CN208115196U - Based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm - Google Patents
Based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm Download PDFInfo
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- CN208115196U CN208115196U CN201820386661.6U CN201820386661U CN208115196U CN 208115196 U CN208115196 U CN 208115196U CN 201820386661 U CN201820386661 U CN 201820386661U CN 208115196 U CN208115196 U CN 208115196U
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 44
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 39
- 238000005336 cracking Methods 0.000 title claims abstract description 36
- 239000004065 semiconductor Substances 0.000 title claims abstract description 36
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000005052 trichlorosilane Substances 0.000 claims abstract description 36
- 238000012806 monitoring device Methods 0.000 claims abstract description 15
- 239000007789 gas Substances 0.000 claims description 45
- 238000004458 analytical method Methods 0.000 claims description 29
- 208000037656 Respiratory Sounds Diseases 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 238000012360 testing method Methods 0.000 claims description 4
- 230000007773 growth pattern Effects 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 3
- 230000002285 radioactive effect Effects 0.000 claims description 3
- 238000005070 sampling Methods 0.000 claims description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 238000002360 preparation method Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 150000002431 hydrogen Chemical class 0.000 description 6
- 231100000331 toxic Toxicity 0.000 description 5
- 230000002588 toxic effect Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000013480 data collection Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000013028 emission testing Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 206010011376 Crepitations Diseases 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000035987 intoxication Effects 0.000 description 1
- 231100000566 intoxication Toxicity 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Abstract
The utility model relates to a kind of automatic alarm devices based on polycrystalline silicon semiconductor rectifying column cracking, it is especially a kind of to be cracked autoalarm based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission, in polycrystalline silicon semiconductor preparation process since the phenomenon that many factors cause rectifying column to crack is monitored and automatic alarm.Including monitoring device part, control section, warning device part and auxiliary device part；Monitoring device part is using trichlorosilane detector and centralized multiple channel acousto emission detector；Control section includes alarm controller, computer and computer display, and computer display is connected with computer, and collection analysis software is equipped in computer；Warning device part is made of yellow led indicator light, red LED alarm lamp and buzzer；Auxiliary device includes solenoid valve, exhaust fan.Monitoring device part, warning device part and auxiliary device part pass through USB interface respectively and are connected with control section.
Description
Technical field
It is especially a kind of the utility model relates to a kind of automatic alarm device based on polycrystalline silicon semiconductor rectifying column cracking
Based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm, prepared by polycrystalline silicon semiconductor
The phenomenon that causing rectifying column to crack due to many factors in the process, is monitored and automatic alarm, by trichlorosilane detector with
And acoustic emission detector cracks to rectifying column and carries out real-time monitoring and timely early warning.
Background technique
Rectifying column is a very important device in polycrystalline silicon semiconductor production process, the refining effect of rectifying separation
Often determine the quality of polysilicon.For rectifying column as pressure vessel, dimensional parameters become more enlarged, and design structure becomes
Obtain increasingly complexization.In order to meet the industrial requirement of polycrystalline silicon semiconductor, it is necessary to correspondingly promote its interior media trichlorine
The operating pressure and operation temperature of hydrogen silicon, although pressure vessel uses high-strength material, harsh operating condition makes it
Institute is loaded increasing, and the factors such as defect crack present in welding process, cause it to occur in process of production in addition
The probability of failure also greatly increases.On 07 13rd, 2015, leakage pyrophoricity accident occurred for auspicious polysilicon rectifying column forever in Leshan, caused
Whole factory's device is stopped transport.Repeatedly there is Cracking Failure phenomenon in energy silicon three phase of industry device of spiral-screen column in Jiangsu, in the mistake of its periodic inspection
It has also been found that cylinder cracking phenomena is very universal in journey, every rectifying column finds, if not repairing, to be difficult to the presence of a large amount of crackles
Continue to come into operation, this will bring huge loss to enterprise.Therefore, to rectifying column cracking phenomena progress real-time monitoring and automatically
Alarm, for avoiding or reducing rectifying column Cracking Failure, the energy consumption for reducing rectifying, the separating effect and energy for improving distillation process
Utilization rate etc. has a very important significance.
The general volume of rectifying column is larger, once there is Cracking Failure phenomenon, not only trichlorosilane is caused to leak, and causes fire
Danger, can also cause damages to environment, personnel etc., cause that society is panic, cause great society's negative effect.
Summary of the invention
The utility model aim is to provide a kind of half based on gas-monitoring and acoustic emission in view of the above shortcomings
Conductor polysilicon rectifying column cracking autoalarm, is a kind of reality based on trichlorosilane gas detection and acoustic emission testing technology
When monitor polycrystalline silicon semiconductor rectifying column cracking phenomena automatic alarm device, to rectifying column crack carry out real-time dynamic monitoring it is pre-
It is alert, rectifying column Cracking Failure can be avoided or reduced in polycrystalline silicon semiconductor preparation process, prolonged its service life.For mentioning
It the degree of purity of high polycrystalline silicon semiconductor and reduces the energy consumption of rectifying, the Stability and dependability for improving rectifying etc. and has emphatically
The value and significance wanted.
The utility model adopts the following technical solutions to achieve：
It include monitoring dress based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm
Set part, control section, warning device part and auxiliary device part；Monitoring device part uses trichlorosilane gas detector
With centralized multiple channel acousto emission detector；Control section includes gas alarm controller, computer and computer display, meter
Calculation machine display is connected with computer, and sound emission collection analysis module is equipped in computer, is adopted to acoustic emission signal collector
Collect Data Analysis Services；Warning device part is made of yellow LED lamp indicator light, red LED alarm lamp and buzzer；Auxiliary dress
It sets including solenoid valve, exhaust fan.Monitoring device part, warning device part and auxiliary device part pass through respectively USB interface with
Control section is connected.The sound emission collection analysis module uses GT800 acoustic emission detection module.
The trichlorosilane detector can be settable multiple according to actual needs, are separately mounted to from radioactive source 7.5m
Or two in detector horizontal distance 15m.Due to highly volatile after trichlorosilane leakage, specific gravity of gas is heavier than air, and described three
Chlorine hydrogen silicon gas detector is mounted on the position away from ground 0.3m ~ 0.6m, and sensor site is downward.
The centralized multiple channel acousto emission detector is by sensor, preamplifier, acoustic emission signal collector etc.
Three major part compositions.Sensor it is settable several, be respectively disposed on around rectifying column weld seam or any part.Sound emission
2 capture cards are integrated in signal picker, each capture card there are 4 autonomous channels, and totally 8 channels, each channel sample rate are equal
For 10M, sampling precision 16bit.Acoustic emission signal collector and computer（Computer）Can directly it be connected by USB extended line interface
It connects, effective distance 100m.
The control section real-time monitoring gas leakage situation and the growth pattern of dynamic monitoring crackle simultaneously determine its hair
Raw position.
When utility model works, first, the trichlorosilane gas detector in monitoring device part is surrounded rectifying column
It is installed within one week at the pipe of 0.3m ~ 0.6m from the ground, real-time monitoring gas leakage situation and the gas concentration that will test turn
It changes electric signal into, passes through cable transmission to controller.The settable concentration point of controller, when gas leakage concentration meets or exceeds this
Concentration point, controller will issue alarm signal and start solenoid valve and exhaust fan, exclude hidden danger automatically.
Second, the acoustic emission sensor in monitoring device part is attached to around tower body, acquisition is received from acoustic emission source
Acoustic emission signal processes acoustic emission signal by acoustic emission signal collector after preamplifier amplifies, and is sent to meter
Calculation machine carries out recording and analyzing display acoustic emission source position, while sending control signal and giving warning device part.
Early warning based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm is automatic
Alarm method includes the following steps：
1）Gas monitoring portion：
Trichlorosilane gas detector was installed at the pipe of 0.3m ~ 0.6m from the ground around rectifying column one week, gas
Digital display module on detector can be with the trichlorosilane gas concentration value in the monitored region of real-time display, and will test
Gas concentration be converted into electric signal, pass through cable transmission to alarm controller.Controller answer in-wall mounting in duty room or
On the wall of monitoring room, apart from ground 160cm or so;
2）Acoustic emission detection part：
Sensor in acoustic emission detector is affixed on around rectifying column tower body, is connected to by noiselike signal line preposition
Amplifier, then electric signal is transmitted to by signal picker by coaxial cable.Signal picker is according to the condition of computer installation
Computer is transmitted to after sound emission data are acquired and are handled.The acquisition analysis system being equipped in computer can to waveform into
Row signature analysis and positioning analysis.
3）Early warning and alarming part：
（1）When sound emission collection analysis module recognizes the Signal of Cracks of generation, and gas detector detects trichlorine hydrogen
Silicon concentration is in 1mg/m3~3mg/m3When, reach three-level alert status, controller and computer are issued to warning device part respectively
Instruction.Warning device part yellow led indicator light lights at this time, and staff is reminded to find crackle generation by analyzing software
Position, and it is handled in time;
（2）When sound emission collection analysis module recognizes Signal of Cracks and gas leakage concentration in 3mg/m3~5mg/m3When,
Reach second level alert status, computer issues signal to warning device part, and controller is respectively to warning device part and auxiliary
Device part issues instruction.Yellow led indicator light in warning device part extinguishes at this time, and red LED alarm lamp lights, auxiliary device
Part exhaust fan is opened, and prompting staff checks to scene rectifying column and Crack handling, prevents trichlorosilane into one
Step leakage;
（3）When sound emission collection analysis module recognizes Signal of Cracks and gas leakage concentration reaches 5mg/m3When, reach
Level-one alert status, computer issue signal to warning device part, and controller is respectively to warning device part and auxiliary device
Part issues instruction.Warning device part red LED alarm lamp lights at this time, and buzzer work issues and continues sound, auxiliary dress
Set part exhaust fan opening, solenoid valve is closed.Staff is notified to handle immediately to scene, to prevent from leaking aggravation
Fire and toxic hazard.
The utility model is based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm
As the cracking warning device for rectifying column in polycrystalline silicon semiconductor production process, have easy to operate, dual real-time monitoring,
The advantages that dynamic detection crackle, can carry out automatic alarm and to the trichlorosilane of leakage to the cracking of polycrystalline silicon semiconductor rectifying column
It is automatically processed, prevents from causing rectification efficiency to reduce due to the trichlorosilane leakage that rectifying column cracks and occurs, causing fire
Toxic hazard, to cause casualties and property loss.The Stability and dependability of rectifying is greatly improved, fire is reduced
A possibility that calamity is poisoned, provides a safer environment for personnel and equipment.
Detailed description of the invention
Below with reference to attached drawing, the utility model is described in further detail：
Fig. 1 is the knot that device is filled based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking automatic alarm
Structure schematic diagram.
In figure：1, trichlorosilane gas detector；2, gas alarm controller；3, acoustic emission sensor；4, preposition amplification
Device；5, acoustic emission signal collector；6, computer；7, warning device；8, exhaust fan；9, solenoid valve.
Specific embodiment
Referring to attached drawing 1, based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm
Including monitoring device part, control section, warning device part and auxiliary device part；Monitoring device part uses trichlorosilane
Gas detector 1 and centralized multiple channel acousto emission detector；Control section includes gas alarm controller 2, computer and meter
Calculation machine display, computer display are connected with computer 6, and sound emission collection analysis module is equipped in computer 6, send out sound
Penetrate signal picker analysis of data collected processing；7 part of warning device is by yellow LED lamp indicator light, red LED alarm lamp and bee
Ring device composition；Auxiliary device includes solenoid valve 9, exhaust fan 8.Monitoring device part, warning device part and auxiliary device part
It is connected respectively by USB interface with control section.The sound emission collection analysis module uses GT800 acoustic emission detection mould
Block.
The trichlorosilane gas detector 1 can be settable multiple according to actual needs, are separately mounted to from radioactive source
In 7.5m or in two detector horizontal distance 15m.Due to highly volatile after trichlorosilane leakage, specific gravity of gas is heavier than air, institute
The trichlorosilane gas detector 1 stated is mounted on the position away from ground 0.3m ~ 0.6m, and sensor site is downward.
The centralized multiple channel acousto emission detector is by sensor, preamplifier 4, acoustic emission signal collector 5
It is formed Deng three major parts.Sensor it is settable several, be respectively disposed on around rectifying column weld seam or any part.Sound hair
It penetrates and integrates 2 capture cards in signal picker 5, each capture card has 4 autonomous channels, totally 8 channels, each channel sample rate
It is 10M, sampling precision 16bit.Acoustic emission signal collector and computer（Computer）Can directly it be connected by USB extended line interface
It connects, effective distance 100m.The sensor uses commercially available acoustic emission sensor 3.
The control section real-time monitoring gas leakage situation and the growth pattern of dynamic monitoring crackle simultaneously determine its hair
Raw position.
It is based on trichlorine based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm
Hydrogen silicon gas detector 1 and acoustic emission testing technology, which crack to rectifying column, carries out the automatic alarm early warning of real-time monitoring.Work
When, the acoustical signal to crack from rectifying column received is transformed into electric signal by acoustic emission sensor 3, passes through preamplifier
The amplification of sound emission electric signal or driving capability by the faint driving capability of sensor output improve to become can transmit quilt at a distance
The received sound emission electric signal of data collection system, then electric signal is transmitted to signal picker by coaxial cable.Collector
Sound emission data are acquired according to the condition of computer installation, continuous implement at signal is carried out to big data quantity Wave data
Reason, extraction are transmitted to computer 6 after being converted into the acoustic emission parameters data of small data quantity again.The acquisition being equipped in computer point
Analysis system can carry out signature analysis and positioning analysis to waveform, determine the position that crackle occurs on rectifying column, and send signal
To warning device and auxiliary device.If crackle is handled not in time, system will show warning window and add up to crack sound
Emit the number of signal event.
Whether region locating for trichlorosilane gas detector real-time monitoring has trichlorosilane leakage simultaneously, if leakage concentration is super
Personnel are crossed to concentration set by alarm controller, controller will transmit a signal to warning device.Come when warning device receives
When from the dual signal of controller and computer, yellow led indicator light, red LED alarm lamp and buzzer are started to work.
Early warning based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm is automatic
Alarm method includes the following steps：
1）Gas monitoring portion：
Trichlorosilane detector was installed at the pipe of 0.3m ~ 0.6m from the ground around rectifying column one week, detection of gas
Digital display module on device can be with the trichlorosilane gas concentration value in the monitored region of real-time display, and the gas that will test
Bulk concentration is converted into electric signal, passes through cable transmission to alarm controller.Control wall, which is answered, hanging is mounted on duty room or monitoring
On the wall of room, apart from ground 160cm or so;
2）Acoustic emission detection part：
Sensor in acoustic emission detector is affixed on around rectifying column tower body, is connected to by noiselike signal line preposition
Amplifier, then electric signal is transmitted to by signal picker by coaxial cable.Collector is according to the condition of computer installation to sound
Transmitting data are acquired and are transmitted to computer after handling.The acquisition analysis system being equipped in computer can carry out waveform special
Sign analysis and positioning analysis.
3）Early warning and alarming part：
（1）When sound emission collection analysis module recognizes the Signal of Cracks of generation, and gas detector detects trichlorine hydrogen
Silicon concentration is in 1mg/m3~3mg/m3When, reach three-level alert status, controller and computer are issued to warning device part respectively
Instruction.Warning device part yellow led indicator light lights at this time, and staff is reminded to find crackle generation by analyzing software
Position, and it is handled in time;
（2）When sound emission collection analysis module recognizes Signal of Cracks and gas leakage concentration in 3mg/m3~5mg/m3When,
Reach second level alert status, computer issues signal to warning device part, and controller is respectively to warning device part and auxiliary
Device part issues instruction.Yellow led indicator light in warning device part extinguishes at this time, and red LED alarm lamp lights, auxiliary device
Part exhaust fan is opened, and prompting staff checks to scene rectifying column and Crack handling, prevents trichlorosilane into one
Step leakage;
（3）When sound emission collection analysis module recognizes Signal of Cracks and gas leakage concentration reaches 5mg/m3When, reach
Level-one alert status, computer issue signal to warning device part, and controller is respectively to warning device part and auxiliary device
Part issues instruction.Warning device part red LED alarm lamp lights at this time, and buzzer work issues and continues sound, auxiliary dress
Set part exhaust fan opening, solenoid valve is closed.Staff is notified to handle immediately to scene, to prevent from leaking aggravation
Fire and toxic hazard.
It is described to be cracked autoalarm based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission, for
Polycrystalline silicon semiconductor rectifying column cracking phenomena carries out three-level early warning, the activity situation and trichlorine hydrogen of double monitoring rectifying column crackle
Silicon gas leakage situation.
The utility model is based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm
Real-time dynamic monitoring and early warning are carried out for the cracking of rectifying column in polycrystalline silicon semiconductor production process, can be applied to different condition
In the production process of environment lower semiconductor polysilicon, by being acquired point to the acoustic emission signal that rectifying column cracks
Analysis, and concentration monitor is carried out to the leakage situation of rectifying column peripheral region trichlorosilane, reach to polycrystalline silicon semiconductor rectifying
The automatic alarm of tower cracking phenomena and the automatic purpose for excluding hidden danger, so that staff adopts an effective measure in time, avoid because
Rectifying column cracking leads to the fire intoxication accident of trichlorosilane leakage and initiation.
Embodiment 1：
In use, first, trichlorosilane detector to be installed on to the pipe of 0.3m ~ 0.6m from the ground around rectifying column for one week
Place, two detector horizontal distances are within 15m, and sensor site is downward.Second, multiple acoustic emission sensors are surrounded rectifying
It is affixed on tower body within tower one week, each sensor connects a preamplifier, then is connected to sound emission letter together by cable
Number collector, is finally connected to computer by USB extended line.
It is now assumed that certain polycrystalline silicon semiconductor rectifying column cracks, method for early warning includes the following steps：
1）Acoustic emission sensor receives the acoustical signal from rectifying column cracking and is converted into as electric signal, by preposition
The sound emission electric signal for the faint driving capability that amplifier exports sensor, which amplifies, or driving capability improves becomes energy at a distance
Transmission is transmitted to signal picker by coaxial cable by the received sound emission electric signal of data collection system, then by electric signal.
The condition that collector is arranged according to computer software is acquired sound emission data, carries out to big data quantity Wave data continuous
Implement signal processing, extraction is transmitted to computer after being converted into the acoustic emission parameters data of small data quantity again.It is filled in computer
Some acquisition analysis systems can carry out signature analysis and positioning analysis to waveform, determine the position that crackle occurs on rectifying column,
And transmit a signal to warning device and auxiliary device.If crackle is handled not in time, system will show warning window and add up
The number of acoustic emission signal event is cracked, while whether region locating for trichlorosilane gas detector real-time monitoring has trichlorine
The leakage of hydrogen silicon, if leakage concentration is more than personnel to concentration set by alarm controller, controller will transmit a signal to alarm dress
It sets;
2）When sound emission collection analysis module recognizes the Signal of Cracks of generation, and gas detector detects trichlorosilane
Concentration is in 1mg/m3~3mg/m3When, reach three-level alert status, controller and computer are issued to warning device part respectively to be referred to
It enables.Warning device part yellow led indicator light lights at this time, and staff is reminded to find the position of crackle generation by analyzing software
It sets, and it is handled in time;
3）When sound emission collection analysis module recognizes Signal of Cracks and gas leakage concentration in 3mg/m3~5mg/m3When, it reaches
To second level alert status, computer issues signal to warning device part, and controller is respectively to warning device part and auxiliary dress
It sets part and issues instruction.Yellow led indicator light in warning device part extinguishes at this time, and red LED alarm lamp lights, auxiliary device portion
Exhaust fan is divided to open, prompting staff checks to scene rectifying column and Crack handling, prevents trichlorosilane further
Leakage;
4）When sound emission collection analysis module recognizes Signal of Cracks and gas leakage concentration reaches 5mg/m3When, reach one
Grade alert status, computer issue signal to warning device part, and controller is respectively to warning device part and auxiliary device portion
Distribute and instructs out.Warning device part red LED alarm lamp lights at this time, and buzzer work issues and continues sound, auxiliary device
Part exhaust fan is opened, solenoid valve is closed.Staff is notified to handle immediately to scene, to prevent leakage aggravation from fire occurs
Calamity and toxic hazard.
In the example of the utility model, trichlorosilane gas detecting instrument and alarm controller select the production of BOAN company
RBT-6000-ZLGX type is in wire mounting trichlorosilane alarm detector and RBK-6000-ZL9 controller；Acoustic emission detector
Select the 8 channel kilomega network Acoustic radiating instrument of PXWAE-8G of Peng Xiang scientific & technical corporation production；Exhaust fan and solenoid valve use commercially available row
Fan and solenoid valve；Buzzer uses commercially available buzzer；Yellow led indicator light and red LED alarm lamp are all made of commercially available
LED light.
The utility model has operation letter as the cracking alarm for rectifying column in polycrystalline silicon semiconductor production process
The advantages that single, double heavy real-time monitoring, dynamic detection crackle, can carry out alarm and to the trichlorosilane of leakage to the cracking of rectifying column
It is automatically processed, prevents from causing rectification efficiency to reduce due to the trichlorosilane leakage that rectifying column cracks and occurs, causing fire
Toxic hazard, to cause casualties and property loss.Therefore, the utility model utilizes gas-monitoring and acoustic emission detection skill
Art carries out real-time dynamic monitoring to polycrystalline silicon semiconductor rectifying column cracking phenomena, improves the Stability and dependability of rectifying, subtracts
A possibility that having lacked fire poisoning, a safer environment is provided for personnel and equipment.
Claims (5)
1. a kind of based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm, feature exists
In：
Including monitoring device part, control section, warning device part and auxiliary device part；Monitoring device part uses trichlorine
Hydrogen silicon detector and centralized multiple channel acousto emission detector；Control section includes that alarm controller, computer and computer are aobvious
Show that device, computer display are connected with computer, sound emission collection analysis module is equipped in computer, acoustic emission signal is adopted
Storage analysis of data collected processing；Warning device part is made of yellow LED lamp indicator light, red LED alarm lamp and buzzer；
Auxiliary device includes solenoid valve and exhaust fan；Monitoring device part, warning device part and auxiliary device part pass through USB respectively
Interface is connected with control section.
2. according to claim 1 a kind of based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking
Autoalarm, it is characterised in that：
The trichlorosilane detector be arranged according to actual needs it is multiple, be separately mounted to from radioactive source 7.5m or two detection
In device horizontal distance 15m.
3. according to claim 1 a kind of based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking
Autoalarm, it is characterised in that：
The trichlorosilane detector is mounted on the position away from ground 0.3m ~ 0.6m, and sensor site is downward.
4. according to claim 1 a kind of based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking
Autoalarm, it is characterised in that：
The centralized multiple channel acousto emission detector is by three sensor, preamplifier, acoustic emission signal collector portions
It is grouped as；Several are arranged in sensor, are respectively disposed on around rectifying column weld seam or any part, in acoustic emission signal collector
2 capture cards are integrated, each capture card there are 4 autonomous channels, totally 8 channels, and each channel sample rate is 10M, sampling essence
Degree is 16bit；Acoustic emission signal collector and computer are directly connected to by USB extended line interface, effective distance 100m.
5. according to claim 1 a kind of based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking
Autoalarm, it is characterised in that：
The control section real-time monitoring gas leakage situation and the growth pattern of dynamic monitoring crackle simultaneously determine what it occurred
Position；
When work, first, the trichlorosilane detector in monitoring device part was installed on from the ground around rectifying column one week
At the pipe of 0.3m ~ 0.6m, the real-time monitoring gas leakage situation and gas concentration that will test is converted into electric signal passes through line
Cable is transferred to controller, and the settable concentration point of controller, when gas leakage concentration meets or exceeds the concentration point, controller will be sent out
Alarm signal and start solenoid valve and exhaust fan out, excludes hidden danger automatically；
Second, the acoustic emission sensor in monitoring device part is attached to around tower body, sound hair of the acquisition from acoustic emission source is received
Signal is penetrated, after preamplifier amplifies, acoustic emission signal is processed by acoustic emission signal collector, and be sent to computer
It carries out recording and analyzing display acoustic emission source position, while sending control signal and giving warning device part.
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| CN108245918A (en) * | 2018-03-21 | 2018-07-06 | 南京工业大学 | Based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108245918A (en) * | 2018-03-21 | 2018-07-06 | 南京工业大学 | Based on gas-monitoring and the polycrystalline silicon semiconductor rectifying column of acoustic emission cracking autoalarm |
| CN108245918B (en) * | 2018-03-21 | 2023-07-14 | 南京工业大学 | Automatic alarm for cracking of semiconductor polysilicon rectifying tower based on gas monitoring and sound emission technology |
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