CN208034439U - Grinding device and grinding system - Google Patents
Grinding device and grinding system Download PDFInfo
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- CN208034439U CN208034439U CN201820147456.4U CN201820147456U CN208034439U CN 208034439 U CN208034439 U CN 208034439U CN 201820147456 U CN201820147456 U CN 201820147456U CN 208034439 U CN208034439 U CN 208034439U
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- grinding
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- grinding assembly
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Abstract
The utility model is related to display technology field, a kind of grinding device and grinding system, wherein grinding device are provided, including：Grinding assembly；Include being responsible for liquid and matching liquid branch pipe with the several of liquid supervisor's connection, wherein several be fixedly connected with grinding assembly with liquid branch pipe and be uniformly distributed on grinding assembly with liquid component.By the grinding assembly being fixedly connected and match liquid component, grinding assembly and it is relatively fixed with the position between liquid component, and by with several with liquid branch pipe being uniformly distributed on grinding assembly in liquid component, so that can be uniformly distributed on grinding assembly with the lapping liquid that liquid component is provided to grinding assembly, achieve the purpose that grinding assembly can preferably grind part to be ground, so that part to be ground has preferable polishing effect.
Description
Technical field
The utility model is related to display technology fields, and in particular to a kind of grinding device in display field manufacturing process
And grinding system.
Background technology
In display technology field, panel display apparatus has the characteristics that fully planarize, light, thin, power saving, meets the following figure
The inexorable trend developed as display device.In the prior art, panel display apparatus includes mainly:PDP(Plasma display
panel)、LCD(Liquid crystal displays)、FED(Field emission displays)、OLED(Organic
Light-emittingdiode displays) etc., especially LCD, OLED have small, low in energy consumption, manufacturing cost low and
The features such as radiationless, has already taken up leading position in current panel display apparatus market.
The surface accuracy of substrate determines the optical property of panel display apparatus and loads the property of the element on substrate
Energy and quality.However, in panel display apparatus production process, such as in handling substrate, the surface of substrate is easy to be scratched,
To influence device performance.
In order to improve the image display quality of display device, in the prior art, Plane Rotation grinding device is generally used, it is right
Substrate surface is ground, polishes.When the grinding device works, lapping liquid is sprayed onto to the one of rotation polishing cotton by nozzle
Side, lapping liquid penetrate into polishing cotton, and polishing cotton is recycled to carry out spin finishing to substrate.
However, in above-mentioned technical proposal, due to nozzle be it is fixed, will in the continuous rotary course of polishing cotton
Lead to being unevenly distributed for lapping liquid, to influence the polishing effect of substrate.
Utility model content
Lapping liquid is distributed not when the technical problem to be solved by the present invention is to overcome substrate in the prior art to grind
The bad defect of grinding effect caused by.
In consideration of it, the utility model provides a kind of grinding device, including：
Grinding assembly；
Include being responsible for liquid and matching liquid branch pipe with the several of liquid supervisor's connection with described, if wherein described with liquid component
It is dry to be fixedly connected with the grinding assembly with liquid branch pipe and be uniformly distributed on grinding assembly.
Optionally, the grinding assembly includes abrasive article and is arranged in the abrasive article outer wall, for supporting described grind
Grind the connector of part.
Optionally, several through-holes are offered on the connector, it is described to be embedded in the through-hole and the grinding with liquid branch pipe
Component is fixedly connected.
Optionally, described to match nozzle of the liquid branch pipe close to described grinding assembly one end end.
The utility model also provides a kind of grinding system, including grinding device described in any one of the above embodiments.
Optionally, further include：
Groove body, and the fixing device above the groove body is set, the fixing device is for fixing part to be ground；
The first branch is connect with the groove body；
The first branch includes the first container, conveying device and the first valve, and the first container passes through described defeated
Device is sent to be connect with the one end of liquid component far from the grinding assembly with described；The groove body by first valve with it is described
The first container connects.
Optionally, further include：The second branch being connect with the groove body；
The second branch includes second container and the second valve；The second container passes through the second valve and the groove body
Connection.
Optionally, further include triple valve；The groove body by the triple valve respectively with the first branch and second
Road connects.
Optionally, further include：Driving device, for driving the grinding device back and forth movement.
Technical solutions of the utility model have the following advantages that：
1. grinding device provided by the utility model by the grinding assembly being fixedly connected and matches liquid component, i.e. grinding group
It part and is relatively fixed with the position between liquid component, and by with several equal on grinding assembly with liquid branch pipe in liquid component
Even distribution so that the lapping liquid provided to grinding assembly with liquid component can be uniformly distributed on grinding assembly, reach grinding group
Part can preferably grind the purpose of part to be ground, so that part to be ground has preferable polishing effect.
2. grinding device provided by the utility model, by the spray with liquid branch pipe close to grinding assembly one end end set
Mouth can increase the conveying radius of lapping liquid, improve grinding efficiency.
3. grinding system provided by the utility model, by the way that the first branch being connect with groove body is arranged, for realizing grinding
The recycling of liquid achievees the purpose that economize on resources.
4. grinding system provided by the utility model, by being set to the second branch of groove body connection, for realizing discarded
The recycling of lapping liquid prevents discarded lapping liquid pollution environment.
5. grinding system provided by the utility model is driven the driving device of grinding device back and forth movement by setting, carried
The grinding efficiency of high grinding system.
Description of the drawings
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific implementation mode or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, other drawings may also be obtained based on these drawings.
Fig. 1 is a structural schematic diagram specifically illustrated of grinding device in the utility model embodiment 1；
Fig. 2 is a structural schematic diagram specifically illustrated of grinding assembly in the utility model embodiment 1；
Fig. 3 is a structural schematic diagram specifically illustrated of grinding system in the utility model embodiment 2；
Reference numeral：10- matches liquid component；11- is responsible for liquid；12- matches liquid branch pipe；13- nozzles；20- grinding assemblies；21-
Connector；22- abrasive articles；23- through-holes；30- parts to be ground；40- fixing devices；50- groove bodies；The 60- first branchs；61- first
Container；62- conveying devices；The first valves of 63-；70- the second branches；71- second containers；The second valves of 72-；80- triple valves.
Specific implementation mode
The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described
Embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, originally
The every other embodiment that field those of ordinary skill is obtained without making creative work, belongs to this practicality
Novel protected range.
In the description of the present invention, it should be noted that term " first ", " second ", " third " are only used for describing
Purpose is not understood to indicate or imply relative importance.
In addition, as long as technical characteristic involved in the utility model different embodiments disclosed below is each other
Not constituting conflict can be combined with each other.
Embodiment 1
The utility model embodiment provides a kind of grinding device, as shown in Figure 1, including 20 He of grinding assembly being fixedly connected
With liquid component 10.Grinding assembly 20 is used for the grinding of part to be ground；With liquid component 10 include with liquid supervisor 11 and with liquid master
The several of pipe connection match liquid branch pipe 12, for providing lapping liquid to grinding assembly 20, wherein several to match liquid branch pipe and grinding assembly
20 are fixedly connected, and are uniformly distributed on grinding assembly.
By the grinding assembly 20 that is fixedly connected with match liquid component 10, i.e. grinding assembly 20 and with the position between liquid component 10
It sets and is relatively fixed, and by with several with liquid branch pipe being uniformly distributed on grinding assembly in liquid component so that match liquid component
10 lapping liquids provided to grinding assembly 20 can be uniformly distributed on grinding assembly 20, and reaching grinding assembly 20 can be preferably
The purpose of part to be ground is ground, so that part to be ground has preferable polishing effect.
As shown in Figure 1, with liquid branch pipe 12 and the axially vertical connection with liquid supervisor 11.With liquid supervisor 11, from the external world, acquisition is ground
Grinding fluid is delivered to through matching liquid supervisor 12 in grinding assembly 20.It is vertically arranged with liquid supervisor 11 by the way that liquid branch pipe 12 will be matched, it can
Be conducive to lapping liquid and be directly entered grinding assembly 20, prevents the too quickly caused grinding assembly of grinding flow quantity from treating abrasive article and grind
Obstruction, influences grinding effect caused by mill.
As shown in Fig. 2, further including the spray being arranged with liquid branch pipe 12 close to 20 one end end of grinding assembly with liquid component 10
Mouth 13.The conveying radius of lapping liquid can be increased by the setting of nozzle 12, improve grinding efficiency.
As shown in Figure 1, grinding assembly 20 includes abrasive article 22 and is arranged in 22 outer wall of abrasive article, it to be used for Supported abrasive
The connector 21 of part 22.Wherein, abrasive article 22 is polishing cotton, and connector 21 is the aluminium layer being arranged in polishing cotton upper surface.
Several through-holes 23 are offered on connector 21, are embedded in through-hole 23 with liquid branch pipe 12, are fixed and are connected with grinding assembly 20
It connects.The connection with liquid component 10 and grinding assembly 20 is realized by the way that through-hole 23 is arranged, it, can while realizing conveying lapping liquid
Ensure being fixedly connected with liquid component 10 and grinding assembly 20.
As with liquid branch pipe 12 and the alternative embodiments for being responsible for 11 position relationships with liquid, with liquid branch pipe 12 and match liquid master
The angle of the axial direction (lapping liquid flow direction) of pipe 11 is less than 90 °；I.e. lapping liquid is delivered to grinding assembly 20 at an angle,
The contact area that lapping liquid and grinding assembly 20 can be increased improves the conveying speed of lapping liquid, to improve grinding device
Grinding efficiency.Preferably, it is 75 ° to 85 ° to match liquid branch pipe 12 and the angle of the axial direction (lapping liquid flow direction) with liquid supervisor 11.
As the alternative embodiments of connector 21, connector 21 can be the supporting member of other arbitrary shapes, also may be used
Think other arbitrary rigid materials, need to only ensure to be reliably connected with liquid component 10 and the fixation of grinding assembly 20.
As the alternative embodiments of abrasive article 22, abrasive article 22 can be other abrasive materials such as sponge, wool wheel, only need
Ensure abrasive article 22 at work, grinding object will not be treated and cause secondary damage.
As a kind of optional embodiment of the present embodiment, which includes several disposed in parallel with liquid component
10, that is, be arranged it is multiple be fixedly connected with grinding assembly 20 with liquid component 20, can improve to grinding assembly 20 and convey lapping liquid
Efficiency；Furthermore it is possible to ensure that lapping liquid is evenly distributed in grinding assembly 20, reach the grinding quality for improving the grinding device
Purpose, and then improve the polishing effect of part to be ground.
As another optional embodiment of the present embodiment, grinding assembly 20 can only include abrasive article 22, and should
The cladding of abrasive article 22 is arranged with liquid branch pipe 12 and is arranged in the inside of abrasive article 22 with liquid branch pipe 12.Only it need to ensure to exist with liquid branch pipe
In the course of work, abrasive article will not be treated and cause to damage.
Embodiment 2
The utility model embodiment provides a kind of grinding system, as shown in figure 3, the system includes the grinding in embodiment 1
Device is used in the preparation process of Organnic electroluminescent device, the grinding to substrate.Wherein, about the specific of grinding device
CONSTRUCTED SPECIFICATION please refers to embodiment 1, and details are not described herein.
As shown in figure 3, substrate 30 is placed in fixing device 40, which is absorption layer.I.e. substrate 30 is placed
On absorption layer, it will be vacuumized between substrate 30 and absorption layer so that substrate 30 can be fixed on absorption layer, can't be to base
Plate 30 causes to damage.
The lower section of fixing device 40 is provided with groove body 50, for collecting lapping liquid, pollutes ring to prevent lapping liquid from leaking
Border.Wherein, return port is offered in the bottom of groove body 50, is utilized again for recycling lapping liquid, save resource.
As shown in figure 3, the grinding system includes the first branch 60 being connect with groove body 50 and the second branch 70, the system is logical
Triple valve 80 is crossed so that groove body 50 is connect with the first branch 60 and the second branch 70 respectively.Import that there are one the triple valves 80, two
A outlet, wherein import is connect with groove body 50, and outlet is connect with the first branch 60 and the second branch 70 respectively.Wherein, first
Road 60 utilizes again for recycling lapping liquid；The second branch 70, including second container 71, for being used in lapping liquid last time
Later, it recycles and discards lapping liquid.When the outlet opening that triple valve 80 is connect with the first branch 60, go out with what the second branch 70 was connect
When mouth is closed, the lapping liquid in groove body 50 realizes recycling through the first branch 60；When triple valve 80 and the first branch 60 connect
The port closing connect, when the outlet being connect with the second branch 70 is opened, the lapping liquid in groove body 50 is realized useless through the second branch 60
Abandon recycling.
The first branch 60 includes the first container 61, for storing lapping liquid；Conveying device 62, being used for will be in the first container 61
Lapping liquid be delivered to liquid component 10.Wherein, conveying device 62 is water pump, i.e., when the system works, water pump 62 holds first
Lapping liquid in device 61 is delivered to liquid component 10, and the lapping liquid after grinding is back to the first container 61 after the collection of groove body 50
In, to realize the recycling of lapping liquid.
Wherein, what is connect with the first branch 60 is responsible for 11 to be telescopic with liquid supervisor 11 with liquid so that the grinding system
In driving device (not shown) drive grinding device back and forth movement, realize grinding to substrate 30.
The course of work of the grinding system is as follows：The first valve 63 in the first branch 60 is opened, the second branch 70 is closed
On the second valve 72 so that the first branch 60 work, the second branch 70 disconnect.After substrate 30 is placed on fixing device 40, Gu
Determine device 40 vacuum extractor start to work, the air between substrate 30 and fixing device 40 is taken away so that substrate 30 with
It is vacuum between fixing device 40, substrate 30 is fixed in fixing device 40.Water pump 62 takes lapping liquid from the first container 61
Go out, ground device is delivered to liquid component 10 in grinding assembly 20；Driving device drives grinding device back and forth movement, realizes
Grinding to substrate 30.Groove body 50 collects the lapping liquid that is flowed down from fixing device in process of lapping, through triple valve 80, is back to the
In one container 61.Water pump 62 constantly takes out lapping liquid from the first container 61, realizes the recycling of lapping liquid.
Lapping liquid last time in use, close the first valve 62, open the second valve 72 so that discarded lapping liquid
It is back in second container 71 from groove body 50, practises and discard the recycling of lapping liquid.
As the optional embodiment of fixing device 40, fixing device 40 can be card slot, i.e. substrate 10 is placed on fixation
After device 40, card slot is by 10 clamping of substrate so that the position of substrate 10 is fixed.Fixing device 40 or other devices, only
It need to ensure that the position of substrate 10 is fixed.
As replaceable connection type between the first branch 60, the second branch 70 and groove body 50, in the bottom of groove body 50 or
Side wall is opened up respectively there are two return port, is connect respectively with the first branch 60 and the second branch 70, i.e., triple valve 80 can be omitted.
As the optional embodiment of conveying device, conveying device 62 can be self priming pump etc., need to only ensure that the conveying fills
Grinding device can be delivered to by lapping liquid from the first container 61 by setting 62.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
Among the protection domain that variation is created still in the utility model.
Claims (9)
1. a kind of grinding device, which is characterized in that including：
Grinding assembly (20)；
With liquid component (10), including match liquid supervisor (11) and with it is described connect with liquid supervisor (11) it is several with liquid branch pipe
(12), wherein described several be fixedly connected and on the grinding assembly (20) with liquid branch pipe (12) with the grinding assembly (20)
It is uniformly distributed.
2. grinding device according to claim 1, which is characterized in that the grinding assembly (20) include abrasive article (22),
And it is arranged in the abrasive article (22) outer wall, the connector (21) for supporting the abrasive article (22).
3. grinding device according to claim 2, which is characterized in that offer several through-holes on the connector (21)
(23), described to be fixedly connected with the grinding assembly (20) with the embedded through-hole (23) of liquid branch pipe (12).
4. grinding device according to claim 1, which is characterized in that described to match described including setting with liquid component (10)
Nozzle (13) of the liquid branch pipe (12) close to the grinding assembly (20) one end end.
5. a kind of grinding system, which is characterized in that including grinding device any one of Claims 1-4.
6. grinding system according to claim 5, which is characterized in that further include：
Groove body (50), and fixing device (40) of the setting above the groove body (50), the fixing device (40) is for solid
Fixed part (30) to be ground；
The first branch (60) is connect with the groove body (50)；
The first branch (60) includes the first container (61), conveying device (62) and the first valve (63), and described first holds
Device (61) is connect with described with liquid component (10) by the conveying device (62)；The groove body (50) passes through first valve
(63) it is connect with the first container (61).
7. grinding system according to claim 6, which is characterized in that further include：Second connect with the groove body (50)
Branch (70)；
The second branch (70) includes second container (71) and the second valve (72)；The second container (71) passes through the second valve
Door (72) is connect with the groove body (50).
8. grinding system according to claim 7, which is characterized in that further include triple valve (80)；The groove body (50) is logical
The triple valve (80) is crossed to connect with the first branch (60) and the second branch (70) respectively.
9. according to claim 5 to 8 any one of them grinding system, which is characterized in that further include：Driving device, for driving
Move the grinding device back and forth movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820147456.4U CN208034439U (en) | 2018-01-29 | 2018-01-29 | Grinding device and grinding system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820147456.4U CN208034439U (en) | 2018-01-29 | 2018-01-29 | Grinding device and grinding system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208034439U true CN208034439U (en) | 2018-11-02 |
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ID=63954822
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820147456.4U Active CN208034439U (en) | 2018-01-29 | 2018-01-29 | Grinding device and grinding system |
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|---|---|
| CN (1) | CN208034439U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111546214A (en) * | 2020-04-23 | 2020-08-18 | 福建晶安光电有限公司 | Dynamic replacement control method and system for slurry in semiconductor wafer processing |
-
2018
- 2018-01-29 CN CN201820147456.4U patent/CN208034439U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111546214A (en) * | 2020-04-23 | 2020-08-18 | 福建晶安光电有限公司 | Dynamic replacement control method and system for slurry in semiconductor wafer processing |
| CN111546214B (en) * | 2020-04-23 | 2022-04-22 | 福建晶安光电有限公司 | Dynamic replacement control method and system for slurry in semiconductor wafer processing |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | "change of name, title or address" |
Address after: No. 3168, Fuyuan Third Road, high tech Zone, Zaozhuang City, Shandong Province Patentee after: Zaozhuang Ruinuo Electronic Technology Co., Ltd Address before: 277000, No. 15, building 322, Internet Town, Zaozhuang hi tech Zone, Shandong Patentee before: ZAOZHUANG VISIONOX ELECTRONIC TECHNOLOGY Co.,Ltd. |
|
| CP03 | "change of name, title or address" |