CN207757470U - A kind of no wax polishing absorption layer sticker - Google Patents
A kind of no wax polishing absorption layer sticker Download PDFInfo
- Publication number
- CN207757470U CN207757470U CN201721730394.1U CN201721730394U CN207757470U CN 207757470 U CN207757470 U CN 207757470U CN 201721730394 U CN201721730394 U CN 201721730394U CN 207757470 U CN207757470 U CN 207757470U
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- Prior art keywords
- shaft
- absorption layer
- stickup
- supporting rack
- axis
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- 238000005498 polishing Methods 0.000 title claims abstract description 55
- 238000010521 absorption reaction Methods 0.000 title claims abstract description 54
- 238000005096 rolling process Methods 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000002950 deficient Effects 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005253 cladding Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009415 formwork Methods 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000012260 resinous material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The utility model provides a kind of no wax polishing absorption layer sticker, the shaft being mutually parallel including two, it is rotatablely connected conveyer belt between two shafts, driving shaft and driven shaft are rotatablely connected on first supporting rack, second supporting rack is rotatably connected to roller bearing, third supporting rack is rotatably connected to stickup rolling shaft, the first belt is equipped between the driving shaft and the roller bearing, the second belt is equipped between the roller bearing and the shaft, the stickup template of clearance fit is equipped between the driving shaft and the driven shaft, described one end for pasting template is equipped with a plurality of circumferentially spaced protrusion.A kind of no wax polishing absorption layer sticker described in the utility model, the predicament for breaking away from manually paste is realized so that being pasted without wax polishing absorption layer, the paste process of complete mechanical is filled with currently without can direct applied blank, both time saving and energy saving, the generation of paste process bubble-free may be implemented again, the fraction defective of product is reduced, production cost is reduced.
Description
Technical field
The utility model belongs to single-sided polishing manufacture field, more particularly, to a kind of no wax polishing absorption layer sticker.
Background technology
No wax polishing absorption layer is a kind of circular pad being made of multi-layer resinous Material cladding, and surface thickness difference is several
Within micron, several symmetry arrangement groove circular holes of the design embedded with same depth, size can use water or lapping liquid etc. by silicon crystal
The products such as piece, Sapphire wafer and its epitaxial wafer are pasted in circular hole, when semi-conductor wafer materials are without wax polishing, first
It will be pasted on ceramic disk without wax polishing absorption layer, then bearing wafer is processed, since no wax polishing absorption layer surface has
Groove circular hole is arranged, and is not flat surface, further groove is different from material surface at plane, cannot be to groove in paste process
Damage is generated, otherwise the polishing yield of polished silicon wafer can be had an impact in polishing process, this just requires more method of attaching
It is harsh, and require paste process that cannot generate bubble, otherwise polishing is influenced it is very big, at present in polishing field,
It can not be used directly to paste the device of no wax polishing absorption layer, typically manually paste when actual production operates, still
There are many problems for manually paste, not only time-consuming, laborious, and one cover plate of patch is there is a great harm for the both hands of personnel, and paste process
It also is difficult to ensure no bubble, or even is pasted not strongly so that polishing process has the hidden danger overturned, this just seriously affects throwing
Light yield, for such situation, the utility model proposes a kind of no wax polishing absorption layer stickers so that no wax polishing is inhaled
Attached pad, which is pasted, to be realized and breaks away from the predicament of manually paste, and the paste process of complete mechanical is filled with currently without can be direct applied
Blank, it is not only time saving and energy saving, but also the generation of paste process bubble-free may be implemented, the fraction defective of product is reduced, production cost is reduced.
Utility model content
In view of this, the utility model is directed to a kind of no wax polishing absorption layer sticker, be filled with currently without
Can direct applied blank, it is not only time saving and energy saving, but may be implemented paste process bubble-free generation, reduce the fraction defective of product, drop
Low production cost.
In order to achieve the above objectives, the technical solution of the utility model is realized in：
A kind of no wax polishing absorption layer sticker, including two shafts being mutually parallel turn between two shafts
Dynamic connection conveyer belt, the conveyer belt both sides are equipped with symmetrical first supporting rack, are rotatablely connected actively on first supporting rack
Axis and driven shaft are rotatably connected to roller bearing close to the side of first supporting rack by the second supporting rack, and third supporting rack turns
Dynamic to be connected with stickup rolling shaft, the roller bearing is placed between the driving shaft and the stickup rolling shaft, the driving shaft and institute
State and be equipped with the first belt between roller bearing, be equipped with the second belt between the roller bearing and the shaft, the driving shaft and it is described from
The stickup template of clearance fit is equipped between moving axis, described one end for pasting template is equipped with a plurality of circumferentially spaced protrusion, no wax
Groove on polishing absorption layer is placed in the raised clearance fit in the stickup template.
Further, the both sides of the shaft are fixed frame, and intermediate shaft connects two fixed frames, the biography
Send band to be placed between two shafts, between two fixed frames of the same side be equipped with fixed plate, first supporting rack,
Second supporting rack and the third supporting rack are each attached in the fixed plate
Further, the thickness for pasting template is identical as the no thickness of wax polishing absorption layer, the driving shaft
Minimum range between the driven shaft is more than 2 times of the stickup template thickness 1-3mm.
Further, the driving shaft and the driven shaft are rotatablely connected by bearing and first supporting rack, institute
Roller bearing and the stickup rolling shaft is stated again by the bearing respectively to turn with first supporting rack and the third supporting rack
Dynamic connection.
Further, the plane that the axis of the axis of the driving shaft and the driven shaft is formed is flat with the conveyer belt
Angle between face is between 45 degree to 90 degree.
Further, the axis of the shaft is parallel with the axis of the driving shaft, the axis of the driving shaft, it is described from
The axis of moving axis, the axis of the roller bearing and the axis for pasting rolling shaft are mutually parallel.
Further, described driving shaft one end passes through first supporting rack to be equipped with the first rotation axis, described roller bearing one end
It is equipped with the second rotation axis across second supporting rack, the shaft close to described stickup rolling shaft one end stretches out the shaft
Three rotation axis are connected with, are rotatablely connected by the first belt between first rotation axis and second rotation axis, described the
It is rotatablely connected by the second belt between two rotation axis and the third rotation axis.
Further, the driving shaft is less than the diameter for pasting template, the master to the distance between the roller bearing
The diameter of moving axis is more than the diameter of the roller bearing.
Further, the stickup template after stickup is across the driving shaft and the driven shaft and by the rolling
Pass through above axis, the stickup template after stickup is equipped with one end of the protrusion close to the conveyer belt direction.
Further, control unit is equipped in the shaft, described control unit is electrically connected with the motor in the shaft.
Compared with the existing technology, a kind of no wax polishing absorption layer sticker described in the utility model has following excellent
Gesture：
(1) a kind of no wax polishing absorption layer sticker described in the utility model, is made by the setting of such structure
No wax polishing absorption layer pastes the predicament for breaking away from manually paste, and the paste process of complete mechanical is filled with currently without can be direct
The blank of application, it is not only time saving and energy saving, but also the generation of paste process bubble-free may be implemented, the fraction defective of product is reduced, production is reduced
Cost.
(2) a kind of no wax polishing absorption layer sticker described in the utility model, is realized by simple transmission mechanism
The tight fit of each section ensures being smoothed out for each section work.
Description of the drawings
The attached drawing for constituting the part of the utility model is used to provide a further understanding of the present invention, this practicality is new
The illustrative embodiments and their description of type are not constituted improper limits to the present invention for explaining the utility model.
In attached drawing：
Fig. 1 is a kind of no wax polishing absorption layer sticker overall structure diagram described in the utility model embodiment；
Fig. 2 is that a kind of no wax polishing absorption layer sticker described in the utility model embodiment pastes formwork structure signal
Figure.
Reference sign：
1- conveyer belts；The first supporting racks of 2-；3- driven shafts；4- driving shafts；5- pastes template；501- protrusions；6- roller bearings；7-
Third supporting rack；8- pastes rolling shaft；9- third rotation axis；The second belts of 10-；The second rotation axis of 11-；The second supporting racks of 12-；
The first belts of 13-；The first rotation axis of 14-；15- fixed plates；16- fixed frames；17- shafts.
Specific implementation mode
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.
In the description of the present invention, it should be understood that term "center", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than indicate
Or imply that signified device or element must have a particular orientation, with specific azimuth configuration and operation, therefore cannot understand
For limitations of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, and should not be understood as indicating
Or it implies relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second " etc. are defined as a result,
Feature can explicitly or implicitly include one or more this feature.It is in the description of the present invention, unless another
It is described, the meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, can also be electrical connection；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, on being understood by concrete condition
State the concrete meaning of term in the present invention.
The utility model will be described in detail below with reference to the accompanying drawings and embodiments.
A kind of no wax polishing absorption layer sticker as shown in Figure 1, including two shafts being mutually parallel, turn described in two
Conveyer belt 1 is rotatablely connected between axis, 1 both sides of the conveyer belt are equipped with symmetrical first supporting rack 2, on first supporting rack 2
It is rotatablely connected driving shaft 4 and driven shaft 3, is rotatably connected to by the second supporting rack 12 close to the side of first supporting rack 2
Roller bearing 6, third supporting rack 7, which is rotatably connected to, pastes rolling shaft 8, and the roller bearing 6 is placed in the driving shaft 4 and stickup rolling
Between axis 8, it is equipped with the first belt 13 between the driving shaft 4 and the roller bearing 6, is set between the roller bearing 6 and the shaft 17
There is the second belt 10, the stickup template 5 of clearance fit, the stickup template are equipped between the driving shaft 4 and the driven shaft 3
5 one end is equipped with a plurality of circumferentially spaced raised 501, the groove on no wax polishing absorption layer and raised 501 clearance fit
It is placed in the stickup template 5.
Wherein, the both sides of the shaft are fixed frame 16, and intermediate shaft 17 connects two fixed frames 16, described
Conveyer belt 1 is placed between two shafts 17, is equipped with fixed plate 15 between two fixed frames 16 of the same side, and described the
One supporting rack 2, second supporting rack 12 and the third supporting rack 7 are each attached in the fixed plate 15.
Wherein, the thickness for pasting template 5 is identical as the no thickness of wax polishing absorption layer, 4 He of the driving shaft
Minimum range between the driven shaft 3 is more than 2 times of 5 thickness 1-3mm of the stickup template.
Wherein, the driving shaft 4 and the driven shaft 3 are rotatablely connected by bearing and first supporting rack 2, described
Roller bearing 6 and the stickup rolling shaft 8 again by the bearing respectively with second supporting rack 12 and the third supporting rack 7
Rotation connection.
Wherein, the plane that the axis of the axis of the driving shaft 4 and the driven shaft 3 is formed is flat with the conveyer belt 1
Angle between face is between 45 degree to 90 degree.
Wherein, the axis of the shaft 17 is parallel with the axis of the driving shaft 4, the axis of the driving shaft 4, it is described from
The axis of moving axis 3, the axis of the roller bearing 6 and the axis for pasting rolling shaft 8 are mutually parallel.
Wherein, 4 one end of the driving shaft passes through first supporting rack 2 to be equipped with the first rotation axis 14,6 one end of the roller bearing
It is equipped with the second rotation axis 11 across second supporting rack 12, the shaft 17 close to 8 one end of the stickup rolling shaft is stretched out
The fixed frame 16 is connected with third rotation axis 9, by described between first rotation axis 14 and second rotation axis 11
First belt 13 is rotatablely connected, by 10 turns of second belt between second rotation axis 11 and the third rotation axis 9
Dynamic connection.
Wherein, the driving shaft 4 arrives the diameter that the distance between described roller bearing 6 is less than the stickup template 5, the active
The diameter of axis 4 is more than the diameter of the roller bearing 6.
Wherein, the stickup template 5 after stickup is across the driving shaft 4 and the driven shaft 3 and by the rolling
The top of axis 6 passes through, and the stickup template 5 after stickup is equipped with described raised 501 one end close to 1 direction of the conveyer belt.
Wherein, control unit is equipped in the shaft 17, described control unit is electrically connected with the motor in the shaft 17.
As shown in Fig. 2, 5 material of stickup template is identical as the groove part material of the absorption layer to be pasted；The stickup
The diameter and thickness of template 5 are identical as the absorption layer diameter and thickness size to be pasted；And the stickup template 5 has
Raised 501 part identical with the groove size and location of absorption layer, the height of the protrusion 501 and the depth of groove phase of absorption layer
Together, before pasting without wax polishing absorption layer, the stickup template 5 is interlocked with no wax polishing absorption layer first and is bonded so that this is viscous
Paste 501 part of the protrusion fitting corresponding with the groove part of absorption layer of template so that the stickup template 5 and no wax polishing absorption layer
The whole smooth alignment of upper and lower surface.
A kind of no wax polishing absorption layer sticker as shown in Figure 1, including：(1) base drive microscope carrier, by conveyer belt 1 etc.
Ceramic disk is placed on the one end of conveyer belt 1 far from roller bearing 6 by composition first when pasting without wax polishing absorption layer.(2) pottery is put well
After porcelain dish, control unit makes ceramic disk slowly be moved to driving shaft 4 and the lower section of driven shaft 3, then by the stickup template 5 of fitting with
It is whole without wax polishing absorption layer, wherein be located under entirety without wax polishing absorption layer, whole one end is slowly put between two axis
Gap.
(3) it puts well and pastes after template 5 be bonded entirety with no wax polishing absorption layer, the movement of conveyer belt 1 makes ceramic disk slowly
Move forward to 6 bottom position of roller bearing, due to the first belt 13 effect and make master and slave moving axis roll, will be bonded whole
Slowly to driving front, the whole front lower place to the right of hand traction fitting is moved at roller bearing 6 body, tears no wax polishing absorption layer manually
The release paper one end at the back side (being bonded whole lower surface), and its circumvolution is fixed on roller bearing 6, again so that ceramic disk
It slowly moves forward, while as the rolling circumvolution of roller bearing 6 slowly tears release paper from the whole back side of fitting, slowly leading manually
Draw fitting to move integrally to ceramic disk, and one end is pasted on ceramic disk front end.(4) the stickup rolling shaft 8 of right end connection
It is close to be driven microscope carrier, after manually pasting the whole one end of fitting with ceramic disk front end, moves again so that ceramic disk and patch
It closes whole be loaded into together and pastes roller bearing 8, and then realize further pressing.
By the transmission of lasting step-by-step movement control mode and each section, which, which can realize, automatically strips no wax
Polish the release paper at the absorption layer back side, and realize and paste the function without wax polishing absorption layer, the sticker in paste process,
By adjacent roller bearing stickup template is bonded with absorption layer and does not misplace, and pass through and paste template 5 so that fitting is whole
Upper and lower surface it is smooth, paste rolling shaft 8 and paste that rolling process force is balanced, stickup is produced without wax polishing absorption layer bubble-free
It is raw, product quality is just can guarantee in polishing processing in this way, promotes polishing yield.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection domain within.
Claims (10)
1. a kind of no wax polishing absorption layer sticker, it is characterised in that：Including two shafts being mutually parallel (17), two institutes
Rotation connection conveyer belt (1) between shaft (17) is stated, conveyer belt (1) both sides are equipped with symmetrical first supporting rack (2), described
It is rotatablely connected driving shaft (4) and driven shaft (3) on first supporting rack (2), the side of close first supporting rack (2) passes through the
Two supporting racks (12) are rotatably connected to roller bearing (6), and third supporting rack (7), which is rotatably connected to, pastes rolling shaft (8), the roller bearing
(6) it is placed between the driving shaft (4) and the stickup rolling shaft (8), is set between the driving shaft (4) and the roller bearing (6)
There is the first belt (13), the second belt (10), the active are equipped between the roller bearing (6) and one of them described shaft (17)
The stickup template (5) of clearance fit is equipped between axis (4) and the driven shaft (3), described one end for pasting template (5) is equipped with more
A circular protrusions (501), the groove on no wax polishing absorption layer are placed in the stickup template with described raised (501) clearance fit
(5) on.
2. a kind of no wax polishing absorption layer sticker according to claim 1, it is characterised in that：The shaft (17)
Both sides are fixed frame (16), and the intermediate shaft (17) connects two fixed frames (16), and the conveyer belt (1) is placed in
Between two shafts (17), between two fixed frames (16) of the same side be equipped with fixed plate (15), described first
Support (2), second supporting rack (12) and the third supporting rack (7) are each attached in the fixed plate (15).
3. a kind of no wax polishing absorption layer sticker according to claim 2, it is characterised in that：The stickup template
(5) thickness is identical as the no thickness of wax polishing absorption layer, between the driving shaft (4) and the driven shaft (3) most
Small distance is more than 2 times of stickup template (5) the thickness 1-3mm.
4. a kind of no wax polishing absorption layer sticker according to claim 3, it is characterised in that：The driving shaft (4)
It is rotatablely connected by bearing and first supporting rack (2) with the driven shaft (3), the roller bearing (6) and stickup rolling
Last item (8) is rotatablely connected with second supporting rack (12) and the third supporting rack (7) respectively again by the bearing.
5. a kind of no wax polishing absorption layer sticker according to claim 4, it is characterised in that：The driving shaft (4)
Axis and the driven shaft (3) axis formed plane and the plane of the conveyer belt (1) between angle arrived at 45 degree
Between 90 degree.
6. a kind of no wax polishing absorption layer sticker according to claim 5, it is characterised in that：The shaft (17)
Axis is parallel with the axis of the driving shaft (4), the axis of the driving shaft (4), the axis of the driven shaft (3), the rolling
The axis of axis (6) and the axis of the stickup rolling shaft (8) are mutually parallel.
7. a kind of no wax polishing absorption layer sticker according to claim 6, it is characterised in that：The driving shaft (4)
One end passes through first supporting rack (2) to be equipped with the first rotation axis (14), and described roller bearing (6) one end passes through second supporting rack
(12) it is equipped with the second rotation axis (11), stretches out the fixed frame close to the shaft (17) for pasting rolling shaft (8) one end
(16) it is connected with third rotation axis (9), passes through described between first rotation axis (14) and second rotation axis (11)
One belt (13) is rotatablely connected, and passes through second belt between second rotation axis (11) and the third rotation axis (9)
(10) it is rotatablely connected.
8. a kind of no wax polishing absorption layer sticker according to claim 7, it is characterised in that：The driving shaft (4)
It is less than the diameter of the stickup template (5) to the distance between the roller bearing (6), the diameter of the driving shaft (4) is more than described
The diameter of roller bearing (6).
9. a kind of no wax polishing absorption layer sticker according to claim 8, it is characterised in that：It is described viscous after stickup
Template (5) is pasted across the driving shaft (4) and the driven shaft (3) and by passing through above the roller bearing (6), after stickup
The stickup template (5) be equipped with the one end of raised (501) close to the conveyer belt (1) direction.
10. a kind of no wax polishing absorption layer sticker according to claim 9, it is characterised in that：The shaft (17)
Interior to be equipped with control unit, described control unit is electrically connected with the motor in the shaft (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721730394.1U CN207757470U (en) | 2017-12-13 | 2017-12-13 | A kind of no wax polishing absorption layer sticker |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721730394.1U CN207757470U (en) | 2017-12-13 | 2017-12-13 | A kind of no wax polishing absorption layer sticker |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207757470U true CN207757470U (en) | 2018-08-24 |
Family
ID=63186748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721730394.1U Active CN207757470U (en) | 2017-12-13 | 2017-12-13 | A kind of no wax polishing absorption layer sticker |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207757470U (en) |
-
2017
- 2017-12-13 CN CN201721730394.1U patent/CN207757470U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191224 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring road No. 12 in Haitai) Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |