CN207751598U - Excimer laser wavelength detecting device - Google Patents
Excimer laser wavelength detecting device Download PDFInfo
- Publication number
- CN207751598U CN207751598U CN201820029852.7U CN201820029852U CN207751598U CN 207751598 U CN207751598 U CN 207751598U CN 201820029852 U CN201820029852 U CN 201820029852U CN 207751598 U CN207751598 U CN 207751598U
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- Prior art keywords
- excimer laser
- shell
- detecting device
- heater
- temperature
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Abstract
The utility model provides a kind of excimer laser wavelength detecting device, including：Closed shell, inside contain calibration tool；Heater configures on the outer wall of the shell, the temperature of the enclosure interior is adjusted；The wherein described heater covers at least three faces of the outer wall of the shell；Temperature sensor measures the temperature of the enclosure interior；And temperature controller controls the heater according to the temperature that the temperature sensor measurement goes out.Heater can be uniformly heated up shell around shell as a result, and the unstable situation of the temperature of enclosure interior is reduced or avoided, and the measurement accuracy that the calibration to keep or improve enclosure interior has is reduced or avoided measured value and the case where error occurs.
Description
Technical field
The utility model is related to semiconductor applications more particularly to a kind of excimer laser wavelength detecting devices.
Background technology
Along with being made fine of semiconductor integrated circuit, highly integrated, requires to improve in semiconductor exposure device and differentiate
Rate.Semiconductor exposure device is referred to as " exposure device " below.Therefore, the wavelength of the light exported from exposure light source is becoming
It is short.In exposure light source gas laser apparatus has been used instead of existing mercury vapor lamp.For example, using output wavelength 248nm
Ultraviolet light KrF excimer laser apparatus and output wavelength 193nm ultraviolet light ArF excimer laser apparatus, as
The gas laser apparatus of exposure.
It should be noted that above to the introduction of background technology be intended merely to it is convenient to the technical solution of the application carry out it is clear,
Complete explanation, and facilitate the understanding of those skilled in the art and illustrate.Cannot merely because these schemes the application's
Background technology part is expounded and thinks that above-mentioned technical proposal is known to those skilled in the art.
Utility model content
Inventor has found：The excimer laser of calibration tool is contained in shell in wavelength detecting device, generally in shell
Certain of the outer wall of body configures flat heater to control the temperature in shell on one side.But due to not configuring
The outer wall surface of heater is exposed at ambient temperature, so if environment temperature changes, is then escaped from outer wall surface
Heat change, the temperature of enclosure interior becomes unstable.In addition, due to only in face of shell unidirectionally add a certain
Non-uniform phenomenon can occur for the temperature of heat, enclosure interior.
Therefore, the temperature at present inside excimer laser wavelength detecting device middle casing will appear unstable situation,
The calibration tool of enclosure interior can be influenced by temperature change, error occur so as to cause measured value.
To solve the above-mentioned problems, the utility model provides a kind of excimer laser wavelength detecting device；Heater covers
At least three faces of the outer wall of lid housing, temperature sensor measure the temperature of the enclosure interior, and temperature controls
The temperature that device goes out according to the temperature sensor measurement controls the heater.
According to the utility model embodiment in a first aspect, provide a kind of excimer laser wavelength detecting device, wrap
It includes：
Closed shell, inside contain calibration tool；
Heater configures on the outer wall of the shell, the temperature of the enclosure interior is adjusted；It is wherein described
Heater covers at least three faces of the outer wall of the shell；
Temperature sensor measures the temperature of the enclosure interior；And
Temperature controller controls the heater according to the temperature that the temperature sensor measurement goes out.
According to the second aspect of the utility model embodiment, wherein the heater is that the rubber that can be bent freely adds
Hot device.
According to the third aspect of the utility model embodiment, wherein the heater covers the four of the outer wall of the shell
A face.
According to the fourth aspect of the utility model embodiment, wherein the excimer laser is also wrapped with wavelength detecting device
It includes：
Diffuser plate is diffused the laser of input；And
Lens export the laser by the calibration tool.
According to the 5th of the utility model embodiment aspect, wherein the shell has be configured with the diffuser plate the
On one side and it is configured with the second face of the lens；First face and second face are not covered by the heater.
According to the 6th of the utility model embodiment the aspect, wherein the calibration, which has, includes：
First calibration tool, has the first measurement accuracy；And
Second calibration tool, has the second measurement accuracy than first high certainty of measurement.
According to the 7th of the utility model embodiment the aspect, wherein the heater covers the three of the outer wall of the shell
A face.
According to the eighth aspect of the utility model embodiment, wherein the excimer laser is also wrapped with wavelength detecting device
It includes：
Diffuser plate is diffused the laser of input；
First lens export the laser by the first calibration tool；And
Second lens export the laser by the second calibration tool.
According to the 9th of the utility model embodiment aspect, wherein the shell has be configured with the diffuser plate the
On one side, it is configured with the second face of first lens and is configured with the third face of second lens；It is first face, described
Second face and the third face are not covered by the heater.
The beneficial effects of the utility model are：Heater covers at least three faces of the outer wall of shell, temperature sensor
The temperature of the enclosure interior is measured, and the temperature that temperature controller goes out according to the temperature sensor measurement is to institute
Heater is stated to be controlled.Heater can be uniformly heated up shell around shell as a result, be reduced or avoided in shell
Measurement is reduced or avoided to keep or improve the measurement accuracy for calibrating tool of enclosure interior in the situation that the temperature in portion is unstable
There is the case where error in value.
With reference to following description and accompanying drawings, the particular implementation of the utility model is disclosed in detail, specifies this practicality
Novel principle can be in a manner of adopted.It should be understood that the embodiment of the utility model in range not thus by
Limitation.In the range of the spirit and terms of appended claims, the embodiment of the utility model includes many changes, modifications
With it is equivalent.
Description of the drawings
Included attached drawing is used for providing being further understood from the utility model embodiment, and which constitute specifications
A part, the embodiment for illustrating the utility model, and with verbal description come together illustrate the principles of the present invention.It is aobvious
And easy insight, the accompanying drawings in the following description are only some embodiments of the utility model, for those of ordinary skill in the art
For, without having to pay creative labor, other drawings may also be obtained based on these drawings.In the accompanying drawings：
Fig. 1 is the diagrammatic cross-section of the excimer laser wavelength detecting device 100 of the utility model；
Fig. 2 is the vertical view of the excimer laser wavelength detecting device 100 of Fig. 1；
Fig. 3 is the diagrammatic cross-section of the excimer laser wavelength detecting device 300 of the utility model；
Fig. 4 is the vertical view of the excimer laser wavelength detecting device 300 of Fig. 3.
Specific implementation mode
With reference to attached drawing, by following explanation, the aforementioned and other feature of the utility model will be apparent.Illustrating
In book and attached drawing, the particular implementation of the utility model is specifically disclosed, which show the utility model wherein may be used
Principle some embodiments, it will thus be appreciated that the utility model is not limited to described embodiment, on the contrary, this practicality
Novel includes whole modifications, modification and the equivalent fallen within the scope of the appended claims.
In the utility model embodiment, term " first ", " second " etc. from appellation to different elements for carrying out area
Point, it is not intended that the space arrangement of these elements or time sequencing etc., these elements should not be limited by these terms.Term
"and/or" includes one kind of the associated term listed or any one of multiple and all combinations.Term "comprising", " packet
Include ", " having " etc. refer to the presence of stated feature, element, element or component, but be not precluded presence or addition one or
Other multiple features, element, element or component.
In the utility model embodiment, singulative " one ", "the" etc. may include plural form, be broadly interpreted
It is not defined as the meaning of "one" for "an" or " one kind "；In addition term " described " is interpreted as both including singular shape
Formula also includes plural form, unless the context clearly indicates otherwise.In addition term " according to " is interpreted as " at least partly root
According to ... ", term "based" is interpreted as " being at least partially based on ... ", unless the context clearly indicates otherwise.
In the following the description of the utility model, for convenience of description, by the side parallel with the direction extended along axis
To " axial direction " is known as, the radial direction centered on axis is known as " radial direction ", by the side of the encirclement radial outside centered on axis
To referred to as " circumferential direction ".It will be appreciated, however, that these simply to illustrate that convenience, limit excimer laser examined with wavelength
Survey direction when device is used and manufactured.
In the following the description of the utility model, for convenience of description, the side where diffuser plate is known as " upside "
Either the side opposite with diffuser plate is known as " downside " or " lower section " by " top ".It will be appreciated, however, that these are only
The convenience of explanation, does not limit the direction when excimer laser is used and manufactured with wavelength detecting device.
The embodiment of the utility model is illustrated with reference to the accompanying drawings.
The utility model embodiment provides a kind of excimer laser wavelength detecting device.
Fig. 1 is the excimer laser schematic diagram of wavelength detecting device 100 of the utility model, shows excimer laser
The section components and relevant apparatus being broken away with the shell in wavelength detecting device 100.As shown in Figure 1, the excimer laser
May include with wavelength detecting device 100：
Closed shell 101, inside contain calibration tool 102；
Heater 103 is configured on the outer wall of the shell 101, is adjusted to the temperature inside the shell 101
Section；Wherein the heater 103 covers at least three faces of the outer wall of the shell 101；
Temperature sensor 104 measures the temperature inside the shell 101；And
Temperature controller 105 carries out the heater 103 according to the temperature that the temperature sensor 104 is measured
Control.
Fig. 2 is the vertical view of the excimer laser wavelength detecting device 100 of Fig. 1, shows that the direction along AA ' is observed
The relevant section components of shell.As shown in Fig. 2, the heater 103 can cover four of the outer wall of the shell 101
Face.
In the present invention, the heater 103 can be the rubber heater that can be bent freely.But this practicality is new
Type is without being limited thereto, such as can also be other kinds of heater.In addition, the tool of temperature sensor 104 and temperature controller 105
Hold in vivo, the prior art can be referred to.
As shown in Figure 1, the excimer laser wavelength detecting device 100 can also include：
Diffuser plate 106 is diffused the laser of input；And
Lens 107 export the laser for having 102 by the calibration.
As shown in Figure 1, being configured with the first face 1011 of the diffuser plate 106 on the shell 101 and configured with described
Second face 1012 of lens 107 can not be covered by the heater 103.As shown in Fig. 2, other four face quilts of shell 101
Heater 103 covers.
Heater can be uniformly heated up shell around shell as a result, and the temperature of enclosure interior is reduced or avoided
Unstable situation, the measurement accuracy that the calibration to keep or improve enclosure interior has, is reduced or avoided measured value and misses
The situation of difference.
As shown in Figure 1, can also be wrapped with the 100 relevant component of excimer laser wavelength detecting device or device
It includes：Narrow band excimer laser oscillator 201, beam splitter 202, line sensor 203, controller 204, the driving of narrowband element
Device 205, etc.；The relevant technologies can be referred to about these components or device.
It is worth noting that, Fig. 1 has only carried out schematically the excimer laser of the utility model with wavelength detecting device
Illustrate, but the utility model is without being limited thereto.About general excimer laser component possessed by wavelength detecting device, specifically may be used
To refer to the relevant technologies, omit the description herein.In addition, the component or element that are not specialized in Fig. 1, can refer to related skill
Art, the utility model are limited not to this.
In one embodiment, the calibration tool 102 may include：First calibration tool, has the first measurement accuracy；
And second calibration tool, have than first high certainty of measurement the second measurement accuracy.In this case, the heating
Device can cover three faces of the outer wall of the shell.
Fig. 3 is the excimer laser diagrammatic cross-section of wavelength detecting device 300 of the utility model, shows quasi-molecule
The section components and relevant apparatus that laser is broken away with the shell of wavelength detecting device 300.As shown in figure 3, the quasi-molecule swashs
Light wavelength detecting device 300 may include：
Closed shell 301, inside contain the first calibration tool 3021 and second calibration tool 3022；
Heater 303 is configured on the outer wall of the shell 301, is adjusted to the temperature inside the shell 301
Section；Wherein the heater 303 covers at least three faces of the outer wall of the shell 301；
Temperature sensor 304 measures the temperature inside the shell 301；And
Temperature controller 305 carries out the heater 303 according to the temperature that the temperature sensor 304 is measured
Control.
Fig. 4 is the vertical view of the excimer laser wavelength detecting device 300 of Fig. 3, shows that the direction along BB ' is observed
The relevant section components of shell.As shown in figure 4, the heater 303 can cover three of the outer wall of the shell 301
Face.
As shown in figure 3, the excimer laser wavelength detecting device 300 can also include：
Diffuser plate 306 is diffused the laser of input；
First lens 3071 export the laser by the first calibration tool 3021；And
Second lens 3072 export the laser by the second calibration tool 3022.
As shown in figure 3, being configured with the first face 3011 of the diffuser plate 306 on the shell 301, being configured with described first
Second face 3012 of lens 3071 and the third face 3013 configured with second lens 2072 are not covered by the heater 303
Lid.As shown in figure 4, other three faces of shell 301 are covered by heater 303.
Heater can be uniformly heated up shell around shell as a result, and the temperature of enclosure interior is reduced or avoided
Unstable situation, the measurement accuracy that the calibration to keep or improve enclosure interior has, is reduced or avoided measured value and misses
The situation of difference.
As shown in figure 3, can also be wrapped with the 300 relevant component of excimer laser wavelength detecting device or device
It includes：Narrow band excimer laser oscillator 401, beam splitter 402, line sensor 403, controller 404, the driving of narrowband element
Device 405, etc.；The relevant technologies can be referred to about these components or device.
It is worth noting that, Fig. 3 has only carried out schematically the excimer laser of the utility model with wavelength detecting device
Illustrate, but the utility model is without being limited thereto.About general excimer laser component possessed by wavelength detecting device, specifically may be used
With reference to the relevant technologies, to omit the description herein.In addition, the component or element that are not specialized in Fig. 3, can refer to related skill
Art, the utility model are limited not to this.
The utility model is described above in association with specific embodiment, but those skilled in the art should be clear
Chu, these descriptions are all exemplary, and are not the limitation to scope of protection of the utility model.Those skilled in the art can root
Various variants and modifications are made to the utility model according to the spirit and principle of the utility model, these variants and modifications are also in this reality
With in novel range.
Preferred embodiments of the present invention are described above by reference to attached drawing.Many features of these embodiments and excellent
Point according to the detailed description is clear, thus appended claims be intended to cover these embodiments to fall into it true
All these feature and advantage in spirit and scope.Further, since those skilled in the art be readily apparent that many modifications and
Change, therefore is not meant to the embodiment of the utility model being limited to illustrated and description precision architecture and operation, but can
To cover all suitable modifications and the equivalent that fall within the scope of its.
Claims (9)
1. a kind of excimer laser wavelength detecting device, which is characterized in that excimer laser wavelength detecting device packet
It includes：
Closed shell, inside contain calibration tool；
Heater configures on the outer wall of the shell, the temperature of the enclosure interior is adjusted；The wherein described heating
Device covers at least three faces of the outer wall of the shell；
Temperature sensor measures the temperature of the enclosure interior；And
Temperature controller controls the heater according to the temperature that the temperature sensor measurement goes out.
2. excimer laser according to claim 1 wavelength detecting device, wherein the heater is can be freely curved
Bent rubber heater.
3. excimer laser according to claim 1 wavelength detecting device, wherein the heater covers the shell
Outer wall four faces.
4. excimer laser according to claim 3 wavelength detecting device, wherein the excimer laser is examined with wavelength
Surveying device further includes：
Diffuser plate is diffused the laser of input；And
Lens export the laser by the calibration tool.
5. excimer laser according to claim 4 wavelength detecting device, wherein the shell is described with being configured with
First face of diffuser plate and the second face for being configured with the lens；First face and second face be not by the heater
Covering.
6. excimer laser according to claim 1 wavelength detecting device, wherein the calibration, which has, includes：
First calibration tool, has the first measurement accuracy；And
Second calibration tool, has the second measurement accuracy than first high certainty of measurement.
7. excimer laser according to claim 6 wavelength detecting device, wherein the heater covers the shell
Outer wall three faces.
8. excimer laser according to claim 7 wavelength detecting device, wherein the excimer laser is examined with wavelength
Surveying device further includes：
Diffuser plate is diffused the laser of input；
First lens export the laser by the first calibration tool；And
Second lens export the laser by the second calibration tool.
9. excimer laser according to claim 8 wavelength detecting device, wherein the shell is described with being configured with
First face of diffuser plate, the second face for being configured with first lens and the third face for being configured with second lens；It is described
First face, second face and the third face are not covered by the heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820029852.7U CN207751598U (en) | 2018-01-09 | 2018-01-09 | Excimer laser wavelength detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820029852.7U CN207751598U (en) | 2018-01-09 | 2018-01-09 | Excimer laser wavelength detecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207751598U true CN207751598U (en) | 2018-08-21 |
Family
ID=63152635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820029852.7U Active CN207751598U (en) | 2018-01-09 | 2018-01-09 | Excimer laser wavelength detecting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207751598U (en) |
-
2018
- 2018-01-09 CN CN201820029852.7U patent/CN207751598U/en active Active
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