CN207687074U - A kind of vacuum drying oven diffusion pump oil baffle - Google Patents

A kind of vacuum drying oven diffusion pump oil baffle Download PDF

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Publication number
CN207687074U
CN207687074U CN201721661339.1U CN201721661339U CN207687074U CN 207687074 U CN207687074 U CN 207687074U CN 201721661339 U CN201721661339 U CN 201721661339U CN 207687074 U CN207687074 U CN 207687074U
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CN
China
Prior art keywords
oil baffle
diffusion pump
interior
drying oven
vacuum drying
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Application number
CN201721661339.1U
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Chinese (zh)
Inventor
叶祥
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SHANGHAI JJJ VACUUM EQUIPMENT CO Ltd
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SHANGHAI JJJ VACUUM EQUIPMENT CO Ltd
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Priority to CN201721661339.1U priority Critical patent/CN207687074U/en
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Abstract

The utility model discloses a kind of vacuum drying oven diffusion pump oil baffles, including interior oil baffle, outer oil baffle and valve deck, valve deck is arranged above device and the diffusion pump below face, diffusion pump surface size is identical as valve deck and pumping hole is provided with sealing flange, sealing flange is looped around at pumping hole and contact site passes through encapsulation process, interior oil baffle is welded on the outside of sealing flange, interior oil baffle open top is more than valve deck, outer oil baffle is welded and fixed on the outside of interior oil baffle, by creating newly-installed interior oil baffle, achieve the effect that prevent greasy dirt, realize the most of oil droplet of barrier, ensure the function of the working performance of vacuum drying oven, solve the problems, such as that oil droplet splashes down;By creating newly-installed outer oil baffle, achievees the effect that avoid workpiece contamination, realized the function of protection workpiece; the one outer oil baffle of circle of end welding is taken in main valve; higher than inner ring oil baffle, blocking is splashed to the oil droplet outside inner ring oil baffle, solves the problems, such as pollution workpiece.

Description

A kind of vacuum drying oven diffusion pump oil baffle
Technical field
The utility model is related to a kind of oil baffle, specially a kind of vacuum drying oven diffusion pump oil baffle.
Background technology
Vacuum drying oven utilizes vacuum system in furnace chamber this particular space(By vacuum pump, vacuum measuring device, vacuum The elements such as valve by assembling meticulously)Stove chamber air is discharged, pressure in furnace chamber is made to be less than a standard atmospheric pressure, stove Cavity space is to realize vacuum state, and here it is vacuum drying oven, diffusion pump is the most extensive, most important of current acquisition high vacuum One of tool is often referred to oil diffusion pump.Diffusion pump is a kind of secondary pumps, it needs mechanical pump as fore pump.
Vacuum drying oven diffusion pump exposes some problems in use at present, such as:There are problems that oil droplet splashes down, very After empty diffusion pump is preheated, when opening main valve, a large amount of oil droplets existing for script will be with the promotion of valve deck and sputter on valve deck Drippage, the oil droplet part splashed down can be dropped into diffusion pumping hole, be returned in diffusion pump;The oil droplet splashed down some can fall on To outside diffusion pumping hole, vacuum chamber can be flowed into after having collected more, vacuum environment is caused to be destroyed, and pollute workpiece, damage is set Standby, cleaning up also causes high effort for.
In conclusion vacuum drying oven diffusion pump splashes down and pollutes the two big urgent problem to be solved such as workpiece there are oil droplet at present.
Utility model content
The technical problems to be solved in the utility model is to overcome existing vacuum drying oven during the work time, and oil droplet is splashed down and polluted The defect of workpiece provides a kind of vacuum drying oven diffusion pump oil baffle, to solve the above problems.
In order to solve the above-mentioned technical problem, the utility model provides the following technical solution:
A kind of vacuum drying oven diffusion pump oil baffle of the utility model, including interior oil baffle, outer oil baffle and valve deck, valve deck are set The diffusion pump above device and below face is set, diffusion pump surface size is identical as valve deck and pumping hole is provided with sealing flange, Sealing flange is looped around at pumping hole and contact site passes through encapsulation process, and interior oil baffle is welded on the outside of sealing flange, interior gear oil It encloses open top and is more than valve deck, outer oil baffle is welded and fixed on the outside of interior oil baffle.
As a kind of optimal technical scheme of the utility model, interior oil baffle and outer oil baffle are made of alloy, are completed After carry out stress relief annealing process, stability is good, and buckling performance is good, and can ensure its size, good appearance well.
As a kind of optimal technical scheme of the utility model, interior oil baffle side forms back taper angle and higher than sealing Flange, so that the oil droplet splashed down can be pushed to be slipped to the old place at work, space is also reasonably utilized.
As a kind of optimal technical scheme of the utility model, welding fabrication after outer oil baffle and the processing of interior oil baffle, weldering The type of being connected into has saved cost.
As a kind of optimal technical scheme of the utility model, outer oil baffle is higher than interior oil baffle, outer oil baffle and interior gear Scraper ring complements one another, and prevents the oil droplet splashed down from polluting workpiece.
The advantageous effect that the utility model is reached is:The utility model is reached by creating newly-installed interior oil baffle The effect for preventing greasy dirt realizes the most of oil droplet of barrier, ensures the function of the working performance of vacuum drying oven, when work, in main valve One circle oil baffle of welding on the outside of valve bonnet seal flange, stops that most of oil droplet for splashing out flange port, the height of interior oil baffle are higher than Sealing flange, such setting make most of oil droplet be blocked, can not splash down in outside, solve the problems, such as that oil droplet splashes down; By creating newly-installed outer oil baffle, achievees the effect that avoid workpiece contamination, realized the function of protection workpiece, connect in main valve The one outer oil baffle of circle of pipe end welding, it is higher than inner ring oil baffle, stop the oil droplet being splashed to outside inner ring oil baffle, outer oil baffle by In higher than interior oil baffle, though such setting so that most of oil droplet to fall on outer gear if splashing down on the outside of interior oil baffle oily Inner wall surface is enclosed, original place is largely flowed back to, solves the problems, such as pollution workpiece.
Description of the drawings
Attached drawing is used to provide a further understanding of the present invention, and a part for constitution instruction, with this practicality Novel embodiment for explaining the utility model, does not constitute limitations of the present invention together.
In the accompanying drawings:
Fig. 1 is the utility model overall structure diagram;
Figure label:1, valve deck;2, outer oil baffle;3, diffusion pump;4, interior oil baffle;5, sealing flange.
Specific implementation mode
The preferred embodiment of the utility model is illustrated below in conjunction with attached drawing, it should be understood that described herein excellent It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
In the description of the present invention, it should be noted that the instructions such as term "vertical", "upper", "lower", "horizontal" Orientation or positional relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description the utility model and letter Change description, do not indicate or imply the indicated device or element must have a particular orientation, with specific azimuth configuration and Operation, therefore should not be understood as limiting the present invention.
In the description of the present invention, it should also be noted that, unless otherwise clearly defined and limited, term " is set Set ", " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, Or it is integrally connected;It can be mechanical connection, can also be electrical connection;It can be directly connected, intermediary can also be passed through It is indirectly connected, can be the connection inside two elements.It for the ordinary skill in the art, can be according to specific Situation understands the concrete meaning of above-mentioned term in the present invention.
Embodiment:As shown in Figure 1, the utility model provides a kind of vacuum drying oven diffusion pump oil baffle, including interior oil baffle 4, outer oil baffle 2 and valve deck 1, valve deck 1 is arranged above device and the diffusion pump 3 below face, 3 surface size of diffusion pump and valve Lid 1 is identical and pumping hole is provided with sealing flange 5, and sealing flange 5 is looped around at pumping hole and contact site passes through encapsulation process, interior gear Scraper ring 4 is welded on 5 outside of sealing flange, and 4 open top of interior oil baffle is more than valve deck 1, and outer oil baffle 2 is welded and fixed keeps off oil inside 4 outside of circle.
Interior oil baffle 4 and outer oil baffle 2 are made of alloy, carry out stress relief annealing process after the completion, and stability is good, folding Curved performance is good, and can ensure its size well, good appearance, and 4 side of interior oil baffle forms back taper angle and higher than sealing Flange 5, so that the oil droplet splashed down can be pushed to be slipped to the old place at work, space is also reasonably utilized, Welding fabrication after outer oil baffle 2 and interior oil baffle 4 are processed, welding fabrication have saved cost, and outer oil baffle 2 is higher than interior oil baffle 4, Outer oil baffle 2 complements one another with interior oil baffle 4, prevents the oil droplet splashed down from polluting workpiece.
Operation principle:In use, oil baffle 4 is directed at 3 pumping hole of diffusion pump in first, it is mounted on the outside of 3 pumping hole of diffusion pump, so Outer oil baffle 2 slowly resists interior oil baffle 4 afterwards, is welded and fixed, and when work, opens main valve, have on valve deck 1 a large amount of oil droplets with It the promotion of valve deck 1 and sputters drippage, a part can be fallen in 3 pumping hole of most diffusion pump, some can fall on the pump of diffusion pump 3 Outside mouthful, the oil droplet part fallen outside pumping hole can be fallen in 4 inner wall surface of interior oil baffle, be slid then along having angled inner wall Into diffusion pump 3, a part can be fallen in 2 inside of outer oil baffle, and oil baffle 2 can stop that oil droplet enters vacuum chamber, will not pollute To workpiece, outer oil baffle 2 complements one another with interior oil baffle 4, can preferably prevent oil droplet from entering vacuum chamber, pollutes workpiece.
Finally it should be noted that:The preferred embodiment that these are only the utility model, is not limited to this practicality It is novel, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art, It still can be with technical scheme described in the above embodiments is modified, or is carried out to which part technical characteristic etc. With replacement.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on should all include It is within the protection scope of the utility model.

Claims (5)

1. a kind of vacuum drying oven diffusion pump oil baffle, which is characterized in that including interior oil baffle(4), outer oil baffle(2)And valve deck (1), valve deck(1)It is arranged above device and the diffusion pump below face(3), diffusion pump(3)Surface size and valve deck(1)It is identical And pumping hole is provided with sealing flange(5), sealing flange(5)It is looped around at pumping hole and contact site passes through encapsulation process, interior gear oil Circle(4)It is welded on sealing flange(5)Outside, interior oil baffle(4)Open top is more than valve deck(1), outer oil baffle(2)It is welded and fixed In interior oil baffle(4)Outside.
2. a kind of vacuum drying oven diffusion pump oil baffle according to claim 1, which is characterized in that interior oil baffle(4)With it is outer Oil baffle(2)It is made of alloy.
3. a kind of vacuum drying oven diffusion pump oil baffle according to claim 1, which is characterized in that interior oil baffle(4)Side It forms back taper angle and is higher than sealing flange(5).
4. a kind of vacuum drying oven diffusion pump oil baffle according to claim 1, which is characterized in that outer oil baffle(2)With it is interior Oil baffle(4)Welding fabrication after processing.
5. a kind of vacuum drying oven diffusion pump oil baffle according to claim 1, which is characterized in that outer oil baffle(2)It is higher than Interior oil baffle(4), outer oil baffle(2)With interior oil baffle(4)It complements one another.
CN201721661339.1U 2017-12-04 2017-12-04 A kind of vacuum drying oven diffusion pump oil baffle Active CN207687074U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721661339.1U CN207687074U (en) 2017-12-04 2017-12-04 A kind of vacuum drying oven diffusion pump oil baffle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201721661339.1U CN207687074U (en) 2017-12-04 2017-12-04 A kind of vacuum drying oven diffusion pump oil baffle

Publications (1)

Publication Number Publication Date
CN207687074U true CN207687074U (en) 2018-08-03

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201721661339.1U Active CN207687074U (en) 2017-12-04 2017-12-04 A kind of vacuum drying oven diffusion pump oil baffle

Country Status (1)

Country Link
CN (1) CN207687074U (en)

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