CN208058409U - A kind of high-purity rare gas gas cylinder pretreatment system - Google Patents

Abstract

Include baking oven, high pressure nitrogen feeding mechanism and recycling air bag equipped with gas cylinders group the utility model is related to a kind of high-purity rare gas gas cylinder pretreatment system；High pressure nitrogen feeding mechanism is connect by main pipeline with gas cylinders group, and blow-down pipe and branch pipe(tube) are separately connected on main pipeline, and branch pipe(tube) is connect with recycling air bag；Gas control valve is installed on main pipeline, recovery control valve is installed on branch pipe(tube), blow valve is installed on blow-down pipe；Carry out that gas cylinder preprocess method includes the recycling that rare gas is retained in gas cylinder, Wei Shui and the remaining control of micro- oxygen and gas cylinder inspect analytical procedure by random samples in gas cylinder using the system.The utility model makes high-purity pretreated efficiency of rare gas gas cylinder be increased dramatically, while also significantly reducing cost of labor.

Description

A kind of high-purity rare gas gas cylinder pretreatment system

Technical field

The utility model is related to a kind of high-purity rare gas gas cylinder pretreatment systems, belong to gas filling equipment pretreatment skill Art field.

Background technology

The rare gas such as helium, neon, krypton, xenon are chiefly used in the fields such as electronics industry, aerospace, illuminating engineering, ordinary circumstance Under lean in compression device indentation gas cylinder and store and transport, quality is required to reach 5N ~ 6N ranks；Due to these rare gas Purity requirement is almost harsh, especially as the xenon of satellite booster agent, it is desirable that micro-water content ﹤ 0.01PPm in xenon, micro- oxygen contain ﹤ 0.1PPm are measured, so very strict to containing the total impurities control standard in gas cylinder；To meet standard requirement, cylinder filling It is required to be pre-processed before rare gas, Wei Shui, micro- oxygen impurities component must satisfy in residual gas in treated gas cylinder Wei Shui in product, micro- oxygen impurities component are filled after the completion of cylinder filling in the range of quality standard controls.

Existing gas cylinder pretreating process is usually single bottle heating, is replaced using nitrogen, and micro- water in gas cylinder after handling, Micro- oxygen demand is examined respectively by bottle, while remaining in gas cylinder the impurity component such as Wei Shui, micro- oxygen in gas before by cylinder treatment（Letter Gas ballon background）How many influences causes the pretreatment time of gas cylinder longer, or even needs that pretreatment is repeated, and substantially drops Low production efficiency, while the increase of cost of labor is caused, it is unfavorable for the promotion of the performance of enterprises.

Utility model content

The technical problem to be solved by the utility model is to provide a kind of high-purity rare gas gas cylinder pretreatment systems, can be big Width promotes gas cylinder and pre-processes efficiency, reduces cost of labor.

Solve above-mentioned technical problem technical solution be：

A kind of high-purity rare gas gas cylinder pretreatment system includes baking oven, high pressure nitrogen feeding mechanism equipped with gas cylinders group With recycling air bag；High pressure nitrogen feeding mechanism is connect by main pipeline with gas cylinders group, and blow-down pipe and branch are separately connected on main pipeline Pipeline, branch pipe(tube) are connect with recycling air bag；Gas control valve is installed on main pipeline, recovery control valve is installed on branch pipe(tube), Blow valve is installed on blow-down pipe.

A kind of above-mentioned high-purity rare gas gas cylinder pretreatment system, the high pressure nitrogen feeding mechanism include passing through supervisor Liquid nitrogen storage, liquid nitrogen pump, air vaporizer, high pressure nitrogen outlet valve and the filter that road is linked in sequence；Go out in high pressure nitrogen Filter lateral pressure table and vaporizer lateral pressure table are installed respectively on the main pipeline of mouth valve both sides, thermometer is installed on baking oven.

A kind of above-mentioned high-purity rare gas gas cylinder pretreatment system, the master between the liquid nitrogen pump and air vaporizer Check-valves is installed on pipeline, safety valve is installed on the main pipeline between high pressure nitrogen outlet valve and vaporizer lateral pressure table, is returned Safety valve is installed on branch pipe(tube) between getter capsule and recovery control valve.

The application method of the utility model is to be divided into following three steps：

Step 1: retaining the recycling of rare gas in gas cylinder：By multiple pending gas cylinder compositions of quasi- storage same media Gas cylinder is assembled into baking oven, the connection of the main pipeline of gas cylinder mouth and pretreatment system, close after baking oven control oven temperature 90~ 105 DEG C are heated, and open gas control valve during heating and recovery control valve enters back residual gas dielectric film filter in gas cylinder Getter capsule is then shut off recovery control valve, opens high pressure nitrogen outlet valve and pressure nitrogen gas is filled with gas cylinders group, close high pressure later Nitrogen outlet valve opens the recycling that recovery control valve carries out residual gas medium again；After repetition aforesaid operations 3~4 times, gas cylinder In nitrogen content up to 99% or more, i.e., the rate of recovery of rare gas medium is retained in gas cylinder 99% or more；

Step 2: Wei Shui, the remaining control of micro- oxygen in gas cylinder：Recovery control valve is closed, oven temperature is controlled 90~105 It DEG C is heated again, high pressure nitrogen outlet valve is opened during heating, high pressure nitrogen is filled in the gas cylinder of gas cylinders group, when inflation Between control at 3~6 minutes, then open blow valve gas in bottle is vented；Emptying terminates, and blow valve is closed, again to gas cylinder In be filled with nitrogen, be then vented again；After repetition aforesaid operations 3~4 times, blow valve is closed, the nitrogen of certain pressure is reserved in gas cylinder Gas；

Step 3: gas cylinder sampling observation analysis：Inspect arbitrary 2 gas cylinders in gas cylinders group by random samples, the 1st gas cylinder accesses analyzer for trace water Water trace analysis is carried out, analyzer for trace water shows that micro-water content is less than 0.33ppm in the gas cylinder, meets the gas cylinder for filling rare gas Middle micro-water content standard requirement；2nd gas cylinder accesses micro- oxygen chromatograph, shows that micro- oxygen content is less than 1.6ppm, satisfaction is filled Fill micro- oxygen content standard requirement in the gas cylinder of rare gas；1st gas cylinder is accessed into micro- oxygen chromatograph, shows micro- oxygen content Less than 1.6ppm；2nd gas cylinder is accessed into analyzer for trace water, display micro-water content is less than 0.33ppm；It proves micro- in 2 gas cylinders There are proportionate relationships with micro-water content for oxygen, i.e., when micro-water content is less than 0.33ppm in gas cylinder, micro- oxygen content is less than 1.6ppm； It is satisfied by micro- oxygen and the requirement of micro- water management standard in the gas cylinder for filling high-purity rare gas, filling for high-purity rare gas can be carried out Dress.

The heating of existing single bottle is changed to 4~6 gas cylinders while heated by the utility model, improves gas cylinder pretreatment effect Rate；It is proved simultaneously by a large amount of commerical tests, as long as micro- oxygen, micro- water symbol in 2 gas cylinders in its gas cylinders group after pretreatment It closes high-purity rare gas and fills requirement, other all gas cylinders can meet standard requirement, eliminate and be needed in the prior art by bottle The step of check analysis, further improves gas cylinder pretreatment efficiency.

The beneficial effects of the utility model are：

The high-purity rare gas gas cylinder pretreatment system of the utility model makes high-purity pretreated efficiency of rare gas gas cylinder obtain To being substantially improved；After the application of Handan Iron and Steel Co Gas Plant, bottle handles Wei Shui, micro- oxygen process time is handled 2 hours by past single bottle and shortened It is handled 0.83 hour to bottle group, treatment effeciency improves 14.4 times；Cost of labor is also significantly reduced simultaneously, is conducive to enterprise The promotion of benefit.

Description of the drawings

Fig. 1 is the utility model gas cylinder pretreatment system schematic diagram；

In figure label for：Baking oven 1, recycling air bag 2, main pipeline 3, gas cylinders group 4, blow-down pipe 5, branch pipe(tube) 6, gas control valve 7, recovery control valve 8, blow valve 9, liquid nitrogen storage 10, liquid nitrogen pump 11, air vaporizer 12, high pressure nitrogen outlet valve 13, mistake Filter 14, vaporizer lateral pressure table 15, thermometer 16, liquid nitrogen pump check-valves 17, filter lateral pressure table 18, safety valve 19.

Specific implementation mode

Fig. 1 shows that the utility model provides a kind of high-purity rare gas gas cylinder pretreatment system, including baking oven 1, elevated pressure nitrogen Gas feeding mechanism and recycling air bag 2；Gas cylinders group 4 is housed, gas cylinders group 4 is made of 4~6 pending gas cylinders, baking oven 1 in baking oven 1 On thermometer 16 is installed, for showing the temperature in baking oven 1；High pressure nitrogen feeding mechanism includes being connected by 3 sequence of main pipeline Liquid nitrogen storage 10, liquid nitrogen pump 11, liquid nitrogen pump check-valves 17, air vaporizer 12, vaporizer lateral pressure table 15, the safety valve connect 19, high pressure nitrogen outlet valve 13, filter lateral pressure table 18 and filter 14；Liquid nitrogen pump 11 is for extracting in liquid nitrogen storage 10 Liquid nitrogen；Empty bath clarifier 12 is used for vaporized liquid nitrogen；Filter 14 is used to filter the nitrogen after vaporization；Filter lateral pressure table 18 It is used to show the nitrogen pressure of 13 both sides of high pressure nitrogen outlet valve with vaporizer lateral pressure table 15；Main pipeline 3 is drawn by filter 14 Go out and is connect afterwards with the bottleneck of each gas cylinder in gas cylinders group 4；Gas is installed on main pipeline 3 between filter 14 and gas cylinders group 4 Body control valve 7；It is separately connected blow-down pipe 5 and branch pipe(tube) 6, branch pipe on main pipeline 3 between filter 14 and gas control valve 7 Road 6 is connect with recycling air bag 2, and recovery control valve 8 and safety valve 19 are equipped on branch pipe(tube) 6, blow valve is equipped on blow-down pipe 5 9。

High-purity pretreated method of rare gas gas cylinder is carried out using the utility model to include the following steps：

Step 1 is that the recycling step of rare gas medium is retained in gas cylinder：4~6 quasi- storage same medias are waited locating Qi-regulating bottle forms gas cylinders group 4 and is packed into baking oven 1, and the main pipeline 3 of gas cylinder mouth and pretreatment system connects, and is controlled after closing baking oven 1 Oven temperature is heated at 90~105 DEG C, 18~22min of heating time, and gas control valve 7 is opened during heating herein and is returned It receives control valve 8 and residual gas dielectric film filter in gas cylinder is entered to recycle air bag 2, be then shut off recovery control valve 8, open high pressure nitrogen Outlet valve 13, the liquid nitrogen in liquid nitrogen storage 10 are extracted out by liquid nitrogen pump 11, and nitrogen is imported gas cylinders group 4 after the filtering of filter 14, When filter lateral pressure table 18 shows nitrogen pressure in 0.4~0.6MPa, high pressure nitrogen outlet valve 13 is closed, opens recycling control Valve 8 processed carries out the recycling of residual gas medium in gas cylinder again；Aforesaid operations 3~4 are repeated in the heating duration of 18~22min After secondary, for nitrogen content in gas cylinder up to 99% or more, filter lateral pressure table 18 shows nitrogen pressure in~0.01MPa, i.e. gas The rate of recovery of gas medium is retained 99% or more in bottle；

Step 2 is Wei Shui, the remaining rate-determining steps of micro- oxygen in gas cylinder：After the completion of step 1, recovery control valve 8 is closed, is dried The temperature control of case 1 is heated again at 90~105 DEG C, when reheating a length of 18~22min, open elevated pressure nitrogen during heating High pressure nitrogen is filled in the gas cylinder of gas cylinders group 4 by gas outlet valve 13, and for inflationtime after 3~6 minutes, filter lateral pressure table 18 is aobvious Show that pressure is 5~6MPa, then opens blow valve 9 and be vented；Blow valve 9 is closed, is filled with nitrogen into gas cylinders group 1 again, After filter lateral pressure table 18 shows that pressure is 5~6MPa, opens blow valve 9 and be vented again；After repetition aforesaid operations 3~4 times, close Close blow valve 9, filter lateral pressure table 18 shows in gas cylinder that nitrogen pressure is 0.4~0.6MPa, pressure in gas cylinders group at this time Nitrogen is for testing and analyzing；

Step 3 is that gas cylinder inspects analytical procedure by random samples：Inspect arbitrary 2 gas cylinders, the 1st gas cylinder access by random samples from gas cylinders group 4 HAL03 type analyzer for trace water carries out water trace analysis, and analyzer for trace water shows that micro-water content is less than 0.33ppm in the gas cylinder, meets Fill micro-water content standard requirement in the gas cylinder of rare gas；2nd gas cylinder accesses micro- oxygen chromatograph, shows micro- oxygen content Less than 1.6ppm, meet micro- oxygen content standard requirement in the gas cylinder for filling rare gas；1st gas cylinder is accessed into micro- oxygen chromatography point Analyzer, display show that micro- oxygen content is less than 1.6ppm；2nd gas cylinder is accessed into analyzer for trace water, display micro-water content is less than 0.33ppm；Prove that there are proportionate relationships with micro-water content for micro- oxygen in 2 gas cylinders, i.e., when in gas cylinder micro-water content less than 0.33ppm When, micro- oxygen content is less than 1.6ppm；It is satisfied by micro- oxygen and the requirement of micro- water management standard in the gas cylinder for filling high-purity rare gas, it can To carry out filling for high-purity rare gas.

Claims (3)

1. a kind of high-purity rare gas gas cylinder pretreatment system, it is characterised in that：It includes that gas cylinders group is housed（4）Baking oven（1）, High pressure nitrogen feeding mechanism and recycling air bag（2）；High pressure nitrogen feeding mechanism passes through main pipeline（3）With gas cylinders group（4）Connection, it is main Pipeline（3）On be separately connected blow-down pipe（5）And branch pipe(tube)（6）, branch pipe(tube)（6）With recycling air bag（2）Connection；Main pipeline（3）On Gas control valve is installed（7）, branch pipe(tube)（6）On recovery control valve is installed（8）, blow-down pipe（5）On blow valve is installed （9）.

2. a kind of high-purity rare gas gas cylinder pretreatment system as described in claim 1, it is characterised in that：The high pressure nitrogen Feeding mechanism includes passing through main pipeline（3）The liquid nitrogen storage being linked in sequence（10）, liquid nitrogen pump（11）, air vaporizer（12）, High pressure nitrogen outlet valve（13）And filter（14）；In high pressure nitrogen outlet valve（13）The main pipeline of both sides（3）It is upper to install respectively Filter lateral pressure table（18）With vaporizer lateral pressure table（15）, baking oven（1）On thermometer is installed（16）.

3. a kind of high-purity rare gas gas cylinder pretreatment system as claimed in claim 2, it is characterised in that：The liquid nitrogen pump （11）And air vaporizer（12）Between main pipeline（3）Upper installation check-valves（17）, high pressure nitrogen outlet valve（13）And vapour Change device lateral pressure table（15）Between main pipeline（3）On safety valve is installed（19）, recycle air bag（2）And recovery control valve（8） Between branch pipe(tube)（6）On safety valve is installed（19）.