CN207719165U - A kind of graphite boat loading-unloading plate machine graphite boat - Google Patents

A kind of graphite boat loading-unloading plate machine graphite boat Download PDF

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Publication number
CN207719165U
CN207719165U CN201721674464.6U CN201721674464U CN207719165U CN 207719165 U CN207719165 U CN 207719165U CN 201721674464 U CN201721674464 U CN 201721674464U CN 207719165 U CN207719165 U CN 207719165U
Authority
CN
China
Prior art keywords
graphite boat
piece
spacer block
graphite
loading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201721674464.6U
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Chinese (zh)
Inventor
徐雷达
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Create Source Automation Equipment Co Ltd
Original Assignee
Wuxi Create Source Automation Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuxi Create Source Automation Equipment Co Ltd filed Critical Wuxi Create Source Automation Equipment Co Ltd
Priority to CN201721674464.6U priority Critical patent/CN207719165U/en
Application granted granted Critical
Publication of CN207719165U publication Critical patent/CN207719165U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of graphite boat loading-unloading plate machine graphite boats, are related to graphite boat field.The graphite boat of the utility model includes the first graphite boat piece and the second graphite boat piece, the parallel interior graphite boat piece of several being set between the first graphite boat piece and the second graphite boat piece, it is equipped with upper spacer block on the outside of first graphite boat piece and the both ends of the second graphite boat piece, the downside of upper spacer block is equipped with lower spacer block, top electrode block and lower electrode block are respectively equipped on upper spacer block and lower spacer block, each boat on piece is equipped with several grooves for loading silicon chip;The upper end of the upper spacer block is equipped with several air blowers;First graphite boat piece is arranged with one layer of garbage collection bag with the space that the second graphite boat piece lower end is surrounded.The graphite boat is reasonable in design, purges and removes silicon chip powder impurity in time, improve the working efficiency of silicon chip film-coated production efficiency and graphite boat charging crane.

Description

A kind of graphite boat loading-unloading plate machine graphite boat
Technical field:
The utility model is related to graphite boat fields, and in particular to a kind of graphite boat loading-unloading plate machine graphite boat.
Background technology:
Constantly increase with the demand of solar battery sheet, each cell piece production commercial city is wanted promoting graphite boat loading-unloading plate machine Power and gas homogeneity in the case of improve product quality, and reduce cost simultaneously.Graphite boat is usually by graphite boat piece, stone The parts such as ink stick combine to be formed.Graphite boat loading-unloading plate machine has when inserting, taking silicon chip at present generates fragment phenomenon, affects silicon chip Plated film production efficiency, and lack the auxiliary device of corresponding purging silicon chip powder and impurity, influence silicon chip film-coated subsequent handling Technology stability.
Utility model content:
The technical problem to be solved by the utility model is to provide one kind, can to purge and collect in time silicon chip powder miscellaneous Matter improves the graphite boat loading-unloading plate machine graphite boat of silicon chip film-coated production efficiency.
Technical problem to be solved in the utility model is realized using technical solution below:
A kind of graphite boat loading-unloading plate machine graphite boat, including the first graphite boat piece and the second graphite boat piece, it is parallel to be set to Several interior graphite boat pieces between one graphite boat piece and the second graphite boat piece, first graphite boat piece and the second graphite boat piece Upper spacer block is equipped on the outside of both ends, the downside of upper spacer block is equipped with lower spacer block, be respectively equipped on upper spacer block and lower spacer block top electrode block and Lower electrode block, each boat on piece are equipped with several grooves for loading silicon chip;The upper end of the upper spacer block is equipped with several Air blower;First graphite boat piece is arranged with one layer of garbage collection bag with the space that the second graphite boat piece lower end is surrounded.
Further, first graphite boat piece, several interior graphite boat pieces, the second graphite boat piece are by being arranged in wherein Screw be fixedly connected with the nut being fixed on outside screw.
Further, pass through ceramics between first graphite boat piece, several interior graphite boat pieces, the second graphite boat piece Pipe is isolated.
Further, the lower end of the lower spacer block is equipped with support leg, and the bottom of support leg is arc-shaped groove structure.
Further, each boat on piece is equipped with groove surfaces are square, rectangle, circle or diamond shape.
Further, the quantity of the interior graphite boat piece is 21.
The utility model has the beneficial effects that:By the first graphite boat piece, the second graphite boat piece and interior graphite boat piece, on every The basic structure of block, lower spacer block, top electrode block, lower electrode block, groove, each fastening structure connection and corresponding matching, increase stone The slotting fragment rate for taking space, reducing during slotting take between black boat piece;The diversified shape of groove facilitates different shape rule The slotting of the silicon chip of lattice takes, and 21 interior graphite boat pieces also increase the treating capacity of the graphite boat;Air blower coordinates garbage collection bag, Also the fragment and dust impurity that can rapidly remove silicon chip, improve the service life of graphite boat;Arc-shaped support leg is also square Graphite boat stablize place and transport.To sum up, the graphite boat is reasonable in design, purges and remove silicon chip powder in time Impurity improves the working efficiency of silicon chip film-coated production efficiency and graphite boat charging crane.
Description of the drawings:
Fig. 1 is the structural schematic diagram of the graphite boat loading-unloading plate machine graphite boat of the utility model;
Fig. 2 is the structural schematic diagram of the first graphite boat piece in Fig. 1;
Wherein:The first graphite boat pieces of 1-;The second graphite boat pieces of 2-;Graphite boat piece in 3-;The upper spacer blocks of 4-;Spacer block under 5-;6- Top electrode block;Electrode block under 7-;8- grooves;9- air blowers;10- garbage collection bags;11- nuts;12- ceramic tubes;13- is supported Foot.
Specific implementation mode:
In order to make the technical means, creative features, achievement of purpose, and effectiveness of the utility model be easy to understand, under Face combines and is specifically illustrating, and the utility model is expanded on further.
As shown in Figs. 1-2, the graphite boat loading-unloading plate machine graphite boat of the present embodiment, including the first graphite boat piece 1 and second Graphite boat piece 2, parallel several interior graphite boat pieces 3 being set between the first graphite boat piece 1 and the second graphite boat piece 2, interior graphite boat The quantity of piece 3 is specially 21.First graphite boat piece (1), several interior graphite boat piece (3), second graphite boat pieces (2) are by wearing The screw (not shown) being located therein is fixedly connected with the nut (11) being fixed on outside screw.First graphite boat piece 1 and Be equipped with upper spacer block 4 on the outside of the both ends of two graphite boat pieces 2, the downside of upper spacer block 4 is equipped with lower spacer block 5, upper spacer block 4 on lower spacer block 5 It is respectively equipped with top electrode block 6 and lower electrode block 7, each boat on piece is equipped with several grooves 8 for loading silicon chip, groove (8) table Face is square, rectangle, circle or diamond shape, facilitates the silicon chip of different size shape to insert and takes.
As shown in Figure 1, the upper end of upper spacer block 4 is equipped with several air blowers 9.First graphite boat piece 1 and the second graphite boat piece 2 The space that lower end is surrounded is arranged with one layer of garbage collection bag 10.Air blower cooperates with garbage collection bag, can be rapidly The fragment and dust impurity for removing silicon chip, improve the service life of graphite boat.The lower end of lower spacer block 5 is equipped with support leg 13, branch The bottom of spike 13 is arc-shaped groove structure, facilitates stablizing for graphite boat and places and transport.
The graphite boat of the present embodiment is reasonable in design, purges and removes silicon chip powder impurity in time, improve silicon chip The working efficiency of the production efficiency and graphite boat charging crane of plated film.
The advantages of basic principles and main features and the utility model of the utility model have been shown and described above.One's own profession The technical staff of industry is it should be appreciated that the present utility model is not limited to the above embodiments, described in above embodiments and description Only illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, the utility model is also It will have various changes and improvements, these various changes and improvements fall within the scope of the claimed invention.The utility model Claimed range is defined by the appending claims and its equivalent thereof.

Claims (6)

1. a kind of graphite boat loading-unloading plate machine graphite boat, including the first graphite boat piece (1) and the second graphite boat piece (2), parallel to set Several interior graphite boat pieces (3) between the first graphite boat piece (1) and the second graphite boat piece (2), it is characterised in that:Described first Upper spacer block (4) is equipped on the outside of graphite boat piece (1) and the both ends of the second graphite boat piece (2), the downside of upper spacer block (4) is equipped with lower spacer block (5), it is respectively equipped with top electrode block (6) and lower electrode block (7) on upper spacer block (4) and lower spacer block (5), each boat on piece, which is equipped with, to be used In several grooves (8) for loading silicon chip;The upper end of the upper spacer block (4) is equipped with several air blowers (9);First graphite Boat piece (1) is arranged with one layer of garbage collection bag (10) with the space that the second graphite boat piece (2) lower end is surrounded.
2. graphite boat loading-unloading plate machine graphite boat according to claim 1, it is characterised in that:First graphite boat piece (1), several interior graphite boat pieces (3), the second graphite boat piece (2) pass through the spiral shell that is arranged in screw therein He is fixed on outside screw Female (11) are fixedly connected.
3. graphite boat loading-unloading plate machine graphite boat according to claim 1, it is characterised in that:First graphite boat piece (1), it is isolated by ceramic tube (12) between several interior graphite boat piece (3), second graphite boat pieces (2).
4. graphite boat loading-unloading plate machine graphite boat according to claim 1, it is characterised in that:Under the lower spacer block (5) End is equipped with support leg (13), and the bottom of support leg (13) is arc-shaped groove structure.
5. graphite boat loading-unloading plate machine graphite boat according to claim 1, it is characterised in that:What each boat on piece was equipped with Groove (8) surface is square, rectangle, circle or diamond shape.
6. graphite boat loading-unloading plate machine graphite boat according to claim 1, it is characterised in that:The interior graphite boat piece (3) Quantity be 21.
CN201721674464.6U 2017-12-06 2017-12-06 A kind of graphite boat loading-unloading plate machine graphite boat Expired - Fee Related CN207719165U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721674464.6U CN207719165U (en) 2017-12-06 2017-12-06 A kind of graphite boat loading-unloading plate machine graphite boat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721674464.6U CN207719165U (en) 2017-12-06 2017-12-06 A kind of graphite boat loading-unloading plate machine graphite boat

Publications (1)

Publication Number Publication Date
CN207719165U true CN207719165U (en) 2018-08-10

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721674464.6U Expired - Fee Related CN207719165U (en) 2017-12-06 2017-12-06 A kind of graphite boat loading-unloading plate machine graphite boat

Country Status (1)

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CN (1) CN207719165U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109148343A (en) * 2018-08-15 2019-01-04 横店集团东磁股份有限公司 A kind of silicon chip of solar cell plated film graphite boat

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109148343A (en) * 2018-08-15 2019-01-04 横店集团东磁股份有限公司 A kind of silicon chip of solar cell plated film graphite boat
CN109148343B (en) * 2018-08-15 2020-02-18 横店集团东磁股份有限公司 Graphite boat for coating film on solar cell silicon wafer

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CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180810

Termination date: 20201206