CN207792695U - A kind of electronic-grade sulfuric acid heating device - Google Patents
A kind of electronic-grade sulfuric acid heating device Download PDFInfo
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- CN207792695U CN207792695U CN201721697674.7U CN201721697674U CN207792695U CN 207792695 U CN207792695 U CN 207792695U CN 201721697674 U CN201721697674 U CN 201721697674U CN 207792695 U CN207792695 U CN 207792695U
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- sulfuric acid
- acidproof
- electronic
- shell
- grade sulfuric
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Abstract
The utility model provides a kind of electronic-grade sulfuric acid heating device, including acidproof shell and at least one heater, heater is fixed on lower part in acidproof shell, and agitating device is provided in acidproof shell, acidproof shell upper end is provided with liquid-inlet, and acidproof housing bottom is provided with liquid outlet.The utility model is simple in structure, easy to operate, and the efficiency of heating surface is high, and after being heated by the device, the filter effect of electronic-grade sulfuric acid is greatly improved, and particle quality is greatly improved.
Description
Technical field
The utility model is related to electronic chemical product field, more particularly to a kind of electronic-grade sulfuric acid heating device.
Background technology
Currently, being that will absorb in electronic-grade sulfuric acid production process after the electronic-grade sulfuric acid solution that has configured is cooled to room temperature
Into pan tank, the circulating filtration of particle is then carried out from pan tank.As CN102530885B discloses a kind of high-purity sulphuric acid
Industrialized preparing process includes the following steps：A, 40% niacin is evaporated into high-purity SO with niacin generator3Gas；B, AR is used
Sulfuric acid absorption tower absorbs SO3；C, by the cooling of AR sulfuric acid pumps slot and shunting, the pipe between AR sulfuric acid absorption towers and AR sulfuric acid pump slots
Desalted water or ultra-pure water are added on road, for control sulfuric acid concentration 98.5%, the sour part come out from AR sulfuric acid pump slots gets to AR
The acid trap of sulfuric acid absorption tower absorbs SO as recycle acid3Flue gas, another part acid enter finished acid pump slot；D, finished acid pumps slot
In AR sulfuric acid coolers the acid of entrance is cooled down；E, become finished product after being filtered by filter.
But viscosity is larger at normal temperatures for sulfuric acid solution, utilizes (physical filtering mistake when chemicals filter progress circulating filtration
Journey), cause filter effect and filtration time to be all affected because viscosity is too big.In order to solve this problem,
CN206064166U discloses a kind of filtration system for MOS grades of electronics sulfuric acid production systems, including sulfuric acid filter and SO3
Pneumatic filter, SO3One layer of heating system has been wrapped up on pneumatic filter side wall.The patent heating system is substantially to solve
SO3The problem of heating vaporization, because of SO3Room temperature is solid, still without solving the problems, such as that the big filtering of electronic-grade sulfuric acid viscosity is difficult.
On the other hand, it although the boiling point of sulfuric acid and viscosity are higher, is generally not easily decomposed, sulfuric acid is heated to meeting at 290 DEG C
Start to decompose to give off sulfur trioxide, and the excessively high moisture that can also volatilize of temperature, so electronic-grade sulfuric acid heating system must take into consideration
Sulfate liquid local temperature cannot be made excessively high, the prior art does not also propose solution for this technical problem.
Invention content
The utility model in view of the deficiencies of the prior art, provides a kind of simple in structure, easy to operate, efficiency of heating surface
High electronic-grade sulfuric acid heating device.
In order to solve the above-mentioned technical problem, the utility model is achieved through the following technical solutions：A kind of electron level sulphur
Sour heating device, including acidproof shell and at least one heater, the heater are fixed on lower part in the acidproof shell, institute
It states and is provided with agitating device in acidproof shell, the upper end of the acidproof shell is provided with liquid-inlet, the acidproof housing bottom
It is provided with liquid outlet.
Further：
The agitating device includes agitating shaft and the stirring slurry that is arranged on the agitating shaft.
The heating tube material of the heater is preferably PTFE.
The acidproof shell includes shell and inner casing, and the enclosure material is preferably carbon steel, shell material in the acidproof shell
It is of fine quality to be selected as PTFE.
The stirring slurry radius is preferably 0.3~0.8 times of the agitating shaft and the heater distance.
98% electronic-grade sulfuric acid can increase the enhancing of its corrosivity with temperature, cannot use traditional carbon steel material container, institute
With components all in the utility model and 98% electronic-grade sulfuric acid media contact all using PTFE.Other 98% electron level sulphur
The resistance that the viscosity size of acid generates filter membrane has a significant impact, if electronic-grade sulfuric acid viscosity is excessively high, can increase delivery pump
Power consumption, and filter effect can be reduced.And filter pressure is excessive, and filtering bore dia has certain increase, causes big
Particle is possibly into filtered electronic-grade sulfuric acid liquid.
In order to reduce the viscosity of electronic-grade sulfuric acid liquid, the utility model is not polluting the electronic-grade sulfuric acid solution configured
Under the conditions of, be increased to 45-65 DEG C using by the temperature of electronic-grade sulfuric acid liquid, such electronic-grade sulfuric acid liquid viscosity can substantially under
Drop, electronic-grade sulfuric acid liquid viscosity drop to 10cp or so from 20cp or so, to substantially improve filter effect, shortened
The time is filtered, and effectively prevents the excessively high caused electronic-grade sulfuric acid liquid of heating temperature and decomposes to give off sulfur trioxide and moisture evaporation
Problem.The heating temperature of another aspect electronic-grade sulfuric acid liquid is maintained at 45-65 DEG C, not only can greatly improve filter effect,
And it can prevent electronic-grade sulfuric acid fluid temperature is excessively high to lead to PTFE filter membrane varying apertures.
Electronic-grade sulfuric acid fluid temperature in order to prevent near heater is excessively high, prevents sulfuric acid from decomposing, this practicality is new
Type is provided with an agitating device in the sour shell of storage can make electronic-grade sulfuric acid liquid uniform by the agitation of agitating device
It is heated.
Compared with prior art, the utility model has the following advantages：
1, simple in structure, easy to operate, the electronic-grade sulfuric acid heating device of the utility model is simple in structure, enormously simplifies
Operating process；
2, the efficiency of heating surface is high, when by the electronic-grade sulfuric acid heating devices heat electronic-grade sulfuric acid of the utility model, electronics
Grade sulfuric acid is heated evenly, it is therefore prevented that sulfuric acid is decomposed, and the efficiency of heating surface is improved；
3, good product quality, after being heated by the device, the filter effect of electronic-grade sulfuric acid is greatly improved, contracting
Short filtration time, reduces energy consumption；Following for particle is directly carried out with absorbing after the sulfuric acid solution configured is cooled to room temperature
Ring filtering comparison, 0.04 μm of particle of electronic-grade sulfuric acid is dropped to from 2000~5000Ea/ml within 100Ea/ml after filtering, cycle
Filtration time saves 60~70%.
Description of the drawings
Fig. 1 is the structural schematic diagram of the electronic-grade sulfuric acid heating device of the utility model.
As shown, 1 is heater, 2 be acidproof shell, and 3 be agitating device, and 4 be liquid-inlet, and 5 be liquid outlet.
Specific implementation mode
As shown in Figure 1, the electronic-grade sulfuric acid heating device of the utility model, including acidproof shell 2 and at least one heating
Device 1, heater 1 are fixed on lower part in acidproof shell 2, and agitating device 3, the upper end of acidproof shell 2 are provided in acidproof shell 2
It is provided with liquid-inlet 4,2 bottom of acidproof shell is provided with liquid outlet 5.Agitating device 3 includes that agitating shaft and setting are being stirred
Stirring slurry on axis.
Using the device heat electronic-grade sulfuric acid flow be：Absorption is added into acidproof shell 2 by liquid-inlet 4 to match
The electronic-grade sulfuric acid set starts heater 1 and starts to heat electronic-grade sulfuric acid；When the electron level sulphur in acidproof shell 2
When sour temperature rises to 20~30 DEG C, starts agitating device 3 and electronic-grade sulfuric acid is stirred, make electronic-grade sulfuric acid thermally equivalent；
When electronic-grade sulfuric acid temperature reaches 45-65 DEG C, electronic-grade sulfuric acid is entered into filtration system by liquid outlet 5.
The utility model is described in more detail by the following examples, but the scope of protection of the utility model is not
It is limited to these embodiments.
Embodiment 1
A kind of electronic-grade sulfuric acid heating device, including acidproof shell 2 and a heater 1 (heating tube material is PTFE),
Heater 1 is fixed on lower part in acidproof shell 2, and agitating device 3 is provided in acidproof shell 2, and the upper end of acidproof shell 2 is provided with
Liquid-inlet 3,2 bottom of acidproof shell are provided with liquid outlet 5.Agitating device 3 includes agitating shaft and is arranged on agitating shaft
Stirring slurry (stirring slurry radius is 0.3 times of agitating shaft and heater distance), acidproof shell 2 include shell (material is carbon steel) and
Inner casing (material PTFE).
It is refiltered after heating electronic-grade sulfuric acid using the device, 0.04 μm of particle drops to 40Ea/ from 2000Ea/ml
ml；With the circulating filtration comparison for absorbing directly progress particle after the sulfuric acid solution that configure is cooled to room temperature, when circulating filtration
Between save 70%.
Embodiment 2
A kind of electronic-grade sulfuric acid heating device, including acidproof shell 2 and two heaters 1 (heating tube material is PTFE),
Heater 1 is fixed on lower part in acidproof shell 2, and agitating device 3 is provided in acidproof shell 2, and the upper end of acidproof shell 2 is provided with
Liquid-inlet 3,2 bottom of acidproof shell are provided with liquid outlet 5.Agitating device 3 includes agitating shaft and is arranged on agitating shaft
Stirring slurry (stirring slurry radius is 0.5 times of agitating shaft and heater distance), acidproof shell 2 include shell (material is carbon steel) and
Inner casing (material PTFE).
It is refiltered after heating electronic-grade sulfuric acid using the device, 0.04 μm of particle drops to 60Ea/ml from 3000Ea/ml
It is interior；With the circulating filtration comparison for absorbing directly progress particle after the sulfuric acid solution that configure is cooled to room temperature, when circulating filtration
Between save 65%.
Embodiment 3
A kind of electronic-grade sulfuric acid heating device, including acidproof shell 2 and three heaters 1 (heating tube material is PTFE),
Heater 1 is fixed on lower part in acidproof shell 2, and agitating device 3 is provided in acidproof shell 2, and the upper end of acidproof shell 2 is provided with
Liquid-inlet 3,2 bottom of acidproof shell are provided with liquid outlet 5.Agitating device 3 includes agitating shaft and is arranged on agitating shaft
Stirring slurry (stirring slurry radius is 0.7 times of agitating shaft and heater distance), acidproof shell 2 include shell (material is carbon steel) and
Inner casing (material PTFE).
It is refiltered after heating electronic-grade sulfuric acid using the device, 0.04 μm of particle drops to 80Ea/m from 4000Ea/ml；
With the circulating filtration comparison for absorbing directly progress particle after the sulfuric acid solution that configure is cooled to room temperature, segmentum intercalaris when circulating filtration
Save 63%.
Embodiment 4
A kind of electronic-grade sulfuric acid heating device, including acidproof shell 2 and four heaters 1 (heating tube material is PTFE),
Heater 1 is fixed on lower part in acidproof shell 2, and agitating device 3 is provided in acidproof shell 2, and the upper end of acidproof shell 2 is provided with
Liquid-inlet 3,2 bottom of acidproof shell are provided with liquid outlet 5.Agitating device 3 includes agitating shaft and is arranged on agitating shaft
Stirring slurry (stirring slurry radius is 0.8 times of agitating shaft and heater distance), acidproof shell 2 include shell (material is carbon steel) and
Inner casing (material PTFE).
It is refiltered after heating electronic-grade sulfuric acid using the device, 0.04 μm of particle drops to 100Ea/ from 5000Ea/ml
ml；With the circulating filtration comparison for absorbing directly progress particle after the sulfuric acid solution that configure is cooled to room temperature, when circulating filtration
Between save 60%.
Claims (5)
1. a kind of electronic-grade sulfuric acid heating device, which is characterized in that including acidproof shell and at least one heater, the heating
Device is fixed on lower part in the acidproof shell, and agitating device is provided in the acidproof shell, and the upper end of the acidproof shell is set
It is equipped with liquid-inlet, the acidproof housing bottom is provided with liquid outlet.
2. electronic-grade sulfuric acid heating device according to claim 1, which is characterized in that the agitating device includes agitating shaft
With the stirring slurry being arranged on the agitating shaft.
3. electronic-grade sulfuric acid heating device according to claim 1, which is characterized in that the heating tube material of the heater
For PTFE.
4. electronic-grade sulfuric acid heating device according to claim 1, which is characterized in that the acidproof shell include shell and
Inner casing, the enclosure material are carbon steel, and the inner casing material is PTFE.
5. electronic-grade sulfuric acid heating device according to claim 2, which is characterized in that the stirring slurry radius is described stirs
Mix axis and the heater distance 0.3~0.8 times.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721697674.7U CN207792695U (en) | 2017-12-08 | 2017-12-08 | A kind of electronic-grade sulfuric acid heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721697674.7U CN207792695U (en) | 2017-12-08 | 2017-12-08 | A kind of electronic-grade sulfuric acid heating device |
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| Publication Number | Publication Date |
|---|---|
| CN207792695U true CN207792695U (en) | 2018-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201721697674.7U Active CN207792695U (en) | 2017-12-08 | 2017-12-08 | A kind of electronic-grade sulfuric acid heating device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107902632A (en) * | 2017-12-08 | 2018-04-13 | 浙江凯圣氟化学有限公司 | A kind of electronic-grade sulfuric acid heating unit and method |
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2017
- 2017-12-08 CN CN201721697674.7U patent/CN207792695U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107902632A (en) * | 2017-12-08 | 2018-04-13 | 浙江凯圣氟化学有限公司 | A kind of electronic-grade sulfuric acid heating unit and method |
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