CN207662875U - A kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device - Google Patents
A kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device Download PDFInfo
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- CN207662875U CN207662875U CN201721848799.5U CN201721848799U CN207662875U CN 207662875 U CN207662875 U CN 207662875U CN 201721848799 U CN201721848799 U CN 201721848799U CN 207662875 U CN207662875 U CN 207662875U
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Abstract
A kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device, including detection of poison gas device (2), pump (4) and hose (5) and two couplings (1,3)；Coupling (1,3) is separately positioned on the air inlet and exhaust ports of dry type spy's tail-gas processing equipment；One end of detection of poison gas device (2) is connected to the coupling (3) of dry type spy's tail-gas processing equipment exhaust ports through hose (5), and the other end is connected to pump (4) through hose (5)；It pumps (4) one end and connects detection of poison gas device (2) exhaust outlet, the other end connects the coupling (1) at dry type spy's tail-gas processing equipment air inlet；Start pump (4) work, equipment exhaust ports gas sample is extracted, detection of poison gas device (2) is flowed through through hose (5), detection of poison gas device (2) detects the concentration for being extracted gas sample, and the gas passage then through pump (4) is discharged at equipment air inlet (1).
Description
Technical field
The utility model belongs to dry process spy's tail-gas processing technology field, more particularly to a kind of tail gas treatment device row
Gas port poison gas concentration monitoring device.
Background technology
In the production technology of the products such as semiconductor, photovoltaic, LCD, it is a large amount of, broad categories special to use
Gas, often these gases in process again cannot be totally consumed, remainder cost recovery is too high, if directly row
It puts, then can cause prodigious pollution to environment, therefore, often can first pass through special tail-gas processing equipment before gas discharge, it will
It is discharged into air again after harmful components removal therein, and what country was strict to the emission request of these gases, and have
Relevant specific discharge index, therefore, it is known that special tail-gas processing equipment exhaust outlet toxic gas emission concentration is necessary.
Currently, in dry type spy's tail-gas processing equipment, it is mainly logical to the detection means of equipment exhaust outlet poison gas concentration
The mode for crossing color indicator is achieved, i.e., installs the transparent window that an inside is equipped with indicator in equipment exhaust end, refer to
Show agent when encountering specific gas, color can change, to judge whether special tail-gas processing equipment will be relevant
Gas treatment is clean.
The above method has following disadvantage：
1. indicator can only judge to contain specific gas in tail gas, the specific dense of color change reactions gas cannot be passed through
Degree；
2. often the service life of equipment is considerably longer than indicator, and indicator indicates there is no apparent failure, often
It can cause the judgement of mistake or the waste of indicator；
3. such judgment method need to visually be judged, that is, need manual patrol, timeliness and accuracy excessively poor.
Invention content
In view of the deficiencies of the prior art, the utility model is intended to provide a kind of dry type spy tail-gas processing equipment exhaust outlet poison
Gas concentration monitoring device can more obtain equipment exhaust outlet poison gas concentration in real time and more accurately.
The technical solution of the utility model is a kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring dress
It sets, including detection of poison gas device, pump and hose and two couplings；
The coupling is separately positioned on the air inlet and exhaust ports of dry type spy's tail-gas processing equipment；
One end of the detection of poison gas device is connected to the steel pipe of dry type spy's tail-gas processing equipment exhaust ports through hose
Connector, the other end are connected to pump through hose, and the detection of poison gas device is for measuring the gas concentration flowed through；
Described pump one end connects detection of poison gas device exhaust outlet, and the other end connects dry type spy's tail-gas processing equipment air inlet
The coupling at place；
Start pump work, equipment exhaust ports gas sample is extracted, and detection of poison gas device, detection of poison gas are flowed through through hose
Device detects the concentration for being extracted gas sample, and then the gas passage through pump is discharged at equipment air inlet, therefore, is taken out after exhaust
The gas sample taken eventually flows back to equipment air inlet and enters back into tank interior again, though detection sample in containing it is toxic at
Equipment will not be flowed directly out by dividing, to pollute.
Further, the utility model further includes the controller being connect with detection of poison gas device, to receive detection of poison gas dress
Set detected gas concentration signal.
Further, above controller has gas concentration early warning and alarm setting.
Further, said pump is air driven pump.Using pneumatic actuation, it is not necessarily to power supply.
Further, above-mentioned detection of poison gas device includes the sensor switched over according to the difference of gaseous species.
Further, above-mentioned hose is transparent PVC hose.
Compared with prior art, the utility model is had an advantage that：
1) without having to worry about color indicator service life the problem of, what system used is all mechanical components, more stable, more reliable
And it can realize automation；
2) misgivings more reliable to the monitoring of system processing power, that no color indicator exhausts or fails etc.；
3) due to monitoring gas concentration in real time using detection of poison gas device, solve influences device because of the change of environment
Sensitivity, accuracy critical function the problem of；
4) the gas relevant parameter detected will be directly converted to after electric signal by detection of poison gas device feeds back to PLC dresses
It sets, without manually making an inspection tour at any time, alarm will be sent out automatically after exceeded, more in time, safer；
3) detection of poison gas device can intuitively be carried out with the environmentally friendly government decree of national regulation pair with the concentration of real-time display gas
Than, while the alarm output signal of monitoring device can be also adjusted to the standard of national requirements for environmental protection, when concentration is higher than setting value
When, system will send out alarm command, and user is allowed to understand equipment disposal ability in real time.
Description of the drawings
From the detailed description below in conjunction with the accompanying drawings to the utility model embodiment, the utility model these and/or its
Its aspect and advantage will become clearer and be easier to understand, wherein：
Attached drawing 1 is the apparatus structure schematic diagram of the utility model embodiment.
Specific implementation mode
It is right with reference to the accompanying drawings and detailed description in order to make those skilled in the art more fully understand the utility model
The utility model is described in further detail.Here it is to be noted that it in the accompanying drawings, assigning identical reference numeral to base
Component part with same or like structure and function in sheet, and will omit about their repeated description.
Embodiment 1
A kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device, as shown in Fig. 1, including poison gas inspection
Survey device 2, air driven pump 4 and transparent PVC hose 5 and two couplings 1,3；
The coupling 1,3 is separately positioned on the air inlet and exhaust ports of dry type spy's tail-gas processing equipment；
One end of the detection of poison gas device 2 is connected to dry type spy's tail-gas processing equipment exhaust outlet through transparent PVC hose 5
The coupling 3 at place, the other end are connected to air driven pump 4 through transparent PVC hose 5, and the detection of poison gas device 2 is according to gaseous species
The sensor that switches over of difference, for measuring the gas concentration flowed through；
4 one end of the air driven pump connects 2 exhaust outlet of detection of poison gas device, and the other end connects dry type spy's tail-gas processing equipment
Coupling 1 at air inlet；
Start air driven pump 4 to work, equipment exhaust ports gas sample is extracted, and detection of poison gas is flowed through through transparent PVC hose 5
Device 2, detection of poison gas device 2, which detects, is extracted the concentration of gas sample, the gas passage then through air driven pump 4 be discharged to equipment into
At gas port.
Controller is connect with detection of poison gas device 2 to receive 2 detected gas concentration signal of detection of poison gas device；Control
Device processed has gas concentration early warning and alarm setting.
By air hose by detection of poison gas device 2, equipment exhaust outlet coupling 3, air driven pump 4,1 steel of equipment air inlet
Pipe fitting connects, with realizing the mesh monitored in real time to target gas levels in equipment exhaust outlet, when exhaust outlet object gas
When concentration is more than preset value, controller can send out early warning and alarm signal, alarm occur, prompt staff need to be to equipment
It is safeguarded or is upgraded.
Each embodiment of the utility model is described above, above description is exemplary, and non-exclusive, and
And it is also not necessarily limited to disclosed each embodiment.Without departing from the scope and spirit of illustrated each embodiment, for
Many modifications and changes will be apparent from for those skilled in the art.Therefore, the guarantor of the utility model
Shield range should be subject to the protection scope in claims.
Claims (6)
1. a kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device, which is characterized in that including detection of poison gas
Device (2), pump (4) and hose (5) and two couplings (1,3)；
The coupling (1,3) is separately positioned on the air inlet and exhaust ports of dry type spy's tail-gas processing equipment；
One end of the detection of poison gas device (2) is connected to the steel of dry type spy's tail-gas processing equipment exhaust ports through hose (5)
Pipe fitting (3), the other end are connected to pump (4) through hose (5), and the detection of poison gas device (2) is used to measure the gas flowed through dense
Degree；
Described pump (4) one end connects detection of poison gas device (2) exhaust outlet, and the other end connects dry type spy's tail-gas processing equipment air inlet
Coupling (1) at mouthful；
Start pump (4) work, equipment exhaust ports gas sample is extracted, and detection of poison gas device (2) is flowed through through hose (5), poison
Gas detection device (2) detects the concentration for being extracted gas sample, and the gas passage then through pump (4) is discharged at equipment air inlet.
2. dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device as described in claim 1, which is characterized in that
Further include the controller being connect with detection of poison gas device (2), is believed with receiving the detected gas concentration of detection of poison gas device (2)
Number.
3. dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device as claimed in claim 2, which is characterized in that
The controller has gas concentration early warning and alarm setting.
4. dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device as described in claim 1, which is characterized in that
The pump (4) is air driven pump.
5. dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device as described in claim 1, which is characterized in that
The detection of poison gas device (2) includes the sensor switched over according to the difference of gaseous species.
6. dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device as described in claim 1, the hose (5)
For transparent PVC hose.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721848799.5U CN207662875U (en) | 2017-12-26 | 2017-12-26 | A kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721848799.5U CN207662875U (en) | 2017-12-26 | 2017-12-26 | A kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207662875U true CN207662875U (en) | 2018-07-27 |
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ID=62943172
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721848799.5U Active CN207662875U (en) | 2017-12-26 | 2017-12-26 | A kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device |
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| CN (1) | CN207662875U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108037246A (en) * | 2017-12-26 | 2018-05-15 | 江西诺发科技有限公司 | A kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device |
-
2017
- 2017-12-26 CN CN201721848799.5U patent/CN207662875U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108037246A (en) * | 2017-12-26 | 2018-05-15 | 江西诺发科技有限公司 | A kind of dry type spy tail-gas processing equipment exhaust outlet poison gas concentration monitoring device |
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