CN207938579U - A kind of vacuum tank - Google Patents
A kind of vacuum tank Download PDFInfo
- Publication number
- CN207938579U CN207938579U CN201820301502.1U CN201820301502U CN207938579U CN 207938579 U CN207938579 U CN 207938579U CN 201820301502 U CN201820301502 U CN 201820301502U CN 207938579 U CN207938579 U CN 207938579U
- Authority
- CN
- China
- Prior art keywords
- vacuum
- surge chamber
- trough body
- vacuum trough
- vacuum tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 claims description 12
- 239000004677 Nylon Substances 0.000 claims description 3
- 229920001778 nylon Polymers 0.000 claims description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 230000003139 buffering effect Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Abstract
The utility model discloses a kind of vacuum tanks, including vacuum trough body, it is characterised in that：The surge chamber of vacuum is set in the vacuum trough body both sides, flanged joint vacuum pump is set at the both ends of the surge chamber, the surge chamber is the container of sealed bottom upper end opening, and the upper port of the surge chamber is parallel with the upper port of the vacuum trough body.The utility model has the beneficial effects that：Since the both sides in vacuum tank are provided with surge chamber, air-flow is not applied directly to vacuum trough body, increase cushioning effect, and wearing layer is increased in vacuum trough body and buffering chamber interior walls, it is ensured that vacuum trough body is without damage, the period for replacing groove body greatly reduces, input is saved, is increased operation rate, production capacity is increased, improve quality, and simple structure and reasonable design.
Description
Technical field
The utility model is related to semiconductor chip processing technique fields, and in particular to a kind of vacuum tank.
Background technology
Semiconductor chip is widely used in various electric appliances, and blast technique is to produce one of the master operation of chip, blowing machine skin
Band is attached to above vacuum tank, is realized negative pressure by wind turbine inside vacuum tank, is caused silicon chip to be adsorbed on above belt and carry out blast.
Due to being negative pressure inside trough, there is relative motion between belt and groove body, cannot be fully sealed, have gas entrance, lead to vacuum
Groove body is impaired, affects the normal production of product, becomes a great problem of puzzlement enterprise, this is the deficiencies in the prior art.
Utility model content
The purpose of this utility model is to provide a kind of vacuum tanks, to solve the problems mentioned in the above background technology.For
Realize that above-mentioned purpose, the utility model provide the following technical solutions：A kind of vacuum tank, including vacuum trough body, it is characterised in that：
Flanged joint vacuum pump is arranged at the both ends of the surge chamber in the surge chamber of the vacuum trough body both sides setting vacuum, described slow
The container that room is sealed bottom upper end opening is rushed, the upper port of the surge chamber is parallel with the upper port of the vacuum trough body.
The inner wall of above-mentioned vacuum trough body and the surge chamber pastes wear-resistant material.
Above-mentioned wear-resistant material is nonmetallic wear-resistant material, and the nonmetallic wear-resistant material is rubber, nylon.
The height h of above-mentioned surge chamber is 1/5th of the vacuum trough body height H.
Above-mentioned surge chamber width l is 1/8th of the vacuum trough body width L.
Compared with prior art, the utility model has the beneficial effects that：Since the both sides in vacuum tank are provided with surge chamber,
Air-flow is not applied directly to vacuum trough body, increases cushioning effect, and increase wearing layer in vacuum trough body and buffering chamber interior walls,
It ensures that vacuum trough body is without damage, the period for replacing groove body greatly reduces, save input, increase operation rate, increase production
Can, improve quality, and simple structure and reasonable design.
Description of the drawings
FIG. 1 is a schematic structural view of the utility model, and Fig. 2 is the overlooking structure diagram of Fig. 1.
In figure：1- vacuum trough bodies, 2- surge chambers, 3- flanges.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
It clearly and completely describes, a kind of vacuum tank, including vacuum trough body, the surge chamber 2 of vacuum is set in 1 both sides of vacuum trough body, slow
The both ends setting flange 3 for rushing room 2 connects vacuum pump, and surge chamber 2 is the container of sealed bottom upper end opening, the upper end of surge chamber 2
Mouth is parallel with the upper port of vacuum trough body 1.Wear-resistant material is pasted in the inner wall of vacuum trough body 1 and surge chamber 2.Wear-resistant material is non-
Metal wear resistant material, nonmetallic wear-resistant material are rubber, nylon.The height h of surge chamber 2 be 1 body height H of vacuum tank five/
One.2 width l of surge chamber is 1/8th of 1 width L of vacuum trough body.
Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is appreciated that can these embodiments be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of vacuum tank, including vacuum trough body, it is characterised in that：In the vacuum trough body both sides, the surge chamber of vacuum is set,
Flanged joint vacuum pump is set at the both ends of the surge chamber, the surge chamber is the container of sealed bottom upper end opening, described
The upper port of surge chamber is parallel with the upper port of the vacuum trough body.
2. a kind of vacuum tank according to claim 1, it is characterised in that：In the vacuum trough body and the surge chamber
Wall pastes wear-resistant material.
3. a kind of vacuum tank according to claim 2, it is characterised in that：The wear-resistant material is nonmetallic wear-resistant material,
The nonmetallic wear-resistant material is rubber, nylon.
4. a kind of vacuum tank according to claim 1, it is characterised in that：The height h of the surge chamber is the vacuum tank
/ 5th of body height H.
5. a kind of vacuum tank according to claim 1, it is characterised in that：The surge chamber width l is the vacuum trough body
/ 8th of width L.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820301502.1U CN207938579U (en) | 2018-03-05 | 2018-03-05 | A kind of vacuum tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820301502.1U CN207938579U (en) | 2018-03-05 | 2018-03-05 | A kind of vacuum tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207938579U true CN207938579U (en) | 2018-10-02 |
Family
ID=63653905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820301502.1U Active CN207938579U (en) | 2018-03-05 | 2018-03-05 | A kind of vacuum tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207938579U (en) |
-
2018
- 2018-03-05 CN CN201820301502.1U patent/CN207938579U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A vacuum tank Effective date of registration: 20230321 Granted publication date: 20181002 Pledgee: Shandong Tongsheng Financing Guarantee Co.,Ltd. Pledgor: JINAN ZHUOWEI ELECTRONICS Co.,Ltd. Registration number: Y2023980035528 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20231212 Granted publication date: 20181002 Pledgee: Shandong Tongsheng Financing Guarantee Co.,Ltd. Pledgor: JINAN ZHUOWEI ELECTRONICS Co.,Ltd. Registration number: Y2023980035528 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A vacuum tank Effective date of registration: 20231215 Granted publication date: 20181002 Pledgee: Shandong Tongsheng Financing Guarantee Co.,Ltd. Pledgor: JINAN ZHUOWEI ELECTRONICS Co.,Ltd. Registration number: Y2023980071958 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |