
V1And V2, k value is made to keep stablizing.Step D: intercept type beam detector is risen, ion beam irradiation sample is made；In irradiation process
The current value and real-time monitoring k value of half intercept type beam detector of on-line measurement, obtain ion beam current intensity size and irradiation is arrived
Absolute beam flux on sample.
So far, attached drawing is had been combined the embodiment of the present disclosure is described in detail.It should be noted that in attached drawing or saying
In bright book text, the implementation for not being painted or describing is form known to a person of ordinary skill in the art in technical field, and
It is not described in detail.In addition, the above-mentioned definition to each element and method be not limited in mentioning in embodiment it is various specific
Structure, shape or mode, those of ordinary skill in the art simply can be changed or be replaced to it.
According to above description, those skilled in the art should have clearly the charged ion beam current strength measurement system of the disclosure
The understanding of Chu.
In conclusion the disclosure provides a kind of charged ion beam current strength measurement system, traditional aluminium foil sandwich is breached
The problems such as measurement accuracy present in beam technology is poor, and easy ablation damages is surveyed, it is more suitable using a kind of survey beam technology of half intercept type
It closes and is used in high current, long-time, different exposed material experiments.
It should also be noted that, the direction term mentioned in embodiment, for example, "upper", "lower", "front", "rear", " left side ",
" right side " etc. is only the direction with reference to attached drawing, not is used to limit the protection scope of the disclosure.Through attached drawing, identical element by
Same or similar appended drawing reference indicates.When may cause understanding of this disclosure and cause to obscure, conventional structure will be omitted
Or construction.
And the shape and size of each component do not reflect actual size and ratio in figure, and only illustrate the embodiment of the present disclosure
Content.In addition, in the claims, any reference symbol between parentheses should not be configured to the limit to claim
System.
It unless there are known entitled phase otherwise anticipates, the numerical parameter in this specification and appended claims is approximation, energy
Enough bases pass through the resulting required characteristic changing of content of this disclosure.Specifically, all be used in specification and claim
The middle content for indicating composition, the number of reaction condition etc., it is thus understood that repaired by the term of " about " in all situations
Decorations.Under normal circumstances, the meaning expressed refers to include by specific quantity ± 10% variation in some embodiments, some
± 5% variation in embodiment, ± 1% variation in some embodiments, in some embodiments ± 0.5% variation.
Furthermore word "comprising" does not exclude the presence of element or step not listed in the claims.It is located in front of the element
Word "a" or "an" does not exclude the presence of multiple such elements.
The word of ordinal number such as " first ", " second ", " third " etc. used in specification and claim, with modification
Corresponding element, itself is not meant to that the element has any ordinal number, does not also represent the suitable of a certain element and another element
Sequence in sequence or manufacturing method, the use of those ordinal numbers are only used to enable an element and another tool with certain name
Clear differentiation can be made by having the element of identical name.
In addition, unless specifically described or the step of must sequentially occur, there is no restriction in the above institute for the sequence of above-mentioned steps
Column, and can change or rearrange according to required design.And above-described embodiment can be based on the considerations of design and reliability, that
This mix and match is used using or with other embodiments mix and match, i.e., the technical characteristic in different embodiments can be freely combined
Form more embodiments.
Similarly, it should be understood that in order to simplify the disclosure and help to understand one or more of each open aspect,
Above in the description of the exemplary embodiment of the disclosure, each feature of the disclosure is grouped together into single implementation sometimes
In example, figure or descriptions thereof.However, the disclosed method should not be interpreted as reflecting the following intention: i.e. required to protect
The disclosure of shield requires features more more than feature expressly recited in each claim.More precisely, as following
Claims reflect as, open aspect is all features less than single embodiment disclosed above.Therefore,
Thus the claims for following specific embodiment are expressly incorporated in the specific embodiment, wherein each claim itself
All as the separate embodiments of the disclosure.
Particular embodiments described above has carried out further in detail the purpose of the disclosure, technical scheme and beneficial effects
Describe in detail it is bright, it is all it should be understood that be not limited to the disclosure the foregoing is merely the specific embodiment of the disclosure
Within the spirit and principle of the disclosure, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the disclosure
Within the scope of shield.
Claims (7)
1. a kind of charged ion beam current strength measurement system, comprising:
Beam transmission vacuum pipe；
Electromagnetic scanning equipment, the outside before the beam transmission vacuum pipe is set；
Ion beam spot detector is arranged inside the beam transmission vacuum pipe, adjacent with the electromagnetic scanning equipment；
Half intercept type beam detector is arranged inside the beam transmission vacuum pipe, with the ion beam spot detector
It is adjacent；The half intercept type beam detector is connect with external ammeter and voltmeter respectively；
Intercept type beam detector is arranged inside the beam transmission vacuum pipe, with the half intercept type Beams detection
Device is adjacent；The intercept type beam detector is connect with external ammeter and DC power supply respectively；
The inside of beam transmission vacuum pipe rear end is arranged in exposed material.
2. charged ion beam current strength measurement system according to claim 1, the half intercept type beam detector include:
Half intercept type line receiving barrel, the half intercept type line receiving barrel are equipped with bottom opening；The half intercept type line connects
It receives cylinder barrel and is equipped with binding post；
First shading ring is connect with the nozzle of the half intercept type line receiving barrel by insulating bar；On first shading ring
Equipped with binding post；
First electronics inhibits ring, is connect with first shading ring by insulating bar；The first electronics inhibition ring, which is equipped with, to be connect
Terminal.
3. charged ion beam current strength measurement system according to claim 1, the intercept type beam detector include:
Intercept type line receiving barrel；The intercept type line receiving barrel barrel is equipped with binding post；
Secondary shielding ring is connect with the nozzle of the intercept type line receiving barrel by insulating bar；It is set on the secondary shielding ring
There is binding post；
Second electronics inhibits ring, is connect with the secondary shielding ring by insulating bar；The second electronics inhibition ring, which is equipped with, to be connect
Terminal.
4. charged ion beam current strength measurement system according to claim 1, the ion beam spot detector is equipped with X-Y
Graduation mark, the ion beam spot detector and beam transfer direction are in 45 ° of angles；The ion beam spot detector is in vertical direction
On can move.
5. charged ion beam current strength measurement system according to any one of claims 1 to 4, further includes: line observation
Window is arranged on the beam transmission vacuum pipe of the ion beam spot detector outside.
6. charged ion beam current strength measurement system according to any one of claims 1 to 4, the ion beam spot detection
Device, the half intercept type beam detector, the intercept type beam detector and the exposed material are centrally disposed in ion beam
On the central axis for transmitting vacuum pipe.
7. charged ion beam current strength measurement system according to any one of claims 1 to 4, the electromagnetic scanning equipment
The quadrupole electromagnet of line X-direction and Y-direction scanning can be achieved respectively including two.
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| CN201820714394.0U CN208188352U (en) | 2018-05-14 | 2018-05-14 | Charged ion beam current strength measurement system |
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| CN201820714394.0U CN208188352U (en) | 2018-05-14 | 2018-05-14 | Charged ion beam current strength measurement system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077561A (en) * | 2019-12-18 | 2020-04-28 | 中国科学院近代物理研究所 | Residual gas charged particle beam monitoring device and method thereof |
-
2018
- 2018-05-14 CN CN201820714394.0U patent/CN208188352U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111077561A (en) * | 2019-12-18 | 2020-04-28 | 中国科学院近代物理研究所 | Residual gas charged particle beam monitoring device and method thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Yao Cunfeng Inventor after: Wang Zhiguang Inventor after: Shen Tielong Inventor after: Wei Kongfang Inventor after: Sun Jianrong Inventor after: Chang Hailong Inventor after: Li Bingsheng Inventor after: Zhang Hongpeng Inventor before: Yao Cunfeng |