CN207964688U

CN207964688U - XRD texture tester objective table devices

Info

Publication number: CN207964688U
Application number: CN201820346064.0U
Authority: CN
Inventors: 刘逸欣
Original assignee: FUJIAN LITECORE PHOTOELECTRIC TECHNOLOGY Co Ltd
Current assignee: FUJIAN LITECORE PHOTOELECTRIC TECHNOLOGY Co Ltd
Priority date: 2018-03-14
Filing date: 2018-03-14
Publication date: 2018-10-12
Anticipated expiration: 2028-03-14

Abstract

The utility model proposes a kind of XRD texture testers objective table device, multiple clamping devices that can be slided with respect to stage surface are provided on objective table ontology；The clamping device includes can be relative to the fixture block for the sliding slot sliding being opened on stage surface, and is set to fixture block and contacts side, and opening up vacuum sucking holes with test article；The vacuum sucking holes connect the vacuum pump being arranged except objective table ontology by vacuum line.It is technical solutions of the utility model and its preferred embodiment delicate structure, of low cost, the scope of application and ease for use of common XRD texture testers objective table device have not only been expanded significantly, also reduce the difficulty and time cost of operation, suitable for the demand of development ＆ production, have higher market value and promotion prospect.

Description

XRD texture tester objective table devices

Technical field

The utility model belongs to X-ray diffraction testing field more particularly to a kind of XRD with vacuum sucking holes and fixture block is knitted Structure tester objective table device.

Background technology

Existing X-ray diffraction（XRD）When texture tester objective table test sample, only sample is clamped with conventional fixture block Product hold when testing fragile samples such as substrate slice and are tightly easy to cause very much sample burst, hold the too loose sample that is easy to cause and fall It falls, and is testing non-circular sample（Such as half circle substrate slice, quadrant substrate slice etc.）When, there are specimen holders Not tight, easy the phenomenon that sliding.

Utility model content

In view of the shortcomings of the prior art and blank, the utility model use following technical scheme：

A kind of XRD texture testers objective table device, it is characterised in that：It is provided with and multiple opposite can carry on objective table ontology The clamping device of object platform planar slide；The clamping device includes that can be slided relative to the sliding slot being opened on stage surface Fixture block, and be set to fixture block and contact side, and opening up vacuum sucking holes with test article；The vacuum sucking holes pass through vacuum The vacuum pump except objective table ontology is arranged in piping connection.

Preferably, the vacuum line connects vacuum sucking holes, and be located at carrier interior one section is vacuum hose.

Preferably, the vacuum line includes at least one section of vacuum corrugated pipe.

Preferably, the corresponding vacuum line of the vacuum sucking holes of the multiple clamping device summarizes pipeline by vacuum and is connected to Vacuum pump.

Preferably, the vacuum line is provided with suction regulating device.

Preferably, in the clamping device, vacuum hose is laid on the downside of the clamping lug boss of fixture block, vacuum sucking holes and folder Block synchronous slide.

Preferably, the fixture block lower part connects slide plate by spring；The slide plate is slidably connected with objective table level.

Preferably, the vacuum line, which enters on the side wall in carrier interior channel, is provided with idler wheel.

Preferably, it there are three the clamping device is total to, is symmetrically distributed on objective table in positive triangle, and its horizontal sliding side To the center towards positive triangle.

Preferably, the objective table ontology is fixed on the base upper portion of tester, and parallel with substrate.

It is technical solutions of the utility model and its preferred embodiment delicate structure, of low cost, common XRD has not only been expanded significantly The scope of application and ease for use of texture tester objective table device also reduce the difficulty and time cost of operation, suitable for grinding The demand produced has higher market value and promotion prospect.

Compared with prior art, the utility model has the beneficial effects that：

1. the present apparatus extends the function of existing XRD texture testers, makes it that sample is more firmly fixed, carry Height greatly reduces work difficulty, improves measurement efficiency, reduce to the accuracy and repeatability of sample XRD texture measurements To the hurtful probability of test sample；

2. the present apparatus extends the sample scope that can be tested of existing XRD texture testers, it is allowed to no longer survey Take temperature face be regular geometric shapes sheet sample, also can test surfaces be random geometry sheet sample.

Description of the drawings

With reference to the accompanying drawings and detailed description to the further details of explanation of the utility model：

Fig. 1 is the utility model embodiment overall structure schematic front view；

Fig. 2 is the utility model embodiment overall structure schematic top plan view；

Fig. 3 is the utility model embodiment overall structure main cross-sectional schematic diagram；

Fig. 4 is the utility model embodiment overall structure side schematic cross-sectional view；

In figure：1- objective tables；2- fixture blocks；21- vacuum sucking holes；22- springs；23- slide plates；3- vacuum hoses；4- idler wheels；5- Vacuum corrugated pipe；6- vacuum summarizes pipeline；7- external vacuum hoses；8- objective table fixing devices；9- substrates；10- suction is adjusted Device；11- vacuum pumps.

Specific implementation mode

For the feature and advantage of this patent can be clearer and more comprehensible, special embodiment below is described in detail below：

As shown in Fig. 2, in the utility model embodiment, loading plane is on 1 ontology of circular objective table there are three settings It can be with respect to the clamping device of 1 planar slide of objective table；It is symmetrically distributed on objective table 1 in positive triangle, and its horizontal glide direction Towards the center of positive triangle.

As shown in Fig. 1,3,4, in the present embodiment, clamping device includes can be relative to the cunning being opened in 1 plane of objective table The fixture block 2 of slot sliding, and be set to fixture block 2 and contact side, and opening up vacuum sucking holes 21 with test article；Vacuum sucking holes 21 connect the vacuum pump 11 being arranged except 1 ontology of objective table by vacuum line.

Wherein, vacuum line connects vacuum sucking holes 21, and one section inside objective table 1 is vacuum hose 3.

The 21 corresponding vacuum line of vacuum sucking holes of three clamping devices is by being vertically set on 1 central lower of objective table Vacuum summarizes pipeline 6 and is connected to vacuum pump 11.

Vacuum hose 3 and vacuum are connected between summarizing pipeline 6 by vacuum corrugated pipe 5.

Vacuum summarizes pipeline 6 and is connected to vacuum pump 11 through suction regulating device 10 by external vacuum hose 7.

As shown in figure 3, in clamping device, vacuum hose 3 is laid on the downside of the clamping lug boss of fixture block 2, vacuum sucking holes 21 with 2 synchronous slide of fixture block.

2 lower part of fixture block connects slide plate 23 by spring 22；Slide plate 23 is slidably connected with 1 level of objective table.

Vacuum line, which enters on the side wall of 1 inner passage of objective table, is provided with idler wheel 4.

1 ontology of objective table is fixed on 9 top of substrate of tester by objective table fixing device 8, and parallel with substrate 9.

In the present embodiment, fixture block 2 is in convex, when the top is arrived in the top of fixture block 2 by spring 22,2 lower half portion of fixture block Upper surface and 1 surface of objective table maintain an equal level, 2 top half of fixture block exposes objective table 1.Vacuum line includes vacuum hose 3, vacuum Bellows 5, vacuum summarize 7 four pipeline 6, external vacuum hose parts, wherein telescopic vacuum corrugated pipe 5 can be preferably Coordinate the movement of fixture block 2, it is more uniform that vacuum summarizes the suction that pipeline 6 makes three clamping devices provide.Enter in vacuum hose 3 Hole both sides inside objective table 1 install two idler wheels 4 additional, facilitate the movement of vacuum hose 3.

In the present embodiment, to adapt to various sizes of sheet sample, summarize in vacuum and set between pipeline 6 and vacuum pump 11 Suction regulating device 10 has been set, has been preferably needle valve, automatic flow control valve or vent valve can also have been replaced with, and according to not Suction is adjusted with size requirements, sample is made more to be firmly fixed on objective table 1 during the test.

In the present embodiment, vacuum pump 11 is placed in outside XRD texture measurement instruments, and passes through vacuum line and objective table 1 Connection, since vacuum pump 11 usually has very strong vibrations, and XRD texture measurement instruments are a kind of precision instruments, so must put In the place far from XRD texture measurement instruments and certain noise reduction processing is done, to exclude the vibrations of vacuum pump 11 to XRD texture measurements The influence of instrument.Meanwhile the requirement for vacuum hose 3 is to want sufficiently soft, is not felt by with hand in XRD texture measurement instrument sides Any vibrations, and will not be to texture measurement instrument when objective table 1 does 0 one 360 degree of Phi scannings and 0 one 90 degree of Kai are scanned Have an impact.

Therefore, in the present embodiment, vacuum hose 3 selects flexible plastic tube.Simultaneously for the thickness requirement control of objective table 1 In 25mm, and the diameter control of the vacuum sucking holes 21 of fixture block 2 is in 3-5mm, and the caliber of vacuum hose 3 is controlled in 6-7mm.

Print in use, is first positioned on objective table 1 by the present embodiment device, is pushed and is slided fixture block 2 by sample Piece is clamped, and during mobile fixture block 2, vacuum hose 3 is easily extracted out in the slave objective table 1 under the effect of idler wheel 4, vacuum ripple Pipe 5 extends, and so that fixture block 2 is fixed by the elastic force of spring 22 after release fixture block 2, while the vacuum sucking holes 21 of fixture block 2 just paste Close print lower surface；Vacuum pump 11 is opened later, adjusts suitable suction, sample is made preferably to be adsorbed on 1 surface of objective table.It surveys After amount, vacuum pump 11 is first closed, pushes and slides fixture block 2 and unclamp sample, slave load of the vacuum hose 3 under the effect of idler wheel 4 It easily retracts in object platform 1 inside objective table 1, vacuum corrugated pipe 5 is shunk.

This patent is not limited to above-mentioned preferred forms, anyone can obtain other each under the enlightenment of this patent The XRD texture tester objective table devices of kind of form, all equivalent changes done according to present utility model application the scope of the claims with repair Decorations, should all belong to the covering scope of this patent.

Claims

1. a kind of XRD texture testers objective table device, it is characterised in that：Be provided on objective table ontology it is multiple can be with respect to loading The clamping device of platform planar slide；The clamping device includes can be relative to the folder for the sliding slot sliding being opened on stage surface Block, and be set to fixture block and contact side, and opening up vacuum sucking holes with test article；The vacuum sucking holes pass through vacuum tube Road connects the vacuum pump being arranged except objective table ontology.

2. XRD texture testers objective table device according to claim 1, it is characterised in that：The vacuum line connection Vacuum sucking holes, and be located at carrier interior one section is vacuum hose.

3. XRD texture testers objective table device according to claim 2, it is characterised in that：The vacuum line is at least Including one section of vacuum corrugated pipe.

4. XRD texture testers objective table device according to claim 2, it is characterised in that：The multiple clamping device Vacuum sucking holes corresponding vacuum line pipeline summarized by vacuum be connected to vacuum pump.

5. XRD texture testers objective table device according to claim 2, it is characterised in that：The vacuum line setting There is suction regulating device.

6. XRD texture testers objective table device according to claim 2, it is characterised in that：In the clamping device, very Empty hose is laid on the downside of the clamping lug boss of fixture block, vacuum sucking holes and fixture block synchronous slide.

7. XRD texture testers objective table device according to claim 6, it is characterised in that：The fixture block lower part passes through Spring connects slide plate；The slide plate is slidably connected with objective table level.

8. XRD texture testers objective table device according to claim 7, it is characterised in that：The vacuum line enters It is provided with idler wheel on the side wall in carrier interior channel.

9. XRD texture testers objective table device according to claim 1, it is characterised in that：The clamping device is shared It three, is symmetrically distributed on objective table in positive triangle, and its horizontal glide direction is towards the center of positive triangle.

10. XRD texture testers objective table device according to claim 1, it is characterised in that：The objective table ontology is solid It is scheduled on the base upper portion of tester, and parallel with substrate.