CN207915231U - A kind of quartz plate abrasive disk and electrode connecting structure - Google Patents

A kind of quartz plate abrasive disk and electrode connecting structure Download PDF

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Publication number
CN207915231U
CN207915231U CN201820108180.9U CN201820108180U CN207915231U CN 207915231 U CN207915231 U CN 207915231U CN 201820108180 U CN201820108180 U CN 201820108180U CN 207915231 U CN207915231 U CN 207915231U
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China
Prior art keywords
insulation tube
electrode
quartz plate
connecting hole
abrasive disk
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Active
Application number
CN201820108180.9U
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Chinese (zh)
Inventor
陈愿勤
陈怡君
罗文静
刘蜜
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Zhong Shantaiwei Electronics Co Ltd
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Zhong Shantaiwei Electronics Co Ltd
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Priority to CN201820108180.9U priority Critical patent/CN207915231U/en
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Abstract

The utility model discloses a kind of quartz plate abrasive disk and electrode connecting structures, including electrode stem, insulation tube, shaft platen and top lap, shaft platen is equipped with connecting hole, the top lap is equipped with slide opening, the electrode stem is fixed in insulation tube, the insulation tube penetrate connecting hole and with connecting hole tight fit, the slide opening is slidably matched with insulation tube.In above structure, eliminate metal tube, and because insulation tube is that non-conducting material is softer, thus is easier to be fixed in connecting hole, and connecting hole is also very shallow, thus it is very easy to assembly, and the replacement of subsequent component is also allowed for, and shaft platen can apply certain pressure to electrode stem and abrasive disk, to which frictional force can be increased in grinding, and then grinding efficiency and grinding effect are improved, and ensure that electrode stem is contacted with the good of quartz plate.

Description

A kind of quartz plate abrasive disk and electrode connecting structure
Technical field
The utility model is related to a kind of quartz plate milling apparatus, especially a kind of quartz plate abrasive disk and electrode connection knot Structure.
Background technology
Crystal-vibration-chip is mainly used in film thickness monitoring field, very thin round crystal-vibration-chip derives from quartz pushrod, by repeatedly Cutting and grinding, quartz wedge are finally made into the very thin quartz plate of a pile, and each quartz plate is through changing circle, grinding and cleaning, finally Plating metal electrode becomes crystal-vibration-chip, and the plated film for being suitable for different stress coating materials monitors.
The quartz plate of a piece of qualification, grinding in process is the key that ensure its precision, common quartz plate Abrasive structure includes upper and lower abrasive disk and transmission bracket.What top lap insulated by disk body and in disk body and with disk body Metal core rod is constituted, and there is hole in core bar upper end, and is connected by copper bar between transmission bracket and core bar, and copper boom end is located at core bar upper end Hole in and core bar can be rotated around copper bar, transmission bracket is respectively driven by corresponding driving mechanism with lower abrasive disk, and copper bar Top lap can be driven to do certain movement by the drive of transmission bracket;The lapping mode of common quartz plate is quartz plate It is positioned over progress spherical surface grinding in upper and lower abrasive disk, lower in the process to grind disc spins, top lap is along lower abrasive disk AnchorPoint Nearby to reciprocatingly moving on the straight path between scheduled certain point, and turn in this process with lower grinding disc spins simultaneously It is dynamic, to which quartz plate therein to be ground into the predetermined size of specific shape.
In said structure, core bar is to be used on one side contact with quartz plate as electrode, and the another side of quartz plate is then Conducting is contacted with lower abrasive disk always in process of lapping, so as to measure thickness of the quartz plate in grinding in process The variation of degree, core bar outside are insulator pipes, also have one layer of metal tube outside insulator layer, since we assemble insulator pipe It is extremely difficult when entering in metal tube, and when needed replacing if there is wear to electrodes later, it is also difficult to it splits out, no Convenient for later maintenance, thus the application makes improvement for above structure.
Invention content
For overcome the deficiencies in the prior art, a kind of quartz plate abrasive disk of the utility model offer and electrode connecting structure.
Technical solution adopted by the utility model to solve its technical problems is:
A kind of quartz plate abrasive disk and electrode connecting structure, it is characterised in that:Including electrode stem, insulation tube, shaft platen And top lap, shaft platen are equipped with connecting hole, the top lap is equipped with slide opening, and the electrode stem is fixed on insulation tube It is interior, the insulation tube penetrate connecting hole and with connecting hole tight fit, the slide opening is slidably matched with insulation tube.
One end of the electrode stem is equipped with the electrode cap that diameter is more than electrode rod diameter, and one end is equipped with diameter on insulation tube More than the boss of insulation pipe diameter, the counter sink being connected to the pore of insulation tube is equipped in the boss, the electrode cap is located at heavy In head bore.
Tie rod holes are equipped in the electrode cap.
The utility model has the beneficial effects that:Including electrode stem, insulation tube, shaft platen and top lap, shaft platen It is equipped with connecting hole, the top lap is equipped with slide opening, and the electrode stem is fixed in insulation tube, and the insulation tube penetrates company Connect hole and with connecting hole tight fit, the slide opening is slidably matched with insulation tube.In above structure, metal tube, Er Qieyin are eliminated It is that non-conducting material is softer, thus is easier to be fixed in connecting hole, thus is very easy to assembly for insulation tube, also just In the replacement of subsequent component, and shaft platen can apply certain pressure to electrode stem and abrasive disk, to grind When have certain frictional force, grinding efficiency and grinding effect can be improved, and ensure that electrode stem and the good of quartz plate connect It touches.
Description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the diagrammatic cross-section of the utility model.
Specific implementation mode
The embodiments of the present invention are described below in detail, the embodiment described example is shown in the accompanying drawings, wherein from beginning Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.
In the description of the present invention, it should be noted that for the noun of locality, if any term "center", " transverse direction ", " longitudinal direction ", " length ", " width ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The indicating positions such as "bottom", "inner", "outside", " clockwise ", " counterclockwise " and position relationship are orientation based on ... shown in the drawings or position Relationship is set, narration the utility model is merely for convenience of and simplifies to describe, do not indicate or imply the indicated device or element It must have a particular orientation, constructed and operated with particular orientation, should not be understood as the specific protection model for limiting the utility model It encloses.
In addition, being used for description purposes only if any term " first ", " second ", it is not understood to indicate or imply relatively heavy The property wanted or the quantity for implicitly indicating technical characteristic." first " is defined as a result, " second " feature can be expressed or implicit include One or more this feature, in the utility model description, " several " are meant that two or more, unless otherwise bright It is really specific to limit.
In the present invention, except as otherwise clear stipulaties and restriction, if any term " assembling ", " connected ", " connection " term It should go to understand as broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can also be machine Tool connects;It can be directly connected, can also be to be connected by intermediary, can be connected inside two elements.For For those of ordinary skill in the art, it can understand that above-mentioned term in the present invention specific contains as the case may be Justice.
In utility model, unless otherwise specified and limited, fisrt feature the "upper" of second feature or "lower" can be with It is in direct contact including the first and second features, can also not be to be in direct contact but pass through it including fisrt feature and second feature Between other characterisation contact.Moreover, fisrt feature second feature " on ", " under " and " above " include fisrt feature Right over second feature and oblique upper, or it is only to indicate that fisrt feature level height is higher than the height of second feature.First Feature second feature " on ", " under " and " below " include that fisrt feature is directly under or diagonally below the second feature, or only Only indicate that fisrt feature level height is less than second feature.
Referring to Fig.1, the utility model discloses a kind of quartz plate abrasive disk and electrode connecting structures, including circular electrode Bar 1, insulation tube 2, shaft platen 3 and top lap 4, electrode stem 1 are made of conductive metal bar material, shaft platen 3 and upper grinding Disk 4 is made of metal, thus electrode stem 1 cannot contact conduction with shaft platen 3 and top lap 4, and shaft platen 3 is equipped with Connecting hole, the top lap 4 are equipped with slide opening, and the electrode stem 1 is fixed in insulation tube 2, and the insulation tube 2 penetrates connection Hole and be fixedly connected with connecting hole, to make shaft platen 3 be fixed as one with electrode stem 1,2 three of insulation tube, it is described on grind The slide opening of mill 4 is slidably matched with insulation tube 2, and top lap 4 is to need the drive with lower abrasive disk and turn in process of lapping Dynamic, to realize the good grinding to quartz plate, thus slide opening must be slidably matched with insulation tube 2.
One end of the electrode stem 1 is equipped with the electrode cap 5 that diameter is more than 1 diameter of electrode stem, and one end is equipped on insulation tube 2 Diameter is more than the boss 6 of 2 diameter of insulation tube, and the counter sink being connected to the pore of insulation tube 2, the electrode are equipped in the boss 6 Cap 5 is located in counter sink, and electrode cap 5 can be wrapped up by counter sink and be avoided and shaft pressure by insulation tube 2 in above structure Disk 3 and top lap 4 contact, and boss 6 can be offseted with shaft platen 3 to be used as the positioning of insulation tube 2, and electrode cap Tie rod holes 7 are equipped in 5, transmission bracket, which is inserted by copper bar in tie rod holes 7, can drive shaft platen 3 and top lap 4 to do back and forth Movement ensures that quartzy slice lapping is uniform to improve grinding effect.
A kind of quartz plate abrasive disk and electrode connecting structure provided above the utility model embodiment, has carried out in detail Thin to introduce, specific case used herein is expounded the principles of the present invention and embodiment, above example Explanation be merely used to help understand the method and its core concept of the utility model;Meanwhile for the general technology of this field Personnel, according to the thought of the utility model, there will be changes in the specific implementation manner and application range, in conclusion The content of the present specification should not be construed as a limitation of the present invention.

Claims (3)

1. a kind of quartz plate abrasive disk and electrode connecting structure, it is characterised in that:Including electrode stem, insulation tube, shaft platen and Top lap, shaft platen are equipped with connecting hole, and the top lap is equipped with slide opening, and the electrode stem is fixed on insulation tube It is interior, the insulation tube penetrate connecting hole and with connecting hole tight fit, the slide opening is slidably matched with insulation tube.
2. a kind of quartz plate abrasive disk according to claim 1 and electrode connecting structure, it is characterised in that:The electrode stem One end be equipped with diameter be more than electrode rod diameter electrode cap, and on insulation tube one end be equipped with diameter be more than insulation pipe diameter it is convex Platform, the counter sink being connected to the pore of insulation tube is equipped in the boss, and the electrode cap is located in counter sink.
3. a kind of quartz plate abrasive disk according to claim 2 and electrode connecting structure, it is characterised in that:The electrode cap In be equipped with tie rod holes.
CN201820108180.9U 2018-01-23 2018-01-23 A kind of quartz plate abrasive disk and electrode connecting structure Active CN207915231U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820108180.9U CN207915231U (en) 2018-01-23 2018-01-23 A kind of quartz plate abrasive disk and electrode connecting structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820108180.9U CN207915231U (en) 2018-01-23 2018-01-23 A kind of quartz plate abrasive disk and electrode connecting structure

Publications (1)

Publication Number Publication Date
CN207915231U true CN207915231U (en) 2018-09-28

Family

ID=63605190

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820108180.9U Active CN207915231U (en) 2018-01-23 2018-01-23 A kind of quartz plate abrasive disk and electrode connecting structure

Country Status (1)

Country Link
CN (1) CN207915231U (en)

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