CN207686953U - A kind of vacuum pump vacuumizes valve-closing device when failure - Google Patents
A kind of vacuum pump vacuumizes valve-closing device when failure Download PDFInfo
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- CN207686953U CN207686953U CN201721908682.1U CN201721908682U CN207686953U CN 207686953 U CN207686953 U CN 207686953U CN 201721908682 U CN201721908682 U CN 201721908682U CN 207686953 U CN207686953 U CN 207686953U
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Priority Applications (1)
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CN201721908682.1U CN207686953U (en) | 2017-12-30 | 2017-12-30 | A kind of vacuum pump vacuumizes valve-closing device when failure |
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CN201721908682.1U CN207686953U (en) | 2017-12-30 | 2017-12-30 | A kind of vacuum pump vacuumizes valve-closing device when failure |
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CN207686953U true CN207686953U (en) | 2018-08-03 |
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CN201721908682.1U Active CN207686953U (en) | 2017-12-30 | 2017-12-30 | A kind of vacuum pump vacuumizes valve-closing device when failure |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111043014A (en) * | 2018-10-12 | 2020-04-21 | 青岛海湾精细化工有限公司 | Air compression station system and control method thereof |
CN111927748A (en) * | 2020-06-19 | 2020-11-13 | 中国科学院微电子研究所 | Gate valve control circuit, vacuum pumping equipment and vacuum chamber |
-
2017
- 2017-12-30 CN CN201721908682.1U patent/CN207686953U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111043014A (en) * | 2018-10-12 | 2020-04-21 | 青岛海湾精细化工有限公司 | Air compression station system and control method thereof |
CN111927748A (en) * | 2020-06-19 | 2020-11-13 | 中国科学院微电子研究所 | Gate valve control circuit, vacuum pumping equipment and vacuum chamber |
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Legal Events
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CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Zhou Ruigen Inventor after: Liu Honglin Inventor after: Huang Xiaoyao Inventor after: Chen Zhe Inventor after: Wu Junli Inventor after: Zhu Jianbo Inventor after: Bao Wenwu Inventor after: Zhou Wenping Inventor after: Jiu Jian Inventor after: Zheng Lujun Inventor before: Zhou Ruigen Inventor before: Zhu Jianbo Inventor before: Bao Wenwu Inventor before: Zhou Wenping Inventor before: Jiu Jian Inventor before: Zheng Lujun Inventor before: Liu Honglin |