CN207904359U - A kind of plated film spherical surface umbrella stand - Google Patents
A kind of plated film spherical surface umbrella stand Download PDFInfo
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- CN207904359U CN207904359U CN201721700700.7U CN201721700700U CN207904359U CN 207904359 U CN207904359 U CN 207904359U CN 201721700700 U CN201721700700 U CN 201721700700U CN 207904359 U CN207904359 U CN 207904359U
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- umbrella stand
- spherical surface
- plated film
- substrate
- supporting rib
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Abstract
The utility model is related to coating technique field, especially a kind of plated film spherical surface umbrella stand, it is characterised in that:Supporting rib is fixedly installed on the bottom surface of the spherical surface umbrella stand ontology, the supporting rib is arranged vertically outward along the center of the spherical surface umbrella stand ontology, and the supporting rib is used for carrying substrates.The utility model has the advantages that:The substrate quantity that single umbrella can carry, yield bigger are improved, while being conducive to film-plating umbrella stand and operating steadily in the long term, the plated film of heavier substrate or the occasion of high temperature plated film is particularly suitable for, more conducively realizes technology stability;The multifarious demand of substrate can be met;Comprehensive plated film of substrate, the especially plated film of flat plate substrate can be achieved, while the uniformity of substrate is more preferable, convenient for being modified to coating film thickness homogeneity;It can be realized with conventional spherical umbrella stand directly general;It can play the role of for the antifouling of equipment;It is simple and reasonable, it is of low cost.
Description
Technical field
The utility model is related to technical field of vacuum plating, especially a kind of vacuum coating spherical surface umbrella stand.
Background technology
In vacuum coating, needs that first substrate to be coated is installed in film-plating umbrella stand and carry out plated film again.In order to be directed to
The substrate of different sizes and shapes can use matched film-plating umbrella stand, and in order to as more as possible in a coating process
Carrying substrates, film-plating umbrella stand generally uses spherical structure, i.e. spherical surface umbrella stand.Currently, generally passing through the trepanning on spherical surface umbrella stand
Mode carry out mounted substrate.But this mounting means has the following problems:1)It is larger to the intensity effect of spherical surface umbrella stand, it is unfavorable for
Film-plating umbrella stand operates steadily in the long term, and then is unfavorable for the stabilization of technique;2)Due to by the way of trepanning, institute's energy on spherical surface umbrella stand
The substrate number and shape of carrying are restricted, and are not easy to meet the multifarious demand of substrate;3)Spherical surface umbrella stand and flat plate substrate
Suitability it is bad.
Invention content
The purpose of this utility model is to provide a kind of plated film spherical surface umbrella stand according to above-mentioned the deficiencies in the prior art, is led to
It crosses and the mode of supporting rib is set to install flat plate substrate in spherical surface umbrella stand bottom surface, while ensureing coating process stability, carry
The substrate quantity that high list umbrella can carry, yield bigger, flexibility are more preferable.
The utility model aim realization is completed by following technical scheme:
A kind of plated film spherical surface umbrella stand, including spherical surface umbrella stand ontology, it is characterised in that:At the bottom of the spherical surface umbrella stand ontology
Supporting rib is fixedly installed on face, the supporting rib is arranged vertically outward along the center of the spherical surface umbrella stand ontology, the support
Muscle is used for carrying substrates.
The supporting rib has at least two tie points being connected to a fixed with the spherical surface umbrella stand ontology.
Detachable be connected and fixed is constituted between the spherical surface umbrella stand ontology and the supporting rib.
The supporting rib is evenly arranged on the spherical surface umbrella stand ontology.
The spherical surface umbrella stand ontology is divided into several sector regions by segmentation muscle, and the supporting rib is evenly arranged in each institute
It states in sector region, and is arranged symmetrically along the center line of the sector region.
The utility model has the advantages that:The substrate quantity that single umbrella can carry, yield bigger are improved, while being conducive to coating umbrella
Frame operates steadily in the long term, is particularly suitable for the plated film of heavier substrate or the occasion of high temperature plated film, more conducively realizes technology stability;
The multifarious demand of substrate can be met;Comprehensive plated film of substrate, the especially plated film of flat plate substrate can be achieved, while substrate is equal
Even property is more preferable, convenient for being modified to coating film thickness homogeneity;It can be realized with conventional spherical umbrella stand directly general;Can play for
The antifouling effect of equipment;It is simple and reasonable, it is of low cost.
Description of the drawings
Fig. 1 is the top surface structure schematic diagram of the utility model;
Fig. 2 is the bottom surface structure schematic diagram of the utility model;
Fig. 3 is the partial structural diagram of the utility model;
Fig. 4 is the connection structure diagram between supporting rib and substrate in the utility model.
Specific implementation mode
The utility model feature and other correlated characteristics are described in further detail by embodiment below in conjunction with attached drawing,
In order to the understanding of technical staff of the same trade:
As shown in Figs 1-4, figure label 1-6 is expressed as:Spherical surface umbrella stand ontology 1, center steering hole 2, segmentation muscle 3,
Sector region 4, supporting rib 5, substrate 6.
Embodiment:As shown in Figure 1, the plated film spherical surface umbrella stand in the present embodiment includes spherical surface umbrella stand ontology 1, in spherical surface umbrella
The center of frame ontology 1 is provided with center steering hole 2, and center steering hole 2 is for installing rotary drive mechanism so that spherical surface umbrella
Frame ontology 1 rotates in coating process, to improve plated film homogeneity.As shown in Figure 1, being provided with four on spherical surface umbrella stand ontology 1
Item divides muscle 3, and spherical surface umbrella stand ontology 1 is divided into four sector regions 4, is used to carry in each sector region 4 by segmentation muscle 3
Substrate.
As shown in Fig. 2, being fixedly installed several supporting ribs for carrying substrates 6 on the bottom surface of spherical surface umbrella stand ontology 1
5, globally the center of umbrella stand ontology 1 is arranged vertically every supporting rib 5 outward.In conjunction with shown in Fig. 2 and Fig. 4, supported at every
Equal arranged for interval has substrate 6 on muscle 5.
As shown in figure 3, supporting rib 5 is evenly arranged in sector region 4, and is arranged symmetrically along the center line of sector region,
So, 6 quantity of substrate that can be carried in entire sector region 4 is also to be arranged symmetrically with its center line, to realize base
The symmetry that piece 6 is put is conducive to the operating steady in a long-term of spherical surface umbrella stand ontology 1;In addition, being also convenient for coating film thickness homogeneity
It is modified.
The present embodiment is in the specific implementation:At least two tie points are provided between supporting rib 5 and spherical surface umbrella stand ontology 1,
Two tie points at least preferably including 5 both side ends of supporting rib are more suitable for increase the mechanical performance of supporting rib 5
The plated film of heavier substrate 6 or the occasion of high temperature plated film, more conducively realize technology stability.As shown in figure 3, in view of supporting rib 5
Length differ, therefore the different connecting hole of quantity is respectively disposed on the supporting rib 5 of different length(As tie point), pass through
Each connecting hole can by each supporting rib 5 and spherical surface umbrella stand ontology 1 it is detachable be connected and fixed it is integral.
Although above example elaborates the design of the utility model aim and embodiment with reference to attached drawing,
But those skilled in the art will realize that in the case where no disengaging claim limits the precondition of range, still may be used
To make various modifications and variations to the utility model, therefore do not repeat one by one herein.
Claims (3)
1. a kind of plated film spherical surface umbrella stand, including spherical surface umbrella stand ontology, it is characterised in that:In the bottom surface of the spherical surface umbrella stand ontology
On be fixedly installed supporting rib, the supporting rib is arranged vertically outward along the center of the spherical surface umbrella stand ontology, the supporting rib
For carrying substrates;The supporting rib has at least two tie points being connected to a fixed with the spherical surface umbrella stand ontology;It is described
Supporting rib is evenly arranged on the spherical surface umbrella stand ontology.
2. a kind of plated film spherical surface umbrella stand according to claim 1, it is characterised in that:The spherical surface umbrella stand ontology with it is described
Detachable be connected and fixed is constituted between supporting rib.
3. a kind of plated film spherical surface umbrella stand according to claim 1, it is characterised in that:The spherical surface umbrella stand ontology is by dividing
Muscle is divided into several sector regions, and the supporting rib is evenly arranged in each sector region, and along the sector region
Center line be arranged symmetrically.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201721700700.7U CN207904359U (en) | 2017-12-08 | 2017-12-08 | A kind of plated film spherical surface umbrella stand |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201721700700.7U CN207904359U (en) | 2017-12-08 | 2017-12-08 | A kind of plated film spherical surface umbrella stand |
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CN207904359U true CN207904359U (en) | 2018-09-25 |
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ID=63567764
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CN201721700700.7U Active CN207904359U (en) | 2017-12-08 | 2017-12-08 | A kind of plated film spherical surface umbrella stand |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110331374A (en) * | 2019-07-23 | 2019-10-15 | 清华大学 | A kind of sample stage being prepared on a large scale surface enhanced Raman substrate |
-
2017
- 2017-12-08 CN CN201721700700.7U patent/CN207904359U/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110331374A (en) * | 2019-07-23 | 2019-10-15 | 清华大学 | A kind of sample stage being prepared on a large scale surface enhanced Raman substrate |
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