CN207961680U - High conductance Pneumatic baffle valve - Google Patents

High conductance Pneumatic baffle valve Download PDF

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Publication number
CN207961680U
CN207961680U CN201820362906.1U CN201820362906U CN207961680U CN 207961680 U CN207961680 U CN 207961680U CN 201820362906 U CN201820362906 U CN 201820362906U CN 207961680 U CN207961680 U CN 207961680U
Authority
CN
China
Prior art keywords
valve
valve body
air inlet
cylinder
deck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201820362906.1U
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Chinese (zh)
Inventor
宋志成
韩海龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ai Fa Ke Vacuum Technology (shenyang) Co Ltd
Original Assignee
Ai Fa Ke Vacuum Technology (shenyang) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ai Fa Ke Vacuum Technology (shenyang) Co Ltd filed Critical Ai Fa Ke Vacuum Technology (shenyang) Co Ltd
Priority to CN201820362906.1U priority Critical patent/CN207961680U/en
Application granted granted Critical
Publication of CN207961680U publication Critical patent/CN207961680U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

High conductance Pneumatic baffle valve belongs to vacuum pump set technical field.High conductance Pneumatic baffle valve, including valve body, valve body upper end is equipped with cylinder, the air inlet of valve body is arranged in valve body side, and the gas outlet of valve body is arranged in the lower end of valve body, in valve body, the lower end of cylinder be connected with valve deck, the cylinder lower end connects valve deck by inverted T shaped gland, it is bolted between the inverted T shaped gland and valve deck, there is cavity, the front end of the cylinder to fix in the cavity inside the interconnecting piece of inverted T shaped gland upper end;The valve deck is corresponding with the gas outlet of valve body, and the air inlet is rectangular air inlet.The utility model Pneumatic baffle valve is more than the rectangular air inlet of height using air scoop width;The distance for not only saving material and air operation shortens, and increase vacuumizes efficiency.In addition, rectangular air inlet, it can be bigger than level round air inlet open area, conductance also becomes larger, and efficiency is vacuumized to be promoted.

Description

High conductance Pneumatic baffle valve
Technical field
The utility model belongs to vacuum pump set technical field, more particularly, to a kind of improvement of pneumatic baffle valve arrangement.
Background technology
Pneumatic baffle valve plays an important role in vacuum pump set, in the high vacuum unit of especially 600 diffusion pumps, existing The high vacuum units of 600 diffusion pumps be to be arranged as follows when in use, in the baffled valve in vacuum furnace body side, flapper valve air inlet The outlet port of end connection vacuum furnace body exhaust port, flapper valve connects vacuum pumping pump, and vacuum pump is arranged in flapper valve lower end;By The height of flapper valve is added to already exceed vacuum furnace body height in conventional vacuum pump, and its air inlet of existing flapper valve is circle Shape, circular air inlet centre-height is also high, need to connect when vacuum drying oven and flapper valve being caused to be connected one section tilt upward lead Flow tube could realize being connected for vacuum drying oven and flapper valve.In addition the exhaust outlet conductance of flapper valve is certain, and air inlet is arranged to circle The position of round air inlet lower end both sides is caused to waste.
Utility model content
In view of the deficienciess of the prior art, the technical problem to be solved by the utility model is to provide a kind of rectangular air inlets Mouth high conductance Pneumatic baffle valve, the air inlet centre-height of the flapper valve is low and air inlet conductance is big.
The utility model adopts the following technical scheme that complete:High conductance Pneumatic baffle valve, including valve body, on valve body End is equipped with cylinder, it is characterised in that:The air inlet of valve body is arranged in valve body side, and the gas outlet of valve body is arranged under valve body End, in valve body, the lower end of cylinder be connected with valve deck, the cylinder lower end passes through inverted T shaped gland and connects valve deck, it is described fall T It is bolted between type gland and valve deck, there is cavity, the front end of the cylinder inside the interconnecting piece of inverted T shaped gland upper end It fixes in the cavity;The valve deck is corresponding with the gas outlet of valve body, corresponding with valve body gas outlet on valve deck to set It is equipped with ring type seal;The air inlet is rectangular air inlet.
As a preferred embodiment, the width of the rectangular air inlet is more than height;This width is more than the flat of height The centre-height of rectangle is relatively low, reduces the when of being connected with vacuum drying oven after height and can accomplish be connected parallel with the gas outlet of vacuum drying oven Form, not only save material and air operation distance shorten, increase vacuumize efficiency.
As another preferred embodiment, it is connected by seal box between the cylinder and the upper valve cover board of valve body upper end; The seal box can be replaced sealing bearing.
The utility model has the beneficial effects that:The utility model Pneumatic baffle valve is more than the square of height using air scoop width Shape air inlet;The centre-height that this width is more than the flat rectangle of height is relatively low, and reducing can when being connected with vacuum drying oven after height By accomplish it is parallel with the gas outlet of vacuum drying oven it is connected in the form of, not only save material and air operation distance shorten, increase take out Vacuum efficiency.In addition, rectangular air inlet, it can be bigger than level round air inlet open area, conductance also becomes larger, to Promotion vacuumizes efficiency.
Description of the drawings
FIG. 1 is a schematic structural view of the utility model.
In figure, 1 is valve deck;2 be annular seal ring;3 be inverted T shaped gland, 4 be air inlet, 5 be spider, 6 be cylinder, 7 be Seal box, 8 be valve body, 9 be gas outlet.
Specific implementation mode
The utility model is described in further detail with reference to the accompanying drawings and detailed description.
The technical issues of in order to keep the utility model solved, technical solution and advantageous effect are more clearly understood, below In conjunction with specific embodiments, the utility model is further described.It should be appreciated that specific embodiment described herein is only To explain the utility model, be not used to limit the utility model.
With reference to the accompanying drawings shown in 1, high conductance Pneumatic baffle valve, including valve body 8,8 upper end of valve body is equipped with cylinder 6, on valve body 8 End is equipped with spider 5, and the spider 5 is circular ring shape spider, and cylinder 6 is set to 5 upper end of the spider;The air inlet of valve body 8 is arranged In 8 side of valve body, the gas outlet of valve body 8 is arranged in the lower end of valve body 8, in valve body 8, the lower end of cylinder 6 be connected with valve deck 1, The cylinder lower end connects valve deck by inverted T shaped gland 3, is bolted between the inverted T shaped gland 3 and valve deck 1, There is cavity, the front end of the cylinder 6 to fix in the cavity inside the interconnecting piece of 3 upper end of T-type gland;The valve deck 1 with The gas outlet of valve body 8 is corresponding, corresponding with valve body gas outlet on valve deck 1 to be provided with ring type seal 2;The air inlet Mouth is rectangular air inlet.
As a preferred embodiment, the width of the rectangular air inlet is more than height;This width is more than the flat of height The centre-height of rectangle is relatively low, reduces the when of being connected with vacuum drying oven after height and can accomplish be connected parallel with the gas outlet of vacuum drying oven Form, not only save material and air operation distance shorten, increase vacuumize efficiency.
As another preferred embodiment, pass through seal box phase between the cylinder 6 and the upper valve cover board of 8 upper end of valve body Even;The seal box can be replaced sealing bearing.
The utility model has the beneficial effects that:The utility model Pneumatic baffle valve is more than the square of height using air scoop width Shape air inlet;The centre-height that this width is more than the flat rectangle of height is relatively low, and reducing can when being connected with vacuum drying oven after height By accomplish it is parallel with the gas outlet of vacuum drying oven it is connected in the form of, not only save material and air operation distance shorten, increase take out Vacuum efficiency.In addition, rectangular air inlet, it can be bigger than level round air inlet open area, conductance also becomes larger, to Promotion vacuumizes efficiency.The reason is that level its periphery edge space of circle air inlet all slatterns, and make The space of edge can all be utilized upper, increase conductance by rectangular air inlet.
The preferred embodiment of the utility model described in detail above.It should be appreciated that the ordinary skill people of this field Member according to the present utility model can conceive without creative work makes many modifications and variations.Therefore, all this technology necks Technical staff passes through logic analysis, reasoning or limited reality on the basis of existing technology according to the design of the utility model in domain Available technical solution is tested, it all should be in the protection domain being defined in the patent claims.

Claims (3)

1. high conductance Pneumatic baffle valve, including valve body, valve body upper end is equipped with cylinder, it is characterised in that:The air inlet of valve body is arranged In valve body side, the gas outlet of valve body is arranged in the lower end of valve body, in valve body, the lower end of cylinder be connected with valve deck, it is described Cylinder lower end connects valve deck by inverted T shaped gland, is bolted between the inverted T shaped gland and valve deck, on inverted T shaped gland There is cavity, the front end of the cylinder to fix in the cavity inside the interconnecting piece at end;The gas outlet of the valve deck and valve body It is corresponding, it is corresponding with valve body gas outlet on valve deck to be provided with ring type seal;The air inlet is rectangular air inlet.
2. high conductance Pneumatic baffle valve according to claim 1, it is characterised in that:The width of the rectangular air inlet is big In height.
3. high conductance Pneumatic baffle valve according to claim 1, it is characterised in that:The cylinder is upper with valve body upper end It is connected by seal box between valve cover.
CN201820362906.1U 2018-03-17 2018-03-17 High conductance Pneumatic baffle valve Expired - Fee Related CN207961680U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820362906.1U CN207961680U (en) 2018-03-17 2018-03-17 High conductance Pneumatic baffle valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820362906.1U CN207961680U (en) 2018-03-17 2018-03-17 High conductance Pneumatic baffle valve

Publications (1)

Publication Number Publication Date
CN207961680U true CN207961680U (en) 2018-10-12

Family

ID=63743903

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820362906.1U Expired - Fee Related CN207961680U (en) 2018-03-17 2018-03-17 High conductance Pneumatic baffle valve

Country Status (1)

Country Link
CN (1) CN207961680U (en)

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Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20181012

Termination date: 20210317

CF01 Termination of patent right due to non-payment of annual fee