CN207976504U - A kind of photodetector test fixture - Google Patents
A kind of photodetector test fixture Download PDFInfo
- Publication number
- CN207976504U CN207976504U CN201820432858.9U CN201820432858U CN207976504U CN 207976504 U CN207976504 U CN 207976504U CN 201820432858 U CN201820432858 U CN 201820432858U CN 207976504 U CN207976504 U CN 207976504U
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- wafer
- integrating sphere
- supporting platform
- test fixture
- holder
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Abstract
The utility model discloses a kind of photodetector test fixture, including pedestal, holder, cantilever shalving, wafer-supporting platform and integrating sphere, the holder is vertically arranged, and its lower end is fixed on one end of the pedestal, and the cantilever shalving is fixedly connected with the upper end of the holder；The wafer-supporting platform installation is on the base, the integrating sphere is fixedly connected with the cantilever shalving, and is placed with silicon slice under test on the surface of the wafer-supporting platform, the table top of the wafer-supporting platform, the lower end light-emitting window of the integrating sphere is provided with anti-dazzling screen, and probe source is provided in the integrating sphere.A kind of photodetector test fixture of the utility model is by being arranged integrating sphere so that illumination can be uniformly radiated on silicon slice under test, promote its Detection accuracy；By the way that displacement platform and sliding rail is arranged so that wafer-supporting platform can slip away below integrating sphere, convenient for being disassembled and installed to silicon slice under test.
Description
Technical field
The utility model is related to photodetection field more particularly to a kind of photodetector test fixtures.
Background technology
Along with the development of detecting technique, detection fixture also gradually accounts for consequence in the measurements.But tradition
Detection fixture mostly without displacement platform and integrating sphere, in fact it could happen that distribution of light sources is uneven, each point illumination on silicon slice under test
Intensity is inconsistent, to influence the testing result of silicon slice under test, occurs that error is larger, it is accurate cannot to meet higher and higher detection
The demand of rate；Most of wafer-supporting platform at this stage is fixed structure simultaneously, when installation is with dismounting silicon slice under test, needs to dismantle
Detector or wafer-supporting platform cannot be satisfied the demand of the flexibility of installation and removal.
Utility model content
The purpose of this utility model is that solve the above-mentioned problems and provides a kind of photodetector test fixture.
The utility model is achieved through the following technical solutions above-mentioned purpose：
A kind of photodetector test fixture, including,
Pedestal, holder and cantilever shalving, the holder are vertically arranged, and its lower end is fixed on one end of the pedestal, described
Cantilever shalving is fixedly connected with the upper end of the holder；
Wafer-supporting platform and integrating sphere, on the base, the integrating sphere is fixed with the cantilever shalving for the wafer-supporting platform installation
Connection, and silicon slice under test is placed on the surface of the wafer-supporting platform, the table top of the wafer-supporting platform, under the integrating sphere
It brings out optical port and is provided with anti-dazzling screen, light inlet and the optical fiber light connects of the integrating sphere upper end.
Further, the fixture further includes sliding rail and displacement platform, and the sliding rail is horizontally fixed on the upper side of the pedestal,
The lower part of the displacement platform and the sliding rail slidable connection, the wafer-supporting platform are fixed at the upper side of the displacement platform.
Preferably, the anti-dazzling screen is selective examination type anti-dazzling screen.
Further, the downside of the pedestal is provided with damping device.
The beneficial effects of the utility model are：
A kind of photodetector test fixture of the utility model is by being arranged integrating sphere so that illumination can uniformly irradiate
On silicon slice under test, its Detection accuracy is promoted；By the way that displacement platform and sliding rail is arranged so that wafer-supporting platform can slip away under integrating sphere
Side, convenient for being disassembled and installed to silicon slice under test.
Description of the drawings
Fig. 1 is a kind of front view of photodetector test fixture described in the utility model；
Fig. 2 is a kind of side view of photodetector test fixture described in the utility model.
In figure：1- pedestals, 2- holders, 3- cantilever shalvings, 4- displacement platforms, 5- wafer-supporting platforms, 6- integrating spheres, 7- sliding rails, 8- shadings
Piece and 9- damping devices.
Specific implementation mode
The utility model is described in further detail below in conjunction with the accompanying drawings：
As depicted in figs. 1 and 2, a kind of photodetector test fixture of the utility model, including pedestal 1, holder 2, cantilever
Frame 3, wafer-supporting platform 5, integrating sphere 6, sliding rail 7 and displacement platform 4, holder 2 are vertically arranged, and its lower end is fixed on one end of pedestal 1, are hanged
Arm support 3 is fixedly connected with the upper end of holder 2, and sliding rail 7 is horizontally fixed on the upper side of pedestal 1, lower part and the sliding rail 7 of displacement platform 4
Slidable connection, wafer-supporting platform 5 are fixed at the upper side of displacement platform 4, and integrating sphere 6 is fixedly connected with cantilever shalving 3, wafer-supporting platform 5
Table top on be placed with silicon slice under test, the lower end light-emitting window of integrating sphere 6 is provided with anti-dazzling screen 8, the light inlet of 6 upper end of integrating sphere with
Optical fiber light connects.Anti-dazzling screen 8 is selective examination type anti-dazzling screen 8, and the downside of pedestal 1 is provided with damping device 9.
A kind of operation principle of photodetector test fixture of the utility model is as follows：
When installing silicon slice under test, displacement platform 4 is slided along sliding rail 7 so that wafer-supporting platform 5 is not located at the lower section of integrating sphere 6,
Then the silicon slice under test on wafer-supporting platform 5 is installed.
After installation is complete, displacement platform 4 is slided along sliding rail 7 so that wafer-supporting platform 5 slides into the underface of integrating sphere 6, passes through
The light that integrating sphere 6 imports optical fiber is evenly dispersed, and by being covered on silicon slice under test after the shading of anti-dazzling screen 8, to silicon to be measured
Piece is detected.
Wherein, silicon slice under test is selective examination type, and when needing to carry out inner ring detection to silicon slice under test, the outer shroud of anti-dazzling screen 8 is hidden
Firmly；When needing to carry out outer shroud detection to silicon slice under test, the inner ring of anti-dazzling screen 8 is covered.
Damping device 9 can be rubber mat, elastic support 2, inflatable foot mat etc..
The technical solution of the utility model is not limited to the limitation of above-mentioned specific embodiment, every skill according to the present utility model
The technology deformation that art scheme is made, each falls within the scope of protection of the utility model.
Claims (4)
1. a kind of photodetector test fixture, it is characterised in that：Including,
Pedestal, holder and cantilever shalving, the holder are vertically arranged, and its lower end is fixed on one end of the pedestal, the cantilever
Frame is fixedly connected with the upper end of the holder；
Wafer-supporting platform and integrating sphere, on the base, the integrating sphere is fixedly connected with the cantilever shalving for the wafer-supporting platform installation,
And it is placed with silicon slice under test on the surface of the wafer-supporting platform, the table top of the wafer-supporting platform, it is brought out under the integrating sphere
Optical port is provided with anti-dazzling screen, light inlet and the optical fiber light connects of the integrating sphere upper end.
2. a kind of photodetector test fixture according to claim 1, it is characterised in that：Further include sliding rail and displacement
Platform, the sliding rail are horizontally fixed on the upper side of the pedestal, the lower part of the displacement platform and the sliding rail slidable connection, institute
State the upper side that wafer-supporting platform is fixed at the displacement platform.
3. a kind of photodetector test fixture according to claim 1, it is characterised in that：The anti-dazzling screen is selective examination type
Anti-dazzling screen.
4. a kind of photodetector test fixture according to claim 1, it is characterised in that：The downside of the pedestal is set
It is equipped with damping device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820432858.9U CN207976504U (en) | 2018-03-28 | 2018-03-28 | A kind of photodetector test fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820432858.9U CN207976504U (en) | 2018-03-28 | 2018-03-28 | A kind of photodetector test fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207976504U true CN207976504U (en) | 2018-10-16 |
Family
ID=63763238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820432858.9U Active CN207976504U (en) | 2018-03-28 | 2018-03-28 | A kind of photodetector test fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207976504U (en) |
-
2018
- 2018-03-28 CN CN201820432858.9U patent/CN207976504U/en active Active
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