CN208121199U - Vacuum coating equipment maintains pump conduit pressure difference hand regulator - Google Patents
Vacuum coating equipment maintains pump conduit pressure difference hand regulator Download PDFInfo
- Publication number
- CN208121199U CN208121199U CN201820369387.1U CN201820369387U CN208121199U CN 208121199 U CN208121199 U CN 208121199U CN 201820369387 U CN201820369387 U CN 201820369387U CN 208121199 U CN208121199 U CN 208121199U
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- China
- Prior art keywords
- cylinder
- rod
- exhaust tube
- pump conduit
- bracket
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a kind of vacuum coating equipments to maintain pump conduit pressure difference hand regulator, pumping rod is equipped in cylinder, pumping rod is connect with cylinder inner piston, pumping rod is flexibly connected an adjusting rod, cylinder is equipped with bracket, adjusting rod is connect with bracket, a positioning rod is also connected on adjusting rod, locating rod is equipped with teeth, exhaust tube is connected on bracket, piston is equipped in exhaust tube, air exhaust rod is connected on piston, air exhaust rod is connect with adjusting rod, exhaust tube is equipped with a pipe joint, a pressurized cylinder is connected on cylinder, pressurized cylinder and cylinder unilaterally connected, pressurized cylinder is equipped with pipe joint.The adjuster is provided with cylinder on the body, pumping rod in cylinder can be filled with gas into pressurized cylinder with piston, high pressure gas in pressurized cylinder is entered by pipe joint maintains pump conduit to adjust intraductal atmospheric pressure, an exhaust tube is additionally provided on the adjuster, exhaust tube is also connect with pump conduit is maintained, the adjusting to pipeline air pressure can be achieved manually in this way, improve the job stability for maintaining pump.
Description
Technical field
The utility model relates to a kind of vacuum coating equipments to maintain pump conduit pressure difference hand regulator.
Background technique
Vacuum coating equipment refers mainly to a kind of plated film for needing to carry out under higher vacuum, specifically includes many types, wraps
Include vacuum ionic evaporation, magnetron sputtering, MBE molecular beam epitaxy, many kinds such as PLD pulsed laser deposition.Main thought is divided into
Two kinds of evaporation and sputtering.The maintenance pump conduit of vacuum coating equipment is influenced the feelings that will appear upper lower tube body internal pressure difference by vacuum degree
Condition will affect the operation stability for maintaining pump when overpressure difference is larger.
Utility model content
The utility model mainly solves technical problem present in the prior art, to provide a kind of vacuum coating equipment dimension
Hold pump conduit pressure difference hand regulator.
The above-mentioned technical problem of the utility model is mainly to be addressed by following technical proposals：
A kind of vacuum coating equipment maintenance pump conduit pressure difference hand regulator includes a cylinder, is equipped with a pull in cylinder
One end of bar, pumping rod is connect with cylinder inner piston, and the other end of pumping rod is flexibly connected an adjusting rod, and one end of cylinder is equipped with one
Bracket, adjusting rod are flexibly connected with bracket, and a positioning rod is also flexibly connected on adjusting rod, and locating rod is equipped with multiple snapping teeth
Tooth is fixedly connected with an exhaust tube on bracket, piston is equipped in exhaust tube, is flexibly connected an air exhaust rod on piston, air exhaust rod and adjusts
Pole is flexibly connected, and exhaust tube is equipped with a first pipe interface, and the other end of cylinder connects a pressurized cylinder, pressurized cylinder it is hollow and
With cylinder unilaterally connected, pressurized cylinder is equipped with a second pipe interface.
As the utility model preferred embodiment, the bracket and cylinder are integrally formed.
As the utility model preferred embodiment, the casing wall of the cylinder is double-layer structure.
The vacuum coating equipment of the utility model maintains pump conduit pressure difference hand regulator to be provided with a gas on the body
Cylinder, the pumping rod in cylinder can be filled with gas with piston into pressurized cylinder, and the high pressure gas in pressurized cylinder is by pipe joint
Into maintaining pump conduit to adjust intraductal atmospheric pressure, an exhaust tube is additionally provided on the adjuster, exhaust tube is also connect with pump conduit is maintained,
In this way by the way that the adjusting to pipeline air pressure can be realized manually, the job stability for maintaining pump is improved.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is that the vacuum coating equipment of the utility model maintains the stereochemical structure signal of pump conduit pressure difference hand regulator
Figure.
Specific embodiment
The preferred embodiment of the utility model is described in detail with reference to the accompanying drawing, so that the advantages of the utility model
It can be easier to be readily appreciated by one skilled in the art with feature, to make the protection scope of the utility model apparent clear
Define.
As shown in Figure 1, a kind of vacuum coating equipment maintains pump conduit pressure difference hand regulator 1, it include a cylinder 10, cylinder
A pumping rod 20 is equipped in 10, one end of pumping rod 20 is connect with cylinder inner piston, and the other end of pumping rod 20 is flexibly connected one and adjusts
One end of pole 21, cylinder 10 is equipped with a bracket 11, and adjusting rod 21 is flexibly connected with bracket 11, is also flexibly connected on adjusting rod 21
A positioning rod 22, locating rod 22 are equipped with multiple snapping teeth, are fixedly connected with an exhaust tube 30 on bracket 11, set in exhaust tube 30
There is piston, an air exhaust rod 31 is flexibly connected on piston, air exhaust rod 31 is flexibly connected with adjusting rod 21, and exhaust tube 30 is equipped with one the
One pipe joint 32, the other end of cylinder 10 connect a pressurized cylinder 40, pressurized cylinder 40 it is hollow and with 10 unilaterally connected of cylinder, pressurization
Cylinder 40 is equipped with a second pipe interface 41.
It is further improved as to the utility model, the bracket 11 and cylinder 10 are integrally formed.
It is further improved as to the utility model, the casing wall of the cylinder 10 is double-layer structure.
The vacuum coating equipment of the utility model maintains pump conduit pressure difference hand regulator to be provided with a gas on the body
Cylinder, the pumping rod in cylinder can be filled with gas with piston into pressurized cylinder, and the high pressure gas in pressurized cylinder is by pipe joint
Into maintaining pump conduit to adjust intraductal atmospheric pressure, an exhaust tube is additionally provided on the adjuster, exhaust tube is also connect with pump conduit is maintained,
In this way by the way that the adjusting to pipeline air pressure can be realized manually, the job stability for maintaining pump is improved.
The mentality of designing for only illustrating the utility model in one embodiment above, in the case where system allows,
The utility model can be extended to while external more functional modules, to extend its function to greatest extent.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, any change or replacement expected without creative work be should be covered within the scope of the utility model.
Therefore, the protection scope of the utility model should be determined by the scope of protection defined in the claims.
Claims (3)
1. a kind of vacuum coating equipment maintains pump conduit pressure difference hand regulator（1）, which is characterized in that it include a cylinder（10）,
Cylinder（10）Inside it is equipped with a pumping rod（20）, pumping rod（20）One end connect with cylinder inner piston, pumping rod（20）The other end
It is flexibly connected an adjusting rod（21）, cylinder（10）One end be equipped with a bracket（11）, adjusting rod（21）With bracket（11）Activity is even
It connects, adjusting rod（21）On be also flexibly connected a positioning rod（22）, locating rod（22）It is equipped with multiple snapping teeth, bracket（11）On
It is fixedly connected with an exhaust tube（30）, exhaust tube（30）It is interior to be equipped with piston, an air exhaust rod is flexibly connected on piston（31）, air exhaust rod
（31）With adjusting rod（21）It is flexibly connected, exhaust tube（30）It is equipped with a first pipe interface（32）, cylinder（10）The other end
Connect a pressurized cylinder（40）, pressurized cylinder（40）Hollow and and cylinder（10）Unilaterally connected, pressurized cylinder（40）It is equipped with one second pipe
Pipeline joint（41）.
2. vacuum coating equipment according to claim 1 maintains pump conduit pressure difference hand regulator, which is characterized in that described
Bracket（11）And cylinder（10）It is integrally formed.
3. vacuum coating equipment according to claim 2 maintains pump conduit pressure difference hand regulator, which is characterized in that described
Cylinder（10）Casing wall be double-layer structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820369387.1U CN208121199U (en) | 2018-03-17 | 2018-03-17 | Vacuum coating equipment maintains pump conduit pressure difference hand regulator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820369387.1U CN208121199U (en) | 2018-03-17 | 2018-03-17 | Vacuum coating equipment maintains pump conduit pressure difference hand regulator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208121199U true CN208121199U (en) | 2018-11-20 |
Family
ID=64199269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820369387.1U Expired - Fee Related CN208121199U (en) | 2018-03-17 | 2018-03-17 | Vacuum coating equipment maintains pump conduit pressure difference hand regulator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208121199U (en) |
-
2018
- 2018-03-17 CN CN201820369387.1U patent/CN208121199U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181120 Termination date: 20190317 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |