CN208172348U - A kind of high-precision focusing device in direct-write photoetching encapsulation type - Google Patents
A kind of high-precision focusing device in direct-write photoetching encapsulation type Download PDFInfo
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- CN208172348U CN208172348U CN201820371877.5U CN201820371877U CN208172348U CN 208172348 U CN208172348 U CN 208172348U CN 201820371877 U CN201820371877 U CN 201820371877U CN 208172348 U CN208172348 U CN 208172348U
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Abstract
The utility model relates to a kind of high-precision focusing devices in direct-write photoetching encapsulation type, including pedestal, prism apparatus and transmission mechanism, the prism apparatus includes the upper prism and lower prism being mutually slidably matched, there is gap between the upper prism and lower prism, the pedestal is equipped with the first mounting groove to match with the lower prism, the transmission device includes lead screw and motor, the upper prism is connect by connecting bracket with the lead screw transmission, the both ends of the lead screw pass through the first support respectively, second support is fixedly connected with pedestal, the end of lead screw is fixedly connected by shaft coupling with the shaft of motor, the motor is fixedly connected by mounting bracket with pedestal, the end of the pedestal is equipped with displacement sensor.The utility model feeds back focal plane distance by laser displacement sensor real-time measurement, cooperates the movement of the prism wedge of the small angle of wedge, achievees the purpose that accurate focusing, solves this deep smaller technological deficiency of direct-write photoetching sealing machine formed coke.
Description
Technical field
The utility model relates to technical field of lithography, and in particular to a kind of high-precision in direct-write photoetching encapsulation type
Focus control.
Background technique
Encapsulation type is one kind of direct-write photoetching equipment, can be applied to IC package support plate.Feature is high parsing, high contraposition essence
Degree, minimum exposure line width can reach 8um.The problem of high parsing of exposure cameras is brought is the reduction of depth of focus, and makes a plate and go in PCB
Industry, depth of focus are one of the important indicators for assessing exposure sources function admirable.
Prism wedge is common focusing structure in optics, and principle is made by the relative motion of two pieces of prism wedges
Its center is equivalent to the parallel flat of different-thickness away from corresponding change, to make the position of focal plane corresponding change of exposure cameras.?
It encapsulates in the exposure cameras optical design of type and prism wedge is added, it is ensured that image quality of the prism wedge in focussing process.
The focus control of direct-write photoetching equipment mostly uses two-way focusing structure at present, and prism wedge block is equal up and down for this structure
Removable, this device focusing stroke is larger, but precision is low, and stability is poor.And direct-write photoetching encapsulates type itself to focusing
Range demands are not high, but there is extremely harsh requirement to precision and stability, therefore need a kind of tune that precision high stability is high
Coke installation.
Utility model content
The purpose of this utility model is to provide a kind of high-precision focusing devices in direct-write photoetching encapsulation type, lead to
Laser displacement sensor real-time measurement feedback focal plane distance is crossed, cooperates the movement of the prism wedge of the small angle of wedge, improves direct-write photoetching
Encapsulate the precision of type focusing.
To achieve the above object, the utility model uses following technical scheme：
A kind of high-precision focusing device in direct-write photoetching encapsulation type, including pedestal, prism apparatus and driver
Structure, the prism apparatus includes the upper prism and lower prism being mutually slidably matched, between having between the upper prism and lower prism
Gap, the pedestal are equipped with the first mounting groove for matching with the lower prism, the transmission device include lead screw and for
The lead screw provides the motor of power, and the upper prism is connect by connecting bracket with the lead screw transmission, and the two of the lead screw
End is fixedly connected by the first support, the second support with pedestal respectively, and the end of lead screw is solid by the shaft of shaft coupling and motor
Fixed connection, the motor are fixedly connected by mounting bracket with pedestal, and the end of the pedestal is equipped with displacement sensor.
As a further improvement of the above technical scheme：
The connecting bracket includes prism mounting rack and connection frame, and the lower end of the prism mounting rack is equipped with and the upper rib
The second mounting groove that mirror size matches, the upper prism are pressed in second mounting groove by gasket, the connection frame
One end is fixedly connected with the prism mounting rack, and the other end of the connection frame is equipped with the threaded hole matched with the lead screw,
Connection frame is driven to be moved forward and backward along lead screw direction by the rotation of lead screw.
The upper prism and prism mounting rack are Rising Wedge, and the lower prism and pedestal are Falling Wedge, described
The two sides of pedestal are respectively equipped with a roller guide rail, and the guide rail is fixedly connected with pedestal, the prism mounting rack and the guide rail
It is slidably connected.
Institute's displacement sensors are laser sensor, which is fixedly connected by mounting plate with pedestal.
The two sides of the pedestal are respectively equipped with the fixing piece that a cross section is L-type, and the guide rail is mounted on the fixing piece
On.
The lower prism is pressed in first mounting groove by the second gasket.
As shown from the above technical solution, the high-precision focusing described in the utility model in direct-write photoetching encapsulation type
Device feeds back focal plane distance by laser displacement sensor real-time measurement, cooperates the movement of the prism wedge of the small angle of wedge, reaches essence
The purpose of close focusing solves this deep smaller technological deficiency of direct-write photoetching sealing machine formed coke.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the decomposition diagram of the utility model；
Fig. 3 is the top view of the utility model；
Fig. 4 is the cross-sectional view of the R-R of Fig. 3；
Fig. 5 is the cross-sectional view of the F-F of Fig. 3；
Fig. 6 is the partial enlarged view of B in Fig. 4；
Fig. 7 is the focusing principle figure of the utility model.
Specific embodiment
The utility model is described further with reference to the accompanying drawing：
As shown in figures 1 to 6, the high-precision focusing device being used in direct-write photoetching encapsulation type of the present embodiment, including pedestal
1, prism apparatus and transmission mechanism, prism apparatus include the upper prism 21 that is mutually slidably matched and lower prism 22, upper prism 21 with
There is gap, as shown in fig. 6, the size in the gap is 0.4mm between lower prism 22；It is equipped with and lower 22 phase of prism on pedestal 1
Matched first mounting groove, the lower prism 22 are pressed in the first mounting groove by mounting plate 25 and the second gasket 24.Transmission dress
It sets including lead screw 31 and for providing the motor 32 of power to lead screw 31, upper prism 21 is driven by connecting bracket 4 and lead screw 31
Connection, the both ends of lead screw 31 pass through the first support 33 respectively, the second support 34 is fixedly connected with pedestal 1, and the end of lead screw 31 is logical
It crosses shaft coupling 35 to be fixedly connected with the shaft of motor 32, motor 32 is fixedly connected by mounting bracket 36 with pedestal 1, pedestal 1
End is equipped with displacement sensor 5.The displacement sensor 5 is laser sensor, which passes through mounting plate 7 and pedestal 1
It is fixedly connected.
The connecting bracket 4 includes prism mounting rack 41 and connection frame 42, and the lower end of prism mounting rack 41 is equipped with and upper prism
The second mounting groove that 21 sizes match, upper prism 21 are pressed in the second mounting groove by the first gasket 23 and pressing plate 26, should
42 one end of connection frame is fixedly connected with prism mounting rack 41, and the other end of connection frame 42 has a mounting base, is set in the mounting base
There is the threaded hole matched with lead screw 31, drives connection frame 42 to be moved forward and backward along 31 direction of lead screw by the rotation of lead screw 31.
The present embodiment, upper prism 21 and prism mounting rack 41 are Rising Wedge, and lower prism 22 and pedestal 1 are decline
Wedge shape is respectively equipped with a roller guide rail 6 in the two sides of pedestal 1, which is fixedly connected with pedestal 1, prism mounting rack 41 with lead
Rail 6 is slidably connected.It is respectively equipped with the fixing piece 9 that a cross section is L-type in the two sides of pedestal 1, guide rail 6 is mounted on fixing piece 9
Bending part, for fixing guide rail 6.
Working principle：The initialization position of upper prism 21 and lower prism 22 is center to center.When work, stepper motor
32 drive lead screw 31 by shaft coupling 35, so that prism mounting rack 5 and upper prism 21 be since the initial position of center, along inclined-plane
Direction Bidirectional slide up and down, keeps the air-gap interval of prism up and down constant when sliding.At this point, upper prism 21 and lower prism 22
General thickness meeting consecutive variations, are equivalent to the parallel flat of different-thickness, to realize the focusing range of positive and negative 0.8mm.
As shown in fig. 7, θ is the angle of wedge of monolithic prism wedge, h is the center thickness of monolithic prism wedge, and Δ h is wedge-shaped rib
The center thickness knots modification of mirror, n are the glass refractions of prism wedge.When prism wedge is moved along inclined-plane, image planes are along axial (this
In by paraxial processing) offset Δ f is about:
Δ f=Δ h (1-1/n)
By above-mentioned formula, when the minimum step of precision mechanical transmission mechanism is 12.5um, the focusing amount of prism wedge is reachable
To 1um.
Embodiment described above is only that preferred embodiments of the present invention are described, not practical to this
Novel range is defined, and under the premise of not departing from the spirit of the design of the utility model, those of ordinary skill in the art are to this
The various changes and improvements that the technical solution of utility model is made should all fall into the protection that the utility model claims book determines
In range.
Claims (6)
1. a kind of high-precision focusing device in direct-write photoetching encapsulation type, it is characterised in that：Including pedestal（1）, prism
Device and transmission mechanism, the prism apparatus include the upper prism being mutually slidably matched（21）With lower prism（22）, the upper rib
Mirror（21）With lower prism（22）Between have gap, the pedestal（1）It is equipped with and the lower prism（22）First to match
Mounting groove, the transmission mechanism include lead screw（31）And it is used for the lead screw（31）The motor of power is provided（32）, it is described on
Prism（21）Pass through connecting bracket（4）With the lead screw（31）Transmission connection, the lead screw（31）Both ends pass through first respectively
Support（33）, the second support（34）With pedestal（1）It is fixedly connected, lead screw（31）End pass through shaft coupling（35）With motor（32）
Shaft be fixedly connected, the motor（32）Pass through mounting bracket（36）With pedestal（1）It is fixedly connected, the pedestal（1）End
Portion is equipped with displacement sensor（5）.
2. the high-precision focusing device according to claim 1 in direct-write photoetching encapsulation type, it is characterised in that：Institute
State connecting bracket（4）Including prism mounting rack（41）And connection frame（42）, the prism mounting rack（41）Lower end be equipped with and institute
State prism（21）The second mounting groove that size matches, the upper prism（21）Pass through the first gasket（23）It is pressed on described
In two mounting grooves, the connection frame（42）One end and the prism mounting rack（41）It is fixedly connected, the connection frame（42）It is another
One end is equipped with and the lead screw（31）The threaded hole matched, passes through lead screw（31）Rotation drive connection frame（42）Along lead screw
（31）Direction is moved forward and backward.
3. the high-precision focusing device according to claim 1 in direct-write photoetching encapsulation type, it is characterised in that：Institute
State prism（21）And prism mounting rack（41）It is Rising Wedge, the lower prism（22）And pedestal（1）It is Falling Wedge,
The pedestal（1）Two sides be respectively equipped with a roller guide rail（6）, the guide rail（6）With pedestal（1）It is fixedly connected, the prism
Mounting rack（41）With the guide rail（6）It is slidably connected.
4. the high-precision focusing device according to claim 1 in direct-write photoetching encapsulation type, it is characterised in that：Institute
Displacement sensors（5）For laser sensor, the displacement sensor（5）Pass through mounting plate（7）With pedestal（1）It is fixedly connected.
5. the high-precision focusing device according to claim 3 in direct-write photoetching encapsulation type, it is characterised in that：Institute
State pedestal（1）Two sides be respectively equipped with a cross section be L-type fixing piece（9）, the guide rail（6）It is mounted on the fixing piece
（9）On.
6. the high-precision focusing device according to claim 1 in direct-write photoetching encapsulation type, it is characterised in that：Institute
State lower prism（22）Pass through the second gasket（24）It is pressed in first mounting groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820371877.5U CN208172348U (en) | 2018-03-19 | 2018-03-19 | A kind of high-precision focusing device in direct-write photoetching encapsulation type |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820371877.5U CN208172348U (en) | 2018-03-19 | 2018-03-19 | A kind of high-precision focusing device in direct-write photoetching encapsulation type |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208172348U true CN208172348U (en) | 2018-11-30 |
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ID=64375297
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820371877.5U Active CN208172348U (en) | 2018-03-19 | 2018-03-19 | A kind of high-precision focusing device in direct-write photoetching encapsulation type |
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| CN (1) | CN208172348U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108279470A (en) * | 2018-03-19 | 2018-07-13 | 合肥芯碁微电子装备有限公司 | A kind of high-precision focusing device encapsulated for direct-write photoetching in type |
-
2018
- 2018-03-19 CN CN201820371877.5U patent/CN208172348U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108279470A (en) * | 2018-03-19 | 2018-07-13 | 合肥芯碁微电子装备有限公司 | A kind of high-precision focusing device encapsulated for direct-write photoetching in type |
| CN108279470B (en) * | 2018-03-19 | 2024-06-14 | 合肥芯碁微电子装备股份有限公司 | High-precision focusing device for direct-writing photoetching packaging machine type |
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Address after: 230088 the 11 level of F3 two, two innovation industrial park, No. 2800, innovation Avenue, Hi-tech Zone, Hefei, Anhui. Patentee after: Hefei Xinqi microelectronics equipment Co., Ltd Address before: Two, H2 building, No. 2800, Wangjiang Industrial Park, 230088 Wangjiang West Road, hi tech Zone, Anhui, Hefei, 533 Patentee before: HEFEI XINQI MICROELECTRONIC EQUIPMENT CO., LTD. |