CN207818528U - A kind of feed liquor structure for disperseing feed liquor and the etching device with the structure - Google Patents
A kind of feed liquor structure for disperseing feed liquor and the etching device with the structure Download PDFInfo
- Publication number
- CN207818528U CN207818528U CN201721261502.5U CN201721261502U CN207818528U CN 207818528 U CN207818528 U CN 207818528U CN 201721261502 U CN201721261502 U CN 201721261502U CN 207818528 U CN207818528 U CN 207818528U
- Authority
- CN
- China
- Prior art keywords
- liquid
- feed liquor
- inlet
- reactive tank
- separatnig plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005530 etching Methods 0.000 title claims abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 125
- 239000006185 dispersion Substances 0.000 claims abstract description 16
- 238000000926 separation method Methods 0.000 claims description 19
- 239000012530 fluid Substances 0.000 claims description 6
- 230000001413 cellular effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 239000002699 waste material Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004927 fusion Effects 0.000 description 3
- 235000013399 edible fruits Nutrition 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
Landscapes
- Weting (AREA)
Abstract
The utility model is related to photovoltaic and semiconductor production equipment technical field more particularly to a kind of feed liquor structure for disperseing feed liquor and with the etching device of the structure.The feed liquor structure of the dispersion feed liquor of the utility model includes reactive tank, fixed frame, inlet and liquid separatnig plate, fixed frame is fixed in reactive tank, and for fixing pending product, reactive tank is equipped with inlet, liquid separatnig plate is arranged between inlet and fixed frame, enter the liquid in reactive tank by inlet, pass through liquid separatnig plate uniform divided flows, so that the liquid for entering reactive tank can be uniformly broken up shunting, it can guarantee the uniformity of feed liquor again, effective protection product to be processed, prevent it due to rear too fast into the flow rate of liquid in reactive tank, flow is excessive, or flow velocity is uneven, and product is made directly to be impacted, to avoid the quality of product from being affected, the percentage of damage of product can also be reduced simultaneously, effectively reduce the waste of product in technical process.
Description
Technical field
The utility model is related to photovoltaic and semiconductor production equipment technical field more particularly to a kind of feed liquors of dispersion feed liquor
Structure and etching device with the structure.
Background technology
In the special process treatment process of current photovoltaic and some of production process of semiconductor and equipment, need first wait for
After the product of processing is put into the reactive tank of equipment, then liquid is passed through into reactive tank.Such as photovoltaic and semiconductor production work
Etching process in skill flow.
In existing photovoltaic and semiconductor production equipment, often use the open pipe fitting of heavy caliber big flow as feed liquor
The direct feed liquor of mouth, and the structure setting of the inlet is easy in feed liquor, because fluid flow is excessive and fluid flow is uneven,
And cause to generate impact to the product being put into advance, the quality of product is impacted, or even the broken of product can be caused to cause
Product wastes.
Utility model content
(1) technical problems to be solved
The technical problem to be solved by the present invention is to provide a kind of feed liquor structure of dispersion feed liquor and there is the structure
Etching device, the liquid that can will enter reactive tank break up the uniformity of shunting and feed liquor, and effective protection is to be processed
Product.
(2) technical solution
In order to solve the above-mentioned technical problem, the utility model provides a kind of feed liquor structure of dispersion feed liquor, including reaction
Slot, fixed frame, inlet and liquid separatnig plate, the fixed frame are fixed in reactive tank, and for fixing pending product, described
Reactive tank is equipped with inlet, and the liquid separatnig plate is arranged between the inlet and fixed frame, is entered by the inlet anti-
Answer liquid in slot, by the liquid separatnig plate uniform divided flows.
Preferably, baffle is equipped between the inlet and fixed frame, the liquid separatnig plate is arranged in the inlet and gear
Between plate.
Preferably, the area of the baffle is greater than or equal to the area of section of the fixed frame.
Preferably, perforation is equipped with one or more liquid separations hole on the liquid separatnig plate；
It is axially distributed in the liquid separation hole to have multiple runners when the liquid separation hole is one；
When the liquid separation hole is multiple, multiple liquid separation holes are evenly distributed at cellular on the liquid separatnig plate.
Preferably, the cross sectional shape in the liquid separation hole is the combination of one or more of round, ellipse and polygon.
Preferably, the inlet is arranged on the bottom, top or side wall of reactive tank.
Preferably, cushion chamber is equipped between the liquid separatnig plate and inlet.
Preferably, it is fixed with support plate between the liquid separatnig plate and inlet, by the support plate by the liquid separatnig plate
The cushion chamber is surrounded between inlet.
Preferably, the periphery of the fixed frame is equipped with the liquid separatnig plate of multiple interconnections, each liquid separatnig plate
It is connected by the baffle between end, the cushion chamber, institute will be separated between the inner wall and liquid separatnig plate of the reactive tank
Inlet is stated to be connected to cushion chamber.
The utility model additionally provides a kind of etching device, including feed liquor structure as described above.
(3) advantageous effect
The above-mentioned technical proposal of the utility model has the advantages that：The feed liquor knot of the dispersion feed liquor of the utility model
Structure includes reactive tank, fixed frame, inlet and liquid separatnig plate, and fixed frame is fixed in reactive tank, and for fixing pending production
Product, reactive tank are equipped with inlet, and liquid separatnig plate is arranged between inlet and fixed frame, enters the liquid in reactive tank by inlet
Body, by liquid separatnig plate uniform divided flows, to which the liquid for entering reactive tank can uniformly be broken up to shunting and feed liquor
Uniformity, effective protection product to be processed prevent it due in rear, flow mistake too fast into the flow rate of liquid in reactive tank
Greatly or flow velocity is uneven, and product is made directly to be impacted, and to avoid the quality of product from being affected, while liquid separatnig plate can also
The percentage of damage for reducing product, effectively reduces the waste of product in technical process；Pass through setting, moreover it is possible to which liquid feed liquor is total not influencing
On the basis of flow, ensures the abundant fusion after the liquid entered in reactive tank is broken up, be conducive to subsequent technological reaction effect；
Etching device equipped with this structure can reduce the liquid into reactive tank to the straight of product under the premise of ensureing etching effect
Impact is connect, improves reaction efficiency, and ensure that the constant into flow quantity of reaction solution, so that it is guaranteed that final etching reaction effect
Fruit.
Description of the drawings
Fig. 1 is the structural schematic diagram of the feed liquor structure of the dispersion feed liquor of the utility model embodiment one；
Fig. 2 is the structural schematic diagram of the feed liquor structure of the dispersion feed liquor of the utility model embodiment two；
Fig. 3 is the vertical view of the feed liquor structure of the dispersion feed liquor of the utility model embodiment two；
Fig. 4 is the structural schematic diagram of the feed liquor structure of the dispersion feed liquor of the utility model embodiment three；
Fig. 5 is the structural schematic diagram of the feed liquor structure of the dispersion feed liquor of the utility model embodiment four.
Wherein, 1, fixed frame；2, product；3, baffle；4, inlet；5, liquid separatnig plate；6, reactive tank；7, cushion chamber.
Specific implementation mode
The embodiment of the utility model is described in further detail with reference to the accompanying drawings and examples.Following embodiment
For illustrating the utility model, but cannot be used for limiting the scope of the utility model.
In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more.Term
The orientation of the instructions such as "upper", "lower", "left", "right", "inner", "outside", " front end ", " rear end ", " head ", " tail portion " or position are closed
System is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of describing the present invention and simplifying the description, rather than
Indicate or imply that signified device or element must have a particular orientation, with specific azimuth configuration and operation, therefore cannot
It is construed as a limitation of the present invention.
Embodiment one
As shown in Figure 1, the feed liquor structure of the dispersion feed liquor described in the present embodiment includes reactive tank 6, fixed frame 1, inlet 4
With liquid separatnig plate 5, fixed frame 1 is fixed in reactive tank 6, and for fixing pending product 2, and reactive tank 6 is equipped with inlet
4, liquid separatnig plate 5 be arranged between inlet 4 and fixed frame 1, by inlet 4 enter reactive tank 6 in liquid, pass through liquid separatnig plate 5
Uniform divided flows, liquid separatnig plate setting can by enter reactive tank 6 liquid uniformly break up shunting and feed liquor it is uniform
Property, effective protection product 2 to be processed, prevent its due to it is rear into the flow rate of liquid in reactive tank 6 is too fast, flow is excessive,
Or flow velocity is uneven, and product 2 is made directly to be impacted, to avoid the quality of product 2 from being affected, while product can also be reduced
2 percentage of damage effectively reduces the waste of product 2 in technical process；Moreover it is possible to so that into the liquid feed liquor in reactive tank 6
Total flow remains unchanged, and on this basis, ensures the abundant fusion after the liquid entered in reactive tank 6 is broken up, after being conducive to
Continuous technological reaction effect.
In order to effectively avoid liquid from directly impacting product 2, baffle 3 is equipped with preferably between inlet 4 and fixed frame 1, point
Liquid plate 5 is arranged between inlet 4 and baffle 3, and liquid separatnig plate 5 and baffle 3 are combined, and are applied jointly to the liquid for flowing through inlet 4
Add buffering effect, and baffle 3 also plays good water conservancy diversion effect to the liquid after being shunted by liquid separatnig plate 5；Preferably, baffle
3 area is greater than or equal to the area of section of fixed frame 1, to ensure that baffle 3 will directly rush at the liquid and product 2 of fixed frame 1
Between be isolated, and have the either side of enough area covering fixed frames 1, to by other in guiding fluid reactive tank 6
Position.
In the present embodiment, perforation is equipped with one or more liquid separations hole on liquid separatnig plate 5.Wherein, when liquid separation hole is one, point
It is axially distributed in fluid apertures to have multiple runners, it is separated by partition between two neighboring runner, ensures to be passed through this point in this way
The liquid of fluid apertures is broken up by runner segmentation；When liquid separation hole is multiple, multiple liquid separation holes are evenly distributed on liquid separation at cellular
On plate 5, to ensure that liquid is broken up abundant and uniform, and quickly can fully it merged after liquid separatnig plate 5.Specifically
, preferably the cross sectional shape in liquid separation hole is the combination of one or more of round, ellipse and polygon, for the ease of adding
Work, preferably liquid separation hole are circle.
For the ease of carrying out water conservancy diversion to liquid before breaing up liquid, in order to ensure the comprehensive engagement of liquid and liquid separatnig plate 5,
Reliability is reduced to avoid the certain point stress on liquid separatnig plate 5 excessive, is preferably equipped between liquid separatnig plate 5 and inlet 4
Cushion chamber 7.
In feed liquor structure described in the present embodiment one, inlet 4 is arranged in the bottom of reactive tank 6, liquid separatnig plate 5 and inlet
It is fixed with support plate between 4, cushion chamber 7 will be surrounded by support plate between liquid separatnig plate 5 and inlet 4.In other words, support plate is enclosed
It is wound on the outer rim of inlet 4, and the bottom end of support plate is fixed on the inner wall of reactive tank 6, top is fixedly connected on liquid separatnig plate 5
Periphery after liquid enters reactive tank 6 by inlet 4, first exists to surround cushion chamber 7 between liquid separatnig plate 5 and inlet 4
Accumulation in cushion chamber 7, so that the surface of liquid and liquid separatnig plate 5 comes into full contact with so that the stress of liquid separatnig plate 5 is more uniform.
Embodiment two
Described in the present embodiment two dispersion feed liquor feed liquor structure and the structure described in embodiment one it is essentially identical, it is identical it
Place repeats no more, the difference is that：As shown in Figures 2 and 3, in the feed liquor structure described in the present embodiment three, the side of fixed frame 1
The periphery in face is equipped with the liquid separatnig plate 5 of multiple interconnections, and one end of each liquid separatnig plate 5 passes through another liquid separatnig plate 5 or one
Baffle 3 connects, and the other end is connect with another baffle 3, fixed frame 1 is enclosed in inside, and by the inner wall of reactive tank 6 and divide
Cushion chamber 7 is separated between liquid plate 5, since inlet 4 is arranged in the bottom of reactive tank 6, in one end towards inlet 4
Be arranged baffle 3, directly product 2 is impacted to avoid liquid, inlet 4 is connected to cushion chamber 7, then by inlet 4 into
The liquid entered in reactive tank 6 is being beaten after baffle 3, is dropped back into again in cushion chamber 7, and increases liquid level as liquid flows into, with
This simultaneously, liquid is shunted by liquid separatnig plate 5, to realize and slowly be contacted between product 2, the safety of effective protection product 2.
Embodiment three
Described in the present embodiment three dispersion feed liquor feed liquor structure and the structure described in embodiment two it is essentially identical, it is identical it
Place repeats no more, the difference is that：As shown in figure 4, in feed liquor structure described in the present embodiment three, inlet 4 is arranged anti-
The top for answering slot 6 is arranged baffle 3 in the underface of inlet 4, encloses the gusset mounted in fixed frame 1 and multiple liquid separatnig plates of bottom
5, respectively between the inner wall of reactive tank 6 there are cushion chamber 7, then when liquid is entered by inlet 4 in reactive tank 6, gear is first passed through
Plate 3 is spread to surrounding, the bottom of reactive tank 6 is then dropped down onto by the movement of falling object in cushion chamber 7, in liquid level elevation process
In, liquid is uniformly broken up by each liquid separatnig plate 5, and is in contact with the product 2 in fixed frame 1, anti-to complete normal technique
It answers.
Example IV
Described in the present embodiment four dispersion feed liquor feed liquor structure and the structure described in embodiment two it is essentially identical, it is identical it
Place repeats no more, the difference is that：As shown in figure 5, in feed liquor structure described in the present embodiment four, inlet 4 is arranged anti-
It answers on any side wall of slot 6.
Embodiment five
On the basis of above-mentioned each embodiment, the present embodiment five proposes a kind of etching device comprising such as embodiment
One to the feed liquor structure for disperseing feed liquor described in any of example IV embodiment, which can be in guarantee etching effect
Under the premise of fruit, direct impact of the liquid for entering reactive tank 6 to product 2 is reduced, reaction efficiency is improved, and ensure that reaction is molten
Liquid it is constant into flow quantity, so that it is guaranteed that final etching reaction effect.
It should be noted that other than the etching device described in the present embodiment five, in photovoltaic and production process of semiconductor stream
Cheng Zhong needs after being first put into product to be processed in the reactive tank 6 of equipment, then is passed through all kinds of of liquid into reactive tank 6
Above-mentioned feed liquor structure can be arranged in production equipment.Therefore, the above various embodiments is only to illustrate the embodiment of the present invention
Technical solution, rather than its limitations；Although having been carried out specifically to the embodiments of the present invention with reference to foregoing embodiments
It is bright, it will be understood by those of ordinary skill in the art that：It can still carry out the technical solution recorded in foregoing embodiments
Modification either carries out equivalent replacement to which part or all technical features；And these modifications or replacements, do not make corresponding
The essence of technical solution is detached from the range of each embodiment technical solution of the embodiment of the present invention.
In conclusion the feed liquor structure of the dispersion feed liquor of the present embodiment includes reactive tank 6, fixed frame 1, inlet 4 and divides
Liquid plate 5, fixed frame 1 are fixed in reactive tank 6, and for fixing pending product 2, and reactive tank 6 is equipped with inlet 4, point
Liquid plate 5 is arranged between inlet 4 and fixed frame 1, and liquid in reactive tank 6, uniform by liquid separatnig plate 5 is entered by inlet 4
Shunting, to which the liquid for entering reactive tank 6 can uniformly be broken up to the uniformity of shunting and feed liquor, effective protection
Product 2 to be processed prevents it due to excessive or flow velocity is uneven in rear, flow too fast into the flow rate of liquid in reactive tank 6,
And product 2 is made directly to be impacted, to avoid the quality of product 2 from being affected, while the percentage of damage of product 2 can also be reduced,
Effectively reduce the waste of product 2 in technical process；By the way that liquid separatnig plate is arranged, moreover it is possible on the basis for not influencing liquid feed liquor total flow
On, ensure the abundant fusion after the liquid entered in reactive tank 6 is broken up, is conducive to subsequent technological reaction effect；Equipped with this knot
The etching device of structure can reduce direct punching of the liquid for entering reactive tank 6 to product 2 under the premise of ensureing etching effect
It hits, reaction efficiency is improved, and ensure that the constant into flow quantity of reaction solution, so that it is guaranteed that final etching reaction effect.
The embodiments of the present invention provide for the sake of example and description, and are not exhaustively or to incite somebody to action
The utility model is limited to disclosed form.Many modifications and variations are aobvious and easy for the ordinary skill in the art
See.Selection and description embodiment are and to make this field to more preferably illustrate the principles of the present invention and practical application
Those of ordinary skill is it will be appreciated that various embodiments with various modifications of the utility model to design suitable for special-purpose.
Claims (10)
1. a kind of feed liquor structure of dispersion feed liquor, which is characterized in that described including reactive tank, fixed frame, inlet and liquid separatnig plate
Fixed frame is fixed in reactive tank, and for fixing pending product, and the reactive tank is equipped with inlet, the liquid separatnig plate
It is arranged between the inlet and fixed frame, liquid in reactive tank, equal by the liquid separatnig plate is entered by the inlet
Even shunting.
2. feed liquor structure according to claim 1, which is characterized in that baffle is equipped between the inlet and fixed frame,
The liquid separatnig plate is arranged between the inlet and baffle.
3. feed liquor structure according to claim 2, which is characterized in that the area of the baffle is greater than or equal to the fixation
The area of section of frame.
4. feed liquor structure according to claim 1, which is characterized in that perforation is equipped with one or more points on the liquid separatnig plate
Fluid apertures；
It is axially distributed in the liquid separation hole to have multiple runners when the liquid separation hole is one；
When the liquid separation hole is multiple, multiple liquid separation holes are evenly distributed at cellular on the liquid separatnig plate.
5. feed liquor structure according to claim 4, which is characterized in that the cross sectional shape in the liquid separation hole is round, oval
The combination of one or more of shape and polygon.
6. feed liquor structure according to claim 1, which is characterized in that the inlet is arranged on the bottom of reactive tank, top
In portion or side wall.
7. according to claim 1-6 any one of them feed liquor structures, which is characterized in that set between the liquid separatnig plate and inlet
There is cushion chamber.
8. feed liquor structure according to claim 7, which is characterized in that be fixed with support between the liquid separatnig plate and inlet
Plate will surround the cushion chamber by the support plate between the liquid separatnig plate and inlet.
9. feed liquor structure according to claim 7, which is characterized in that the periphery of the fixed frame is equipped with multiple interconnections
The liquid separatnig plate, connected by baffle between the end of each liquid separatnig plate, by the inner wall of the reactive tank and liquid separation
The cushion chamber is separated between plate, the inlet is connected to cushion chamber.
10. a kind of etching device, which is characterized in that including such as claim 1-9 any one of them feed liquor structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721261502.5U CN207818528U (en) | 2017-09-28 | 2017-09-28 | A kind of feed liquor structure for disperseing feed liquor and the etching device with the structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721261502.5U CN207818528U (en) | 2017-09-28 | 2017-09-28 | A kind of feed liquor structure for disperseing feed liquor and the etching device with the structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207818528U true CN207818528U (en) | 2018-09-04 |
Family
ID=63336166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721261502.5U Expired - Fee Related CN207818528U (en) | 2017-09-28 | 2017-09-28 | A kind of feed liquor structure for disperseing feed liquor and the etching device with the structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207818528U (en) |
-
2017
- 2017-09-28 CN CN201721261502.5U patent/CN207818528U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207818528U (en) | A kind of feed liquor structure for disperseing feed liquor and the etching device with the structure | |
| CN206428211U (en) | One kind leaches mechanism and leaching device | |
| CN102847899A (en) | Method for improving cleanliness of casting blank | |
| CN103669061B (en) | Economic benefits and social benefits hydraulic pulping system | |
| CN207862290U (en) | A kind of anti-slip slot infuser | |
| CN214820684U (en) | Water guide device for sizing sleeve of vacuum sizing box | |
| CN203944161U (en) | A kind of oxidizing tower gas-liquid separation inner member | |
| CN209438213U (en) | Foam removal knockout drum | |
| CN208526082U (en) | A kind of uniform bag filter of cloth wind | |
| CN207680197U (en) | A kind of recovering mechanism of sticky rice washing water | |
| CN209204737U (en) | Water segregator used in a kind of spirolactone walsh oxidation reaction | |
| CN203408501U (en) | Multifunctional slime water treatment tank | |
| CN209076241U (en) | A kind of cyclone separator containing gas-liquid separation device | |
| CN207086890U (en) | Ferronickel cast iron unit | |
| CN2491096Y (en) | Externally pressed hollow fiber membrane modular | |
| CN104451913B (en) | A kind of spinning-drawing machine bath | |
| CN215507303U (en) | Flotation foam buffering defoaming device | |
| CN219629368U (en) | Water-vapor separation water outlet nozzle and water drinking device | |
| CN219093558U (en) | Splash-proof discharge end for pouring | |
| CN205133812U (en) | Deacidify device of semicontinuous spinning machine | |
| CN108714586A (en) | A kind of cleaning device of high transparency offset ink calcium filter cake | |
| CN217121733U (en) | Immersion type water gap | |
| CN216430514U (en) | Melt valve based on guide drainage | |
| CN215387761U (en) | Feeding device capable of restraining slurry feeding disturbance | |
| CN216758144U (en) | High-temperature alloy multi-hole molten steel pouring splitter plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. Address before: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd. Address after: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd. Address before: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee before: Beijing Chuangyu Technology Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210315 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: 102209 Beijing city Changping District town Beiqijia Hongfu Pioneer Park No. 15 hospital Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180904 |