CN208035032U - A kind of silicon wafer processing unit (plant) - Google Patents
A kind of silicon wafer processing unit (plant) Download PDFInfo
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- CN208035032U CN208035032U CN201820256211.5U CN201820256211U CN208035032U CN 208035032 U CN208035032 U CN 208035032U CN 201820256211 U CN201820256211 U CN 201820256211U CN 208035032 U CN208035032 U CN 208035032U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The utility model is related to a kind of silicon wafer processing unit (plant)s, including pedestal, rack, evolution clamping mechanism, silicon wafer to block clamping mechanism and saw blade cutting machine；The evolution clamping mechanism is used to be clamped the seed crystal stick of pending evolution, and the silicon wafer blocks clamping mechanism and blocked for silicon single crystal rod or polysilicon block to be blocked, evolution and silicon single crystal rod, polysilicon block of the saw blade cutting machine for seed crystal stick to be clamped.The utility model silicon wafer processing unit (plant) integrates the evolution and break-in facility of silicon wafer, it can realize the evolution of seed crystal stick and realize blocking or being sliced for silicon single crystal rod and polysilicon block, it is simple and compact for structure, the production and application cost of producer is reduced, utilization rate of equipment and installations is improved.
Description
Technical field
The utility model is related to hard and brittle material cutting technology field more particularly to a kind of silicon wafer processing unit (plant)s.
Background technology
Use for silicon wafer in photovoltaic industry is very extensive.In order to meet the mass parameter of silicon crystal bar with it is lower together with work
Shape, the size of sequence and to silicon rod carry out preparatory processing, it is indispensable in photovoltaic solar cell piece process early period
Step.Firstly the need of seed crystal is processed, evolution processing is carried out to seed crystal, then silicon single crystal rod, or casting are drawn out by seed crystal
Go out polysilicon block, then silicon single crystal rod, polysilicon block is blocked again, slice processing etc., from cutting technique, no matter
It is long line diamond wire or annular diamond fretsaw, work is blocked for seed crystal, cylindric silicon single crystal rod, cube polysilicon block
Skill parameter request is all similar, therefore the cutting operating mechanism (cutting machine) of equipment does not need to be specifically designed, but right
The clamping of seed crystal, cylindric silicon single crystal rod, cube polysilicon block, clamping tooling have different operating requirement.
Using existing processing technology and equipment in silicon crystal bar truncated process, silicon rod usually passes through artificial choker block or people
Power pulls fixture to fix, but due to the uncertainty of manual method, cannot be completely fixed silicon rod securely so that it was blocked
Silicon rod has defect, often because of the problem of subtle displacement occurs " wavy surface, face are uneven " and " chipping ".In addition either
Evolution, silicon single crystal rod and the blocking for polysilicon block of seed crystal stick need the requirement of clamping device to be used to be all different, existing
Equipment be mostly by dedicated silicon wafer processing equipment, execute respectively it is above-mentioned three kinds work, using these have a single function cut
Switching complexity is not used only in off line or excavation machine, and use cost is high.In addition, such as because monocrystalline silicon piece cost compared with
Height causes monocrystalline silicon piece demand to decline in certain time period, then monocrystalline shear is long a large amount of idle and long expectation occurs
Machine phenomenon so that utilization rate of equipment and installations is low, and the idle expense safeguarded is also higher.
Invention content
For this reason, it may be necessary to a kind of silicon wafer processing unit (plant) is provided, it is single to solve existing silicon wafer processing unit (plant) application function, if
Standby utilization rate is low, produces and uses problem with high costs.
To achieve the above object, a kind of silicon wafer processing unit (plant) is inventor provided, the processing unit (plant) includes pedestal, machine
Frame, evolution clamping mechanism, silicon wafer block clamping mechanism and saw blade cutting machine；
The rack is set on pedestal；
The evolution clamping mechanism includes turntable, clamping piece and revolving power mechanism, and the turntable is located on pedestal,
The clamping piece is fixed on turntable, and the upper surface of clamping piece offers concave mouth, and the concave mouth waits for evolution for fixation
Silicon wafer, clamping piece are rotated towards crisscross resigning straight slot, the revolving power mechanism is arranged with for driving by seam allowance
Platform rotates；
It includes Working gantry, rolling wheel support frame, idler wheel mechanism and limit voussoir that the silicon wafer, which blocks clamping mechanism,；The work
It is removably fixed on pedestal as rack, Working gantry is located above evolution clamping mechanism, and the rolling wheel support frame includes work
Platform and the clamping plate for being fixed on workbench both sides, the workbench are fixed on Working gantry, the idler wheel mechanism packet
It includes multigroup roller bearing and is connected to the idler wheel of roller bearing one end, the other end of the roller bearing is fixed on clamping plate, the idler wheel mechanism
It is two groups, is located on the clamping plate of workbench both sides, the periphery of all idler wheels is in same in the idler wheel mechanism
Height constitutes a V-type inclined-plane, and the limit voussoir waits cutting between silicon wafer to be blocked and rolling wheel support frame for limiting to clamp
Disconnected silicon wafer；
The saw blade cutting machine is located at the top that silicon wafer blocks clamping mechanism, and saw blade cutting machine is fixed on via elevating mechanism
In the rack, the lifting of the elevating mechanism or descent tape moving-wire saw cutting machine are blocked or are opened to silicon wafer to be processed
Side.
As a kind of preferred structure of the utility model, the rolling wheel support frame is two-part structure, two sections of roller supportings
There are prepsetting gap between frame, the prepsetting gap, which is located at the decline of saw blade cutting machine, block on the path of work walking, supplies
Saw blade cutting machine passes through.
As a kind of preferred structure of the utility model, the limit voussoir is triangular prism voussoir, the triangular prism voussoir
To be multiple, multiple triangular prism voussoirs are uniformly distributed on the clamping plate for being resisted against workbench both sides.
As a kind of preferred structure of the utility model, the limit voussoir is quadrangular voussoir, the quadrangular voussoir
Section be right-angled trapezium, the quadrangular voussoir be it is multiple, multiple quadrangular voussoirs are uniformly set at workbench one
Side.
As a kind of preferred structure of the utility model, the processing unit (plant) further includes mobile feed mechanism, the movement
Feed mechanism includes driving mechanism and mobile chassis, and the turntable is set on mobile chassis, is set below the mobile chassis
It is equipped with the linear guide, the driving mechanism drives mobile chassis to carry out straight reciprocating motion along the linear guide.
As a kind of preferred structure of the utility model, the driving mechanism includes servomotor, gear reducer and ball wire
Bar, the speed reducer are connect with servo motor output shaft, and the output end mobile chassis of the ball screw connection decelerating motor connects
It connects, to drive mobile chassis to carry out straight reciprocating motion.
As a kind of preferred structure of the utility model, the driving mechanism further includes organ shield, the organ shield
It is set on pedestal, one end of organ shield and the side of mobile chassis connect, between organ shield, mobile scale and pedestal
It is formed and houses cavity, the linear guide is respectively positioned on ball screw in accommodating cavity.
As a kind of preferred structure of the utility model, the revolving power mechanism includes electric rotating machine and turbine and worm machine
Structure, the electric rotating machine are located on the side of turntable, and electric rotating machine drives the rotation of turbine and worm mechanism, to drive turntable to send out
Raw rotation.
As a kind of preferred structure of the utility model, the workbench of the rolling wheel support frame and to be fixed on work flat
Plastic cement gasket is both provided on the clamping plate of platform both sides.
As a kind of preferred structure of the utility model, the revolving power mechanism linear reciprocation device and rack are described
Cyclic annular tooth socket is provided on turntable upper side wall, the ring-type tooth socket is meshed with rack, the linear reciprocation device and rack
It is sequentially connected.
As a kind of preferred structure of the utility model, the limit voussoir and idler wheel are plastic cement material.
It is different from the prior art, above-mentioned technical proposal has the following advantages that：The utility model silicon wafer processing unit (plant) collection silicon wafer
Evolution and break-in facility in one, can realize the evolution of seed crystal stick and realize blocking for silicon single crystal rod and polysilicon block
Or slice, simple and compact for structure, the silicon wafer of setting blocks clamping mechanism makes it can either by the shape of change limit voussoir
Silicon single crystal rod can also carry out polysilicon block to stablize fixation, switching is simple, clamping efficiency is high, and silicon wafer blocks clamping machine in addition
Structure, using being detachably connected, can very easily disassemble silicon wafer and block clamping mechanism, use evolution clamping mechanism pair with pedestal
Seed crystal carries out evolution processing, reduces the production and application cost of producer, improves utilization rate of equipment and installations.
Description of the drawings
Fig. 1 is the main structure diagram that the present embodiment silicon wafer processing unit (plant) blocks silicon single crystal rod；
Fig. 2 is the overlooking structure diagram that the present embodiment silicon wafer blocks that silicon single crystal rod is clamped in clamping mechanism；
Fig. 3 is the main structure diagram that the present embodiment silicon wafer processing unit (plant) blocks polysilicon block；
Fig. 4 is the overlooking structure diagram that the present embodiment silicon wafer blocks that polysilicon block is clamped in clamping mechanism；
Fig. 5 is main structure diagram of the present embodiment silicon wafer processing unit (plant) to seed crystal stick evolution；
Fig. 6 is the overlooking structure diagram that seed crystal stick is clamped in the present embodiment evolution clamping mechanism；
Fig. 7 is the oblique view of structural diagram of one embodiment of the present embodiment revolving power mechanism.
Reference sign：
1, pedestal；
2, rack；
3, evolution clamping mechanism；
31, turntable；311, cyclic annular tooth socket；
32, clamping piece；321, concave mouth；322, resigning straight slot；
33, revolving power mechanism；
331, linear reciprocation device；332, rack；
4, silicon wafer blocks clamping mechanism；
41, Working gantry；
42, rolling wheel support frame；421, workbench；422, clamping plate；
43, idler wheel mechanism；
44, voussoir is limited；
45, gap；
5, saw blade cutting machine；
6, elevating mechanism
711, servo motor；712, decelerating motor；713, ball screw；714, organ shield；
72, mobile chassis；
73, the linear guide；
8, plastic cement gasket；
9, silicon single crystal rod；
10, polysilicon block；
11, seed crystal stick.
Specific implementation mode
For the technology contents of technical solution, construction feature, the objects and the effects are described in detail, below in conjunction with specific reality
It applies example and attached drawing is coordinated to be explained in detail.
It please refers to Fig.1 to Fig. 6, the utility model provides a kind of silicon wafer processing unit (plant), and the processing unit (plant) includes pedestal
1, rack 2, evolution clamping mechanism 3, silicon wafer block clamping mechanism 4 and saw blade cutting machine 5；The rack 2 is set on pedestal 1；
The pedestal 1 and the holder that is fixed on pedestal 1 as the utility model silicon wafer processing unit (plant) agent structure for carrying,
Fixed other components, such as：Evolution clamping mechanism 3, saw blade cutting machine 5 etc..
The evolution clamping mechanism 3 is used to load the seed crystal stick of fixed pending evolution.Its concrete structure is：The evolution
Clamping mechanism 3 includes turntable 31, clamping piece 32 and revolving power mechanism 33.The turntable 31 is located on pedestal 1, the folder
Gripping member 32 is fixed on turntable 31, and the upper surface of clamping piece 32 offers concave mouth 321, and the concave mouth 321 is for fixing
The seed crystal stick for waiting for evolution prevents seed crystal stick from occurring shaking during cutting evolution and in 31 rotation process of turntable or partially
The case where removing predeterminated position, seed crystal stick evolution face is caused wavy surface or chipping occur occurs.Clamping piece 32 by seam allowance towards
It is arranged with crisscross resigning straight slot 322, the effect of resigning straight slot 322 is the safe operation of saw blade cutting machine 5, prevents line
Saw cutting machine is cut to during carrying out wire cutting on clamping piece 32, resigning straight slot 322 convenient for cutting line to seed crystal stick into
Row cutting completely, prevents evolution face from not completely cutting through, also allows for the abjection of cutting line, the boss between resigning straight slot 322 is then made
The seed crystal support platform after evolution cutting is completed for seed crystal stick, prevents cutting process from displacement occur.The revolving power mechanism 33
For driving turntable 31 to rotate, seed crystal stick generally requires the evolution for carrying out multiple faces, is cut not changing saw blade cutting machine 5
In the case of cutting operating path, rotation turntable 31 is to change the evolution face of seed crystal stick, more simple, the working efficiency of evolution work
Higher, and to be adapted to such evolution mode, crisscross resigning straight slot 322 is arranged by seam allowance downwards for clamping piece 32.
The silicon wafer blocks clamping mechanism 4 for loading fixed silicon single crystal rod or polysilicon block.Its concrete structure is：Institute
It includes Working gantry 41, rolling wheel support frame 42, idler wheel mechanism 43 and limit voussoir 44 to state silicon wafer and block clamping mechanism 4.The work
It is the supporting rack that entire silicon wafer blocks clamping mechanism 4 to make rack 41, for carrying fixed idler whell supporting rack 42, idler wheel mechanism 43
Deng the Working gantry 41 is removably fixed on pedestal 1 in the present embodiment, and Working gantry 41 is located at evolution clamping mechanism 3
Top, evolution clamping mechanism 3 and silicon wafer are blocked clamping mechanism 4 and are arranged using this up-down structure, can be reduced to the greatest extent
The volume of entire silicon wafer processing unit (plant), structure setting it is more compact, and more convenient silicon crystal bar blocks or evolution
School knife process, in this embodiment, need carry out seed crystal stick evolution when, user need to only remove silicon wafer and block clamping machine
Structure 4 can very easily carry out the switching of application function.The detachable connection includes bolt and nut connection, mortise-tenon joint
Etc..
The rolling wheel support frame 42 includes workbench 421 and the clamping plate 422 for being fixed on 421 both sides of workbench, institute
The rolling wheel support frame 42 stated is mainly used for the support fixed mechanism of silicon crystal bar, and the workbench 421 is fixed on Working gantry 41
On, the idler wheel mechanism 43 includes that multigroup roller bearing and the idler wheel for being connected to roller bearing one end, the other end of the roller bearing are fixed on
On clamping plate 422, specifically, the idler wheel mechanism 43 specifically includes idler wheel, bearing, snap ring, roller bearing, bearing inner race is inserted in roller bearing
One end is positioned by the snap ring being fitted into the annular groove of roller bearing end, and plastic roller is inserted in bearing outer ring, and idler wheel end is moulded by loading
The snap ring of portion's annular groove positions.Axis hole positioning is offered on the clamping plate face, roller bearing is completed to fix by locking limit screw.Institute
It is two groups to state idler wheel mechanism 43, is located on the clamping plate 422 of 421 both sides of workbench, all rollings in the idler wheel mechanism 43
The periphery of wheel is in sustained height and constitutes a V-type inclined-plane, and V-type inclined-plane directly contacts stationary plane as silicon crystal bar, described
Limit voussoir 44 can be resisted against on clamping plate 422, between silicon wafer to be blocked and rolling wheel support frame 42, be waited for for limiting to clamp
Silicon wafer is blocked, silicon crystal bar is absorbed in V-type inclined-plane under the action of its own gravity, and engaging limit by V-type inclined-plane fixes, and is then waiting for
It blocks wedging between silicon crystal bar and rolling wheel support frame 42 and limits voussoir 44 to further fix silicon crystal bar to be processed, according to be added
The shape of work silicon crystal bar selects compatible limit voussoir 44, it is made simply to realize very much silicon single crystal rod and polysilicon block clamping
Switching, prevent from silicon crystal bar cannot being completely fixed securely so that its silicon crystal bar blocked has defect, often because subtle
Displacement there is the problem of " wavy surface, face uneven " and " chipping ".The utility model forms V-type inclined-plane also more using roller supporting
Adding the mobile feeding for facilitating silicon crystal bar, blocking for silicon crystal bar is simpler, substantially, the feeding that user passes through change silicon crystal bar
Amount can also realize the slice function of silicon crystal bar.
The saw blade cutting machine 5 is located at the top that silicon wafer blocks clamping mechanism 4, and saw blade cutting machine 5 is solid via elevating mechanism 6
It is scheduled on 2 in the rack, the lifting of the elevating mechanism 6 or descent tape moving-wire saw cutting machine 5 block silicon wafer to be processed
Or evolution.Cutting mechanism of the saw blade cutting machine 5 as the utility model silicon wafer processing unit (plant), mainly passes through cutting line
Rotation completes the blocking of silicon crystal bar, is sliced or even evolution work.The elevating mechanism 6 can be linear motor, cylinder etc.., line
Saw cutting machine 5 is ring wire saw cutting machine, and the utility model silicon wafer processing unit (plant) integrates the evolution and break-in facility of silicon wafer,
It can realize the evolution of seed crystal stick and realize blocking or being sliced for silicon single crystal rod and polysilicon block, it is simple and compact for structure, if
The silicon wafer set, which blocks clamping mechanism and limits the shape of voussoir by change, makes it can either also can be to polysilicon to silicon single crystal rod
Block carries out stablizing fixation, and switching is simple, clamping efficiency is high, and silicon wafer blocks clamping mechanism and is detachably connected with pedestal use in addition,
Silicon wafer can very easily be disassembled and block clamping mechanism, evolution processing is carried out to seed crystal using evolution clamping mechanism, reduces factory
The production and application cost of family improves utilization rate of equipment and installations.
Referring to Fig. 2, a kind of preferred structure as the utility model, the rolling wheel support frame 42 is two-part structure,
There are prepsetting gap between two sections of rolling wheel support frames 42, the prepsetting gap, which is located at the decline of saw blade cutting machine 5, to carry out blocking work
On the path of walking, pass through for saw blade cutting machine 5.Rolling wheel support frame 42 is arranged to such structure, more convenient saw blade cutting
Machine 5 is to completely cut off and improve cut-off efficiency, if rolling wheel support, which is that one-part form structure is so just bad, holds silicon crystal bar to be blocked
It is whether completely cut off, and can't be cut on the workbench 421 of rolling wheel support frame 42 in truncated process, accuracy compared with
Hardly possible is held, and according to the falling head for accurately controlling the stringent control line saw cutting machine of mechanism 5, realizes that precision control undoubtedly increases
The manufacturing cost of the utility model.
It please refers to Fig.1 and Fig. 2,.Silicon single crystal rod is mostly cylindric, and the wedging of triangular prism voussoir will not change roller supporting
The V-arrangement inclined-plane that frame 42 is formed with idler wheel mechanism 43.Silicon single crystal rod is after the placement of the upper opening on V-arrangement inclined-plane, the outer circle of silicon single crystal rod
Face and V-arrangement inclined-plane are tangent, to limit the degree of freedom of silicon single crystal rod, complete the positioning of silicon single crystal rod.Preferably, described three
The inclined-plane of prism voussoir is towards silicon single crystal rod, and optimal, the triangular prism voussoir is straight triangular prism.The wherein length essence of idler wheel
The length of the upper supporting surface for being exactly silicon crystal bar, as long as the roller length that guarantee is enough, so that it may with clamping from 6 inches to 18 inch etc.
The silicon single crystal rod of plurality of specifications.Saw blade cutting machine 5 after the completion of carrying out tool setting position determination to silicon single crystal rod, in silicon single crystal rod and
Several triangular prism voussoirs are wedged between rolling wheel support frame 42 and further fix silicon single crystal rod, are rubbed what silicon single crystal rod dead weight generated
Completion clamps work under the action of wiping power and triangular prism voussoir wedging force.
In embodiment as shown in Figure 3 and Figure 4, increase between the clamping plate 422 of 42 both sides of rolling wheel support frame in this embodiment
If so that one of V-arrangement inclined-plane presss from both sides face by inclined-plane complanation, is the polysilicon block of rectangle so as to constant cross-section,
The clamping for realizing silicon single crystal rod and polysilicon block switches, and simple shape, and production cost is low, easy to implement.Saw blade cutting
Machine 5 wedges several after the completion of carrying out tool setting position determination to polysilicon block between polysilicon block and rolling wheel support frame 42,
It completes to clamp work under the action of wedging power and polysilicon block its own gravity.
Referring to Fig. 6, a kind of preferred structure as the utility model, the processing unit (plant) further includes mobile feeding machine
Structure, the mobile feed mechanism include driving mechanism and mobile chassis 72, and the turntable 31 is set on mobile chassis 72, institute
It states 72 lower section of mobile chassis and is provided with the linear guide 73, the driving mechanism drives mobile chassis 72 to be carried out directly along the linear guide 73
Line moves back and forth.The mobile feed arrangement is used on turntable 31 after fixed loading seed crystal stick, is moved into default position
It sets, evolution work is carried out using saw blade cutting machine 5.The driving mechanism driving mobile chassis 72 is moved along the linear guide 73
It is dynamic, realize straight reciprocating motion, and then carry out the installation and replacement of seed crystal stick.
As described in the fig 5 and 6, in the particular embodiment, the driving mechanism includes servo motor 711, speed reducer
With ball screw 713, the speed reducer exports axis connection with servo motor 711, and the ball screw 713 connects decelerating motor
712 output end mobile chassis 72 connects, to drive mobile chassis 72 to carry out straight reciprocating motion.Ball screw 713 is tool
Most-often used actuated element on machinery and precision machinery, major function are to convert rotational motion to linear movement, or incite somebody to action
Torque is converted into axial repeated action power, while having both high-precision, invertibity and efficient feature.Servo in the present embodiment
The high rotating speed of motor 711 is after the deceleration by speed reducer, by ball screw 713 by the rotation of 712 output end of decelerating motor
Conversion of motion is linear motion, to drive mobile chassis 72 to carry out straight reciprocating motion, and then turntable 31 is driven to do straight line fortune
It is dynamic, the dismounting of more convenient seed crystal stick.In other examples, the driving mechanism can also be cylinder, hydraulic cylinder or
Person's linear motor.
Referring to Fig. 6, a kind of preferred embodiment as the utility model, the driving mechanism further includes organ shield
714, the organ shield 714 is set on pedestal 1, and one end of organ shield 714 and the side of mobile chassis connect, organ shield
It is formed between cover 714, mobile chassis and pedestal 1 and houses cavity, the linear guide 73 is respectively positioned on accommodating with ball screw 713
In cavity.Dust-proof, waterproof protective effect is played in the setting of organ shield 714.
In embodiment as described in the fig 5 and 6, the revolving power mechanism 33 includes electric rotating machine and turbine and worm machine
Structure, the electric rotating machine are located on the side of turntable 31, and electric rotating machine drives the rotation of turbine and worm mechanism, to drive turntable
31 rotate.Worm gear mechanism is commonly used to transmit the movement between two alternating axis and power.Worm gear and worm screw are therebetween
Wheel and rack is equivalent in plane, worm screw is again similar to screw configuration.Electric rotating machine drives worm screw rotation, and worm screw drives and it
The turbine of engagement rotates, and then turntable 31 is driven to rotate movement, it is preferred that the angle that turntable 31 rotates every time
Degree is 90 °.Certainly, as long as other driving mechanisms can drive turntable 31 to rotate.
Referring to Fig. 7, another preferred structure as the utility model, the revolving power mechanism linear reciprocation device
331 and rack 332, cyclic annular tooth socket 311 is provided on the turntable upper side wall, and the ring-type tooth socket 311 is nibbled with 332 phase of rack
It closes, the linear reciprocation device is connect with rack-driving.In the present embodiment, the linear reciprocation device 331 can be cylinder,
Hydraulic cylinder or linear motor, the telescopic piston rod of linear reciprocation device are fixedly connected with one end of rack, telescopic piston rod fortune
It is dynamic that the rack 332 is driven to move along a straight line, then via with the cyclic annular tooth socket transmission that is meshed with rack on turntable, will
The transform linear motion of rack is the rotary motion of turntable 31, to realize that pivotal axis of the turntable in the middle part of it does rotation fortune
It is dynamic.In preferred embodiment, the revolving power mechanism is set to the top of the mobile chassis of mobile feed mechanism so that rotation
Turn force mechanisms to move in company with mobile feed mechanism.
As shown in Figures 1 to 6, as another preferred embodiment of the utility model, the rolling wheel support frame 42
It workbench 421 and is fixed on the clamping plate 422 of 421 both sides of workbench and is both provided with plastic cement gasket.The plastic cement gasket 8
Effect be to prevent roller support from impacting the quality caused by silicon wafer material because silicon wafer and ferrous material are direct
Contact, ferrous material, which very likely carries, contains magnetic conductive substance, leads to the complication of silicon chip magnetic field edge effect, to influence
The quality of battery, but also can prevent silicon wafer material surface from being scratched.Further, the plastic cement being arranged on workbench 421
8 each region of gasket has same level height.Preferably, the limit voussoir 44 and idler wheel are plastic cement material.With upper-part
It is disposed as plastic cement material, can also save the operation for installing crystal pad additional between silicon crystal bar and each clamping device, manufacture is more
It is simple.
It should be noted that although the various embodiments described above have been described herein, it is not intended to limit
The scope of patent protection of the utility model.Therefore, the innovative idea based on the utility model carries out embodiment described herein
Change and modification or equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, directly
Or above technical scheme is used in other related technical areas indirectly, it is included in the patent protection model of the utility model
Within enclosing.
Claims (10)
1. a kind of silicon wafer processing unit (plant), which is characterized in that the processing unit (plant) includes pedestal, rack, evolution clamping mechanism, silicon wafer
Block clamping mechanism and saw blade cutting machine；
The rack is set on pedestal；
The evolution clamping mechanism includes turntable, clamping piece and revolving power mechanism, and the turntable is located on pedestal, described
Clamping piece is fixed on turntable, and the upper surface of clamping piece offers concave mouth, and the concave mouth waits for evolution silicon wafer for fixation,
Clamping piece is by seam allowance towards crisscross resigning straight slot is arranged with, and the revolving power mechanism is for driving turntable
Rotation；
It includes Working gantry, rolling wheel support frame, idler wheel mechanism and limit voussoir that the silicon wafer, which blocks clamping mechanism,；The workbench
Frame is removably fixed on pedestal, and Working gantry is located above evolution clamping mechanism, and the rolling wheel support frame includes workbench
And it is fixed on the clamping plate of workbench both sides, the workbench is fixed on Working gantry, and the idler wheel mechanism includes more
Group roller bearing and the idler wheel for being connected to roller bearing one end, the other end of the roller bearing are fixed on clamping plate, and the idler wheel mechanism is two
Group is located on the clamping plate of workbench both sides, and the periphery of all idler wheels is in sustained height in the idler wheel mechanism
A V-type inclined-plane is constituted, the limit voussoir is between silicon wafer to be blocked and rolling wheel support frame, for clamping silicon wafer to be blocked；
The saw blade cutting machine is located at the top that silicon wafer blocks clamping mechanism, and saw blade cutting machine is fixed on described via elevating mechanism
In rack, the lifting of the elevating mechanism or descent tape moving-wire saw cutting machine is blocked to silicon wafer to be processed or evolution.
2. silicon wafer processing unit (plant) according to claim 1, which is characterized in that the rolling wheel support frame is two-part structure,
There are prepsetting gap between two sections of rolling wheel support frames, the prepsetting gap, which is located at the decline of saw blade cutting machine, to carry out blocking work walking
Path on, pass through for saw blade cutting machine.
3. silicon wafer processing unit (plant) according to claim 2, which is characterized in that the limit voussoir is triangular prism voussoir, institute
It is multiple to state triangular prism voussoir, and multiple triangular prism voussoirs are uniformly distributed on the clamping plate for being resisted against workbench both sides.
4. silicon wafer processing unit (plant) according to claim 2, which is characterized in that the limit voussoir is quadrangular voussoir, institute
The section for stating quadrangular voussoir is right-angled trapezium, and the quadrangular voussoir is multiple, and multiple quadrangular voussoirs are uniformly distributed setting
In workbench side.
5. silicon wafer processing unit (plant) according to claim 1, which is characterized in that the processing unit (plant) further includes mobile feeding machine
Structure, the mobile feed mechanism include driving mechanism and mobile chassis, and the turntable is set on mobile chassis, the movement
The linear guide is provided with below chassis, the driving mechanism drives mobile chassis to carry out straight reciprocating motion along the linear guide.
6. silicon wafer processing unit (plant) according to claim 5, which is characterized in that the driving mechanism includes servo motor, subtracts
Fast machine and ball screw, the speed reducer are connect with servo motor output shaft, the output of the ball screw connection decelerating motor
Mobile chassis connection is held, to drive mobile chassis to carry out straight reciprocating motion.
7. silicon wafer processing unit (plant) according to claim 6, which is characterized in that the driving mechanism further includes organ shield,
The organ shield is set on pedestal, and one end of organ shield and the side of mobile chassis connect, organ shield, mobile chassis
And formed between pedestal and house cavity, the linear guide is respectively positioned on ball screw in accommodating cavity.
8. silicon wafer processing unit (plant) according to claim 1, which is characterized in that the revolving power mechanism includes electric rotating machine
With turbine and worm mechanism, the electric rotating machine is located on the side of turntable, and electric rotating machine drives the rotation of turbine and worm mechanism, with
Turntable is driven to rotate.
9. silicon wafer processing unit (plant) according to claim 1, which is characterized in that the revolving power mechanism linear reciprocation device
And rack, cyclic annular tooth socket is provided on the turntable upper side wall, the ring-type tooth socket is meshed with rack, the linear reciprocation
Device is connect with rack-driving.
10. silicon wafer processing unit (plant) according to claim 1, which is characterized in that the workbench of the rolling wheel support frame with
And it is fixed on the clamping plate of workbench both sides and is both provided with plastic cement gasket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820256211.5U CN208035032U (en) | 2018-02-09 | 2018-02-09 | A kind of silicon wafer processing unit (plant) |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820256211.5U CN208035032U (en) | 2018-02-09 | 2018-02-09 | A kind of silicon wafer processing unit (plant) |
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| Publication Number | Publication Date |
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| CN208035032U true CN208035032U (en) | 2018-11-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820256211.5U Withdrawn - After Issue CN208035032U (en) | 2018-02-09 | 2018-02-09 | A kind of silicon wafer processing unit (plant) |
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| CN109397568A (en) * | 2018-11-16 | 2019-03-01 | 福州天瑞线锯科技有限公司 | A kind of silicon single crystal rod evolution clamping device |
| CN109397563A (en) * | 2018-11-16 | 2019-03-01 | 福州天瑞线锯科技有限公司 | A kind of silicon single crystal rod excavation machine |
| CN110303608A (en) * | 2019-07-10 | 2019-10-08 | 陈惠丽 | A kind of semiconductor silicon rod intercept unit based on wire cutting |
| CN110304633A (en) * | 2019-07-17 | 2019-10-08 | 亚洲硅业（青海）有限公司 | A kind of reduction furnace silicon rod discharging device |
| CN110849495A (en) * | 2019-11-06 | 2020-02-28 | 上海理工大学 | Temperature measuring device for cutting hard and brittle materials by wire saw and using method |
| CN113954256A (en) * | 2021-11-01 | 2022-01-21 | 青岛高测科技股份有限公司 | Loading and unloading device of silicon rod cutting system and silicon rod cutting system |
| CN115489037A (en) * | 2022-11-18 | 2022-12-20 | 浙江晶盛机电股份有限公司 | Crystal cutting method and crystal growing equipment |
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2018
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| CN109397568B (en) * | 2018-11-16 | 2024-03-29 | 福州天瑞线锯科技有限公司 | Monocrystalline silicon rod squaring clamping device |
| CN109397563A (en) * | 2018-11-16 | 2019-03-01 | 福州天瑞线锯科技有限公司 | A kind of silicon single crystal rod excavation machine |
| CN109397563B (en) * | 2018-11-16 | 2024-03-29 | 福州天瑞线锯科技有限公司 | Monocrystalline silicon rod squarer |
| CN109397568A (en) * | 2018-11-16 | 2019-03-01 | 福州天瑞线锯科技有限公司 | A kind of silicon single crystal rod evolution clamping device |
| CN110303608A (en) * | 2019-07-10 | 2019-10-08 | 陈惠丽 | A kind of semiconductor silicon rod intercept unit based on wire cutting |
| CN110304633A (en) * | 2019-07-17 | 2019-10-08 | 亚洲硅业（青海）有限公司 | A kind of reduction furnace silicon rod discharging device |
| CN110304633B (en) * | 2019-07-17 | 2020-12-15 | 亚洲硅业(青海)股份有限公司 | Silicon rod discharging device of reduction furnace |
| CN110849495B (en) * | 2019-11-06 | 2021-04-30 | 上海理工大学 | Temperature measuring device for cutting hard and brittle materials by wire saw and using method |
| CN110849495A (en) * | 2019-11-06 | 2020-02-28 | 上海理工大学 | Temperature measuring device for cutting hard and brittle materials by wire saw and using method |
| CN113954256B (en) * | 2021-11-01 | 2024-02-02 | 青岛高测科技股份有限公司 | Loading and unloading device of silicon rod cutting system and silicon rod cutting system |
| CN113954256A (en) * | 2021-11-01 | 2022-01-21 | 青岛高测科技股份有限公司 | Loading and unloading device of silicon rod cutting system and silicon rod cutting system |
| CN115489037A (en) * | 2022-11-18 | 2022-12-20 | 浙江晶盛机电股份有限公司 | Crystal cutting method and crystal growing equipment |
| CN115489037B (en) * | 2022-11-18 | 2023-02-24 | 浙江晶盛机电股份有限公司 | Crystal cutting method and crystal growing apparatus |
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