CN207958481U - A kind of double-layer nested crucible of metal evaporation - Google Patents
A kind of double-layer nested crucible of metal evaporation Download PDFInfo
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- CN207958481U CN207958481U CN201721701982.2U CN201721701982U CN207958481U CN 207958481 U CN207958481 U CN 207958481U CN 201721701982 U CN201721701982 U CN 201721701982U CN 207958481 U CN207958481 U CN 207958481U
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- crucible
- boron nitride
- pyrolytic boron
- tantalum
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Abstract
The utility model provides a kind of metal evaporation double-layer nested crucible, including pyrolytic boron nitride crucible, and tantalum-tungsten alloy crucible is nested with outside pyrolytic boron nitride crucible.The thickness of tantalum-tungsten alloy crucible is less than the thickness of pyrolytic boron nitride crucible.Pyrolytic boron nitride crucible is disposed as cylindrical shape with tantalum-tungsten alloy crucible.The internal diameter of tantalum-tungsten alloy crucible is greater than or equal to the outer diameter of pyrolytic boron nitride crucible.The top of pyrolytic boron nitride crucible is set as rectangular frame structure.Metal evaporation provided by the utility model passes through the nested tantalum-tungsten alloy crucible outside pyrolytic boron nitride crucible with double-layer nested crucible, both the good thermal conductance of pyrolytic boron nitride PBN crucibles, thermal shock resistance and high-temperature stability had been remained, it in turn ensures the problem of there is enough intensity to be not easily broken and prevent infiltration leakage for the double-layer nested crucible for being nested with outer layer TTA crucibles, prevents molten metal from leaking into evaporation source.In addition, the structure setting of double-layer nested crucible extends the service life of crucible.
Description
Technical field
The utility model is related to cathodic metals in OLED intelligent displays technical field more particularly to displayer production
The structure of crucible for vapor plating.
Background technology
Organic light emitting display OLED (Organic Light-Emitting Display) technology is most promising at present
One of screen display technology.The core functional layer of OLED device include anode, organic function layer (hole injection/transport layer,
Electron injection transport layer and luminescent layer) and cathode.Ideal cathodes are that have work function using low workfunction metal as implanted layer
Matched with electron transfer layer, translucency is good and electric conductivity preferably etc. performances stable metal (Mg/Ag, Li/Al etc.).Metallic cathode
The evaporating temperature needed when vapor deposition is higher (evaporating temperature of silver-colored Ag is close to 1300 DEG C), it is desirable that metal with vapor deposition crucible have compared with
Wellability, good thermal conductance, thermal shock resistance and high-temperature stability between poor metal.Being presently used for the crucible that silver-colored Ag evaporates is mostly
Pyrolytic boron nitride (Pyrolytic Boron Nitride, PBN) material, the disadvantage is that pyrolytic boron nitride PBN crucible long-time high temperature
After use, the service life declines, and needs to regularly replace；And because the service life declines, infiltration risk of leakage occurs and increases, evaporation source is caused to be damaged
Probability rises；Increase production cost and management and control risk；And pyrolytic boron nitride PBN crucible intensity is smaller.Pyrolytic boron nitride PBN earthenwares
Crucible is easy to collide with and cracked in added material, can be escaped to when silver-colored Ag being caused to melt and damage evaporation source on evaporation source.It steams
The damage that rises can cause cathode evaporation cavity vapor deposition halting problem occur, influence productive temp.Therefore, a kind of raising earthenware need to be researched and developed
Crucible intensity extends the metal evaporation crucible structure of pot life.
Utility model content
The utility model provides a kind of double-layer nested crucible of metal evaporation, solves pyrolytic boron nitride PBN crucibles
Good thermal conductance, thermal shock resistance and high-temperature stability and tantalum-tungsten alloy crucible (Tantalum Tungsten Alloys, TTA)
High intensity be not easily broken and the characteristic of anti-infiltration leakage combines, the technical issues of service life to extend crucible.
In order to solve the above-mentioned technical problem, technical solution adopted in the utility model is：
The utility model provides a kind of metal evaporation double-layer nested crucible, including pyrolytic boron nitride crucible, in the heat
It is nested with tantalum-tungsten alloy crucible outside solution boron nitride crucible；
The thickness of the tantalum-tungsten alloy crucible is less than the thickness of the pyrolytic boron nitride crucible.
Further, the pyrolytic boron nitride crucible and the tantalum-tungsten alloy crucible be disposed as cylindrical shape or other
Shape.
Further, the internal diameter of the tantalum-tungsten alloy crucible is greater than or equal to the outer diameter of the pyrolytic boron nitride crucible.
Further, the top of the pyrolytic boron nitride crucible is set as rectangular frame structure.
Metal evaporation provided by the utility model passes through the nested tantalum tungsten outside pyrolytic boron nitride crucible with double-layer nested crucible
Alloy crucible had both remained the good thermal conductance of pyrolytic boron nitride PBN crucibles, thermal shock resistance and high-temperature stability, had in turn ensured
There is enough intensity to be not easily broken and prevent asking for infiltration leakage for the double-layer nested crucible for being nested with outer layer TTA crucibles
Topic, prevents molten metal from leaking into evaporation source.In addition, the structure setting of double-layer nested crucible extends the use longevity of crucible
Life.
Description of the drawings
Fig. 1 is front view of the utility model metal evaporation with double-layer nested crucible；
Fig. 2 is vertical view of the utility model metal evaporation with double-layer nested crucible.
Specific implementation mode
The embodiment of the utility model is specifically illustrated below in conjunction with the accompanying drawings, and attached drawing is only for reference and illustrates to use, not structure
The limitation of pairs of the utility model patent protection domain.
Embodiment 1：
As shown in Figure 1, the present embodiment is related to a kind of double-layer nested crucible of metal evaporation, including pyrolytic boron nitride crucible 1,
Tantalum-tungsten alloy crucible 2 is nested with outside the pyrolytic boron nitride crucible 1.
In the present embodiment, the thickness of the tantalum-tungsten alloy crucible 2 is less than the thickness of the pyrolytic boron nitride crucible 1.
In the present embodiment, the pyrolytic boron nitride crucible 1 is disposed as cylindrical shape with the tantalum-tungsten alloy crucible 2
Or other shapes.
In the present embodiment, the internal diameter of the tantalum-tungsten alloy crucible 2 is greater than or equal to the outer of the pyrolytic boron nitride crucible 1
Diameter.
In the present embodiment, the top of the pyrolytic boron nitride crucible 1 is set as rectangular frame structure.
The utility model is on the basis of traditional metal evaporation single layer pyrolytic boron nitride PBN crucibles, using double-deck embedding
Set crucible structure, inner crucible are pyrolytic boron nitride PBN materials, and outer crucible is tantalum-tungsten alloy TTA materials.Pyrolytic boron nitride
Wellability is poor between PBN materials and metal, thermal conductance is good, coefficient of thermal expansion is small and has high-temperature stability (2200 DEG C), is
The ideal material of metal fever crucible for vapor plating is made at present.But the disadvantage is that easily infiltration leaks, and itself hardness is smaller, collision
In be easily broken it is cracked.Tantalum-tungsten alloy TTA materials thermal conductance is good, and with high-melting-point, high intensity, corrosion-resistant, ductility is good
The features such as good.The double-layer nested crucible structure of pyrolytic boron nitride PBN crucibles and tantalum-tungsten alloy TTA crucibles, internal layer are cylindrical
The pyrolytic boron nitride PBN crucibles of shape, crucible top are rectangular frame structure.The tantalum-tungsten alloy TTA crucibles of outer cylindrical body shape
Tight internal layer pyrolytic boron nitride PBN crucibles, the two are nested into a complete cylinder type crucible.Because of outer layer tantalum-tungsten alloy
TTA crucibles are relatively thin, and when ensureing evaporation source heating, heat can be transmitted to rapidly internal layer PBN crucibles.The metal evaporation of the utility model
Good thermal conductance, thermal shock resistance and high-temperature stability are remained with nested crucible, while the intensity of crucible can be improved, prevented
Molten metal leakage in crucible extends the service life of crucible.
Above disclosed is only the preferred embodiment of the utility model, and the right of the utility model cannot be limited with this
Protection domain, therefore equivalent variations made according to the patent scope of the utility model still belong to the model that the utility model is covered
It encloses.
Claims (4)
1. a kind of metal evaporation double-layer nested crucible, including pyrolytic boron nitride crucible, it is characterised in that：It is nitrogenized in the pyrolysis
It is nested with tantalum-tungsten alloy crucible outside boron crucible；The thickness of the tantalum-tungsten alloy crucible is less than the thickness of the pyrolytic boron nitride crucible
Degree.
2. the double-layer nested crucible of metal evaporation according to claim 1, it is characterised in that：
The pyrolytic boron nitride crucible is disposed as cylindrical shape with the tantalum-tungsten alloy crucible.
3. the double-layer nested crucible of metal evaporation according to claim 2, it is characterised in that：
The internal diameter of the tantalum-tungsten alloy crucible is greater than or equal to the outer diameter of the pyrolytic boron nitride crucible.
4. the double-layer nested crucible of metal evaporation according to claim 2, it is characterised in that：
The top of the pyrolytic boron nitride crucible is set as rectangular frame structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721701982.2U CN207958481U (en) | 2017-12-08 | 2017-12-08 | A kind of double-layer nested crucible of metal evaporation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721701982.2U CN207958481U (en) | 2017-12-08 | 2017-12-08 | A kind of double-layer nested crucible of metal evaporation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207958481U true CN207958481U (en) | 2018-10-12 |
Family
ID=63728967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721701982.2U Active CN207958481U (en) | 2017-12-08 | 2017-12-08 | A kind of double-layer nested crucible of metal evaporation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207958481U (en) |
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2017
- 2017-12-08 CN CN201721701982.2U patent/CN207958481U/en active Active
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