CN207923721U - A kind of LIBS detecting systems - Google Patents
A kind of LIBS detecting systems Download PDFInfo
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- CN207923721U CN207923721U CN201820275709.6U CN201820275709U CN207923721U CN 207923721 U CN207923721 U CN 207923721U CN 201820275709 U CN201820275709 U CN 201820275709U CN 207923721 U CN207923721 U CN 207923721U
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- sample
- pulse laser
- dichroscope
- microcobjective
- camera
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Abstract
The utility model discloses a kind of LIBS detecting systems, including:Light path system, LED light, sample stage, controller;Camera is located at the surface of microcobjective;The second condenser lens, dichroscope, the first condenser lens, imaging lens group are set gradually between microcobjective and camera from the bottom up;The angle of dichroscope and horizontal plane is 45 °;The pulse laser that pulse laser generates is located in the input path of dichroscope;Shaping aperture is in the light path between pulse laser and dichroscope;Sample is placed on sample stage, and positioned at the underface of microcobjective;Fibre-optical probe is located above the side of sample;LED light is located above the other side of sample;One end of optical fiber connects fibre-optical probe, and the other end connects spectrometer;Spectrometer, pulse laser, camera, LED light are electrically connected with controller.Technical solution provided by the utility model, it is simple in structure, it disclosure satisfy that the demand quickly detected.
Description
Technical field
The utility model belongs to laser spectral analysis technical field more particularly to a kind of LIBS detecting systems.
Background technology
Laser induced breakdown spectroscopy (Laser-induced breakdown spectroscopy, LIBS) technology is a kind of
Atomic Emission Spectral Analysis technology, it generates plasma using the pulse laser excitation sample to be tested of high-energy, passes through analysis
Plasma light spectrum signal realizes the elemental analysis of sample.The technology measuring speed is fast, wide range of measurement, can multielement simultaneously
Analysis, can complete the quantification and qualification of element contained by complex material.It is above-mentioned due to having the advantages that, the technology extensive use
In numerous areas such as metallurgical analysis, environmental monitoring, geological prospectings.
Existing LIBS detecting systems, structure is more complex, cannot meet the needs of quickly detecting.
Utility model content
The utility model is intended to provide a kind of LIBS detecting systems, simple in structure, disclosure satisfy that the demand quickly detected.
In order to achieve the above objectives, the technical solution adopted in the utility model is as follows:
A kind of LIBS detecting systems disclosed by the utility model, including:Light path system, LED light, sample stage, controller;Institute
Stating light path system includes:Camera, imaging lens group, pulse laser, shaping aperture, dichroscope, the first condenser lens, the
Two condenser lenses, microcobjective, fibre-optical probe, optical fiber, spectrometer;The camera is located at the surface of the microcobjective;
Second condenser lens, dichroscope, first poly- is set gradually between the microcobjective and the camera from the bottom up
Focus lens, imaging lens group;The microcobjective, the second condenser lens, dichroscope, the first condenser lens, imaging lens group
It is coaxial;The angle of the dichroscope and horizontal plane is 45 °;The pulse laser that the pulse laser generates is located at described two
To in the input path of Look mirror;The shaping aperture is in the light path between the pulse laser and the dichroscope;
Sample is placed on the sample stage, and sample is located at the underface of the microcobjective;The fibre-optical probe is located at the sample
Side above;The LED light is located above the other side of the sample;One end of the optical fiber connects the fibre-optical probe,
The other end of optical fiber connects the spectrometer;The spectrometer, pulse laser, camera, LED light are electric with the controller
Property connection.
Preferably, the sample stage is three-D displacement sample stage;The three-D displacement sample stage and the controller are electrical
Connection.
Preferably, the pulse laser is to adjust Q formulas Nd:YAG laser.
Preferably, the spectrometer is equipped with ICCD detectors.
Preferably, the controller includes microcontroller.
LIBS detecting systems provided by the utility model, it is simple in structure, it disclosure satisfy that the demand quickly detected.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model embodiment;
In figure:1 is LED light, and 2 be sample stage, and 3 be camera, and 4 be imaging lens group, and 5 be pulse laser, and 6 be shaping
Aperture, 7 be dichroscope, and 8 be the first condenser lens, and 9 be the second condenser lens, and 10 be microcobjective, and 11 be fibre-optical probe, 12
It is spectrometer for optical fiber, 13,14 be sample.
Specific implementation mode
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing, to this reality
It is further elaborated with novel.
Fig. 1 is the structural schematic diagram of the utility model embodiment, including:Light path system, LED light 1, sample stage 2, control
Device;The light path system includes:Camera 3, imaging lens group 4, pulse laser 5, shaping aperture 6, dichroscope 7, first
Condenser lens 8, the second condenser lens 9, microcobjective 10, fibre-optical probe 11, optical fiber 12, spectrometer 13;The camera 3 is located at
The surface of the microcobjective 10;Described is set gradually between the microcobjective 10 and the camera 3 from the bottom up
Two condenser lenses 9, dichroscope 7, the first condenser lens 8, imaging lens group 4;The microcobjective 10, the second condenser lens 9,
Dichroscope 7, the first condenser lens 8, imaging lens group 4 are coaxial;The dichroscope 7 and the angle of horizontal plane are 45 °;Institute
The pulse laser for stating the generation of pulse laser 5 is located in the input path of the dichroscope 7;The shaping aperture 6 is located at institute
It states in the light path between pulse laser 5 and the dichroscope 7;Sample 14 is placed on the sample stage 2, and sample 14 is located at
The underface of the microcobjective 10;The fibre-optical probe 11 is located above the side of the sample 14;The LED light 1 is located at
Above the other side of the sample 14;One end of the optical fiber 12 connects the fibre-optical probe 11, the other end connection of optical fiber 12
The spectrometer 13;The spectrometer 13, pulse laser 5, camera 3, LED light 1 are electrically connected with the controller.
Preferably, the sample stage 2 is three-D displacement sample stage;The three-D displacement sample stage and the controller are electrical
Connection.The pulse laser 5 is to adjust Q formulas Nd:YAG laser.The spectrometer 13 is equipped with ICCD detectors.The control
Device includes microcontroller.
LIBS detecting systems provided by the utility model, it is simple in structure, it disclosure satisfy that the demand quickly detected.
Certainly, the utility model can also have other various embodiments, without departing substantially from the spirit of the present invention and its essence
In the case of, those skilled in the art can make various corresponding change and deformations, but these phases according to the utility model
The change and distortion answered should all belong to the protection domain of the utility model the attached claims.
Claims (5)
1. a kind of LIBS detecting systems, including:Light path system, LED light (1), sample stage (2), controller;The light path system packet
It includes:Camera (3), imaging lens group (4), pulse laser (5), shaping aperture (6), dichroscope (7), the first condenser lens
(8), the second condenser lens (9), microcobjective (10), fibre-optical probe (11), optical fiber (12), spectrometer (13);The camera
(3) it is located at the surface of the microcobjective (10);Between the microcobjective (10) and the camera (3) from the bottom up according to
It is secondary that second condenser lens (9), dichroscope (7), the first condenser lens (8), imaging lens group (4) are set;It is described micro-
Object lens (10), the second condenser lens (9), dichroscope (7), the first condenser lens (8), imaging lens group (4) are coaxial;It is described
Dichroscope (7) and the angle of horizontal plane are 45 °;The pulse laser that the pulse laser (5) generates is located at the dichroic
In the input path of mirror (7);The shaping aperture (6) is between the pulse laser (5) and the dichroscope (7)
In light path;Sample (14) is placed on the sample stage (2), and sample (14) is located at the underface of the microcobjective (10);Institute
Fibre-optical probe (11) is stated to be located above the side of the sample (14);The LED light (1) is located at the other side of the sample (14)
Top;One end of the optical fiber (12) connects the fibre-optical probe (11), and the other end of optical fiber (12) connects the spectrometer
(13);The spectrometer (13), pulse laser (5), camera (3), LED light (1) are electrically connected with the controller.
2. LIBS detecting systems according to claim 1, which is characterized in that the sample stage (2) is three-D displacement sample
Platform;The three-D displacement sample stage is electrically connected with the controller.
3. LIBS detecting systems according to claim 1, which is characterized in that the pulse laser (5) is to adjust Q formulas Nd:
YAG laser.
4. LIBS detecting systems according to claim 1, which is characterized in that the spectrometer (13) is detected equipped with ICCD
Device.
5. LIBS detecting systems according to claim 1, which is characterized in that the controller includes microcontroller.
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CN201820275709.6U CN207923721U (en) | 2018-02-26 | 2018-02-26 | A kind of LIBS detecting systems |
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CN201820275709.6U CN207923721U (en) | 2018-02-26 | 2018-02-26 | A kind of LIBS detecting systems |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109884032A (en) * | 2019-02-19 | 2019-06-14 | 中国科学院合肥物质科学研究院 | The pinpoint laser induced breakdown spectroscopy detection system of ablation point and method |
-
2018
- 2018-02-26 CN CN201820275709.6U patent/CN207923721U/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109884032A (en) * | 2019-02-19 | 2019-06-14 | 中国科学院合肥物质科学研究院 | The pinpoint laser induced breakdown spectroscopy detection system of ablation point and method |
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