CN208055455U - A kind of deformation adjusting apparatus for cathode bar magnet - Google Patents
A kind of deformation adjusting apparatus for cathode bar magnet Download PDFInfo
- Publication number
- CN208055455U CN208055455U CN201820575330.7U CN201820575330U CN208055455U CN 208055455 U CN208055455 U CN 208055455U CN 201820575330 U CN201820575330 U CN 201820575330U CN 208055455 U CN208055455 U CN 208055455U
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- China
- Prior art keywords
- bar magnet
- cathode bar
- guide rail
- adjusting apparatus
- column
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Abstract
The utility model is related to field of glass production technology,More particularly to a kind of deformation adjusting apparatus for cathode bar magnet,Including pedestal,Guide rail on the pedestal,The supporting rack being erected above the pedestal and the guide rail,Hydraulic jack on support frame as described above and right over the guide rail,Cathode bar magnet to be corrected along the guide rail length extending direction slide setting on the guide rail,Cathode bar magnet described in the briquetting face of the hydraulic jack,The briquetting is equipped with pressure sensor,The guide rail immediately below the briquetting is equipped with range sensor,The pressure sensor and the range sensor are electrically connected with data acquisition device,By using the adjusting apparatus of the utility model,Easily the cathode bar magnet of deformation can be corrected,To improve the access times of cathode bar magnet,Reduce production cost.
Description
Technical field
The utility model is related to field of glass production technology, and in particular to a kind of deformation for cathode bar magnet adjusts dress
It sets.
Background technology
Coating wire rotating cathode bar magnet in glass production, magnet is sealed in inside cathode bar magnet, by using water cooling side
Formula takes away the heat generated in sputtering process, cooling to achieve the purpose that.Cathode bar magnet is used for during vacuum magnetic-control sputtering, is carried
For sputtering required magnetic field.During replacing target, need to dismantle target and magnetic cylinder, while magnet through making after a period of time
With due to the influence of environment and Wen Sheng, leading to magnet demagnetization etc., cathode bar magnet need to be dismantled and replace magnet, and clean maintenance cathode
Bar magnet.
The main portions of cathode bar magnet deformation are centre position, and circular runout is big.In the prior art for the cathode of deformation
Bar magnet can not be corrected, and new cathode bar magnet is needed replacing when its deflection is excessive.
Invention content
The utility model provides a kind of deformation adjusting apparatus for cathode bar magnet, can be easily to the cathode of deformation
Bar magnet is corrected, and to improve the access times of cathode bar magnet, reduces production cost.
In order to achieve the above objectives, the technical solution adopted in the utility model is：A kind of deformation for cathode bar magnet adjusts
Device, including pedestal, the guide rail on the pedestal, the supporting rack being erected above the pedestal and the guide rail, installation
Hydraulic jack on support frame as described above and right over the guide rail, the length of cathode bar magnet to be corrected along the guide rail
The setting of extending direction sliding is spent on the guide rail, cathode bar magnet described in the briquetting face of the hydraulic jack, the pressure
Block is equipped with pressure sensor, is located at the guide rail immediately below the briquetting and is equipped with range sensor, the pressure sensing
Device and the range sensor are electrically connected with data acquisition device.
Further, the pedestal is I-steel, and the I-steel includes the first flange plate and second wing being mutually parallel
Listrium, and between first flange plate and second flange plate and the web that is respectively perpendicular with it, described first
Flange plate is installed in ground, and the guide rail is set on second flange plate, the length direction parallel described second of the guide rail
The length direction of flange plate.
Further, support frame as described above includes the first column and the second column being vertically arranged, and is set up in
Crossbearer at the top of first column and second column, the crossbearer is horizontally extending, first column, described
Second column and the crossbearer constitute hollow frame.
Further, first column, second column and the crossbearer are by being weldingly connected.
Further, first column, second column and the crossbearer are I-steel.
Further, the briquetting is nylon briquetting.
Further, the adjusting apparatus further include along the guide rail length extending direction slide be set up in described lead
At least two sliding parts on rail, the sliding part are equipped with the support base to cathode bar magnet described in support.
Further, the position that the upper surface of the support base is contacted with the cathode bar magnet be arc-shaped, circular arc it is straight
The diameter of diameter and the cathode bar magnet to be corrected matches.
Further, the support base uses rubber material.
Further, the data acquisition device with to show its adopt the display devices of data is electrically connected.
After the above technical solution is adopted, the utility model has the following advantages that compared with prior art：The utility model
Adjusting apparatus is simple in structure, when being corrected to cathode bar magnet, it is only necessary to control the briquetting of hydraulic jack downwardly against the moon
Pole bar magnet；By the way that pressure sensor and range sensor is arranged, hydraulic jack pair in correcting process can be monitored in real time
The correct amount of pressure and correction position that cathode bar magnet applies, prevents undercorrection or correction excessive；Cathode bar magnet is slided
Setting on guide rail, be easy to implement the correction at each position of cathode bar magnet.
Description of the drawings
Attached drawing 1 is the axonometric drawing of the adjusting apparatus of the utility model；
Attached drawing 2 is the section structure diagram of attached drawing 1；
Attached drawing 3 is the side view of attached drawing 1.
Wherein, 1, pedestal；101, the first flange plate；102, the second flange plate；103, web；2, guide rail；3, supporting rack；
301, the first column；302, the second column；303, crossbearer；4, hydraulic jack；401, briquetting；5, cathode bar magnet；6, pressure passes
Sensor；7, range sensor；8, sliding part；9, support base.
Specific implementation mode
The utility model is described in further detail with reference to the accompanying drawings and embodiments.
As shown in Figure 1 to Figure 3, a kind of deformation adjusting apparatus for cathode bar magnet 5, including pedestal 1, be set to pedestal 1 on
Guide rail 2, the supporting rack 3, the liquid on supporting rack 3 and right over guide rail 2 that are erected at pedestal 1 and the top of guide rail 2
Press jack 4, cathode bar magnet 5 to be corrected along guide rail 2 length extending direction slide setting on guide rail 2, hydraulic jack
The 401 face cathode bar magnet 5 of briquetting on top 4, briquetting 401 are equipped with pressure sensor 6, are located on the guide rail 2 immediately below briquetting 401
Equipped with range sensor 7, pressure sensor 6 and range sensor 7 and data acquisition device（It is not indicated in figure）Electrical connection.
Preferably, the data adopted by displaying data in real-time harvester, data acquisition device and display device（In figure
It does not indicate）Electrical connection.
In the present embodiment, pedestal 1 is I-steel, and I-steel includes the first flange plate 101 being mutually parallel and second edge of a wing
Plate 102, and between the first flange plate 101 and the second flange plate 102 and the web 103 that is respectively perpendicular with it, first wing
Listrium 101 is installed in ground, and guide rail 2 is set on the second flange plate 102, parallel second flange plate of the length direction of guide rail 2 102
Length direction.
Supporting rack 3 includes the first column 301 and the second column 302 being vertically arranged, and is set up in first and stands
The crossbearer 303 at 302 top of column 301 and the second column, crossbearer 303 is horizontally extending, the first column 301, the second column 302
And crossbearer 303 constitutes hollow frame.
First column 301, the second column 302 and crossbearer 303 are I-steel.First column 301, the second column 302
And crossbearer 303 is by being weldingly connected.
Pedestal 1, the first column 301, the second column 302 and the selection of crossbearer 303 use I-steel, are not only easy to obtain,
And it is of low cost.
To prevent briquetting 401 from causing rigid damage, briquetting 401 to use nylon briquetting on 5 surface of cathode bar magnet.
Adjusting apparatus further includes the multiple sliding parts 8 being set up on guide rail 2 slided along the length extending direction of guide rail 2.
In the present embodiment, the quantity of sliding part 8 is two, and two sliding parts 8 are separately positioned on the both ends of cathode bar magnet 5, on sliding part 8
Equipped with the support base 9 to support cathode bar magnet 5.By position of the mobile sliding part 8 on guide rail 2, can will need to correct
Position be moved to the lower section of hydraulic jack 4, to easily realize the correction at 5 each position of cathode bar magnet.
The position that the upper surface of support base 9 is contacted with cathode bar magnet 5 be arc-shaped, it is preferred that the diameter of circular arc with wait rectifying
The diameter of the positive cathode bar magnet 5 matches.
When needing to correct the cathode bar magnet 5 of different-diameter, the sliding part 8 with different circular arcs can be replaced accordingly.
Preferably, support base 9 uses rubber material.
When being corrected to cathode bar magnet 5, it is only necessary to control the briquetting 401 of hydraulic jack 4 downwardly against cathode bar magnet 5
?.By the way that pressure sensor 6 and range sensor 7 is arranged, hydraulic jack 4 can be monitored in correcting process in real time to cathode
The correct amount of pressure and correction position that bar magnet 5 applies, prevents undercorrection or correction excessive.
By using the adjusting apparatus of the utility model, it may be convenient to the cathode bar magnet 5 of deformation is corrected, to
The access times of cathode bar magnet 5 are improved, production cost is reduced.
Above-described embodiment is only the technical concepts and features for illustrating the utility model, and its object is to allow be familiar with technique
Personage can understand the content of the utility model and implement according to this, the scope of protection of the utility model can not be limited with this.
It is all according to equivalent change or modification made by the spirit of the present invention essence, should all cover the scope of protection of the utility model it
It is interior.
Claims (10)
1. a kind of deformation adjusting apparatus for cathode bar magnet, it is characterised in that：Leading including pedestal, on the pedestal
Rail, the supporting rack being erected above the pedestal and the guide rail, be mounted on support frame as described above on and positioned at the guide rail just on
Side hydraulic jack, cathode bar magnet to be corrected along the guide rail length extending direction slide setting in the guide rail
On, cathode bar magnet described in the briquetting face of the hydraulic jack, the briquetting is equipped with pressure sensor, is located at the briquetting
The guide rail of underface is equipped with range sensor, the pressure sensor and the range sensor and data acquisition device
Electrical connection.
2. a kind of deformation adjusting apparatus for cathode bar magnet according to claim 1, it is characterised in that：The pedestal is
I-steel, the I-steel include the first flange plate and the second flange plate being mutually parallel, and are set to first flange plate
The web being respectively perpendicular between second flange plate and with it, first flange plate are installed in ground, and the guide rail is set
In on second flange plate, the length direction of parallel second flange plate of length direction of the guide rail.
3. a kind of deformation adjusting apparatus for cathode bar magnet according to claim 1, it is characterised in that：Support frame as described above
Including the first column and the second column being vertically arranged, and it is set up in first column and second column top
The crossbearer in portion, the crossbearer is horizontally extending, and first column, second column and the crossbearer constitute mouth word
Type frame.
4. a kind of deformation adjusting apparatus for cathode bar magnet according to claim 3, it is characterised in that：Described first is vertical
Column, second column and the crossbearer are by being weldingly connected.
5. a kind of deformation adjusting apparatus for cathode bar magnet according to claim 3, it is characterised in that：Described first is vertical
Column, second column and the crossbearer are I-steel.
6. a kind of deformation adjusting apparatus for cathode bar magnet according to claim 1, it is characterised in that：The briquetting is
Nylon briquetting.
7. a kind of deformation adjusting apparatus for cathode bar magnet according to claim 1, it is characterised in that：The adjustment dress
Set further includes at least two sliding parts being set up on the guide rail slided along the length extending direction of the guide rail, the cunning
Moving part is equipped with the support base to cathode bar magnet described in support.
8. a kind of deformation adjusting apparatus for cathode bar magnet according to claim 7, it is characterised in that：The support base
The position that is contacted with the cathode bar magnet of upper surface be arc-shaped, the diameter of circular arc is straight with the cathode bar magnet to be corrected
Diameter matches.
9. a kind of deformation adjusting apparatus for cathode bar magnet according to claim 7, it is characterised in that：The support base
Using rubber material.
10. a kind of deformation adjusting apparatus for cathode bar magnet according to claim 1, it is characterised in that：The data
Harvester with to show its adopt the display devices of data is electrically connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820575330.7U CN208055455U (en) | 2018-04-20 | 2018-04-20 | A kind of deformation adjusting apparatus for cathode bar magnet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820575330.7U CN208055455U (en) | 2018-04-20 | 2018-04-20 | A kind of deformation adjusting apparatus for cathode bar magnet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208055455U true CN208055455U (en) | 2018-11-06 |
Family
ID=63983438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820575330.7U Active CN208055455U (en) | 2018-04-20 | 2018-04-20 | A kind of deformation adjusting apparatus for cathode bar magnet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208055455U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110899386A (en) * | 2019-11-12 | 2020-03-24 | 丽水学院 | Guide rail straightening span adjusting device |
-
2018
- 2018-04-20 CN CN201820575330.7U patent/CN208055455U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110899386A (en) * | 2019-11-12 | 2020-03-24 | 丽水学院 | Guide rail straightening span adjusting device |
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