CN207688827U - A kind of air float type image measurement instrument - Google Patents

A kind of air float type image measurement instrument Download PDF

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Publication number
CN207688827U
CN207688827U CN201820127601.2U CN201820127601U CN207688827U CN 207688827 U CN207688827 U CN 207688827U CN 201820127601 U CN201820127601 U CN 201820127601U CN 207688827 U CN207688827 U CN 207688827U
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China
Prior art keywords
air
guide rail
vertical
float guide
float
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CN201820127601.2U
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Chinese (zh)
Inventor
陈高辉
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Zhejiang Eagle Kefeidi Polytron Technologies Inc
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Zhejiang Eagle Kefeidi Polytron Technologies Inc
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Abstract

The utility model discloses a kind of air float type image measurement instruments, including supporting table, air bearing, vertical air-float guide rail, motor support plate, motor stator, perpendicular air-float guide rail and ccd sensor, it is fixed with support leg in the supporting table, and perspective workbench is provided in support leg, the air bearing is set to below perspective workbench, the supporting table one side edge is fixed with support column, and vertical orbit determination is provided on support column, the vertical air-float guide rail is set to above vertical orbit determination, and vertical air-float guide rail is internally provided with air supporting block, it is provided with air inlet on the air supporting block, and tracheae is connected on air inlet, it is fixed with gas outlet on the tracheae, the motor support plate is set to vertical orbit determination side, and it is provided with motor stator above motor support plate.The air float type image measurement instrument is equipped with vertical air-float guide rail, horizontal air-float guide rail and perpendicular air-float guide rail, and the gauge head on air-float guide rail perpendicular in this way can be moved up and down all around, can preferably move gauge head, can more accurately measure workpiece in this way.

Description

A kind of air float type image measurement instrument
Technical field
The utility model is related to radiographic measurement equipment technical field, specially a kind of air float type image measurement instrument.
Background technology
With the fast development of science and technology, image measurer is also quickly being opened up, the ccd sensor pair on image application measuring instrument Workpiece size measures, but while measuring needs back light, so the platform of image instrument is all based on perspective, and when measuring workpiece due to The gravity of workpiece, and the reason of material is had an X-rayed, perspective workbench is easy to happen deformation so causing measurement workpiece inaccurate, gauge head moves Dynamic offset can not accurately be measured workpiece by friction effects are larger, therefore there is an urgent need to can improve image measurer knot on the market The technology of structure, to improve this equipment.
Utility model content
The purpose of this utility model is to provide a kind of air float type image measurement instruments, to solve to propose in above-mentioned background technology Existing image measurer when measuring workpiece when in use due to the reason of the gravity of workpiece, and perspective workbench material, thoroughly Be easy to happen deformation depending on workbench so to lead to measure workpiece inaccurate, gauge head move offset distance by friction effects are larger cannot The problem of accurately measuring workpiece.
To achieve the above object, the utility model provides the following technical solutions:A kind of air float type image measurement instrument, including branch It supports platform, air bearing, indulge air-float guide rail, motor support plate, motor stator, perpendicular air-float guide rail and ccd sensor, in the supporting table It is fixed with support leg, and is provided with perspective workbench in support leg, the air bearing is set to below perspective workbench, described Supporting table one side edge is fixed with support column, and vertical orbit determination is provided on support column, and the vertical air-float guide rail is set to vertical orbit determination Top, and vertical air-float guide rail is internally provided with air supporting block, is provided with air inlet on the air supporting block, and gas is connected on air inlet It manages, gas outlet is fixed on the tracheae, the motor support plate is set to vertical orbit determination side, and is provided with electricity above motor support plate Machine stator is equipped with movable plate on the motor stator, support plate is connected on the vertical air-float guide rail, and set above support plate It is equipped with horizontal orbit determination, horizontal air-float guide rail is installed, and motor is installed above horizontal air-float guide rail on the horizontal orbit determination, under the motor Side is provided with perpendicular orbit determination, and the perpendicular air-float guide rail is set to above perpendicular orbit determination, and is provided with fixed link on perpendicular air-float guide rail, described Ccd sensor is fixed on fixed link end.
Preferably, the perspective workbench and air bearing distance are 5-7 μm.
Preferably, there are two the vertical air-float guide rail is arranged altogether, and vertical air-float guide rail is about air bearing symmetrical placement.
Preferably, the vertical orbit determination and vertical air-float guide rail are to be slidably connected, and vertical air-float guide rail sliding distance is fixed less than vertical The length of rail.
Preferably, the perpendicular orbit determination is about horizontal orbit determination positioned vertical.
Preferably, the perpendicular air-float guide rail and fixed link constitute fixed structure, and fixed link glides with perpendicular air-float guide rail Maximum distance is less than fixed link to the distance of perspective workbench.
Compared with prior art, the utility model has the beneficial effects that:
1, this equipment is equipped with air bearing, and below perspective workbench center, such workpiece is placed for air bearing setting Above perspective workbench;When work, air bearing can hold up perspective workbench, perspective workbench can be made to be not easy to send out in this way Raw deformation, increases the accuracy of measurement in this way;
2, this equipment is equipped with vertical air-float guide rail, horizontal air-float guide rail and perpendicular air-float guide rail, the survey on air-float guide rail perpendicular in this way Head can be moved up and down all around, can accurately be moved gauge head, can more accurately be measured workpiece in this way;
3, this equipment is equipped with ccd sensor, ccd sensor can under the action of air-float guide rail all around on move down It is dynamic because be air-float guide rail, the frictional force being subject to is small, and the workpiece accuracy surveyed greatly improves.
Description of the drawings
Fig. 1 is the utility model air float type image measurement instrument structural schematic diagram;
Fig. 2 is the utility model air float type image measurement instrument overlooking structure diagram;
Fig. 3 is the utility model air-float guide rail structural representation.
In attached drawing:1, supporting table, 2, support leg, 3, perspective workbench, 4, air bearing, 5, support column, 6, vertical orbit determination, 7, Vertical air-float guide rail, 8, air supporting block, 9, air inlet, 10, tracheae, 11, gas outlet, 12, motor support plate, 13, motor stator, 14, move Movable plate, 15, support plate, 16, horizontal orbit determination, 17, horizontal air-float guide rail, 18, motor, 19, perpendicular orbit determination, 20, perpendicular air-float guide rail, 21, solid Fixed pole, 22, ccd sensor.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work The every other embodiment obtained, shall fall within the protection scope of the present invention.
The utility model air float type image measurement instrument is as shown in Figure 1, 2, 3, including supporting table 1, support leg 2, perspective work Platform 3, air bearing 4, support column 5, vertical orbit determination 6, vertical air-float guide rail 7, air supporting block 8, air inlet 9, tracheae 10, gas outlet 11, electricity Machine support plate 12, motor stator 13, movable plate 14, support plate 15, horizontal orbit determination 16, horizontal air-float guide rail 17, motor 18, perpendicular orbit determination 19, Air-float guide rail 20, fixed link 21 and ccd sensor 22 are erected, is fixed with support leg 2 in supporting table 1, and be provided in support leg 2 Depending on workbench 3, perspective workbench 3 is 5-7 μm with 4 distance of air bearing, is overcome under the action of such air bearing 4 The deformation of workbench 3 is had an X-rayed, air bearing 4 is set to 3 lower section of perspective workbench, and 1 one side edge of supporting table is fixed with support column 5, and vertical orbit determination 6 is provided on support column 5, vertical orbit determination 6 and vertical air-float guide rail 7 be slidably connected, and the vertical sliding of air-float guide rail 7 away from From the length less than vertical orbit determination 6, the shift length of vertical air-float guide rail 7 has been limited, has made vertical air-float guide rail 7 without departing from both orbit determination Road, vertical air-float guide rail 7 is set to 6 top of vertical orbit determination, and vertical air-float guide rail 7 is internally provided with air supporting block 8, indulges air-float guide rail 7 one Altogether there are two settings, and vertical air-float guide rail 7 is about 4 symmetrical placement of air bearing, before and after capable of driving horizontal air-float guide rail 17 in this way It is mobile, so that the scope of activities of ccd sensor 22 is increased, air inlet 9 is provided on air supporting block 8, and tracheae is connected on air inlet 9 10, gas outlet 11 is fixed on tracheae 10, motor support plate 12 is set to 6 side of vertical orbit determination, and 12 top of motor support plate is provided with Motor stator 13 is equipped with movable plate 14 on motor stator 13, and support plate 15, and support plate 15 are connected on vertical air-float guide rail 7 Top is provided with horizontal orbit determination 16, horizontal air-float guide rail 17 is equipped on horizontal orbit determination 16, and 17 top of horizontal air-float guide rail is equipped with motor 18,18 lower section of motor is provided with perpendicular orbit determination 19, and it is about 16 positioned vertical of horizontal orbit determination, 22 energy of such ccd sensor to erect orbit determination 19 Enough preferably to measure workpiece, perpendicular air-float guide rail 20 is set to 19 top of perpendicular orbit determination, and is provided with fixed link on perpendicular air-float guide rail 20 21, it erects air-float guide rail 20 and constitutes fixed structure, and the maximum distance that fixed link 21 glides with perpendicular air-float guide rail 20 with fixed link 21 Less than fixed link 21 to the distance of perspective workbench 3, the ccd sensor 22 in such fixed link 21 will not be with perspective workbench 3 Collision causes unnecessary loss, ccd sensor 22 to be fixed on 21 end of fixed link.
Operation principle:Before using the air float type image measurement instrument, it is necessary first to entire air float type image measurement instrument The simple knowledge in structure is carried out, first by equipment connection external power supply (this figure is not drawn into), workpiece will be measured and be positioned over sky On perspective workbench 3 right over gas bearing 4, motor 18 is opened at this time, air bearing 4 works under the action of motor 18, Under the action of air bearing 4, the perspective workbench 3 below workpiece will not deform upon, at this time on the vertical orbit determination 6 on support column 5 The vertical air-float guide rail 7 of connection works, and under the action of air supporting block 8 and tracheae 10, vertical air-float guide rail 7 floats, on horizontal orbit determination 16 Horizontal air-float guide rail 17 also floats with the perpendicular air-float guide rail 20 on perpendicular orbit determination 19, at this time under the effect of motor 18, on motor stator 13 Movable plate 14 move, drive and indulge air-float guide rail 7 and move, and movable plate 14 has placement on each air-float guide rail, exists at this time Ccd sensor 22 under the effect of movable plate 14 in fixed link 21 is moved to above workpiece, and CCD is passed under the effect of perpendicular air-float guide rail Sensor can be to workpiece close-in measurement and telemeasurement, and here it is the use process of the air float type image measurement instrument, this theorys The content not being described in detail in bright belongs to the prior art well known to professional and technical personnel in the field.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is appreciated that can these embodiments be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaiied Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.

Claims (6)

1. a kind of air float type image measurement instrument, including supporting table (1), air bearing (4), vertical air-float guide rail (7), motor support plate (12), motor stator (13), perpendicular air-float guide rail (20) and ccd sensor (22);It is characterized in that:It is solid on the supporting table (1) Surely there is support leg (2), and be provided with perspective workbench (3) in support leg (2), the air bearing (4) is set to perspective work Below platform (3), supporting table (1) one side edge is fixed with support column (5), and vertical orbit determination (6) is provided on support column (5), The vertical air-float guide rail (7) is set to above vertical orbit determination (6), and vertical air-float guide rail (7) is internally provided with air supporting block (8), described It is provided with air inlet (9) on air supporting block (8), and is connected with tracheae (10) on air inlet (9), is fixed with out on the tracheae (10) Gas port (11), the motor support plate (12) is set to vertical orbit determination (6) side, and is provided with motor stator above motor support plate (12) (13), movable plate (14) is installed on the motor stator (13), support plate (15) is connected on the vertical air-float guide rail (7), And it is provided with horizontal orbit determination (16) above support plate (15), horizontal air-float guide rail (17), and horizontal gas are installed on the horizontal orbit determination (16) Motor (18) is installed above floating guide rail (17), perpendicular orbit determination (19), the perpendicular air-float guide rail are provided with below the motor (18) (20) it is set to above perpendicular orbit determination (19), and fixed link (21), the ccd sensor (22) is provided on perpendicular air-float guide rail (20) It is fixed on fixed link (21) end.
2. air float type image measurement instrument according to claim 1, it is characterised in that:The perspective workbench (3) and air Bearing (4) distance is 5-7 μm.
3. air float type image measurement instrument according to claim 1, it is characterised in that:The vertical air-float guide rail (7) sets altogether There are two setting, and vertical air-float guide rail (7) and air bearing (4) symmetrical placement.
4. air float type image measurement instrument according to claim 1, it is characterised in that:The vertical orbit determination (6) and vertical air supporting are led Rail (7) is to be slidably connected, and vertical air-float guide rail (7) sliding distance is less than the length of vertical orbit determination (6).
5. air float type image measurement instrument according to claim 1, it is characterised in that:The perpendicular orbit determination (19) is about horizontal fixed Rail (16) positioned vertical.
6. air float type image measurement instrument according to claim 1, it is characterised in that:The perpendicular air-float guide rail (20) and fixation Bar (21) constitutes fixed structure, and the maximum distance that fixed link (21) glides with perpendicular air-float guide rail (20) is arrived less than fixed link (21) Have an X-rayed the distance of workbench (3).
CN201820127601.2U 2018-01-25 2018-01-25 A kind of air float type image measurement instrument Active CN207688827U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820127601.2U CN207688827U (en) 2018-01-25 2018-01-25 A kind of air float type image measurement instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820127601.2U CN207688827U (en) 2018-01-25 2018-01-25 A kind of air float type image measurement instrument

Publications (1)

Publication Number Publication Date
CN207688827U true CN207688827U (en) 2018-08-03

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Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110375664A (en) * 2019-03-29 2019-10-25 天津大学 A kind of device measuring freeform optics surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110375664A (en) * 2019-03-29 2019-10-25 天津大学 A kind of device measuring freeform optics surface

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