CN208130712U

CN208130712U - Particle trap

Info

Publication number: CN208130712U
Application number: CN201820059666.8U
Authority: CN
Inventors: 黎微明; 李翔; 胡彬; 左敏
Original assignee: Jiangsu Weidao Nano Equipment Technology Co Ltd
Current assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Priority date: 2018-01-15
Filing date: 2018-01-15
Publication date: 2018-11-23
Anticipated expiration: 2028-01-15

Abstract

The utility model discloses a kind of particle traps, by catcher shell (1), catcher lid (2), air deflector shell (3), air deflector (4) and filter core (5)；Air deflector (4) are equipped in the air deflector shell (3), several helical blades for increasing gas travel are equipped on the outside of the air deflector (4), its air deflector shell, capture air deflector, filter core is incorporated into catcher shell, then catcher lid is covered, the particle trap that composition one completely seals is whole, there are the air inlet and air outlet of gas on the lid of catcher, such design mainly increases the extracted time in particle trap containing TMA (trimethyl aluminium) gas, simultaneously, to discharging a small amount of air in particle trap, react the moisture in air sufficiently with the TMA come is drawn into, generate alumina powder particle, it is adsorbed on the inner wall of particle trap, reduce the pollution of the vacuum pump of the pumping to gas outlet.

Description

Particle trap

Technical field

The utility model belongs to tubular type ALD equipment, and in particular to a kind of exhaust gas processing device.

Background technique

Particle trap belongs to exhaust gas processing device, and patent 201310141393.3 discloses a kind of particle collection device And exhaust treatment system, the particle collection device, including pipeline body and strainer；The lower section of the pipeline body is air inlet, Top is gas outlet；The strainer is set to the inside of the pipeline body, and covers the gas outlet.The present invention for pair The tail gas generated in semiconductor etching process is handled.

Patent 201510291216.2 discloses a kind of haze powder collection processing unit, and wherein electrostatic Cyclone Particle is caught Catching device assembly includes that electrostatic whirlwind particle trap assembly air inlet, outer cylinder, inner cylinder, particle collector, electrostatic Cyclone Particle are caught Device assembly gas outlet, arista electrode and newel are caught, the electrostatic whirlwind particle trap assembly air inlet goes out with knockouts Port is connected, and the inner cylinder is arranged in outer cylinder one end and is connected with electrostatic whirlwind particle trap assembly gas outlet, institute Newel is provided in the outer cylinder stated, the surface of the newel is evenly arranged with arista electrode, and the outer cylinder bottom is set It is equipped with particle collector.

It is air inlet below first patent of the above-mentioned prior art, top is the form of gas outlet, and gas flow is short, gas Body particle cannot be deposited sufficiently in collection device；In second patent, using electromagnetic field to the powder collection contained in gas, It is different from the technical field that this patent is applicable in primarily directed to air purification field.

Summary of the invention

In view of the above technical problem, the utility model will improve the following disadvantage of existing particle trap：The runner of gas It is short, inefficiency；Original design disassembly is inconvenient；Maintenance time interval is short；It is at high cost.

The particle trap of the utility model, by catcher shell 1, catcher lid 2, air deflector shell 3, air deflector 4 with And filter core 5.

Air deflector shell 3, air deflector 4 and filter core 5 are placed in catcher shell 1, and catcher lid 2 is covered in catcher shell 1 top of body, air deflector shell 3 and filter core 5 are stretched out out of catcher lid 2, and catcher lid 2 connects particle trap and machine is set It is standby.

It is equipped with air deflector 4 in air deflector shell 3, several helical-blades for increasing gas travel are equipped on the outside of the air deflector 4 The root of piece, helical blade connects on air deflector 4；Tail gas is entered in air deflector shell 3 by total air inlet 6, and gas is along helical-blade Piece walking, increases gas travel, and the moisture in trimethyl aluminium and air in atmosphere is allowed to make sufficiently reaction completely；On air deflector 4 The rule flowed through equipped with supplied gas or irregular aperture, gas flowed out by these apertures, and the alumina powder of generation End is sticked to the outside of air deflector 4.

The bottom of air deflector shell 3 also is provided with aperture, and by the aperture, gas is overflowed out of air deflector 4.

Air deflector shell 3 and filter core 5 are placed side by side, and the top of air deflector shell 3, total gas outlet 7 is arranged in total air inlet 6 The top of filter core 5 is set.

Air deflector shell 3 is connected by the aperture on its bottom with filter core 5.

Catcher lid 2 is connect with air deflector shell 3, filter core 5 with machine by clamp, while air deflector shell 3 and filter core 5 are logical It is fixed to cross sole 8, sole 8 is fixed by screw thread and catcher shell 1；Come loose clamp, rotates footing 8, about by the up-regulation of footing 8 10mm, the idler wheel of particle trap bottom contacts ground at this time, and catcher lid disengaged with shell, in this way, easily catching It catches device shell and hauls out cleaning together with air deflector shell, air deflector, filter core.

Further preferred technical solution, air deflector 4 are the hollow stainless steel tube for being welded with flange, and stainless steel tube is equipped with rule Aperture then.

Beneficial effect：

(1) runner of gas increases, and increases alumina powder depositional area, improves filtering powder efficient utilization.

(2) the design convenient disassembly, comes loose clamp, so that it may catcher shell together with air deflector shell, air deflector, filter Core hauls out cleaning together.

(3) maintenance time is short, and each maintenance time only has pervious maintenance time compared to half, improves efficiency.

(4) production cost is also lower than original.

Detailed description of the invention

Fig. 1 is the schematic diagram of the utility model mechanism.

Specific embodiment

1 pair of specific embodiment of the present utility model is illustrated with reference to the accompanying drawing.

The particle trap of the utility model, including catcher shell 1, catcher lid 2, air deflector shell 3, air deflector 4, And filter core 5.

Whole particle trap forms a closed entirety by above 5, there is air inlet and air outlet, purpose It is that unreacted is completely contained TMA gas from the vacuum cavity of plated film to be extracted into this particle trap, while in particle trap It is inside put into micro air disengaging, extra TMA has been reacted, alumina powder is generated, has been collected in particle trap, this The purpose of technical solution is exactly to allow sufficiently react in particle trap containing extra TMA gas, in order to avoid influence subsequent vacuum pump. Air deflector shell 3, air deflector 4 and filter core 5 are placed in catcher shell 1, and catcher lid 2 covers on 1 top of catcher shell, Air deflector shell 3 and filter core 5 are stretched out out of catcher lid 2, and catcher lid 2 connects particle trap and machinery equipment.

Air deflector 4 is equipped in air deflector shell 3, air deflector 4 is the hollow stainless steel tube for being welded with flange, is set on stainless steel tube Well-regulated aperture is equipped with several helical blades for increasing gas travels, the root connection of helical blade on the outside of the air deflector 4 On air deflector 4；Tail gas is entered in air deflector shell 3 by total air inlet 6, and gas is walked along helical blade, is increased gas travel, is allowed Moisture in trimethyl aluminium and air in atmosphere makees sufficiently reaction completely；The rule that the supplied gas that air deflector 4 is equipped with flows through Aperture, the alumina powder that gas is flowed out by these apertures, and generated are sticked to the outside of air deflector 4.

The flow process in particle trap of tail gas is as follows：Tail gas is entered in air deflector shell 3 by total air inlet 6, gas Body is walked along helical blade, increases gas travel, and the moisture in trimethyl aluminium and air in atmosphere is allowed to make sufficiently reaction completely； Gas a part is entered in the hollow stainless steel tube in air deflector 4 by the outside of air deflector 4, while a part of gas It is flowed in air deflector 4 and air deflector shell 3, the aperture on the hollow stainless steel tube of air deflector 4 allows gas arbitrarily to flow into not It becomes rusty in steel pipe, or has and flowed out in stainless steel tube in air deflector 4 and air deflector shell 3；Gas flows more disorder more is conducive to The reaction of trimethyl aluminium in tail gas；Last gas is entered by the aperture of the bottom of air deflector shell 3 into filter core 5, is generated Particulate matter be adhered on the outer wall of filter core 5, the gas filtered through filter core 5 by total gas outlet 7 be discharged particle trap.

The disassembly of particle trap is as follows：Clamp (not shown) by catcher lid 2 and air deflector shell 3, filter core 5 with Machine connection, while air deflector shell 3 and filter core 5 are fixed by sole 8, sole 8 is fixed by screw thread and catcher shell 1； Come loose clamp, rotate footing 8, raise about 10mm, at this time particle trap bottom idler wheel contact ground, catcher lid and Shell has disengaged, in this way, catcher shell is hauled out cleaning together with air deflector shell, air deflector, filter core.

Claims

1. particle trap, it is characterised in that：It includes catcher shell (1), catcher lid (2), air deflector shell (3), leads Flow device (4) and filter core (5)；Air deflector (4) are equipped in the air deflector shell (3), are equipped on the outside of the air deflector (4) several Increase the helical blade of gas travel, air deflector shell (3) is equipped with the aperture of supplied gas circulation.

2. particle trap according to claim 1, it is characterised in that：The air deflector shell (3) and filter core (5) are side by side It places, total air inlet (6) setting is on the top of air deflector shell (3), top of total gas outlet (7) setting in filter core (5).

3. particle trap according to claim 1 or 2, it is characterised in that：The air deflector (4) is equipped with supplied gas stream Logical aperture；The bottom of the air deflector shell (3) is equipped with the aperture of supplied gas circulation.

4. particle trap according to claim 3, it is characterised in that：The air deflector (4) is to be welded with the hollow of flange Stainless steel tube, stainless steel tube are equipped with aperture, gas can through the aperture on stainless steel tube by flowing into hollow stainless steel tube or By being flowed out in hollow stainless steel tube.

5. particle trap according to claim 4, it is characterised in that：The gas is in air deflector (4) and in air Reaction of moisture generate alumina powder, gas is flowed out via the aperture of air deflector shell (3) bottom, and alumina powder is adhered to The outer wall of filter core (5), gas are discharged from being extracted in aperture on filter core (5) by total gas outlet (7).

6. particle trap according to claim 4, it is characterised in that：Catcher lid (2) is arranged in catcher shell (1) Top, air deflector shell (3) and filter core (5) are stretched out out of catcher lid (2), and catcher lid (2) connects particle trap and machine Device equipment.

7. particle trap according to claim 4, it is characterised in that：Footing (8) is threadedly attached in catcher shell The bottom of body (1), the clamp that the catcher lid that comes loose is connect with machinery equipment rotate footing (8), footing (8) are raised, at this time The idler wheel of grain catcher bottom contacts ground, and catcher lid and shell disengage.

8. using the atomic layer deposition apparatus of particle trap described in claim 1, it is characterised in that：Atomic layer deposition apparatus Offgas outlet connect particle trap.