CN207669036U - Rotary electrode end cleaning device - Google Patents
Rotary electrode end cleaning device Download PDFInfo
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- CN207669036U CN207669036U CN201721891607.9U CN201721891607U CN207669036U CN 207669036 U CN207669036 U CN 207669036U CN 201721891607 U CN201721891607 U CN 201721891607U CN 207669036 U CN207669036 U CN 207669036U
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- grinding tool
- sealing cover
- movable sealing
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- shell
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Abstract
The utility model discloses a kind of rotary electrode end cleaning devices, including cleaning assembly, air motor, hold-down support and movable sealing cover, hold-down support connect the cavity to form an inner hollow with movable sealing cover, air motor is connect with hold-down support, cleaning assembly be located in above-mentioned cavity and with the output axis connection of air motor, movable sealing cover side is equipped with dust suction interface.The utility model imitates the polishing mode of type form to be cleaned to electrode using revolution space, and circumferential and axial adjust its compression degree by compression spring, after grinding tool bistrique is worn, compression spring can be gradually adjusted, stable cleaning performance is on the one hand obtained, on the other hand the service life of bistrique also can fully be extended, use cost is reduced, this fit on dust exhaust apparatus during the work time directly siphons away dust of generation etc., optimize the operating environment of worker, reduces the harm to construction personnel's health.
Description
Technical field
The utility model is related to a kind of cleaning devices, and in particular to a kind of rotary electrode end cleaning device.
Background technology
Polysilicon is the main of the products such as monocrystalline silicon, the solar cell for manufacturing IC substrate and various semiconductor devices
Raw material.Polysilicon can be used for preparing monocrystalline silicon, be widely used in semi-conductor industry, as artificial intelligence, automatically control, information
The basic material of the devices such as processing, opto-electronic conversion.Due to the development of semi-conductor industry and solar cell, high-purity polycrystalline silicon
Demand is continuously increased.Polysilicon production process mainly has improved Siemens and silane thermal decomposition process in the world at present, wherein 70% or more adopts
Use improved Siemens.The production of improved Siemens energy compatible electronic grade and solar-grade polysilicon has technology maturation, fits
The features such as closing industrialization production, is the preferred technology that current production of polysilicon generally uses.Siemens Method is heavy by gas phase
Area method produces rod-like polycrystal silicon.When in actual production process by a stone or metal plate for standing a stove on as a precaution against fire bottom be distributed with promise it is dry to electrode, one
N-shaped is connected into silicon mandrel body between electrode, then by vapour deposition process, silicon crystal is made gradually to be deposited on silicon core from level to level
On, form a thicker polysilicon barred body.
Country's polysilicon market competition is very fierce at present.Since the production of polysilicon stage is mainly in polysilicon in furnace body
The process of interior deposition, therefore in order to improve production efficiency, each family is bound to reduce each standard in addition to production process as far as possible
The standby time.It is completed at present as the dismounting of barred body is all made of Pneumatic manipulator, substantially increases and tear stick efficiency open.
Currently, in preparation stage before production, the cleaning of furnace body electrode is still using manually using Pneumatic grinding machine with unification
The mode of a little nylon bistrique polishings.Since electrode is the basis for generating deposition reaction, after each use, need to sink on its surface
Long-pending silicon particle etc. polishes off, to reach better electric conductivity in process of production.
As shown in figure 3, it is cylinder that polysilicon electrode, which is a lower part, top is the structure of conical section, at present to its surface
The work of removing, pneumatic peripheral milling often are completed, and bistrique is smaller, and speed is slow, and surface quality is poor, affects production efficiency,
Additionally due to bruting process will raise the silicon particle dust on dust around and electrode so that working environment is to operating personnel
Health effect is larger.
Invention content
In view of the above-mentioned problems of the prior art, the utility model provides a kind of rotary electrode end cleaning device,
Electrode clean is efficient, and is polluted without granule dust, beneficial to the health of operating personnel.
To achieve the goals above, the technical solution adopted in the utility model is：A kind of rotary electrode end cleaning dress
It sets, including cleaning assembly, air motor, hold-down support and movable sealing cover, hold-down support connect to be formed in one with movable sealing cover
The hollow cavity in portion, air motor are connect with hold-down support, cleaning assembly be located in above-mentioned cavity and with the output of air motor
Axis connection, movable sealing cover side are equipped with dust suction interface.
Electrode centering for the ease of observing utility model works state at work, and when convenient for cleaning, activity
Sealing cover is transparent material.
It can smoothly enter into order to facilitate air in cleaning process, movable sealing cover upper end opens up aperture, is conducive to cross-ventilation.
Further, cleaning assembly be one end close one end open cylindrical structure, cleaning assembly include rotary support seat,
Shell, end grinding tool and circumferential grinding tool, shell are the cylinder of both ends open, and rotary support seat is arranged in one end of shell, rotation
Support base lateral surface is provided with connecting pole, and rotary support seat medial surface is equipped with end grinding tool, and end grinding tool is located at enclosure interior, shell
Internal side is equipped with circumferential grinding tool.
Further, end grinding tool is connect by end grinding tool guider screw with rotary support seat, and shell is equipped with multiple
Trepanning, circumferential grinding tool support has been connected by screw in trepanning, and circumferential grinding tool support medial surface is connected with circumferential grinding tool.
Further, grinding tool medial surface in end is provided with blind hole, is equipped with vertically-guided screw in blind hole, outside vertically-guided screw
Side is equipped with vertical compression spring, and vertically-guided screw one end is connect with end grinding tool, and the other end is connect with rotary support seat.
The utility model imitates the polishing mode of type form to be carried out clearly to electrode using revolution space compared with prior art
It washes, and circumferential and axial adjust its compression degree by compression spring, after grinding tool bistrique is worn, can gradually adjust compression spring, a side
Face obtains stable cleaning performance, on the other hand also can fully extend the service life of bistrique, reduces use cost, this fit on dust suction
Device during the work time directly siphons away dust of generation etc., optimizes the operating environment of worker, reduces to construction personnel's health
Harm.
Description of the drawings
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is cleaning assembly structural schematic diagram；
Fig. 3 is polysilicon electrode structural schematic diagram；
In figure：1, movable sealing cover, 11, dust suction interface, 2, cleaning assembly, 200, connecting pole, 201, rotary support seat, 202,
Vertically-guided screw, 203, vertical compression spring, 204, end grinding tool, 205, end grinding tool guider screw, 206, circumferential grinding tool, 207,
The support of circumferential grinding tool, 208, circumferential guide post, the 209, first gasket, 210, be adjusted circumferentially screw, 211, circumferential compression spring, 212, the
Two gaskets, 213, shell, 3, hold-down support, 4, air motor.
Specific implementation mode
The utility model is described in further detail below in conjunction with the accompanying drawings.
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
As shown in Figure 1, the utility model includes cleaning assembly 2, air motor 4, hold-down support 3 and movable sealing cover 1, it is fixed
Bearing 3 connect the cavity for forming an inner hollow with movable sealing cover 1 for the support to total, hold-down support 3, pneumatically
Motor 4 is connect with hold-down support 3, cleaning assembly 2 be located in above-mentioned cavity and with the output axis connection of air motor 4, activity envelope
It covers 1 side and is equipped with dust suction interface 11；When work, dust suction interface 11 is connect with dust exhaust apparatus first, then starts the utility model,
The utility model is covered on electrode to be cleaned, air motor 4 drives cleaning assembly 2 to rotate, and completes to the clear of electrode surface
It washes, dust particles generated in cleaning process etc. are siphoned away by dust exhaust apparatus through dust suction interface 11；Entire cleaning assembly 2 is in high speed
Electrode surface is removed totally quickly in rotary course, while dust exhaust apparatus siphons away dust, work efficiency is high, construction environment
It is good.
Cleaning assembly 2 is the cylindrical structure that one end open is closed in one end, and cleaning assembly 2 includes rotary support seat 201, shell
213, end grinding tool 204 and circumferential grinding tool 206, shell 213 are the cylinder of both ends open, and rotary support seat 201 is arranged in shell
213 one end, 201 lateral surface of rotary support seat are provided with connecting pole 200, and 201 medial surface of rotary support seat is equipped with end grinding tool
204, end grinding tool 204 is located inside shell 213, and 213 medial surface of shell is equipped with circumferential grinding tool 206；End grinding tool 204 passes through end
Portion's grinding tool guider screw 205 is connect with rotary support seat 201, and shell 213 is equipped with multiple trepannings, is connected by screw in trepanning
There is circumferential grinding tool support 207, circumferential grinding tool supports 207 medial surfaces to be connected with circumferential grinding tool 206；Electrode extend into cleaning assembly 2
It is interior, cleaning is rapidly completed by end grinding tool 204 and circumferential grinding tool 206.
In order to ensure that end grinding tool 204 can fit closely the surface of electrode always, grinding tool 204 medial surface in end is provided with blind
Hole, vertically-guided screw 202 is equipped in blind hole, and 202 outside of vertically-guided screw is equipped with vertical compression spring 203, vertically-guided screw
202 one end are connect with end grinding tool 204, and the other end is connect with rotary support seat 201, and end grinding tool 204 is in the axial direction then
There is certain removable space, so that vertical compression spring 203 forces end grinding tool 204 to be bonded with electrode seal.
As shown in Fig. 2, shell 213 is circumferential to be uniformly distributed several trepannings, the side in hole has fixed hinged seat, the other side to have
One small bearing for being threaded hole, circumferential grinding tool support 207 are connected to by hinge post on shell 213, circumferential grinding tool support 207
Corresponding with small bearing with threaded hole on shell 213 is a slotted hole, and one end is threaded post, and there are one screw threads for the other end
Hole, circumferential guide post 208 pass through circumferential grinding tool that the slotted hole on 207 is supported to be installed on shell 213 in corresponding threaded hole, the
Two gaskets 212 are mounted in circumferential guide post 208, block the slotted hole of circumferential grinding tool support 207, in 212 outside of the second gasket
Circumferential compression spring 211 is installed, circumferential compression spring 211 plays the role of inwardly compressing circumferential grinding tool support 207, circumferential compression spring 211
Outside is mounted with the first gasket 209 and is adjusted circumferentially screw 210；Screw 210 is adjusted circumferentially to be primarily used to adjust circumferential compression spring
211 compression degree；Circumferential 207 inside of grinding tool support is useful for installing the card slot of circumferential grinding tool 206,206 outside of circumferential grinding tool
There is small boss to be mounted in the circumferential support of grinding tool 207, the shape of 206 inside of circumferential grinding tool is just bonded the electrode to be cleaned,
Circumferential grinding tool 207 is all made of the softer materials such as similar porous wear resistant nylon with end grinding tool 204 and is made, it is also possible to similar resistance to
The form for grinding nylon bristle, in the dirt for grinding off electrode surface while not lesion electrode.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this practicality is new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this practicality is new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing in the equivalent requirements of the claims will be fallen
All changes in justice and range are embraced therein.Any reference numeral in claim should not be considered as limitation
Involved claim.
The above, the only preferred embodiment of the utility model, are not intended to limit the utility model, every according to this
The technical spirit of utility model should be included in this to any trickle amendment, equivalent replacement and improvement made by above example
Within the protection domain of utility model technical solution.
Claims (6)
1. a kind of rotary electrode end cleaning device, which is characterized in that including cleaning assembly（2）, air motor（4）, it is fixed
Bearing（3）With movable sealing cover（1）, hold-down support（3）With movable sealing cover（1）Connection forms the cavity of an inner hollow, pneumatically
Motor（4）With hold-down support（3）Connection, cleaning assembly（2）In above-mentioned cavity and and air motor（4）Output shaft connect
It connects, movable sealing cover（1）Side is equipped with dust suction interface（11）.
2. a kind of rotary electrode end cleaning device according to claim 1, which is characterized in that the movable sealing cover
（1）For transparent material.
3. a kind of rotary electrode end cleaning device according to claim 1, which is characterized in that the movable sealing cover
（1）Upper end opens up aperture.
4. a kind of rotary electrode end cleaning device according to claim 1, which is characterized in that the cleaning assembly
（2）The cylindrical structure of one end open, cleaning assembly are closed for one end（2）Including rotary support seat（201）, shell（213）, end
Grinding tool（204）With circumferential grinding tool（206）, shell（213）For the cylinder of both ends open, rotary support seat（201）It is arranged in shell
（213）One end, rotary support seat（201）Lateral surface is provided with connecting pole（200）, rotary support seat（201）Medial surface is equipped with
End grinding tool（204）, end grinding tool（204）Positioned at shell（213）Inside, shell（213）Medial surface is equipped with circumferential grinding tool
（206）.
5. a kind of rotary electrode end cleaning device according to claim 1, which is characterized in that the end grinding tool
（204）Pass through end grinding tool guider screw（205）With rotary support seat（201）Connection, shell（213）Multiple trepannings are equipped with,
Circumferential grinding tool support has been connected by screw in trepanning（207）, circumferential grinding tool support（207）Medial surface is connected with circumferential grinding tool
（206）.
6. a kind of rotary electrode end cleaning device according to claim 4, which is characterized in that the end grinding tool
（204）Medial surface is provided with blind hole, and vertically-guided screw is equipped in blind hole（202）, vertically-guided screw（202）Outside is equipped with vertical
Compression spring（203）, vertically-guided screw（202）One end and end grinding tool（204）Connection, the other end and rotary support seat（201）Even
It connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721891607.9U CN207669036U (en) | 2017-12-29 | 2017-12-29 | Rotary electrode end cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721891607.9U CN207669036U (en) | 2017-12-29 | 2017-12-29 | Rotary electrode end cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207669036U true CN207669036U (en) | 2018-07-31 |
Family
ID=62972690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721891607.9U Active CN207669036U (en) | 2017-12-29 | 2017-12-29 | Rotary electrode end cleaning device |
Country Status (1)
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| CN (1) | CN207669036U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111496598A (en) * | 2020-04-24 | 2020-08-07 | 广东博智林机器人有限公司 | Plane grinding device and plane grinding robot |
-
2017
- 2017-12-29 CN CN201721891607.9U patent/CN207669036U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111496598A (en) * | 2020-04-24 | 2020-08-07 | 广东博智林机器人有限公司 | Plane grinding device and plane grinding robot |
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