CN207996460U - A kind of liquid source surge tank - Google Patents
A kind of liquid source surge tank Download PDFInfo
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- CN207996460U CN207996460U CN201721465449.0U CN201721465449U CN207996460U CN 207996460 U CN207996460 U CN 207996460U CN 201721465449 U CN201721465449 U CN 201721465449U CN 207996460 U CN207996460 U CN 207996460U
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- liquid
- phase mouth
- cylinder
- surge tank
- gas phase
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Abstract
The utility model discloses a kind of liquid source surge tanks, including the upper cover of cylinder, cylinder and the support plate for supporting cylinder, support plate bottom to be fixed on bottom plate, and the bottom end of cylinder is butterfly end socket;It is provided with liquid phase mouth, liquid-level switch installing port and the gas phase mouth I being oppositely arranged and gas phase mouth II on upper lid, flange is installed in liquid phase mouth, flange upper cover is fixed with by screw at flange upper end opening, and inserted with the take over I for going deep into cylinder body bottom in liquid phase mouth;It is equipped with boss in the opening of liquid-level switch installing port;Inserted with the take over II through upper cover in the aperture of gas phase mouth I and gas phase mouth II;The protective device for installing protective device is also welded in upper cover upper end to shelve in advance;The utility model has the following advantages:Ensure surge tank safety and stability, do not generate secondary pollution to liquid source, and effectively removes de-soak.
Description
Technical field
The utility model is related to PV photovoltaic industry crystal-silicon battery slices field, espespecially a kind of liquid source surge tank.
Background technology
The advanced manufacturing industries such as semiconductor/photovoltaic/optical fiber can be used to such as TMA, the poisonous and harmful chemical liquids such as DEZ, SiCl4
State source, usually using push gas push gas liquid with certain pressure into transmission pipeline network force feed to technique board, and technique
Board allows the usual < of flowed fluctuation amplitude 10% to the usual < 1g/min of flow all very littles of this kind of liquid source.This
Flow is minimum for liquid, and needs continual and steady supply, this just proposes liquid source supplying system very high
Constant pressure and flow requirement, for example be mixed into bubble in liquid, when flowing through board flowmeter, will show big flowed fluctuation, shadow
Ring technological parameter and finished product yield.
In order to eliminate inevitable mixed a small amount of gas during the bottle of replacement source, need liquid into transmission pipeline network
Before, a buffer unit that can effectively remove bubble is first passed through, the TMA centralizedly supply systems of the double source bottle switching designed at present,
During dismounting, purging source bottle, minute quantity gas inevitably is remained in the bottle connecting pipe of the sources pigtail, works as source
After bottle liquid-phase outlet valve is opened, residual gas can mix in a liquid, by pipe network, be slowly transported to technique board, flowed through
When gauge, since gas liquid density is different, big flowed fluctuation will be measured, and can actually influence technological parameter and product
Yield.
To solve the above-mentioned problems, a kind of liquid source buffer unit effectively removing bubble is devised in new technology, and its
In key be surge tank, how to ensure surge tank safety and stability, do not generate secondary pollution to liquid source, and effectively remove
Bubble, is very important.
Utility model content
The technical problems to be solved in the utility model is the shortcomings that overcoming the prior art, and providing one kind ensuring surge tank safety
Stablize, do not generate secondary pollution to liquid source, and effectively removes the liquid source surge tank of de-soak.
In order to solve the above-mentioned technical problem, the utility model provides the following technical solution:A kind of liquid source surge tank,
Support plate including cylinder, the upper cover of cylinder and support cylinder, support plate bottom are fixed on bottom plate, and the bottom end of cylinder is butterfly
End socket;Liquid phase mouth, liquid-level switch installing port and the gas phase mouth I being oppositely arranged and gas phase mouth II, liquid phase mouth are provided on upper lid
On flange is installed, flange upper cover is fixed with by screw at flange upper end opening, and inserted with going deep into cylinder in liquid phase mouth
The take over I of bottom;It is equipped with boss in the opening of liquid-level switch installing port;In the aperture of gas phase mouth I and gas phase mouth II inserted with
Through the take over II of upper cover;The protective device for installing protective device is also welded in upper cover upper end to shelve in advance.
As a kind of optimal technical scheme of the utility model, gas phase mouth I is push gas feed, and gas phase mouth II is to mend
Expect import.
As a kind of optimal technical scheme of the utility model, the bottom of take over I is in 140 ° of bendings, and tube bottom is away from cylinder bottom 5-
The upper end 10mm, take over I is welded on flange on lid.
As a kind of optimal technical scheme of the utility model, three manual diaphragm valves are installed, three manually at the top of cylinder
Diaphragm valve is respectively air inlet isolating valve, feed supplement feed liquor isolating valve, goes out liquid isolating valve.
Tuning-fork type liquid level is installed as a kind of optimal technical scheme of the utility model, in liquid-level switch installing port to open
It closes.
As a kind of optimal technical scheme of the utility model, surge tank is integrally made of SS316L stainless steel materials.
Tank body material all selects SS316L stainless steels, and especially anticorrosive good, pitting resistance is outstanding, and phosphorus content is lower in 316L,
There is better resistance to intercrystalline corrosion.
1. tank structure designs
Liquid source needs the push gas using~0.3Mpa to carry out force feed, and the manufacture of surge tank pressing force Vessel Design considers
To absolute safety, design pressure usually presses 1.0Mpa, and tank body is cylinder, and bottom is butterfly end socket, and top is to thicken flange
(upper cover);
Storage tank is vertical structure, and pot bottom raffinate is less;
A dismountable flange port (flange upper cover) is designed in top flange, is used as cleaning and maintenance.
2. volume
The dischargeable capacity of single surge tank need to meet all technique boards while run at least 1 day or more, be typically designed to
20-30L water capacities.
3. the surface treatment of material and portion in contact with the electrolyte
Tank body material all selects SS316L stainless steels, and anticorrosive good, especially pitting resistance is outstanding, contains in 316L
Carbon amounts is lower, has better resistance to intercrystalline corrosion.
Inner tank surface circular arc is excessive, and is handled to < Ra0.2 μm through electrobrightening, will not be generated to clean liquid source
Secondary pollution.
4. nozzle is arranged
There are 4 nozzles, liquid phase mouth 1, gas phase mouth 3 at the top of surge tank;One of gas phase mouth is for installing tuning-fork type
Liquid-level switch, connection type are screw thread;In another 2 gas phase mouths one for push gas feed, there are one be feed supplement import, this
2 gas phase mouth purposes can be exchanged arbitrarily, all be to be welded on tank deck flange (internal and flange by one, a 1/4 " pipeline
Inner wall is concordant), one faces VCR seal nipple of upper weld;
Liquid phase mouth is inserted into the position of pot bottom distance 5mm by one 1/2 " pipeline, can kept away as storage tank liquid outlet
Exempt from pot bottom some bulky grains etc. and enter outlet tube, the bending of 140 ° of outlet tube lower part can allow liquid in tank lower central position
Go out liquid, while liquid outlet quantity can be improved again;Outlet tube top passes through and is welded on dismountable flange, and a VCR is welded at top
Face seal nipple;
5. bottom supports support entire surge tank for fixed.
6. top valve protective device
Tank top, 3 manual diaphragm valves of installation, respectively air inlet isolating valve, feed supplement feed liquor isolating valve go out liquid isolation
Valve;
It is used at the top of surge tankStainless steel tube weld 2 arc protective devices, in addition to 3 diaphragms of tank deck can be protected
Valve can also be used as that storage tank handle is easy to use to be moved from the damages such as hitting.
The advantageous effect that the utility model is reached is:A kind of liquid source surge tank of the utility model, it is ensured that surge tank is pacified
It is complete to stablize, do not generate secondary pollution to liquid source, and effectively remove de-soak.
Description of the drawings
Attached drawing is used to provide a further understanding of the present invention, and a part for constitution instruction, with this practicality
Novel embodiment for explaining the utility model, does not constitute limitations of the present invention together.
In the accompanying drawings:
Fig. 1 is the utility model overall structure diagram;
Fig. 2 is the utility model upper cover planar structure schematic diagram;
Figure label:1, bottom plate;2, support plate;3, butterfly end socket;4, take over I;5, cylinder;6, upper cover;7, flange;8,O
Type circle;9, flange upper cover;10, soket head cap screw;11, take over II;12, boss;13, liquid phase mouth;14, liquid-level switch installing port;
15, gas phase mouth I;16, gas phase mouth II;17, protective device is shelved in advance.
Specific implementation mode
The preferred embodiment of the utility model is illustrated below in conjunction with attached drawing, it should be understood that described herein excellent
It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
In the description of the present invention, it should be noted that the instructions such as term "vertical", "upper", "lower", "horizontal"
Orientation or positional relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description the utility model and simplification
Description, does not indicate or imply the indicated device or element must have a particular orientation, with specific azimuth configuration and behaviour
Make, therefore should not be understood as limiting the present invention.
In the description of the present invention, it should also be noted that, unless otherwise clearly defined and limited, term " is set
Set ", " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection,
Or it is integrally connected;It can be mechanical connection, can also be electrical connection;It can be directly connected, intermediary can also be passed through
It is indirectly connected, can be the connection inside two elements.It for the ordinary skill in the art, can be according to specific feelings
Condition understands the concrete meaning of above-mentioned term in the present invention.
Embodiment:As shown in Figs. 1-2, a kind of liquid source surge tank of the utility model offer, including cylinder 5, cylinder 5 are upper
Lid 6 and the support plate 2 for supporting cylinder 5,2 bottom of support plate are fixed on bottom plate 1, and the bottom end of cylinder 5 is butterfly end socket 3;Upper
Liquid phase mouth 13, liquid-level switch installing port 14 and the gas phase mouth I15 being oppositely arranged and gas phase mouth II16, liquid phase mouth are provided on lid 6
Flange 7 is installed on 13, flange upper cover 9 is fixed with by screw at 7 upper end opening of flange, and inserted with depth in liquid phase mouth 13
Enter the take over I4 of 5 bottom of cylinder;It is equipped with boss 12 in the opening of liquid-level switch installing port 14;Gas phase mouth I15 and gas phase mouth
Inserted with the take over II11 through upper cover 6 in the aperture of II16;It is also welded in 6 upper end of upper cover for installing protective device
Protective device shelves 17 in advance.
Specifically:TMA liquid is transported to through pipe network in this tank by centralizedly supply system, and gas-liquid separation is realized by dead weight,
The front mixed gas of any reason been separated in storage tank top, is discharged by exhaust outlet through storage tank gas phase mouth;
Tank structure reasonable design mixes gas in a liquid with drop when the liquid of feed supplement enters from tank deck in tank
During falling, it is efficiently removed through Gravity Separation;(material-feeding port cannot be arranged in pot bottom, because bubble may be mingled with
It is gone out in a liquid by force feed through outlet tube);
Inner tank surface circular arc is excessive, and is handled through electrobrightening, will not generate secondary pollution to clean liquid source;
Design of pressure vessels manufactures, and selects SS316L stainless steel materials, it is ensured that surge tank safe and stable operation.
Due to needing to realize that centralizedly supply, i.e. liquid source in surge tank are extruded by push gas, force feed is distributed through pipe network
To each technique board, therefore the dischargeable capacity of single surge tank need to meet all technique boards while run at least 1 day or more, lead to
It is standing to be calculated as 20-30L water capacities.
The utility model provides a kind of liquid source surge tank, it is ensured that surge tank safety and stability, liquid source is not generated it is secondary
Pollution, and effectively remove de-soak.
Finally it should be noted that:The preferred embodiment that these are only the utility model, is not limited to this practicality
It is novel, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art,
It still can be with technical scheme described in the above embodiments is modified, or is carried out to which part technical characteristic etc.
With replacement.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on should all include
It is within the protection scope of the utility model.
Claims (6)
1. a kind of liquid source surge tank, which is characterized in that including cylinder (5), the upper cover (6) of cylinder (5) and support cylinder (5)
Support plate (2), support plate (2) bottom are fixed on bottom plate (1), and the bottom end of cylinder (5) is butterfly end socket (3);In upper cover (6)
It is provided with liquid phase mouth (13), liquid-level switch installing port (14) and gas phase mouth I (15) and the gas phase mouth II (16) being oppositely arranged, liquid phase
Flange (7) is installed on mouthful (13), flange upper cover (9), and liquid phase mouth are fixed with by screw at flange (7) upper end opening
(13) inserted with the take over I (4) for going deep into cylinder (5) bottom in;It is equipped with boss in the opening of liquid-level switch installing port (14)
(12);Inserted with the take over II (11) through upper cover (6) in the aperture of gas phase mouth I (15) and gas phase mouth II (16);In upper cover (6)
Upper end is also welded with the protective device for installing protective device and shelves in advance (17).
2. a kind of liquid source surge tank according to claim 1, which is characterized in that the gas phase mouth I (15) is push
Gas feed, gas phase mouth II (16) are feed supplement import.
3. a kind of liquid source surge tank according to claim 1, which is characterized in that the bottom of the take over I (4) is in
140 ° of bendings, tube bottom are welded on away from cylinder bottom 5-10mm, take over I (4) upper end in flange upper cover (9).
4. a kind of liquid source surge tank according to claim 1, which is characterized in that installation three at the top of the cylinder (5)
A manual diaphragm valve, three manual diaphragm valves are respectively air inlet isolating valve, feed supplement feed liquor isolating valve, go out liquid isolating valve.
5. a kind of liquid source surge tank according to claim 1, which is characterized in that the liquid-level switch installing port (14)
Tuning-fork type liquid-level switch is inside installed.
6. a kind of liquid source surge tank according to claim 1, which is characterized in that surge tank integrally uses SS316L stainless
Steel material is made.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201721465449.0U CN207996460U (en) | 2017-11-06 | 2017-11-06 | A kind of liquid source surge tank |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201721465449.0U CN207996460U (en) | 2017-11-06 | 2017-11-06 | A kind of liquid source surge tank |
Publications (1)
Publication Number | Publication Date |
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CN207996460U true CN207996460U (en) | 2018-10-23 |
Family
ID=63835248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201721465449.0U Active CN207996460U (en) | 2017-11-06 | 2017-11-06 | A kind of liquid source surge tank |
Country Status (1)
Country | Link |
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CN (1) | CN207996460U (en) |
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2017
- 2017-11-06 CN CN201721465449.0U patent/CN207996460U/en active Active
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