CN207946038U - A kind of survey tool of target surplus - Google Patents
A kind of survey tool of target surplus Download PDFInfo
- Publication number
- CN207946038U CN207946038U CN201820073040.2U CN201820073040U CN207946038U CN 207946038 U CN207946038 U CN 207946038U CN 201820073040 U CN201820073040 U CN 201820073040U CN 207946038 U CN207946038 U CN 207946038U
- Authority
- CN
- China
- Prior art keywords
- measurement
- target
- upper bracket
- survey tool
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model is related to a kind of survey tool of target surplus, which includes：Lower bracket, upper bracket, measurement assembly and locking assembly, the bottom of the upper bracket is provided with the first connecting hole, multiple through-hole structures are provided on the upper bracket, it is provided with straight slot on the side wall of the upper bracket, the second connecting hole is provided in the straight slot, wherein, the lower bracket is connected by first connecting hole with the upper bracket；The measurement assembly is set in the through-hole structure, and can be up and down along the through-hole structure；The locking assembly is installed on second connecting hole.The survey tool of the utility model disposably multi-point reading target surplus can obtain the surplus of target, to improve the utilization rate of target by judging that the height of measuring rod can fast and accurately determine the innermost position of target.
Description
Technical field
The utility model is related to measuring tool technical fields, more particularly to a kind of survey tool of target surplus.
Background technology
Liquid crystal display (Liquid Crystal Display, abbreviation LCD) is as in all kinds of digital displays instantly
Main product is favored by more and more users.Thin film transistor (TFT) (Thin Film Transistor, abbreviation in LCD
TFT-LCD) because having the characteristics that fast screen reaction speed, good contrast, brightness is high, visible angle is big, rich in color, and become
The mainstream equipment of current liquid crystal display, is widely used in laptop, lcd-tv etc..
In the formation processing procedure of thin film transistor (TFT), metal layer is generally formed by sputtering (sputtering), and principle is：
With charged particle bombardment target, when the high ion bombardment surface of solids, surface atom occurs and collides and occur energy and momentum
Transfer, makes target atom be escaped from surface and is deposited on the process on substrate material.Currently, high performance sputtering target material is in TFT
Conductive layer of the field of display as TFT, with the fast development of monitor market, target plays an important role.And
When carrying out sputtering technology, with the increase of film thickness on substrate, target is gradually consumed, and the thickness of target is thinned therewith.Target
The surplus of material is to influence the important parameter of apparatus and process adjustment, not only may determine that whether target needs by the surplus of target
It replaces, but also can be that technical parameter is adjusted again, foundation is provided to further increase target utilization.
At present in industry generally use two ways measure target surplus, wherein first way be using electronic vernier caliper into
Row measures, as shown in Figure 1, measuring target concave point position using electronic vernier caliper, directly reads measured value, measured value h is exactly
Target consumption；The second way is using vernier caliper and ruler conjunction measuring, as shown in Fig. 2, being first placed on ruler
On target, top and the target concave point distance H of vernier caliper measurement ruler are then utilized, wherein the height of ruler is h, then
Target consumption=H-h.
However, above two mode, during measurement, the naked eyes of survey crew are unable to judge accurately target consumption
Most deep position, and during measurement, reading is caused due to shaking of tester's body etc., and there are larger
Error.
Utility model content
Therefore, to solve technological deficiency and deficiency of the existing technology, the utility model proposes a kind of target surpluses
Survey tool.
Specifically, this tool includes：
Lower bracket 1, upper bracket 2, measurement assembly 3 and locking assembly 4 are provided with the first company in the bottom of the upper bracket 2
Hole 21 is connect, the upper bracket 2 is provided with multiple through-hole structures 22, straight slot 23 is provided on the side wall of the upper bracket 2,
The second connecting hole 24 is provided in the straight slot 23, wherein
The lower bracket 1 is connected by first connecting hole 21 with the upper bracket 2；
The measurement assembly 3 is movably set in the through-hole structure 22, and can be up and down along the through-hole structure 22；
The locking assembly 4 is installed on second connecting hole 24.
In one embodiment of the utility model, the upper bracket 2 includes upper bracket ontology 25 and fixed plate 26,
In, the fixed plate 26 is set to one end of the close the multiple through-hole structure 22 of the straight slot 23.
In one embodiment of the utility model, the length phase of the length of the straight slot 23 and second connecting hole 24
Deng.
In one embodiment of the utility model, the straight slot 23 is rectangular straight slot.
In one embodiment of the utility model, first connecting hole 21 is threaded hole.
In one embodiment of the utility model, second connecting hole 24 is threaded hole.
In one embodiment of the utility model, the locking assembly 4 includes multiple bolts.
In one embodiment of the utility model, the measurement assembly 3 is measured including the first measurement assembly 31 and second
Component 32, first measurement assembly, 31 and second measurement assembly 32 are movably set in the through-hole structure 22.
In one embodiment of the utility model, first measurement assembly 31 and second measurement assembly 32 are wrapped
Include multiple measuring rods.
In one embodiment of the utility model, the measuring rod includes measurement scale and block, wherein the gear
Block is located at the upper end of the measurement scale.
The utility model embodiment has following advantage：
1, the survey tool of the utility model disposably can read target surplus by multi-point, by judging measuring rod
Height can fast and accurately determine that the utilization of target is improved in the innermost position of target to obtain the surplus of target
Rate.
2, the survey tool of the utility model will not be made in measurement process because of factors such as the body-sway motions of tester
At the error of reading, and measurement process is more convenient, have higher stability, and improve survey tool durability and
The accuracy of measurement.
3, the survey tool of the utility model be when need not measure, all measuring rods can free-falling, and
It can be placed on what measuring rod was stablized in upper bracket by block, use when being convenient for measuring and raising safety in utilization.
4, the surplus of target can not only be accurately measured using the survey tool of the present embodiment, and can be prevented
The generation of the sputtering object of target, improves the yield of target in measurement process, so as to the time for delaying target to replace, to carry
High equipment mobility.
Through the following detailed description with reference to the accompanying drawings, the other aspects and feature of the utility model become apparent.But it answers
When knowing, which is only the purpose design explained, not as the restriction of the scope of the utility model, this is because its
It should refer to appended claims.It should also be noted that unless otherwise noted, it is not necessary to which scale attached drawing, they are only
Try hard to conceptually illustrate structure and flow described herein.
Description of the drawings
Below in conjunction with attached drawing, specific embodiment of the present utility model is described in detail.
Fig. 1 is a kind of target measurement method schematic diagram that the prior art provides；
Fig. 2 is another target measurement method schematic diagram that the prior art provides；
Fig. 3 is a kind of front view of the tool for measurement target surplus that the utility model embodiment provides；
Fig. 4 is a kind of vertical view for upper bracket structure that the utility model embodiment provides；
Fig. 5 is a kind of structural schematic diagram for measuring rod that the utility model embodiment provides；
Fig. 6 is a kind of front view for upper bracket that the utility model embodiment provides；
Fig. 7 is a kind of vertical view of the tool for measurement target surplus that the utility model embodiment provides；
Fig. 8 is a kind of schematic diagram for measurement target surplus mode that the utility model embodiment provides；
Fig. 9 is a kind of process schematic for measurement target surplus that the utility model embodiment provides.
Symbol description
1 lower bracket；2 upper brackets；3 measurement assemblies；4 locking assemblies；5 targets；21 first connecting holes；22 through-hole structures；23
Straight slot；24 second connecting holes；25 upper bracket ontologies；26 fixed plates；31 first measurement assemblies；32 second measurement assemblies.
Specific implementation mode
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, below in conjunction with the accompanying drawings to this
The specific implementation mode of utility model is described in detail.
Embodiment one
Fig. 3~Fig. 5 is referred to, Fig. 3 is a kind of tool for measurement target surplus that the utility model embodiment provides
Front view, Fig. 4 are a kind of vertical view for upper bracket structure that the utility model embodiment provides, and Fig. 5 is implemented for the utility model
A kind of structural schematic diagram for measuring rod that example provides.Specifically, a kind of target that the utility model one embodiment proposes is remaining
The survey tool of amount, as shown in figure 3, the survey tool includes：
Lower bracket 1, upper bracket 2, measurement assembly 3 and locking assembly 4, wherein as shown in figure 4, being set in the bottom of upper bracket 2
It is equipped with the first connecting hole 21, multiple through-hole structures 22 are provided on upper bracket 2, straight slot is provided on the side wall of upper bracket 2
23, the second connecting hole 24 is provided in straight slot 23, wherein
Lower bracket 1 is connected by the first connecting hole 21 with upper bracket 2；
Measurement assembly 3 is set in through-hole structure 22, and can be up and down along the through-hole structure 22；
Locking assembly 4 is installed on the second connecting hole 24.
Preferably, upper bracket 2 includes upper bracket ontology 25 and fixed plate 26, wherein fixed plate 26 is set to straight slot 23
Close to one end of the multiple through-hole structure 22.
Preferably, the equal length of the length of straight slot 23 and the second connecting hole 24.
Preferably, straight slot 23 is rectangular straight slot.
Preferably, the first connecting hole 21 is threaded hole.
Preferably, the second connecting hole 24 is threaded hole.
Preferably, locking assembly 4 includes multiple bolts.
Preferably, measurement assembly 3 includes the first measurement assembly 31 and the second measurement assembly 32, the first measurement assembly 31 and the
Two measurement assemblies 32 are movably set in through-hole structure 22.
Preferably, the first measurement assembly 31 and the second measurement assembly 32 include that multiple measuring rods form.
Preferably, as shown in figure 5, measuring rod includes measurement scale and block, wherein block is located at measurement scale
Upper end.
The advantageous effect of the present embodiment：
1, the survey tool of the utility model is measured by multiple measuring rods, can be disposable by multiple measuring rods
Target can fast and accurately be determined to obtain target surplus by this measurement method by obtaining the target of different depth
Surplus, improve working efficiency.
2, the measurement process of the utility model does not need survey crew's handheld measurement tool, so as to avoid because of tester
Hand shake or body-sway motion caused by error, improve the accuracy of measurement.
Embodiment two
Referring again to Fig. 3~Fig. 5, and referring also to Fig. 6~Fig. 9, Fig. 6 are one kind that the utility model embodiment provides
The front view of upper bracket, Fig. 7 are a kind of vertical view of the tool for measurement target surplus that the utility model embodiment provides, figure
A kind of schematic diagram of the 8 measurement target surplus modes provided for the utility model embodiment, Fig. 9 is the utility model embodiment
A kind of process schematic of the measurement target surplus provided.On the basis of the above embodiments, the present embodiment will be to this practicality
Novel survey tool describes in detail.
The survey tool of the present embodiment includes lower bracket 1, upper bracket 2, measurement assembly 3 and locking assembly 4, wherein
As shown in figure 3, lower bracket 1 is set to the lower section of survey tool, one end of lower bracket 1 is provided with screw thread.
As shown in figure 4, upper bracket 2 includes the first connecting hole 21, through-hole structure 22, straight slot 23, the second connecting hole 24, upper branch
Frame ontology 25 and fixed plate 26, wherein
First connecting hole 21 is threaded hole, and is arranged in the lower end of upper bracket ontology 25, lower bracket 1 by threaded hole with it is upper
Holder 2 connects, and is used to support upper bracket 2；
Through-hole structure 22 is set on upper bracket ontology 25, through-hole structure 22 be provided with it is multiple, all through-hole structures 22
Radius is equal, and center is in same horizontal line；
As shown in fig. 6, straight slot 23 is the rectangular straight slot structure on 2 side wall of upper bracket, straight slot 23 is close to through-hole structure 22
One end and the side wall of through-hole structure 22 penetrate through, and such fixed plate 26 can touch measurement assembly 3, and then fastening can be played to it
Effect.The width of straight slot 23 is more than the diameter summation of all through-hole structures 22, and the length of straight slot 23 is arranged to see measurement group
Until the surface of part 3, straight slot 23 is for placing fixed plate 26；
Fixed plate 26 is movably set in straight slot 23, and length and width is equal with the length and width of straight slot 23, fixed
Plate 26 is used for the fixation measuring component 3 in measurement process, in case the shaking of measurement assembly 3 causes measurement error；
Second connecting hole 24 includes multiple threaded holes, and the second connecting hole 24 is arranged in straight slot 23, and the second connecting hole 24
Length and straight slot 23 equal length.
As shown in fig. 7, measurement assembly 3 includes the first measurement assembly 31 and the second measurement assembly 32, the first measurement assembly 31
It is made of two measuring rods, the second measurement assembly 32 is made of multiple second measuring rods, and the first measurement assembly 31 is separately positioned on
And can be up and down in through-hole structure 22 in the through-hole structure 22 at both ends, the setting of the second measurement assembly 32 is logical at remaining
In pore structure 22, and can be up and down in through-hole structure 22, wherein the first measurement assembly 31 is for determining measuring basis, the
Two measurement assemblies 32 are used to measure the consumption of target.
The survey tool of the present embodiment disposably can read target surplus by multi-point, by the height for judging measuring rod
The innermost position of target can be fast and accurately determined, to obtain the surplus of target, to improve the utilization of target
Rate.
Locking assembly 4 is made of multiple bolts, and bolt is connect with the second connecting hole 24, in measurement process, is pushed away by bolt
Dynamic fixed plate 26 contacts the first measurement assembly 31 and the second measurement assembly 32, to be used for fixing the first measurement assembly 31 and second
Measurement assembly 32.
As shown in fig. 7, measuring rod is made of measurement scale and block, measurement scale is used to measure the consumption of target
Amount, so that it is determined that the surplus of target, block is used for preventing measuring rod from sliding in through-hole structure 22.
The survey tool of the present embodiment when need not measure, all measuring rods can free-falling, and pass through
Block can be placed on what measuring rod was stablized in upper bracket 2, use when being convenient for measuring and raising safety in utilization.
The course of work：As shown in Figure 8 and Figure 9, it is measured at position Step 1: survey tool is placed on；Step 2: by target
Material 5 is placed on the underface of upper bracket 2；Step 3: the first measurement assembly 31 and the second measurement assembly 32 are individually placed to through-hole
In structure 22, the block lower end of the measuring rod of the first measurement assembly 31 and the upper surface contact of upper bracket 2, contact position are exactly
Measuring rod is the position of 0 scale, using the first measurement assembly 31 as measuring basis；Step 4: locking assembly 4 and second is connected
It connects sky 24 to connect, to push fixed plate 26, makes the surface of fixed plate 26 and the first measurement assembly 31 and the second measurement assembly 32
Contact closely fixes the position of the first measurement assembly 31 and the second measurement assembly 32；Step 5 determines the contacted with target 5
The second minimum measuring rod of height in two measurement assemblies 32, to read the consumption H of target 5；Step 6 determines the surplus of target
Surplus.
The survey tool of the present embodiment will not cause to read in measurement process because of factors such as the body-sway motions of tester
The error of book, and measurement process is more convenient, has higher stability, and improve durability and the measurement of survey tool
Accuracy.
In conclusion a kind of target surplus that specific case used herein provides the utility model embodiment
The principle and embodiment of survey tool is expounded, and the explanation of above example is only intended to help to understand the utility model
Scheme and its core concept；Meanwhile for those of ordinary skill in the art, according to the thought of the utility model, specific
There will be changes in embodiment and application range, in conclusion the content of the present specification should not be construed as to this practicality newly
The limitation of type, the scope of protection of the utility model should be subject to appended claims.
Claims (10)
1. a kind of survey tool of target surplus, which is characterized in that including：Lower bracket (1), upper bracket (2), measurement assembly
(3) and locking assembly (4), the bottom of the upper bracket (2) is provided with the first connecting hole (21), on the upper bracket (2)
Multiple through-hole structures (22) are provided with, straight slot (23) is provided on the side wall of the upper bracket (2), in the straight slot (23)
It is provided with the second connecting hole (24), wherein
The lower bracket (1) is connected by first connecting hole (21) with the upper bracket (2)；
The measurement assembly (3) is set in the through-hole structure (22), and can be up and down along the through-hole structure (22)；
The locking assembly (4) is installed on second connecting hole (24).
2. survey tool according to claim 1, which is characterized in that the upper bracket (2) includes upper bracket ontology (25)
With fixed plate (26), wherein the fixed plate (26) is set to the close the multiple through-hole structure (22) of the straight slot (23)
One end.
3. survey tool according to claim 2, which is characterized in that the length of the straight slot (23) is connect with described second
The equal length in hole (24).
4. survey tool according to claim 3, which is characterized in that the straight slot (23) is rectangular straight slot.
5. survey tool according to claim 1, which is characterized in that first connecting hole (21) is threaded hole.
6. survey tool according to claim 1, which is characterized in that second connecting hole (24) is threaded hole.
7. survey tool according to claim 1, which is characterized in that the locking assembly (4) includes multiple bolts.
8. survey tool according to claim 1, which is characterized in that the measurement assembly (3) includes the first measurement assembly
(31) and the second measurement assembly (32), first measurement assembly (31) and second measurement assembly (32) are movably set in institute
It states in through-hole structure (22).
9. survey tool according to claim 8, which is characterized in that first measurement assembly (31) and described second is surveyed
It includes multiple measuring rods to measure component (32).
10. survey tool according to claim 9, which is characterized in that the measuring rod includes measurement scale and block,
Wherein, the block is located at the upper end of the measurement scale.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820073040.2U CN207946038U (en) | 2018-01-17 | 2018-01-17 | A kind of survey tool of target surplus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820073040.2U CN207946038U (en) | 2018-01-17 | 2018-01-17 | A kind of survey tool of target surplus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207946038U true CN207946038U (en) | 2018-10-09 |
Family
ID=63701959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820073040.2U Active CN207946038U (en) | 2018-01-17 | 2018-01-17 | A kind of survey tool of target surplus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207946038U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108180814A (en) * | 2018-01-03 | 2018-06-19 | 京东方科技集团股份有限公司 | A kind of target etches measuring device |
-
2018
- 2018-01-17 CN CN201820073040.2U patent/CN207946038U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108180814A (en) * | 2018-01-03 | 2018-06-19 | 京东方科技集团股份有限公司 | A kind of target etches measuring device |
| CN108180814B (en) * | 2018-01-03 | 2020-01-03 | 京东方科技集团股份有限公司 | Target etching amount measuring device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207946038U (en) | A kind of survey tool of target surplus | |
| CN202196000U (en) | Portable contact angle detecting device adopting actual liquid droplet method | |
| CN102636412A (en) | Method for detecting leveling property of battery slurry | |
| CN205580318U (en) | Measuring device | |
| CN206496764U (en) | A kind of measuring auxiliary mark post | |
| CN102435289A (en) | Novel electronic balance | |
| CN104457678A (en) | Building engineering quality planeness detection device | |
| CN208780416U (en) | Support device for deflection metrology | |
| Konishi et al. | Copper dissolution phenomena along a vertical plane anode in CuSO4 solution | |
| CN203375911U (en) | Quick testing device for fabric thickness | |
| CN204807074U (en) | Plane measuring device of large -scale lid type product | |
| CN203148417U (en) | Repose angle measuring device based on principle of injection method | |
| CN203772327U (en) | Radar open channel flowmeter | |
| CN207570450U (en) | Pcb board thickness detection instrument | |
| CN204788177U (en) | Special thickness measurement device | |
| CN106526920B (en) | Liquid crystal display compensates phase difference value measurement method and device in film surface | |
| CN205981049U (en) | Carry out measuring measuring tool to semi -axis centre bore degree of depth variation | |
| CN108802153A (en) | A kind of calibration method of periodic attenuation, electronic equipment and storage medium | |
| CN207163852U (en) | Viscosity measurements support and viscosity detecting device | |
| CN209102042U (en) | A kind of calibrating installation of thickness of protection tier measuring instrument | |
| CN207439327U (en) | A kind of device for being used to measure single side coating silicon steel sheet amount of bow | |
| CN208704563U (en) | A kind of indoor design Pattern plate ruler | |
| CN202770700U (en) | Young's modulus instrument platform capable of adjusting conveniently | |
| CN207007159U (en) | A kind of civil engineering horizon rule | |
| CN104965356B (en) | Drip method for implanting under liquid crystal dripping device and liquid crystal |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |