CN207811867U - A kind of fixture system for chemical vapor deposition ParyleneC films - Google Patents
A kind of fixture system for chemical vapor deposition ParyleneC films Download PDFInfo
- Publication number
- CN207811867U CN207811867U CN201820252111.5U CN201820252111U CN207811867U CN 207811867 U CN207811867 U CN 207811867U CN 201820252111 U CN201820252111 U CN 201820252111U CN 207811867 U CN207811867 U CN 207811867U
- Authority
- CN
- China
- Prior art keywords
- fixture
- box body
- left box
- right case
- antenna unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Support Of Aerials (AREA)
Abstract
A kind of fixture system for chemical vapor deposition Parylene C films, for depositing Parylene C films to the first microband antenna unit and the second microband antenna unit；The fixture system includes left box body fixture and right case fixture, and left box body fixture and right case fixture, which are detachably matched, is encircled into an enclosure space；The bottom surface of left box body fixture is laid with left box body hole group, and the bottom surface of right case fixture is laid with right case hole group；Several through-holes are provided on one side of left box body fixture or right case fixture, plastic catheter is fixed in through-hole.The utility model not only meets the requirement of performance, and can efficiently use entire vacuum deposition chamber, while being deposited to multiple microband antenna units, improves production efficiency, and depositing protective film for later complex antenna front provides reference.
Description
Technical field
The utility model is related to fixture system technical fields, and in particular to one kind being used for chemical vapor deposition Parylene C
The fixture system of film.
Background technology
Antenna arrays of radar is made of multiple microband antenna units, microband antenna unit by integrated coaxial connector with
Micro-strip plate is welded.In order to control high/low temperature variation caused by moisture condensation on microband antenna unit repeatedly condensation and height
Foam absorbent caused by air pressure change ensures that the microband antenna unit being exposed in radome can work normally, to micro-strip day
The surfacecti proteon of line unit is most important.By carrying out thematic experimental study, microstrip antenna list is carried out using Parylene films
Member organic coatings, especially with Parylene C films, microwave property is satisfied by requirements, with good water resistance,
Apply uniformity, thermal stability, salt spray proof.
Microband antenna unit maximum front volume be 520mm × 340mm × 50mm, minimum front volume be 370mm ×
340mm × 50mm, in order to reach electric characteristics requirement, these microband antenna units can only have one side deposition Parylene C films
It is protected, another side cannot deposit.Due to the chloro-p-xylene free radical that the atmosphere of deposition chamber is gas phase, the molecule
Size is in nanoscale scope, possesses high permeability, and minimum gap is likely to that raw material is made to enter, under existing tooling
It is difficult to and is fully sealed, deposit upper film so as to cause non-deposited face, influence the electric characteristics of entire antenna array.
In addition, microband antenna unit is placed in the box body of pentahedron, although can meet single sided deposition requirement, institute
It is big it to be lying placed in area occupied in gaseous phase deposition stove body with box body, a microband antenna unit can only once be deposited,
And when being vacuumized in furnace body, formed high tooling inside and outside differential pressure can also by the microband antenna unit being fixed in tooling because
It deforms and damages.
Utility model content
To avoid above-mentioned the deficiencies in the prior art, on the basis of ensureing that corresponding electric characteristics require, improves and criticize
Quantify fast deposition efficiency, the utility model provides a kind of fixture system for chemical vapor deposition Parylene C films.
The utility model is achieved through the following technical solutions：
A kind of fixture system for chemical vapor deposition Parylene C films, for the first microband antenna unit and
Second microband antenna unit deposits Parylene C films；The fixture system includes left box body fixture and right case fixture；
Left box body fixture and right case fixture are open case shape, and left box body fixture and right case fixture detachably coordinate
Surround an enclosure space；The bottom surface of left box body fixture be laid with the shape of antenna element on the first microband antenna unit, point
The corresponding left box body hole group of cloth；The bottom surface of right case fixture is laid with the shape with antenna element on the second microband antenna unit
Shape, distribution corresponding right case hole group；
Several through-holes are provided on one side of left box body fixture or right case fixture, being fixed with plastics in through-hole leads
Pipe.
The quantity of scheme as an optimization, through-hole is two.
Scheme as an optimization is sealed between plastic catheter and through-hole by butyl rubber belt, and the length of plastic catheter is more than
5cm。
Each side both ends of scheme as an optimization, left box body fixture and right case fixture are provided with several screw holes, left case
It is solid by lath-shaped gasket with holes and screw between the screw hole of screw hole on body fixture and right case fixture on corresponding position
Fixed connection.
The beneficial effects of the utility model include：
1. the utility model tooling is put into chemical vapor deposition instrument furnace chamber, deposited, is sunk according to relevant parameter
It is taken out after product, microband antenna unit needs what is deposited to cover a thin layer of Parylene C films on one side, and the back side
It is not covered with Parylene C film layers.The utility model not only meets the requirement of performance, and can efficiently use entire true
Empty settling chamber, while multiple microband antenna units are deposited, production efficiency is improved, it is thin for the deposition protection of later complex antenna front
Film provides reference.
2. plastic catheter prevents inside and outside differential pressure from microband antenna unit being caused to damage for balancing inner and outer air pressure；Butyl rubber belt
It is mainly used for the processing of seam crossing air-tightness, waterproof is shockproof.
3. lath is fixed so that fixture system system in deposition process is firm, and dismantles, is easy to assembly.
Description of the drawings
Fig. 1 is the microband antenna unit structural schematic diagram that the utility model and needs deposit.
Fig. 2 is the utility model usage state diagram.
In all the appended drawings, identical reference numeral is used for indicating identical element or structure, wherein：
1- left box body fixtures, 2- right case fixtures, 11- left box bodies hole group I, 12- left box bodies hole group II, 21- right cases hole
Group I, 22- right cases hole group II, the first microband antenna units of 3-, the second microband antenna units of 4-, 5- plastic catheters, 6- through-holes.
Specific implementation mode
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that the specific embodiments described herein are only used to solve
The utility model is released, is not used to limit the utility model.
In order to make it easy to understand, the direction being previously mentioned in the utility model is specifically described：A left side refers to left in face of attached drawing
Side where hand, the right side refer in face of the side where the attached drawing right hand.
Embodiment 1：
A kind of fixture system for chemical vapor deposition Parylene C films, for the first microband antenna unit 3
Parylene C films are deposited with the second microband antenna unit 4.
As shown in Figure 1, the fixture system uses stainless steel, including left box body fixture 1 and right case fixture 2.Left case
Body fixture 1 and right case fixture 2 are open case shape, and left box body fixture 1 and right case fixture 2, which are detachably matched, is encircled into an envelope
Close space；The bottom surface of left box body fixture 1 is laid with opposite with the shape of antenna element, distribution on the first microband antenna unit 3
The left box body hole group answered；The bottom surface of right case fixture 2 be laid with the shape of antenna element on the second microband antenna unit 4,
It is distributed corresponding right case hole group.The number and shape of left box body hole group and right case hole group according to the quantity of antenna element and
Complex-shaped degree is determined, and shape can be rectangular, round, triangle etc..
The structure of first microband antenna unit 3 and the second microband antenna unit 4 may be the same or different, the two
Maximum front volume is 520mm × 340mm × 50mm, and minimum front volume is 370mm × 340mm × 50mm.In the present embodiment
It needs the structure of the first microband antenna unit 3 deposited and the second microband antenna unit 4 just identical, is provided with two class antennas
In a period of time, this makes left box body hole group be divided into II 12 two kinds of left box body hole group I 11 and left box body hole group, and right case hole group is divided into right case
II 22 two kinds of body opening group I 21 and right case hole group.
It is opened on one side of left box body fixture 1 there are two through-hole 6, plastic catheter 5 is fixed in through-hole 6；Plastic catheter 5
It is sealed by butyl rubber belt between through-hole 6.Through-hole 6 can also be equally located on right case fixture 2, the length of plastic catheter 5
For 5cm.Plastic catheter prevents inside and outside differential pressure from microband antenna unit being caused to damage for balancing inner and outer air pressure；Butyl rubber belt is main
For the processing of seam crossing air-tightness, waterproof is shockproof.
Each side both ends of left box body fixture 1 and right case fixture 2 are provided with several screw holes, the spiral shell on left box body fixture 1
Hole and right case fixture 2 are fixedly connected between the screw hole on corresponding position by lath-shaped gasket with holes and screw；This makes
Obtaining the opening face of left box body fixture 1 and right case fixture 2 can be releasably secured together.
As shown in Fig. 2, in use, the antenna element on the first microband antenna unit 3 passes through left box body hole group I 11 and left case
Body opening group II 12 is inserted into left box body fixture 1, and the antenna element on the second microband antenna unit 4 passes through I 21 He of right case hole group
Right case hole group II 22 is inserted into right case fixture 2, and uses Teflon adhesive tape ASF-110FR by surrounding leakage hole, seam in babinet
It is sealed at gap, left box body folder is fixed on to seal the first microband antenna unit 3 and the second microband antenna unit 4 respectively
On tool 1 and right case fixture 2, the open end of left box body fixture 1 and right case fixture removably seals fixation.
One or more above-mentioned apparatuses are put into chemical vapor deposition stove, opening device, Parylene raw materials are evaporating
Room by Pintsch process is free radical in cracking room, the vacuum that Parylene free radicals enter room temperature is heavy at gaseous state by heating evaporation
Product is indoor, and free radical loses energy and bonds together to form polymerizable molecular film again on front surface at normal temperatures, fine and close pin-free, transparent
It is unstressed.It is taken out after deposition, it is thin that antenna micro strip front needed to deposit covers a thin layer of Parylene C on one side
Film, and the back side is not covered with Parylene C film layers.The utility model not only meets the requirement of performance, and can be effectively sharp
It is deposited with entire vacuum deposition chamber, while to mutiple antennas submatrix, improves production efficiency, protected for later complex antenna front deposition
It protects film and reference is provided.
As it will be easily appreciated by one skilled in the art that the above is only the preferred embodiment of the utility model only, not
To limit the utility model, any modification made within the spirit and principle of the present invention, equivalent replacement and change
Into etc., it should be included within the scope of protection of this utility model.
Claims (4)
1. a kind of fixture system for chemical vapor deposition Parylene C films, for the first microband antenna unit (3) and
Second microband antenna unit (4) deposits Parylene C films；It is characterized in that：The fixture system includes left box body fixture (1)
With right case fixture (2)；
The left box body fixture (1) and right case fixture (2) are open case shape, the left box body fixture (1) and the right side
Case clamp (2), which is detachably matched, is encircled into an enclosure space；The bottom surface of the left box body fixture (1) is laid with and described first
The shape of antenna element, distribution corresponding left box body hole group on microband antenna unit (3)；The bottom of the right case fixture (2)
Face is laid with and the shape of antenna element, distribution corresponding right case hole group on second microband antenna unit (4)；
Several through-holes (6), the through-hole (6) are provided on one side of the left box body fixture (1) or right case fixture (2)
Inside it is fixed with plastic catheter (5).
2. a kind of fixture system for chemical vapor deposition Parylene C films according to claim 1, feature exist
In：The quantity of the through-hole (6) is two.
3. a kind of fixture system for chemical vapor deposition Parylene C films according to claim 1, feature exist
In：It is sealed by butyl rubber belt between the plastic catheter (5) and the through-hole (6), the length of the plastic catheter (5) is more than
5cm。
4. a kind of fixture system for chemical vapor deposition Parylene C films according to claim 1, feature exist
In：Each side both ends of the left box body fixture (1) and right case fixture (2) are provided with several screw holes, the left box body folder
Have between the screw hole on corresponding position of screw hole and the right case fixture (2) on (1) through lath-shaped gasket with holes and
Screw is fixedly connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820252111.5U CN207811867U (en) | 2018-02-12 | 2018-02-12 | A kind of fixture system for chemical vapor deposition ParyleneC films |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820252111.5U CN207811867U (en) | 2018-02-12 | 2018-02-12 | A kind of fixture system for chemical vapor deposition ParyleneC films |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207811867U true CN207811867U (en) | 2018-09-04 |
Family
ID=63321186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820252111.5U Active CN207811867U (en) | 2018-02-12 | 2018-02-12 | A kind of fixture system for chemical vapor deposition ParyleneC films |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207811867U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110965045A (en) * | 2018-09-29 | 2020-04-07 | 南京理工大学 | Method for protecting thin-wall energy-gathered cutting rope by utilizing Parylene micro-nano film |
-
2018
- 2018-02-12 CN CN201820252111.5U patent/CN207811867U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110965045A (en) * | 2018-09-29 | 2020-04-07 | 南京理工大学 | Method for protecting thin-wall energy-gathered cutting rope by utilizing Parylene micro-nano film |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN207811867U (en) | A kind of fixture system for chemical vapor deposition ParyleneC films | |
| JP2008001988A5 (en) | ||
| CN104198545B (en) | Sonde heated type humidity sensor and preparation method thereof and a kind of humidity measuring circuit | |
| CN106058458B (en) | A kind of broadband intelligence Meta Materials wide-angle wave transparent antenna house and its antenna system | |
| CN104505147A (en) | Preparation method for graphene nanowall flexible conductive film | |
| CN205228986U (en) | Polymer water absorbent resin characteristic of materials detection mechanism | |
| CN206427517U (en) | A kind of constant temperature storage box | |
| CN110847491A (en) | Assembled graphite alkene wallboard that generates heat | |
| CN103296417B (en) | Metamaterial antenna cover and antenna system | |
| CN206478317U (en) | A kind of damp-proof wear-resistant airduct | |
| CN209658795U (en) | A kind of MPP bellows | |
| CN219195118U (en) | Glass cover plate coating jig | |
| CN208667102U (en) | The solid membrane device of graphene optimization polymer production is utilized in lithium battery | |
| CN205482115U (en) | Vacuum drying oven heater and vacuum drying oven | |
| CN204903657U (en) | High temperature wide band vacuum atmosphere dielectric measuring device | |
| CN106058457B (en) | A kind of ultra-thin low pass frequency selects Meta Materials wave transparent antenna house | |
| CN203320119U (en) | Three-target plasma sputtering instrument | |
| CN202297758U (en) | Planar target device for film plating | |
| CN108469596A (en) | A kind of Flexible graphene nm wall detector for magnetic field | |
| JPWO2015008867A1 (en) | Sheet-like laminate, sheet-like laminate production method, and sheet-like composite | |
| CN102117735B (en) | There is the process chamber of slit valve tunnel support | |
| CN114460986B (en) | Device for controlling atomic vapor pressure | |
| CN105071036A (en) | X-waveband intelligent metamaterial wide-angle wave-transparent radome | |
| CN217034179U (en) | Material electrical property testing arrangement that multi-scenario was used | |
| CN221028662U (en) | High-production-efficiency vapor phase reaction deposition equipment for preparing graphene |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |