CN208167094U - A kind of multilayer crucible - Google Patents
A kind of multilayer crucible Download PDFInfo
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- CN208167094U CN208167094U CN201820469027.9U CN201820469027U CN208167094U CN 208167094 U CN208167094 U CN 208167094U CN 201820469027 U CN201820469027 U CN 201820469027U CN 208167094 U CN208167094 U CN 208167094U
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Abstract
The utility model provides a kind of multilayer crucible, and the multilayer crucible is made of at least two crucible layers, wherein the crucible layer in two neighboring crucible layer positioned at outside is attached on the outer wall of the crucible layer of inside.Multilayer crucible provided by the utility model has the advantages that structure is simple, utilization rate is high and cost is relatively low.
Description
Technical field
The utility model relates to crucible technique field more particularly to a kind of multilayer crucibles.
Background technique
The utility model belongs to the relevant technologies relevant to the utility model for the description of background technique, is only used for
The summary of the invention for illustrating and being easy to understand the utility model, should not be construed as applicant and is specifically identified to or estimates applicant being considered
The prior art of the utility model in the applying date for being put forward for the first time application.
Pyrolytic boron nitride (abbreviation PBN) crucible is made of PBN, even if at high temperature, will not be reacted with raw material compound,
PBN crucible is (99.999%) with high purity simultaneously, and surface compact, high temperature resistant, thermal expansion coefficient is small, and thermal conductivity is high, and has obvious
Anisotropy, infiltration angle it is big the advantages that.The BN crucible of pyrolysismethod preparation has itself purity is high, higher high-temperature behavior etc. excellent
Point.But sometimes, the raw material in crucible can be bonded on crucible internal walls after high-temperature heating, be not readily separated, and due to raw material
Expansion rate differs larger with the expansion rate of crucible, causes crucible to rupture when leading to cooling, to need replacing new crucible, crucible
Whole utilization rate is low.For example, remaining aluminium or silvering solution cognition are bonded in after aluminium or silver carry out high-temperature heating evaporation in crucible
On crucible internal walls, sub-cooled can be such that crucible ruptures after shrinking, and cause crucible that can only scrap, cannot utilize again, this can make earthenware
The utilization rate of crucible reduces, and replaces crucible and need the time, can reduce production efficiency, improves production cost.
Utility model content
In order to solve the problems, such as that crucible utilization rate is low, the utility model provides a kind of multilayer crucible that utilization rate is high.
The utility model embodiment provides a kind of multilayer crucible,
The multilayer crucible is made of at least two crucible layers, wherein
Crucible layer in two neighboring crucible layer positioned at outside is attached on the outer wall of the crucible layer of inside.
Preferably, the crucible layer in two neighboring crucible layer positioned at outside is attached to by chemical vapour deposition technique positioned at interior
On the outer wall of the crucible layer of side.
Preferably, the crucible is boron nitride crucible made of vapor deposition.
Preferably, constitute outermost crucible layer at least two crucible layers of the multilayer crucible thickness account for it is described more
The half of crucible overall thickness is to 3/4ths.
Preferably, it constitutes at least two crucible layers of the multilayer crucible in addition to outermost crucible layer, other crucibles
The thickness of layer is essentially identical, the essentially identical actual (real) thickness and other described crucibles for referring to described each layer of other crucible layers
The overall thickness of layer is no more than 10% divided by the thickness difference after the number of plies averaging of income of other crucible layers.
Preferably, the wall thickness for constituting outermost crucible layer at least two crucible layers of the multilayer crucible is
0.05mm-2mm, the thickness in monolayer of other each crucible layers in addition to outermost crucible layer are 0.01mm-0.5mm.
Preferably, the material for the matrix that the chemical vapor deposition uses is graphite.
Preferably, the structure of at least two crucible layers is isoepitaxial growth structure.
The utility model has the advantages that：The multilayer crucible of the utility model embodiment is by least two crucible layers
Composition, in use, remaining crucible layer can also continue to use as a whole even if most inner side crucible layer ruptures, avoids
The problem of entire crucible is all scrapped.Improve the utilization rate and production efficiency of crucible, and saved replacement crucible time and at
This.
It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not
The utility model can be limited.
Detailed description of the invention
It, below will be to embodiment or the prior art in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
Attached drawing needed in description is briefly described.
Fig. 1 is the structural schematic diagram that multilayer crucible described in the utility model has two crucible embodiments；
Fig. 2 is the structural schematic diagram that multilayer crucible described in the utility model has three crucible embodiments.
Description of symbols：1- the first crucible layer, 2- the second crucible layer, 3- third crucible layer.
Specific embodiment
Following the discussion provides multiple embodiments of the utility model.Although each embodiment represents utility model crucible
Single combination, but the crucible layer of the utility model difference embodiment can be replaced, or merge combination, therefore this is practical new
Type is it is also contemplated that all possible combinations comprising crucible layer in documented identical and/or different embodiments.Thus, if one
Embodiment includes crucible layer A, B, C, another embodiment includes the combination of crucible layer B and D, then the utility model also should be regarded as
Every other possible combined embodiment including one or more crucible layers containing A, B, C, D, although the embodiment can
Can there be specific literature record in the following contents.
It should be understood that although hereinafter describing various crucible layers using term " first ", " second " etc., this
A little information should not necessarily be limited by these terms, these terms are only used to for same type of crucible layer being distinguished from each other out.For example, not taking off
In the case where from the scope of the utility model, " first " crucible layer can also be referred to as " second " crucible layer, similar, " second " earthenware
Crucible layer can also be referred to as " first " crucible layer.It also should be noted that illustrate only for ease of description, in attached drawing with
The relevant part of the utility model rather than full content.
The utility model relates to a kind of multilayer crucibles.Multilayer in the utility model refers to two layers or two layers or more.
One embodiment according to the present utility model, such as Fig. 1, the embodiments of the present invention provide a kind of multilayer earthenware
Crucible, the multilayer crucible are made of at least two crucible layers, wherein
Crucible layer in two neighboring crucible layer positioned at outside is attached on the outer wall of the crucible layer of inside.
The multilayer crucible of the utility model embodiment includes at least two crucible layers, and embodiment as shown in Figure 1 includes the
One crucible layer 1 and the second crucible layer 2, the second crucible layer 2 are attached on 1 outer wall of the first crucible layer.And embodiment packet shown in Fig. 2
Include a crucible layer 1, the second crucible layer 2 and third crucible layer 3.Due to having certain binding force between each crucible layer,
In use, the multilayer crucible of the utility model embodiment uses as a whole, synchronous exists with existing single layer crucible
Using being above not different.And since the layer structure of the multilayer crucible of the utility model embodiment is led when the difference because of expansion rate
It is only the innermost crucible layer of tearing when the raw material being adhered on crucible internal walls being caused to shrink tearing crucible, and remaining crucible layer
The crucible of composition can still act as an entirety and continue to use.The more existing crucible of multilayer crucible of the utility model embodiment
Utilization rate is higher, to reduce the cost of the enterprise using crucible.
The utility model embodiment shown in the drawings is only as its layer of structure is illustrated, not to the utility model
It is specific to limit, such as layer ratio, shape and the number of plies.
One as above-described embodiment is preferred, and it is logical for forming each layer of the multilayer crucible of the utility model embodiment
Chemical vapour deposition technique acquisition is crossed, using each layer of chemical vapour deposition technique preparation multilayer crucible layer, layer and layer can be made (such as
First crucible layer 1 and the second crucible layer 2) between combine closely as an entirety, and the position that layer is combined with layer is entire
The more weak position of binding force in multilayer crucible, thus in crucible in use, the multilayer crucible of the utility model embodiment can
To use as a whole, and due to raw material contraction cause crucible to rupture when, only innermost layer crucible layer rupture, due to layer with
Opposite other parts binding force is relatively weak between layer, and other layers (in addition to innermost layer) is made to keep complete, and still be able to after
It is continuous to use, the normal work integrally produced is not influenced, can be improved the utilization rate of crucible entirety, and production cost can be saved.
The multilayer crucible of the utility model embodiment is at least constituted by two layers, such as can be as shown in Figure 1, only including first
Crucible layer 1 and the second crucible layer 2, the multilayer crucible of certain the utility model embodiment are also possible to the more layers by being more than two layers
It constitutes.In order to keep the using effect of crucible more preferable, safer, in a preferred embodiment, multilayer crucible is constituted at least
The material of two crucible layers is identical, and to prevent, expansion or shrinkage rate is different and influences using effect.Sheet shown in Fig. 2 is practical new
It further include third crucible layer 3 in another embodiment of type, third crucible layer 3 is attached on 2 outer wall of the second crucible layer.Certainly,
As described in above-described embodiment, what third crucible layer 3 was also possible to obtain by chemical vapour deposition technique.The present embodiment is by setting
Three crucible layers are set, can be further improved the utilization rate of crucible entirety and improve production efficiency, and can further save use
The production cost of the enterprise of multilayer crucible.In other embodiments, can by 3 outer wall of third crucible layer adhere to the 4th,
5th or more crucible layer constitutes the multilayer crucible of the utility model embodiment, and those skilled in the art will be understood that its composition
And the effect having.
As one preferred embodiment of the utility model, the multilayer crucible of the utility model embodiment be vapor deposition and
At boron nitride crucible.Chemical vapor deposition (Chemicalvapordeposition, abbreviation CVD) is containing composition film
Other gases needed for the gaseous reactant of element or the steam of liquid reactants and reaction introduce reaction chamber, in substrate material surface
Generate the process of film.In a preferred embodiment of the utility model, the first crucible layer 1, the second crucible layer 2 and third earthenware
Crucible layer 3 is vapor-deposited by nitrogen, boron chloride and ammonia, and the crucible manufactured in this way is in hot conditions
Also extremely stable, the purity for evaporating resulting materials will not be influenced because of volatilization in evaporation process.In addition, crucible structure causes
It is close, it can effectively stop the volatilization of substance contained by crucible body, improve the degree of purity of high-temperature space environment under hot conditions, mention
High high temperature evaporation generates the purity of material.In one preferred embodiment of the utility model, using chemical vapour deposition technique in base
Body surface face carries out pyrolytic deposition, it is easy to implement to make to prepare boron nitride crucible, and operate fairly simple, crucible with multi-layer structure
Effect when work is more preferable, utilization rate is higher.In other embodiments, other other than chemical vapour deposition technique can also be used
Mode manufactures crucible with multi-layer structure, or produces by the way of chemical vapor deposition other than boron nitride material it
The crucible with multi-layer structure of his material, it is to be understood that these modes of crucible with multi-layer structure are all in this reality
Within novel protection scope.
The overall thickness of the multilayer crucible of the utility model embodiment can according to need determination, and those skilled in the art can be with
Relevant information is obtained from the prior art.Certainly, adjusting appropriate can also be carried out in prior art basis.Such as it can be existing
Suitably increase certain thickness on the basis of some crucible thickness.Such as can be and increase 1-5%, the specific can be that increasing
2%, 3%, 4%, it can also be increase by 0.5% or more preferable, be also possible to increase by 7% or more.It is real to constitute the utility model
The thickness for applying each crucible layer of the multilayer crucible of example also can according to need determination, it is not limited here.It only provides below
Some specific examples for reference, such as every layer of thickness between 0.01mm-3mm, the specific can be that 0.05mm, 0.1mm,
0.15mm, 0.2mm, 1mm or 2mm etc., naturally it is also possible to be 5mm or thicker.It is selected as one of which, outermost crucible
The thickness of layer can be different from the thickness range of choice of the crucible layer on the inside of remaining.Such as constitute at least two crucibles of multilayer crucible
The wall thickness of outermost crucible layer is 0.05mm-2mm, the single layer of other each crucible layers in addition to outermost crucible layer in layer
With a thickness of 0.01mm-0.5mm.It is smaller to control crucible integral thickness, it is possible to reduce deposition preparation time saves raw material.Crucible knot
Structure and production process are fairly simple, but can save the time of replacement damage crucible when in use, improve the utilization of crucible entirety
Rate and production efficiency, and production cost can be saved.
In addition, the thickness of each layer of the multilayer crucible of the utility model embodiment can identical (or essentially identical), can also
It is different.In various embodiments of the utility model thickness it is identical or essentially identical to be not necessarily referring to thickness number absolutely identical, but allow to have one
Fixed difference.Such as the thickness average value that the actual (real) thickness of each layer in n layer and each layer overall thickness of the n are obtained divided by number of plies n
Difference is in the ranges such as 5%, 7%, 10% or 11%, i.e., it is believed that the n thickness degree is identical or essentially identical.It such as can will be outermost
The thickness value setting of layer is larger, and the thickness of inner layers is smaller, and the thickness of such as outermost crucible layer accounts for overall thickness
Half to 3/4ths.In this way, in the identical situation of general thickness, every one layer of rupture, to the thickness of remaining part
Degree influences smaller thus also smaller to the influential effect of remainder continued to use.Outermost crucible layer thickness compared with
When other layers of thickness is larger, other layers of thickness can be identical (or essentially identical) and be also possible to difference.It such as ought be only by
When one crucible layer 1 and the second crucible layer 2 constitute the multilayer crucible of the utility model embodiment, the first crucible layer 1 and the second crucible
The thickness of layer 2 can be identical, and the thickness value of the first crucible layer 1 of inside can also be made compared with the thickness of the second crucible layer 2 in outside
It is worth small.The thickness that specifically can be the first crucible layer 1 accounts for a quarter of overall thickness to one third, the thickness of the second crucible layer 2
Degree accounts for 3rd/2nd to four/3rds of overall thickness.It is of course also possible to which it is less to be that 1 thickness of the first crucible layer accounts for overall thickness percentage
It is a little or close to half.Again with the multilayer crucible of the utility model embodiment by the first crucible layer 1, the second crucible layer 2 and
For when three crucible layers 3 are constituted, the thickness of the first crucible layer 1, the second crucible layer 2 and third crucible layer 3 can be identical, can also be with
Make that the thickness value of the first crucible layer 1 of inside is small compared with the thickness value of the second crucible layer 2 in outside, thickness value of the second crucible layer 2
Thickness value compared with the third crucible layer 3 in outside is small, and the thickness value of third crucible layer 3 is compared with the first crucible layer 1, the second crucible layer 2
Thickness value is big.The wall thickness that specifically can be the first crucible layer 1 is a quarter of total wall thickness, and the wall thickness of the second crucible layer 2 is total
The a quarter of wall thickness, the wall thickness of third crucible layer 3 are 2/4ths of total wall thickness.The thickness of either third crucible layer accounts for always
2/3rds of thickness, and the thickness of the first crucible layer accounts for the one third of residual thickness (i.e. the one third of overall thickness), the
The thickness of two crucible layers accounts for 2/3rds of residual thickness (i.e. the one third of overall thickness).
In order to make those skilled in the art further understand the multilayer crucible of above-described embodiment, the utility model is provided
A kind of manufacturing method of the multilayer crucible of any of the above-described embodiment is included the following steps using vapour deposition process：
It is sequentially depositing each crucible layer for constituting the multilayer crucible from the inside to the outside；Wherein
When current crucible layer reaches design thickness, stops vapor deposition, start to deposit next earthenware after being spaced setting time
Crucible layer, so that adjacent deposition twice obtains the adjacent crucible layer with certain conjugation.
The manufacturing method of the multilayer crucible of the utility model embodiment is reaching when preparing crucible using vapour deposition process
When the crucible layer of current deposition reaches design thickness, stops vapor deposition, gas phase is further continued for after the time interval for being spaced setting
Next crucible layer is deposited, so as to obtain the crucible of the multilayered structure between each layer with certain binding force.For example, the first earthenware
After the completion of prepared by crucible layer 1, stop vapor deposition, then proceedes to the second crucible layer 2 of preparation, just obtain after preparation with two
The crucible of layer structure.For compared with the existing technology, tool can be prepared only by the interval time for increasing by one section of vapor deposition
There is the crucible of multilayered structure, it is easy to implement, and operation is fairly simple, meanwhile, effect when crucible with multi-layer structure works
More preferably, utilization rate is higher.Certainly, the utility model embodiment is not precluded to continue to deposit in the outer surface of existing crucible and obtain
The multilayer crucible of the present utility model application.Existing crucible includes all crucibles (demoulding or not demoulding) after coming out of the stove.Certainly,
Some crucibles should ensure that the cleannes on surface, to guarantee binding force between layers.Guarantee knot certain between layers
With joint efforts, can be avoided product at gap is formed between layers, influence using effect.
In the manufacturing method of the utility model embodiment multilayer crucible, between the vapor deposition for preparing two neighboring crucible layer
Between be for forming layer structure at regular intervals.Interval time too it is short can make between layers binding force it is too strong, be not easy to be formed
Layer structure, the time is too long to will affect production efficiency.Preferably be spaced at least 20 minutes, more preferably 30 minutes to 60 minutes it
Between.In interval time, respective reaction condition is all constant, in the case where not increasing the workload of operator, can be had
Have the crucible of multilayered structure, make to operate easy to implement, and the using effect of the multilayer crucible manufactured is preferable, overall cost compared with
It is small.In actually preparation, without prejudice to the utility model, interval time can according to need determination, not do herein
It is specific to limit.Only provide some illustrative reference values below, for example, interval 30 minutes, 40 minutes, 50 minutes, can also between
Every 60 minutes, 90 minutes or for more time.Equally, the utility model embodiment is not meant to that interval is lower than 20 minutes just not
It is able to achieve layered structure.
By taking one embodiment of the utility model shown in FIG. 1 as an example, prepared by the multilayer crucible of the utility model embodiment
Include the following steps：
The preparation of first crucible layer 1 stops vapor deposition, obtains first when reaching the first design deposition thickness on matrix
Crucible layer 1；
The preparation of second crucible layer 2, continues to be vapor-deposited, thus in first earthenware after obtaining the first crucible layer 1
The second crucible layer 2 is formed on the outer wall of crucible layer 1, when deposition thickness reaches the second design thickness, is stopped vapor deposition, is obtained the
Two crucible layers 2.
Through the above steps, the second crucible layer 2 is attached on 1 outer wall of the first crucible layer, the first crucible layer 1 and the second crucible
Layer 2 is both a part of multilayer crucible and when rupturing, and is used separately as an entirety, and the second crucible layer 2 adheres to
On 1 outer wall of the first crucible layer, it is attached to the second crucible layer 2 between first crucible layer 1 broken in the presence of interior crucible layer is not influenced
The binder course continued to use after splitting, when in use, raw material evaporation in interior crucible layer, i.e. the first crucible layer 1, due to expansion rate
Difference, cause the raw material being adhered on 1 inner wall of the first crucible layer shrink tearing crucible, due to the first crucible layer 1 and the second earthenware
Junction between crucible layer 2 is the most weak place of entire crucible, so being only the first crucible layer 1 of tearing, to the second crucible layer 2
Without influence, at this point, the second crucible layer 2 crucible can continue to use as a whole, and do not have to replace new crucible, to using this
For the enterprise for the multilayer crucible that utility model provides, saves the time of replacement crucible and buy the cost of new crucible, can have
The raising working efficiency of effect and reduce cost.
Certainly, in the multilayer crucible for preparing embodiment shown in Fig. 2, only on the basis of the above embodiments, according to same
The method of sample is spaced certain time interval between the second crucible layer 2 and deposition third crucible layer 3 depositing, to third crucible
Layer 3 obtains design thickness.
In one preferred embodiment of the utility model, the material of the matrix of pyrolytic deposition is graphite.Due to graphite
Nature comparison is stablized, high temperature resistant, so also limiting the volatilization of substance in crucible body to a certain extent.In one embodiment
In, use graphite as the matrix of vapor deposition, since the Nature comparison of graphite is stablized, high temperature resistant, so making using graphite
For the crucible that the matrix of vapor deposition manufactures, the volatilization of substance in crucible body is also limited to a certain extent.?
In other embodiments, using Si3N4Ceramics, SiC ceramic, Al2O3Ceramics or ZrO2The ceramic materials such as ceramics are as matrix
Vapor deposition is learned, since cost is relatively low for ceramics, can reduce the cost of manufacture crucible.It will be appreciated by those skilled in the art that
It is that according to the needs of actual conditions, other dense refractory materials also can be used in the matrix for carrying out chemical vapor deposition, all exists
Within the protection scope of the utility model.
In one preferred embodiment of the utility model, the deposition growing mode of the first crucible layer 1 and the second crucible layer 2 is
Isoepitaxial growth, the i.e. structure of the first crucible layer 1 and the second crucible layer 2 are isoepitaxial growth structure.Deposition growing side
Formula use isoepitaxial growth the advantages of be：Can be to avoid in vapor deposition processes, reaction gas and matrix (such as graphite, Si3N4
Ceramics, SiC ceramic, Al2O3Ceramics or ZrO2Ceramics etc.) between reaction, can also effectively reduce tumor bubble the defects of formation.
In one embodiment, the deposition growing mode of the first crucible layer 1 and the second crucible layer 2 is heteroepitaxial growth.Art technology
Personnel are it is understood that this is a preferred embodiment of the utility model, if can also reach this using other modes
Kind effect, is also within the protection scope of the utility model.
Specific depositing operation is not specifically limited in the utility model embodiment, those skilled in the art are as needed
It can select, or optimize in the prior art, as long as according to the thought of the utility model, spaced apart deposits be can be obtained both
It is integrated, and the multilayer crucible with layer structure.
For reference, steps are as follows for the preferred embodiment of gas-phase deposition in the following embodiments：
By nitrogen, boron chloride and ammonia according to molar ratio be 2-5:1-3:The ratio of 1-3 is passed through the furnace reaction heated
Device, the temperature in furnace reactor are 1500-2200 DEG C, and the vacuum degree in furnace reactor is 50-300Pa；
The mixed gas that nitrogen, boron chloride and ammonia are formed carries out pyrolytic deposition, 40- on the matrix in furnace reactor
After 80 minutes, pause is passed through gas 30-60 minutes, obtains the first crucible layer 1 that wall thickness is 0.1-0.5mm；
Continue nitrogen, boron chloride and ammonia to be 2-5 according to molar ratio:1-3:It is 1500- that the ratio of 1-3, which is passed through temperature,
2200 DEG C of furnace reactor, the vacuum degree in furnace reactor are 50-300Pa, and mixed gas carries out heat in 1 outer wall of the first crucible layer
Solution deposition, after 50-90 minutes, 1 outer wall of the first crucible layer adheres to the second crucible layer 2 that wall thickness is 0.05-1mm, carries out at demoulding
Crucible with multi-layer structure is obtained after reason.
It can be seen from above-described embodiment that the preparation process of the multilayer crucible of the utility model embodiment can with it is existing
Technique is essentially identical, only by suspending deposition reaction in process of production, realizes the multilayered structure of crucible.The utility model is implemented
Not only be combined as a whole, but also can be separated under certain external force between each layer of the multilayer crucible of example, make remaining part after
It is continuous to use as a whole.
In a working Examples of the manufacturing method of the multilayer crucible of the utility model, the vacuum degree of furnace reactor is protected
It holds as 100Pa, reaction temperature remains 2000 DEG C, and pyrolytic deposition carries out on graphite matrix always, is 2: 1 by molar ratio:1
Nitrogen, boron chloride and high-purity ammonia introduce the furnace reactor heated, and after forty minutes, pause deposition 30 minutes obtains wall thickness
For the first crucible layer 1 of 0.1mm.The molar ratio of gas is constant, continues nitrogen, boron chloride and ammonia being passed through furnace reactor,
Mixed gas carries out pyrolytic deposition in 1 outer wall of the first crucible layer, and after 50 minutes, it is 0.5mm that 1 outer wall of the first crucible layer, which adheres to wall thickness,
The second crucible layer 2.After carrying out demoulding processing, crucible with multi-layer structure is obtained.Using chemical vapour deposition technique and interval
The crucible that the method for the time of vapor deposition manufactures has bilayer or multilayer structure, is using earthenware with multi-layer structure
When crucible, the utilization rate of crucible entirety can be improved, reduce the replacing construction of crucible.
In a working Examples of the manufacturing method of the multilayer crucible of the utility model, the vacuum degree of furnace reactor is protected
It holds as 130Pa, reaction temperature remains 1900 DEG C, and pyrolytic deposition is always in Si3N4It is carried out on ceramic matrix, is 3 by molar ratio:
2:2 nitrogen, boron chloride and high-purity ammonia introduce the furnace reactor heated, and after sixty minutes, pause deposition 50 minutes obtains
Wall thickness is the first crucible layer 1 of 0.3mm.Molar ratio is constant, continues nitrogen, boron chloride and ammonia being passed through furnace reactor, mixes
It closes gas and carries out pyrolytic deposition in 1 outer wall of the first crucible layer, after 70 minutes, it is 0.5mm's that 1 outer wall of the first crucible layer, which adheres to wall thickness,
Second crucible layer 2.After carrying out demoulding processing, crucible with multi-layer structure is obtained.According to the purposes of crucible, to deposition pause
The thickness of time and crucible layer is adjusted, and is operated fairly simple, conveniently.
In a working Examples of the manufacturing method of the multilayer crucible of the utility model, the vacuum degree of furnace reactor is protected
It holds as 140Pa, reaction temperature remains 2200 DEG C, and pyrolytic deposition is always in ZrO2It is carried out on ceramic matrix, is 5 by molar ratio:
3:3 nitrogen, boron chloride and high-purity ammonia introduce the furnace reactor heated, and after 80 minutes, pause deposition 60 minutes is obtained
Wall thickness is the first crucible layer 1 of 0.5mm.Gas mole ratio is constant, continues for nitrogen, boron chloride and ammonia to be passed through furnace reaction
Device, mixed gas carries out pyrolytic deposition in 1 outer wall of the first crucible layer, after 90 minutes, pause deposition 60 minutes, and the first crucible layer 1
Outer wall adheres to the second crucible layer 2 that wall thickness is 1mm.Molar ratio is constant, continues for nitrogen, boron chloride and ammonia to be passed through furnace reaction
Device, mixed gas carries out pyrolytic deposition in 12 outer wall of the first crucible layer, and after 90 minutes, 2 outer wall of the second crucible layer attachment wall thickness is
The third crucible layer 3 of 1mm.After carrying out demoulding processing, crucible with multi-layer structure is obtained.It can be into one by increasing crucible layer
Step improves the whole utilization efficiency of crucible, and reduces production cost.
The multilayer crucible of crucible manufacturing preparation provided by the utility model, it is only necessary to heavy in the gas phase for preparing crucible layer
When product, at regular intervals, can make crucible that there is multilayered structure, and have certain binding force between crucible layer, quality compared with
Good, smoothness is high, not will form tumor bubble, is not in peeling phenomenon in use process, using effect is good, utilization rate is high, can have
Effect saves time and the cost of replacement crucible, production cost when reducing using crucible.
The above is only specific embodiment of the present utility model, is made skilled artisans appreciate that or realizing this
Utility model.Various modifications to these embodiments will be apparent to one skilled in the art, institute herein
The General Principle of definition can be realized in other embodiments in the case where not departing from the design or range of the utility model.
Therefore the present invention will not be limited to the embodiments shown herein, but meet with principles disclosed herein and
The consistent widest scope of features of novelty.
Claims (8)
1. a kind of multilayer crucible, which is characterized in that
The multilayer crucible is made of at least two crucible layers, wherein
Crucible layer in two neighboring crucible layer positioned at outside is attached on the outer wall of the crucible layer of inside.
2. multilayer crucible according to claim 1, which is characterized in that be located at the crucible layer in outside in two neighboring crucible layer
It is attached on the outer wall of the crucible layer of inside by chemical vapour deposition technique.
3. multilayer crucible according to claim 1, which is characterized in that the crucible is boron nitride earthenware made of vapor deposition
Crucible.
4. multilayer crucible according to claim 1, which is characterized in that constitute at least two crucible layers of the multilayer crucible
In the thickness of outermost crucible layer account for the half of the multilayer crucible overall thickness to 3/4ths.
5. multilayer crucible according to claim 1, which is characterized in that constitute at least two crucible layers of the multilayer crucible
In, in addition to outermost crucible layer, the thickness of other crucible layers is essentially identical, described essentially identical to refer to other described crucible layers
After number of plies averaging of income of the overall thickness of each layer of actual (real) thickness and other crucible layers divided by other crucible layers
Thickness difference is no more than 10%.
6. multilayer crucible according to claim 1, which is characterized in that constitute at least two crucible layers of the multilayer crucible
In outermost crucible layer wall thickness be 0.05mm-2mm, the single monolayer thick of other each crucible layers in addition to outermost crucible layer
Degree is 0.01mm-0.5mm.
7. multilayer crucible according to claim 2, which is characterized in that the material for the matrix that the chemical vapor deposition uses
For graphite.
8. multilayer crucible according to claim 1, which is characterized in that the structure of at least two crucible layer is
Isoepitaxial growth structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820469027.9U CN208167094U (en) | 2018-04-04 | 2018-04-04 | A kind of multilayer crucible |
Applications Claiming Priority (1)
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