CN208131390U - A kind of material delivery system - Google Patents
A kind of material delivery system Download PDFInfo
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- CN208131390U CN208131390U CN201820370530.9U CN201820370530U CN208131390U CN 208131390 U CN208131390 U CN 208131390U CN 201820370530 U CN201820370530 U CN 201820370530U CN 208131390 U CN208131390 U CN 208131390U
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- chamber
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Abstract
The utility model provides a kind of material delivery system.The material delivery system includes device noumenon and lid, and described device ontology has the chamber for accommodating material, and the lid is sealed in the open end of the chamber；Described device further includes sprinkler part, and one end of the sprinkler part stretches in the chamber, and the other end is connected to the material supply pipe of described device body exterior.Setting based on sprinkler part, so that device has the function of spraying material.When the material that supply pipe provides is cleaning agent, cleaning agent is sprayed in device noumenon by sprinkler part, and compared to the mode of soaking and washing agent, the cleaning effect of device is can be improved in the mode for spraying cleaning agent, the scavenging period of shortening device improves the cleaning efficiency of device.
Description
Technical field
The utility model relates to field of display technology, especially a kind of material delivery system.
Background technique
Glue stations in colloid system, photoresist feedway is used for glue stations for glue.Existing photoresist supplies
Giving device is usually cylindrical tank body, including tank body ontology a and lid b, structure it is as shown in Figure 1.
When carrying out the replacement of other type photoresists to tank body, specific replacement operation includes：It is intracorporal to give off tank for the first step
Remaining photoresist；Second step injects cleaning agent into tank body, cleans tank body in such a way that cleaning agent impregnates tank body, impregnates knot
The cleaning agent in tank body is discharged after beam；Third step injects new photoresist into tank body, is carried out using new photoresist to tank body clear
It washes；4th step injects new photoresist into tank body.
Structure based on tank body causes tank body not to be cleaned so that the intracorporal photoresist of tank is not easy to be thoroughly removed,
The photoresist held is treated to pollute.
Utility model content
The technical problem to be solved by the present invention is to provide a kind of material delivery systems, clean convenient for device, will not be right
Photoresist to be held pollutes.
On the one hand, a kind of array substrate, including device noumenon and lid are provided, described device ontology, which has, accommodates material
Chamber, the lid is sealed in the open end of the chamber；
Described device further includes sprinkler part, and one end of the sprinkler part stretches in the chamber, the other end and institute
State the material supply pipe connection outside device noumenon.
Further, first through hole is provided on the lid；
The sprinkler part includes spray tube, and one end of the spray tube passes through the first through hole of the lid and stretches
Enter to the chamber, the other end is connected to the first supply pipe outside described device, is protruded on the spray tube of the chamber and is set
It is equipped with multiple spray apertures being spaced apart.
Further, described device further includes rotary part, and the other end of the rotary part and the sprinkler part is solid
It is fixed, the sprinkler part can be driven to rotate.
Further, the second through-hole is additionally provided on the lid；
Described device further includes material input pipe, and the material input pipe passes through second through-hole and stretches to the chamber
It is interior.
Further, third through-hole is additionally provided on the lid；
Described device further includes discharge of materials pipe, and the discharge of materials pipe protrudes into the third through-hole and the chamber connects
It is logical.
Further, fourth hole is additionally provided on the lid；
Described device further includes material using pipe, and the material protrudes into the fourth hole using pipe and the chamber connects
It is logical.
Further, described device further includes temperature-measuring part；Fifth hole is additionally provided on the lid；
The temperature-measuring part passes through the fifth hole and stretches in the chamber.
Further, described device ontology is arc-shaped in the inner wall at the lid.
Compared with prior art, the utility model includes following advantages：
The utility model embodiment provides a kind of material delivery system, which includes device noumenon and lid, device
Ontology has the chamber for accommodating material, and lid is sealed in the open end of chamber, and device further includes sprinkler part, and the one of sprinkler part
End stretches in chamber, and the other end is connected to the supply pipe outside device.Setting based on sprinkler part, so that device has spray
Drench the function of material.When the material that supply pipe provides is cleaning agent, cleaning agent is sprayed in device noumenon by sprinkler part, phase
Mode than in the mode of soaking and washing agent, spraying cleaning agent can be improved the cleaning effect of device, when the cleaning of shortening device
Between, improve the cleaning efficiency of device.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of photoresist feedway in the prior art；
Fig. 2 is the structural schematic diagram of material delivery system provided by the embodiment of the utility model；
Fig. 3 is the structural schematic diagram of the spray equipment in material delivery system provided by the embodiment of the utility model.
Description of symbols
A, tank body ontology b, lid 1, device noumenon 21, upper cover
22, lower cover 3, spray tube 4, material supply pipe 5, rotary part
6, fixed sleeving 7, material input pipe 8, discharge of materials pipe 9, material use pipe
10, temperature probe A, chamber
Specific embodiment
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing and have
Body embodiment is described in further detail the utility model.
In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more；Term
The orientation or positional relationship of the instructions such as "upper", "lower", "left", "right", "inner", "outside" is orientation based on the figure or position
Relationship is merely for convenience of describing the present invention and simplifying the description, rather than the machine or element of indication or suggestion meaning are necessary
It with specific orientation, is constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, it can also be indirectly connected through an intermediary.
For the ordinary skill in the art, can be understood with concrete condition above-mentioned term in the present invention specifically contain
Justice.
Specific embodiment of the present utility model is described in further detail with reference to the accompanying drawings and examples.Following reality
Example is applied for illustrating the utility model, but is not intended to limit the scope of the present invention.
The utility model embodiment provides a kind of material delivery system.Material supply provided by the embodiment of the utility model
Device includes device noumenon and lid, and device noumenon has the chamber for accommodating material, and lid is sealed in the chamber of device noumenon
Open end；
Material delivery system further includes sprinkler part, and one end of sprinkler part stretches in chamber, sprinkler part it is another
End is connected to the material supply pipe outside material delivery system.
Sprinkler part has the function of spraying material, the setting of sprinkler part, so that material delivery system has spray object
The function of material.
When the material that supply pipe provides is cleaning agent, cleaning agent is sprayed in device noumenon by sprinkler part, compared to
The cleaning effect of device can be improved in the mode of soaking and washing agent, the mode for spraying cleaning agent, and the scavenging period of shortening device mentions
The cleaning efficiency of high device.
The structure of spray equipment can there are many, for example, sprinkler part may include spray tube, can be set on lid
First through hole, the first through hole that one end of spray tube passes through lid stretch in chamber, and the other end and material of spray tube supply
Supply pipe connection outside device noumenon, protrudes on the spray tube of chamber and is provided with multiple spray apertures being spaced apart.
With reference to Fig. 2, material delivery system includes device noumenon 1 and lid, and device noumenon 1 has the chamber A for accommodating material,
Lid includes upper cover 21 and lower cover 22, and upper cover 21 is sealed in the upper open end of device noumenon 1, and lower cover 22 is sealed in device noumenon 1
Lower open end, material delivery system further includes sprinkler part, and sprinkler part includes spray tube 3, and one end of spray tube 3 passes through down
The first through hole of lid 22 stretches in chamber A, and the other end of spray tube 3 and the material outside material delivery system ontology 1 supply
Pipe 4 is connected to.The structure for being provided with the spray tube of spray apertures is as shown in Figure 3.It, can also be in device sheet in addition to structure shown in Fig. 2
Through-hole is set on body, and spray equipment is protruded into the chamber of device noumenon by the through-hole in device noumenon.Specific structure can root
Factually border is configured.
Material delivery system provided by the embodiment of the utility model can also include rotary part, rotary part and spray portion
The other end of part is fixed, and sprinkler part can be driven to rotate.The setting of rotary part, so that material delivery system has rotation spray
The function of component, each region of the inner wall for the material directive device noumenon that can spray sprinkler part, is completed to inner wall
The cleaning of each region, while the material kinetic energy with higher sprayed in sprinkler part rotary course from sprinkler part, tool
There are preferable cleaning ability, therefore the setting of rotating device, improves device cleaning effect.
It can be according to the positional relationship of actual setting rotary part and sprinkler part.For example, as shown in Fig. 2, material supplies
Device includes device noumenon 1, upper cover 21, lower cover 22, material supply pipe 4, spray tube 3, rotary part 5 and fixed sleeving 6, on
Lid 21 is sealed in the upper open end of device noumenon 1, and lower cover 22 is sealed in the lower open end of device noumenon 1, is arranged on lower cover 22
There is through-hole, one end of spray tube 3 is protruded into the chamber A of device noumenon 1 by the through-hole on lower cover 22, and rotary part 5 is fixed on
In lower cover 22 and its side wall and lower cover 22 seal, and are provided with fixed sleeving 6 on rotary part 5, the other end of spray tube 3 passes through
Fixed sleeving 6 is fixed on rotary part 5, and rotary part 5 is provided with hollow chamber, and material supply pipe 4 protrudes into rotary part 5
Hollow chamber is connected to the other end of spray tube 3.
The second through-hole, material are also provided in material delivery system provided by the embodiment of the utility model, on lid
Feedway can also include material input pipe, and material input pipe passes through the second through-hole and stretches in chamber.Material shown in Fig. 2
In feedway, the through-hole that material input pipe 7 passes through on lower cover 22 is stretched in chamber A.
The setting of material input pipe, increases the material supply mode of material delivery system, and the material for improving device is defeated
Send ability.In actual mechanical process, material delivery system can be used to chamber A and convey material, at the same using spray equipment and
Material supply pipe conveys material to chamber A, quickly conveys material into chamber A；Also spent material supply pipe 4 or object be can choose
Expect that input pipe 7 conveys material to chamber A, specific operation process can be according to being actually configured.
In material delivery system provided by the embodiment of the utility model, third through-hole, material are also provided on lid
Feedway can also include discharge of materials pipe, and discharge of materials pipe passes through third through-hole and chamber.Discharge of materials pipe is set
It sets, so that discharge of materials pipe has the function of discharges material.In material delivery system shown in Fig. 2, discharge of materials pipe 8 is protruded into down
Through-hole on lid 22 is connected to chamber A.
In material delivery system provided by the embodiment of the utility model, fourth hole, material are also provided on lid
Feedway can also include material using pipe, and material is using pipe across fourth hole and chamber.Material can be with using pipe
It is connect with the material outside device using equipment, supplies the material to the material in device and be delivered to material using setting, realize object
The transmission of material.In material delivery system shown in Fig. 2, the through-hole that material is protruded on lower cover 22 using pipe 9 is connected to chamber A.
Can be according to the number for being actually configured above-mentioned various pipes, the utility model is herein with no restrictions.
Material delivery system provided by the embodiment of the utility model can also include temperature-measuring part, can also be arranged on lid
There is fifth hole, temperature-measuring part passes through fifth hole and stretches in chamber.The setting of temperature-measuring part, so that material delivery system
With temp sensing function, when temperature-measuring part protrudes into material, the function of the temperature for the material that there is material delivery system measurement to hold
Energy.In material delivery system shown in Fig. 2, temperature-measuring part is temperature probe 10, and temperature probe 10 passes through the through-hole in upper cover 21
It stretches in chamber A.The type and installation site of temperature-measuring part can be according to being actually configured.
In material delivery system provided by the embodiment of the utility model, device noumenon is in arc in the inner wall at lid
Shape.Compared to existing device noumenon shown in FIG. 1 in the rectangular structure of inner wall at lid, object provided in this embodiment
Setting of the feedway based on the arcuate structure is expected, so that device has material easy cleaning, scavenging period is short, cleaning effect is good etc.
Feature.In material delivery system shown in Fig. 2, device noumenon 1 is in the arc-shaped structure of inner wall at upper cover 21, device noumenon
1 in the arc-shaped structure of inner wall at lower cover 22.
To make those skilled in the art that material delivery system provided by the utility model be more clearly understood, now by with
The structure and use process of material delivery system is described in detail in lower example.
Example
This example holds photoresist using material delivery system shown in Fig. 2, conveys photoresist for photoresist coating equipment.
Material delivery system shown in Fig. 2 use process is as follows：
When the photoresist that replacement material delivery system is held, need to open the valve of discharge of materials pipe 8, it will be surplus in device
Remaining light photoresist is expelled in specified containers from discharge of materials pipe 8.
After the completion of the remaining photoresist discharge in device, the valve of material supply pipe 4, spent material supply pipe 4 are opened
Cleaning reagent is conveyed to spray tube 3, cleaning reagent is sprayed from spray tube 3, quickly cleaned to the inner surface of device, after cleaning
Reagent from discharge of materials pipe 8 be discharged.
The valve of material delivery pipe 8 is closed, spent material supply pipe 4 and material input pipe 7 convey into chamber A clear simultaneously
Reagent is washed, cleaning reagent stands a period of time after being full of chamber A, is transferred to residual photoresist in cleaning reagent, standing terminates
The valve for opening discharge of materials pipe 8 afterwards, the cleaning reagent in chamber A is discharged from discharge of materials pipe 8, and cleaning reagent is full of chamber
A mono- is to after twice, can be completed cleaning of the cleaning reagent to the residual photoresist in chamber A.
Spent material input pipe 7 conveys new photoresist into chamber A, removes remaining cleaning reagent in material input pipe 7,
Spent material supply pipe 4 and spray tube 3 convey new photoresist into chamber A, and the new photoresist that spray tube 3 sprays can be complete rapidly
The cleaning of remaining cleaning agent in twin installation, last new photoresist is primary full of chamber A and is discharged, to complete new photoresist
Cleaning to the residual cleaning reagent in chamber A.
After cleaning, while spent material input pipe 7 and material supply pipe 4 convey new photoresist into device, make to fill
Setting interior Fast Filling expires new photoresist.
Based on the use process of above-mentioned material delivery system, when primary light photoresist in more changing device, by using
Cleaning reagent and new photoresist, primary light photoresist can be thoroughly removed, and scavenging period is few, when greatly reducing device shutdown
Between, the usage amount for cleaning the photoresist used is less, and cost is relatively low for cleaning, since device can be cleaned up thoroughly,
Therefore new photoresist will not be polluted when use device installs new photoresist, ensure that the product quality of new photoresist.Separately
Outside, since the scavenging period of material delivery system is shorter, the opposite formation efficiency improved for glue stations in colloid system.
It should be noted that this example be only citing introduction is carried out to the structure and use process of material delivery system, and
With no restrictions, all structures and use process for meeting the utility model intention.
All the embodiments in this specification are described in a progressive manner, the highlights of each of the examples are with
The difference of other embodiments, the same or similar parts between the embodiments can be referred to each other.
A kind of material delivery system provided by the utility model is described in detail above, tool used herein
Body example is expounded the principles of the present invention and embodiment, and the above embodiments are only used to help understand
The method and its core concept of the utility model；At the same time, for those skilled in the art, the think of according to the utility model
Think, there will be changes in the specific implementation manner and application range, in conclusion the content of the present specification should not be construed as pair
The limitation of the utility model.
Claims (8)
1. a kind of material delivery system, which is characterized in that including device noumenon and lid, described device ontology, which has, accommodates material
Chamber, the lid is sealed in the open end of the chamber；
Described device further includes sprinkler part, and one end of the sprinkler part stretches in the chamber, the other end and the dress
Set the material supply pipe connection of body exterior.
2. the apparatus according to claim 1, which is characterized in that be provided with first through hole on the lid；
The sprinkler part includes spray tube, and one end of the spray tube passes through the first through hole of the lid and stretches to
In the chamber, the other end is connected to the first supply pipe outside described device, is protruded on the spray tube of the chamber and is provided with
Multiple spray apertures being spaced apart.
3. the apparatus of claim 2, which is characterized in that described device further includes rotary part, the rotary part
It is fixed with the other end of the sprinkler part, the sprinkler part can be driven to rotate.
4. the apparatus according to claim 1, which is characterized in that be additionally provided with the second through-hole on the lid；
Described device further includes material input pipe, and the material input pipe passes through second through-hole and stretches in the chamber.
5. the apparatus according to claim 1, which is characterized in that be additionally provided with third through-hole on the lid；
Described device further includes discharge of materials pipe, and the discharge of materials pipe protrudes into the third through-hole and the chamber.
6. the apparatus according to claim 1, which is characterized in that be additionally provided with fourth hole on the lid；
Described device further includes material using pipe, and the material protrudes into the fourth hole and the chamber using pipe.
7. the apparatus according to claim 1, which is characterized in that described device further includes temperature-measuring part；On the lid also
It is provided with fifth hole；
The temperature-measuring part passes through the fifth hole and stretches in the chamber.
8. the apparatus according to claim 1, which is characterized in that described device ontology is in the inner wall at the lid
Arc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820370530.9U CN208131390U (en) | 2018-03-19 | 2018-03-19 | A kind of material delivery system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820370530.9U CN208131390U (en) | 2018-03-19 | 2018-03-19 | A kind of material delivery system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208131390U true CN208131390U (en) | 2018-11-23 |
Family
ID=64288908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820370530.9U Active CN208131390U (en) | 2018-03-19 | 2018-03-19 | A kind of material delivery system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208131390U (en) |
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2018
- 2018-03-19 CN CN201820370530.9U patent/CN208131390U/en active Active
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