CN207811864U - Vacuum coater - Google Patents

Abstract

The utility model discloses a kind of vacuum coaters, including the first cavity and the second cavity.It is provided with coating system in first cavity, reel system is provided on the second cavity.Coating system includes ion source and target body and is arranged on the inner wall of the first cavity.Reel system includes the first retractable volume, the second retractable volume, film coating roller and guide roller, and film coating roller includes the first filming roller and the second film coating roller.The first filming roller and the second film coating roller offer fluid passage, and vacuum coater further includes rotary joint, and rotary joint connects film coating roller, and fluid passage is connected to rotary joint and film coating roller.Rotary joint and fluid passage remains stationary, do not rotate.In the utility model embodiment, water cooled rolls enables the material that vacuum coater is some non-refractories to carry out plated film.

Description

Vacuum coater

Technical field

The utility model is related to plated film field more particularly to a kind of vacuum coaters.

Background technology

In the related art, during vacuum coating, temperature is generally higher when material coiling plated film to be plated, leads to material to be plated Material is prone to the phenomenon that deformation, so most of vacuum coating equipment is only heat-resisting material plated film, such as metal, significantly Limit the application range of vacuum coating.

Utility model content

A kind of vacuum coater that the utility model embodiment provides, which is characterized in that including the first cavity and the Two cavitys, second cavity are movably disposed in first cavity and cooperatively form confined space,

It is provided with coating system in first cavity, reel system is provided on second cavity,

The coating system includes ion source and target body and is arranged on the inner wall of first cavity,

The reel system includes the first retractable volume, the second retractable volume, film coating roller and guide roller, and the film coating roller includes the One film coating roller and the second film coating roller, the guide roller are used to the material to be plated guiding in first retractable volume being wound up into described On the first filming roller and second film coating roller and it is further directed in second retractable volume or by second retractable volume On material to be plated guided to first retractable volume by second film coating roller and the first filming roller,

The first filming roller and second film coating roller offer fluid passage, and the vacuum coater further includes rotation Adapter, the rotary joint connect the film coating roller, and the fluid passage is connected to the rotary joint and the film coating roller,

The rotary joint and the fluid passage remains stationary, do not rotate.

In vacuum coater in the utility model embodiment, two film coating rollers all use water cooled rolls, in water cooled rolls Fluid passage in be passed through coolant liquid, the coolant liquid of flowing takes away the high temperature on film coating roller, avoids material to be plated from being damaged, significantly The application range of vacuum coater is expanded.

In some embodiments, second cavity bottom is provided with traveling wheel, is fixedly installed on first cavity There is a track, the traveling wheel moves on the track so that second cavity is incorporated to first cavity and from described first It is detached in cavity.

In some embodiments, the coating system further includes magnet assembly, and the magnetic field line of the magnet assembly passes through The target body.

In some embodiments, the fluid passage is cylinder, the axis of the fluid passage and first plating The axis of deflector roll and second film coating roller is located along the same line.

In some embodiments, the reel system further includes motor and belt, and the output shaft of the motor passes through institute It states belt and drives the first filming roller and second film coating roller rotation, the rotating speed of the motor is adjustable.

In some embodiments, the belt includes synchronous belt, big timing belt pulley and small timing belt pulley, described Small timing belt pulley connects the output shaft of the motor, and the big timing belt pulley connects the film coating roller, the synchronous belt Connect the big timing belt pulley and the small timing belt pulley.

In some embodiments, the reel system further includes pressure roller, jockey pulley and nip rolls, the pressure roller, described Jockey pulley and guide roller cooperation are to adjust the tensioning degree of the material to be plated, and the pressure roller and nip rolls cooperation are to adjust The flatness of material to be plated.

In some embodiments, the position-adjustable of the pressure roller and the jockey pulley.

The additional aspect and advantage of the utility model embodiment will be set forth in part in the description, partly will be under Become apparent in the description in face, or is recognized by the practice of the utility model.

Description of the drawings

In description of the above-mentioned and/or additional aspect and advantage of the utility model from combination following accompanying drawings to embodiment It will be apparent and be readily appreciated that, wherein：

Fig. 1 is the planar structure schematic diagram of the vacuum coater of embodiment of the present invention；

Fig. 2 is the local part planar structure schematic diagram of the vacuum coater of embodiment of the present invention；

Fig. 3 is the another planar structure schematic diagram of the vacuum coater of embodiment of the present invention；

Fig. 4 is the work structure diagram of the vacuum coater of embodiment of the present invention；

Fig. 5 is the diagrammatic cross-section of the film coating roller of the vacuum coater of embodiment of the present invention.

Specific implementation mode

The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein Same or similar label indicates same or similar element or element with the same or similar functions from beginning to end.Lead to below It crosses the embodiment being described with reference to the drawings to be exemplary, is only used for explaining the utility model, and should not be understood as to this practicality Novel limitation.

In the description of the present invention, it should be understood that term "center", " longitudinal direction ", " transverse direction ", " length ", " width Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", The orientation or positional relationship of the instructions such as " clockwise ", " counterclockwise " be based on the orientation or positional relationship shown in the drawings, be only for Described convenient for description the utility model and simplifying, do not indicate or imply the indicated device or element must have it is specific Orientation, with specific azimuth configuration and operation, therefore should not be understood as limiting the present invention.In addition, term " first ", " second " is used for description purposes only, and is not understood to indicate or imply relative importance or implicitly indicates indicated technology The quantity of feature.Define " first " as a result, the feature of " second " can explicitly or implicitly include it is one or more The feature.The meaning of " plurality " is two or more in the description of the present invention, unless otherwise clearly specific It limits.

In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally Connection；It can be mechanical connection, can also be to be electrically connected or can mutually communicate；It can be directly connected, it can also be in Between medium be indirectly connected, can be the interaction relationship of the connection or two elements inside two elements.For this field For those of ordinary skill, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.

In the description of the present invention, unless otherwise clearly defined and limited, fisrt feature second feature it "upper" or "lower" may include that the first and second features are in direct contact, can also include the first and second features not be directly to connect It touches but passes through the other characterisation contact between them.Moreover, fisrt feature second feature " on ", " top " and " on Face " includes fisrt feature right over second feature and oblique upper, or to be merely representative of fisrt feature level height special higher than second Sign.Fisrt feature second feature " under ", " lower section " and " below " include fisrt feature immediately below second feature and obliquely downward Side, or be merely representative of fisrt feature level height and be less than second feature.

Following disclosure provides many different embodiments or example is used for realizing the different structure of the utility model. In order to simplify the disclosure of the utility model, hereinafter the component of specific examples and setting are described.Certainly, they are only Example, and purpose does not lie in limitation the utility model.In addition, the utility model can in different examples repeat reference numerals And/or reference letter, this repetition are for purposes of simplicity and clarity, itself not indicate discussed various embodiments And/or the relationship between setting.In addition, the example for the various specific techniques and material that the utility model provides, but this Field those of ordinary skill can be appreciated that the application of other techniques and/or the use of other materials.

Please refer to Fig.1-Fig. 5, a kind of vacuum coater 100 that embodiment of the present invention provides, including the first cavity 10 With the second cavity 20, the second cavity 20 is movably disposed in the first cavity 10 and cooperatively forms confined space.First cavity It is provided with coating system 12 in 10, reel system 22 is provided on the second cavity 20.Coating system 12 includes target body 14 and ion Source is simultaneously arranged on the inner wall of the first cavity 10.Reel system 22 includes the first retractable volume 222, the second retractable volume 224, film coating roller 226 and guide roller 228, film coating roller 226 includes the first filming roller 2262 and the second film coating roller 2264, and guide roller 228 is used for the Material to be plated guiding in one retractable volume 222 is wound up on the first filming roller 2262 and the second film coating roller 2264 and further guides Pass through the second film coating roller 2264 and the first filming roller on to the second retractable volume 224 or by the material to be plated in the second retractable volume 224 In 2262 guiding to the first retractable volumes 222.Target body 14 is arranged evenly and at intervals around film coating roller 226.

In some embodiments, 20 bottom of the second cavity is provided with traveling wheel, and track is provided on the first cavity 10, row It walks to take turns movement in orbit so that the second cavity 20 is sent into the first cavity 10 and is pulled out from the first cavity 10.

100 personnel easy to operation of vacuum coater in embodiment of the present invention are by the second cavity 20 from the first cavity 10 In separate, carry out being placed and taken out for material volume to be plated, reduce operation difficulty, improve the efficiency of coating operation.Together When, when being blocked there is a situation where material to be plated in reel system 22, personnel easy to operation are at the material to be plated that blocks Reason, avoids the material damage machine to be plated of card master, extends the service life of vacuum coater 100.

Specifically, the vacuum coater 100 of present embodiment uses magnetic control sputtering cathode system, magnetic control sputtering cathode system System is a kind of physical gas phase deposition technology, is used for sputter coating process, can prepare the multiple materials such as metal, semiconductor, insulator. Vacuum coater 100 is simple in structure, easily controllable, and has the advantages that plated film area is big and strong adhesive force.Magnetron sputtering is cloudy The operation principle of electrode systems is：Magnetic control sputtering cathode system is placed under ar gas environment, in magnetic control sputtering cathode system and anode Apply enough voltage between substrate, form the electric field of some strength, electronics flies to substrate, and and argon gas under the action of electric field Ar atmo collide, make ar atmo ionization produce argon ion and new electronics, new electronics flies to substrate, and argon ion exists 14 surface of the annular target body of high-energy bombardment is carried under electric field action, and 14 surface of annular target body is made to sputter.In present embodiment Vacuum coater 100 in target body 14 be rectangle, the sputter locus that generates after sputter coating intermediate ion bombardment target body 14 Similar horse race road.Finally, the neutral target atom in sputtering particle or molecule deposition complete the plated film to substrate on substrate.

Certainly, argon gas can also be replaced with other low-pressure inert gas.

Magnetron sputtering deposition speed is higher, and equipment sows height, and air pressure needed for magnetron sputtering work is relatively low, saves energy Source, so magnetron sputtering application is more extensive.

In some embodiments, coating system 12 and the setting of the interval of reel system 22.

In this way, the distance between coating system 12 and reel system 22 ensure that the stability of magnetron sputtering, it is effectively ensured To the area coverage of material to be plated, the incomplete situation of material film plating to be plated is avoided.Meanwhile it also ensuring in reel system 22 Roller rotation process in and coating system 12 do not interfere.

In some embodiments, finite place piece (not shown) is set on track, and locating part is for limiting the second cavity 20 And the first relative position between cavity 10.

In this way, during mobile second cavity 20, opposite position between the second cavity 20 and the first cavity 10 is avoided It is excessive to set variation, influences the structural stability of vacuum coater 100, then influences the leakproofness of vacuum coater 100, Influence the quality of plated film.

In some embodiments, coating system further includes magnet assembly, and the magnetic field line of magnet assembly passes through target body 14.

In some embodiments, magnet assembly includes permanent magnet component and/or electromagnetic component.

In some embodiments, the first retractable volume 222, the second retractable volume 224 are oppositely arranged, 2262 He of the first filming roller Second film coating roller 2264 is arranged between the first retractable volume 222 and the second retractable volume 224 and is oppositely arranged.

In this way, the layout of reel system 22 is so that guiding of the material to be plated by guide roller 228, is easy to implement two-sided plating Film.

In some embodiments, guide roller 228 is arranged between the first retractable volume 222 and the second retractable volume 224, plated film System 12 is arranged in the outside of the first filming roller 2262 and the second film coating roller 2264.

In this way, the first filming roller 2262 and the division of labor of the second film coating roller 2264 are clear, the two sides of material to be plated is carried out respectively Coating operation.

In some embodiments, the distance phase of target body 14 and close the first filming roller 2262 or the second film coating roller 2264 Together.

In this way, ensure that each position plated film is uniform on material to be plated in coating operation, avoids material film plating to be plated endless Entirely or massif shape deposition occurs on material to be plated for Coating Materials, influences the planarization of material surface to be plated.

In some embodiments, the first filming roller 2262 and the second film coating roller 2264 offer fluid passage 2266, liquid The first filming roller 2262 and the second film coating roller 2264 are run through in body channel 2266.

In this way, liquid can be inputted in fluid passage 2266, by flowing of the liquid in fluid passage 2266, is taken away High temperature on one film coating roller 2262 and the second film coating roller 2264, to make vacuum coater 100 in present embodiment can be with Coating operation is carried out for the material of the non-refractories such as plastics.

Specifically, generally logical tap water in fluid passage 2266.In this way, cost is relatively low, and heat dissipation effect is also preferable.Into One step, the problems such as such as considering machine maintenance and be lost, deionized water can be used, avoid fouling and corrosion in circuit.Into One step, for the higher material of heatproof, tap water can be led in fluid passage 2266 and carries out cooling treatment, and reduces plated film The quality of processing, in turn ensures coating quality；And for the material of other non-refractories, it is needed in fluid passage 2266 logical special Cooling liquid ensures the quality of plated film to ensure the low temperature environment on film coating roller.

It is possible to further adjust the type of flowing velocity and liquid of the liquid in fluid passage 2266, to adjust The heat dissipation effect of fluid passage 2266, and then the temperature of the first filming roller 2262 and the second film coating roller 2264 is adjusted, with for difference The material of material carries out coating operation, ensures the quality of plated film.

In some embodiments, fluid passage 2266 is 1.

In this way, the first filming roller 2262 and 2264 structure of the second film coating roller are relatively simple, it is easy to manufacture.

In some embodiments, fluid passage 2266 is cylinder, the axis and the first filming roller of fluid passage 2266 2262 and second the axis of film coating roller 2264 be located along the same line.

In this way, reducing the shadow of liquid flowing two pairs of rollers body stability of the roll body in rotation process in fluid passage 2266 It rings, improves the quality and efficiency of plated film.

In some embodiments, vacuum coater 100 further includes rotary joint 30, and rotary joint 30 connects film coating roller 226, fluid passage 2266 is connected to rotary joint 30 and film coating roller 226.

In this way, rotary joint 30 ensure that the first filming roller 2262 and the second film coating roller 2264 liquid in rotation process are logical Road 2266 will not leak coolant liquid.

In some embodiments, 30 remains stationary of rotary joint, does not rotate.

In some embodiments, 2266 remains stationary of fluid passage, does not rotate.

In some embodiments, reel system 22 further includes motor 221 and belt 223, and the output shaft of motor 221 passes through Belt 223 drives the first filming roller 2262 and the rotation of the second film coating roller 2264, and the rotating speed of motor 221 is adjustable.

In some embodiments, belt 223 includes synchronous belt 2232, big timing belt pulley 2234 and small synchronous belt Wheel 2236, small timing belt pulley 2236 connect the output shaft of motor 221, and big timing belt pulley 2234 connects film coating roller 226, synchronous Belt 2232 connects big timing belt pulley 2234 and small timing belt pulley 2236.

In some embodiments, reel system 22 further includes pressure roller 225, jockey pulley 227 and nip rolls, and pressure roller 225 is opened Power roller 227 and the cooperation of guide roller 228 are to adjust the tensioning degree of material to be plated, and pressure roller and nip rolls cooperation are to adjust material to be plated Flatness.

In some embodiments, the position-adjustable of pressure roller 225 and jockey pulley 227.

In this way, the tensioning degree of material to be plated can be adjusted, to adapt to the plated film requirement of different materials to be plated, and then ensure Coating effects.

In the description of this specification, reference term " embodiment ", " certain embodiments ", " schematically implementation What the description of mode ", " example ", " specific example " or " some examples " etc. meant to describe in conjunction with the embodiment or example Particular features, structures, materials, or characteristics are contained at least one embodiment or example of the utility model.In this explanation In book, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific spy of description Sign, structure, material or feature can be combined in any suitable manner in any one or more embodiments or example.

While there has been shown and described that the embodiment of the utility model, those skilled in the art can manage Solution：A variety of to the progress of these embodiments can change in the case where not departing from the principles of the present invention and objective, change, It replaces and modification, the scope of the utility model is limited by claim and its equivalent.

Claims (8)

1. a kind of vacuum coater, which is characterized in that including the first cavity and the second cavity, second cavity is movably It is arranged in first cavity and cooperatively forms confined space,

It is provided with coating system in first cavity, reel system is provided on second cavity,

The coating system includes ion source and target body and is arranged on the inner wall of first cavity,

The reel system includes the first retractable volume, the second retractable volume, film coating roller and guide roller, and the film coating roller includes the first plating Deflector roll and the second film coating roller, the guide roller are used to the material to be plated guiding in first retractable volume being wound up into described first On film coating roller and second film coating roller and it is further directed in second retractable volume or will be in second retractable volume Material to be plated is guided by second film coating roller and the first filming roller to first retractable volume,

The first filming roller and second film coating roller offer fluid passage, and the vacuum coater further includes that rotation connects Head, the rotary joint connect the film coating roller, and the fluid passage is connected to the rotary joint and the film coating roller,

The rotary joint and the fluid passage remains stationary, do not rotate.

2. vacuum coater according to claim 1, which is characterized in that second cavity bottom is provided with walking Wheel, is fixedly installed track on first cavity, the traveling wheel move on the track so that second cavity simultaneously Enter first cavity and is detached from first cavity.

3. vacuum coater according to claim 1, which is characterized in that the coating system further includes magnet assembly, The magnetic field line of the magnet assembly passes through the target body.

4. vacuum coater according to claim 1, which is characterized in that the fluid passage is cylinder, the liquid The axis in body channel and the axis of the first filming roller and second film coating roller are located along the same line.

5. vacuum coater according to claim 1, which is characterized in that the reel system further includes motor and skin The output shaft of band, the motor drives the first filming roller and second film coating roller to rotate by the belt, the electricity The rotating speed of machine is adjustable.

6. vacuum coater according to claim 5, which is characterized in that the belt includes synchronous belt, synchronizes greatly Belt pulley and small timing belt pulley, the small timing belt pulley connect the output shaft of the motor, and the big timing belt pulley connects The film coating roller is connect, the synchronous belt connects the big timing belt pulley and the small timing belt pulley.

7. vacuum coater according to claim 1, which is characterized in that the reel system further includes pressure roller, tension Roller and nip rolls, the pressure roller, the jockey pulley and guide roller cooperation are to adjust the tensioning degree of the material to be plated, institute Pressure roller and nip rolls cooperation are stated to adjust the flatness of material to be plated.

8. vacuum coater according to claim 7, which is characterized in that the position of the pressure roller and the jockey pulley can It adjusts.