CN207845762U - The furnace body chassis component of large tank inner wall plated film vacuum cathode arc coating machine - Google Patents

The furnace body chassis component of large tank inner wall plated film vacuum cathode arc coating machine Download PDF

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Publication number
CN207845762U
CN207845762U CN201721420859.3U CN201721420859U CN207845762U CN 207845762 U CN207845762 U CN 207845762U CN 201721420859 U CN201721420859 U CN 201721420859U CN 207845762 U CN207845762 U CN 207845762U
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CN
China
Prior art keywords
height
plated film
chassis
tank body
furnace body
Prior art date
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Active
Application number
CN201721420859.3U
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Chinese (zh)
Inventor
李志荣
冯晓庭
潘锐华
陸创程
魏艳玲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Huicheng Vacuum Technology Co.,Ltd.
Original Assignee
Dongguan Huicheng Vacuum Science & Technology Co Ltd
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Priority to CN201721420859.3U priority Critical patent/CN207845762U/en
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Publication of CN207845762U publication Critical patent/CN207845762U/en
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Abstract

The utility model discloses a kind of furnace body chassis components of large tank inner wall plated film vacuum cathode arc coating machine, including chassis and additional flange;The chassis level setting, is provided with the annular seal groove of different-diameter, vaccum seal ring is equipped in the seal groove with one heart thereon;The additional flange bottom surface is used to dock by vaccum seal ring sealing with the chassis, top surface is also equipped with vaccum seal ring, the additional flange is used to compensate the difference in height of different height tank body, make different height tank body, in plated film, overhead height can be located in a specific range.The utility model furnace body chassis component can be adapted to different tank body internal diameters and height plated film, make different height tank body, and in plated film, overhead height can be located in a specific range.

Description

The furnace body chassis component of large tank inner wall plated film vacuum cathode arc coating machine
Technical field
The utility model is related to a kind of furnace body chassis components of large tank inner wall plated film vacuum cathode arc coating machine.
Background technology
Here large tank, referring to the one end open other end has capping cover, 1.5 meters -3.3 meters 2.5 meters of x high of diameter - 3.8 meters of tank body.Here large tank inner wall plated film vacuum cathode arc coating machine refers to using the large tank as very The outer wall of sky plating room, tank body is buckled on the furnace body chassis of coating machine, forms the coating machine of interim Vacuum Deposition room.This practicality is new Type is intended to provide a kind of furnace body chassis.
Utility model content
The goal of the invention of the utility model is to provide a kind of being adapted to different tank body internal diameters and height plated film, makes different height Tank body is spent, in plated film, overhead height can be located in a specific range, large tank inner wall plated film vacuum The furnace body chassis component of cathode arc coating machine.
The goal of the invention of the utility model is achieved through the following technical solutions:A kind of large tank inner wall plated film vacuum the moon The furnace body chassis component of pole electrical arc coating machine, including chassis and additional flange;
The chassis level setting, is provided with the annular seal groove of different-diameter, is equipped in the seal groove with one heart thereon Vaccum seal ring;
The additional flange bottom surface is used to dock by vaccum seal ring sealing with the chassis, and top surface is also equipped with Vaccum seal ring, the additional flange is used to compensate the difference in height of different height tank body, makes different height tank body, in plated film, Its overhead height can be located in a specific range.
According to tank body internal diameter, it is buckled in and on the sealing ring of respective diameters, forms interim Vacuum Deposition room on chassis.In tank When body difference in height, this difference in height can be compensated by additional flange, makes different height tank body, in plated film, overhead height Can it be located in a specific range.
There is the additional flange two or more, these additional flanges to have different height and/or internal diameter, their top surfaces Sealing ring, it may have different-diameter.
Compared with the prior art, the utility model has the advantages that:
The utility model furnace body chassis component can be adapted to different tank body internal diameters and height plated film, make different height tank body, In plated film, overhead height can be located in a specific range, be conducive to simplify large tank inner wall plated film use The structure design and program of vacuum cathode arc coating machine control.
Description of the drawings
Fig. 1 is structural schematic diagram when the utility model furnace body chassis component coordinates with large tank a;
Fig. 2 is structural schematic diagram when the utility model furnace body chassis component coordinates with large tank b.
Specific implementation mode
As shown in Figure 1, 2, the furnace body chassis of the large tank inner wall plated film vacuum cathode arc coating machine of the present embodiment Component includes chassis 1 and additional flange 2.Chassis 1 is horizontally disposed, is provided with the annular seal groove 11 of 3 different-diameters with one heart thereon, Vaccum seal ring 12 is installed in seal groove 11.2 bottom surface of additional flange is docked with chassis 1 by the sealing of vaccum seal ring 12, is pushed up Face is also equipped with vaccum seal ring 21.
When in face of the tank body of different height, as shown in Figure 1, tank body a height is low, need to mend by additional flange 2 at this time Difference in height is filled, specifically additional flange 2 is placed on chassis 1, using the One On The Chassis sealing ring 12, makes to realize between them close Envelope docking, then tank body a is buckled in additional flange 2, the vaccum seal ring 21 in additional flange 2, it is close between realization the two Envelope docking, to form interim plating room.When tank body is sufficiently high, as shown in Fig. 2, tank body b higher, at this point, add on method can be withdrawn from Orchid 2, tank body b is directly buckled on the vaccum seal ring 12 on chassis 1, can also form interim plating room.
Different-diameter vaccum seal ring 11 on chassis 1 is adapted to for chassis 1 with different inner diameters tank body, realizes sealing docking; Additional flange 2 then is used to compensate the difference in height of different height tank body, makes these tank bodies in plated film, overhead height can position In in a specific range.When 2 specification of additional flange is changeable, adaptation of the coating machine to different inner diameters and height tank body plated film Property is more preferably.

Claims (2)

1. a kind of furnace body chassis component of large tank inner wall plated film vacuum cathode arc coating machine, which is characterized in that including Chassis and additional flange;
The chassis level setting, is provided with the annular seal groove of different-diameter, vacuum is equipped in the seal groove with one heart thereon Sealing ring;
The additional flange bottom surface is used to dock by vaccum seal ring sealing with the chassis, and top surface is also equipped with vacuum Sealing ring, the additional flange is used to compensate the difference in height of different height tank body, makes different height tank body, in plated film, top Portion's height can be located in a specific range.
2. furnace body chassis component according to claim 1, which is characterized in that the additional flange has two or more, this A little additional flanges have different height and/or internal diameter, the sealing ring of their top surfaces, it may have different-diameter.
CN201721420859.3U 2017-10-31 2017-10-31 The furnace body chassis component of large tank inner wall plated film vacuum cathode arc coating machine Active CN207845762U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721420859.3U CN207845762U (en) 2017-10-31 2017-10-31 The furnace body chassis component of large tank inner wall plated film vacuum cathode arc coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721420859.3U CN207845762U (en) 2017-10-31 2017-10-31 The furnace body chassis component of large tank inner wall plated film vacuum cathode arc coating machine

Publications (1)

Publication Number Publication Date
CN207845762U true CN207845762U (en) 2018-09-11

Family

ID=63426556

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721420859.3U Active CN207845762U (en) 2017-10-31 2017-10-31 The furnace body chassis component of large tank inner wall plated film vacuum cathode arc coating machine

Country Status (1)

Country Link
CN (1) CN207845762U (en)

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Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
CP03 Change of name, title or address

Address after: No.2, Longyuan Road, Yanwu, Dalingshan Town, Dongguan City, Guangdong Province 523000

Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd.

Address before: 523820 Guangdong Province, Dongguan City Dalingshan Town Village fourth industrial zone.

Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY Co.,Ltd.

CP03 Change of name, title or address