CN207661425U - A kind of sulfuric acid conveying device for sapphire substrate sheet pickling - Google Patents
A kind of sulfuric acid conveying device for sapphire substrate sheet pickling Download PDFInfo
- Publication number
- CN207661425U CN207661425U CN201721368355.1U CN201721368355U CN207661425U CN 207661425 U CN207661425 U CN 207661425U CN 201721368355 U CN201721368355 U CN 201721368355U CN 207661425 U CN207661425 U CN 207661425U
- Authority
- CN
- China
- Prior art keywords
- pipeline
- valve
- relief
- conveying device
- sulfuric acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 title claims abstract description 65
- 238000005554 pickling Methods 0.000 title claims abstract description 16
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 16
- 239000010980 sapphire Substances 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 title claims abstract description 16
- 230000005540 biological transmission Effects 0.000 claims abstract description 32
- 235000011149 sulphuric acid Nutrition 0.000 claims abstract description 15
- 239000001117 sulphuric acid Substances 0.000 claims abstract description 15
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 2
- 239000005864 Sulphur Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
The utility model discloses a kind of sulfuric acid conveying device for sapphire substrate sheet pickling, including tank for sulphuric acid, pump, transmission valve and descaling bath, the tank for sulphuric acid, pump, transmission valve and descaling bath are linked in sequence successively by pipeline；It is characterized in that, pipeline between the pump and the transmission valve is equipped with level sensor, the conveying device further includes relief pipeline, one end of the relief pipeline is connected with tank for sulphuric acid, the other end is connected on the pipeline between the level sensor and the transmission valve, and the relief pipeline is equipped with relief valve.Relief pipeline, relief valve and level sensor is arranged in the utility model, avoids original pipeline and the risk that plugging fault needs artificial pressure release to generate occurs, ensure that duration, stability and the safety of sulfuric acid transmission, improve production efficiency.
Description
Technical field
The utility model is related to a kind of sulfuric acid conveying devices, and in particular to a kind of sulfuric acid for sapphire substrate sheet pickling
Conveying device belongs to sapphire substrate sheet processing technique field.
Background technology
Sapphire substrate sheet is needed after CMP planarization by acid cleaning process, and pickling process is mixed using sulfuric acid and hydrogen peroxide
Close liquid cleaning；Since sulfuric acid density is 1.84g/cm3, relative to other liquid, than great, often will appear in conveying by
Excessive pressure makes this big proportion in pipeline caused by the gas of pipeline residual and hyperbaric solution body after last time Transmission
Liquid be difficult to continue to transmit；Since sulfuric acid is hazardous chemical, manual teardown pipeline, which carrys out pressure release, prodigious risk；And this
Kind dismounting can also influence the continuity of operation, influence production efficiency.
Invention content
The technical issues of solution：In view of the deficienciess of the prior art, the utility model, which provides one kind, being used for sapphire
The sulfuric acid conveying device of substrate slice pickling, by introducing relief pipeline on the basis of existing sulfuric acid conveying device, it is ensured that transmission
Duration, stability and safety.
Technical solution：The utility model provides a kind of sulfuric acid conveying device for sapphire substrate sheet pickling, including
Tank for sulphuric acid, pump, transmission valve and descaling bath, the tank for sulphuric acid, pump, transmission valve and descaling bath are linked in sequence successively by pipeline；Its
It is characterized in that, the pipeline between the pump and the transmission valve is equipped with level sensor, and the conveying device further includes pressure release
One end of pipeline, the relief pipeline is connected with tank for sulphuric acid, and the other end is connected to the level sensor and the transmission valve
Between pipeline on, the relief pipeline be equipped with relief valve.
Pipeline between the transmission valve and the descaling bath is equipped with level sensor, and the conveying device further includes letting out
One end of pressure pipeline, the relief pipeline is connected with tank for sulphuric acid, and the other end is connected to the level sensor and the pickling
On pipeline between slot, the relief pipeline is equipped with relief valve.
The pump is pneumatic diaphragm pump, model TREBOR MODEL 110.The transmission valve and relief valve are pneumatic
Diaphragm valve, model CKD AMD313R-15BUP-00N4F.The level sensor is photoelectric proximity switch, model
OMRON E2K-L26MC1。
Advantageous effect：The utility model sulfuric acid conveying device is provided with relief pipeline, relief valve and level sensor, starts
It pumps and starts to work after device, transmit valve and relief valve opens simultaneously, adjust the balance of manifold pressure, when level sensor incudes
Sulfate liquid in pipeline closes relief valve, and sulfuric acid is transferred to by the way that transmission valve is smooth in descaling bath, avoids original pipe
There is the risk that plugging fault needs artificial pressure release to generate in road, and ensure that duration, stability and the safety of sulfuric acid transmission, carries
High production efficiency.
Description of the drawings
Fig. 1 is the structural schematic diagram of 1 sulfuric acid conveying device of embodiment；
Fig. 2 is the structural schematic diagram of 2 sulfuric acid conveying device of embodiment.
Specific implementation mode
With reference to embodiment, the utility model is described in further detail, but therefore protection scope of the present invention is not limited to
In following embodiments, but limited by description and claims of this specification.
Embodiment 1
As shown in Figure 1, a kind of sulfuric acid conveying device for sapphire substrate sheet pickling, including tank for sulphuric acid, pump, transmission valve
And descaling bath, the tank for sulphuric acid, pump, transmission valve and descaling bath are linked in sequence successively by pipeline；The pump and the transmission valve
Between pipeline be equipped with level sensor, the conveying device further includes relief pipeline, one end of the relief pipeline and sulphur
Sour bucket is connected, and the other end is connected on the pipeline between the level sensor and the transmission valve, on the relief pipeline
Equipped with relief valve.
The pump is pneumatic diaphragm pump, model TREBOR MODEL 110.The transmission valve and relief valve are pneumatic
Diaphragm valve, model CKD AMD313R-15BUP-00N4F.The level sensor is photoelectric proximity switch, model
OMRON E2K-L26MC1。
When transmission, starter, pump is started to work, and transmits valve and relief valve opens simultaneously, adjust manifold pressure
Balance, when level sensor senses that the sulfate liquid in pipeline, closing relief valve, sulfuric acid are transferred to descaling bath by transmitting valve
It is interior, for the pickling after sapphire substrate sheet polishing.
Embodiment 2
As shown in Fig. 2, a kind of sulfuric acid conveying device for sapphire substrate sheet pickling, including tank for sulphuric acid, pump, transmission valve
And descaling bath, the tank for sulphuric acid, pump, transmission valve and descaling bath are linked in sequence successively by pipeline；The transmission valve and the acid
Pipeline between washing trough is equipped with level sensor, and the conveying device further includes relief pipeline, one end of the relief pipeline
It is connected with tank for sulphuric acid, the other end is connected on the pipeline between the level sensor and the descaling bath, the relief tube
Road is equipped with relief valve.
The pump is pneumatic diaphragm pump, model TREBOR MODEL 110.The transmission valve and relief valve are pneumatic
Diaphragm valve, model CKD AMD313R-15BUP-00N4F.The level sensor is photoelectric proximity switch, model
OMRON E2K-L26MC1。
When transmission, starter, pump is started to work, and transmits valve and relief valve opens simultaneously, adjust manifold pressure
Balance, when level sensor senses that the sulfate liquid in pipeline, closing relief valve, sulfuric acid are transferred to descaling bath by transmitting valve
It is interior, for the pickling after sapphire substrate sheet polishing.
Claims (4)
1. a kind of sulfuric acid conveying device for sapphire substrate sheet pickling, including tank for sulphuric acid, pump, transmission valve and descaling bath, institute
It states tank for sulphuric acid, pump, transmission valve and descaling bath to be linked in sequence successively by pipeline, which is characterized in that the conveying device further includes
Relief pipeline, the pipeline between the pump and the transmission valve are equipped with level sensor, one end of the relief pipeline and sulphur
Sour bucket is connected, and the other end is connected on the pipeline between the level sensor and the transmission valve or the transmission valve
Pipeline between the descaling bath is equipped with level sensor, and one end of the relief pipeline is connected with tank for sulphuric acid, another
End is connected on the pipeline between the level sensor and the descaling bath, and the relief pipeline is equipped with relief valve.
2. a kind of sulfuric acid conveying device for sapphire substrate sheet pickling according to claim 1, it is characterised in that institute
It is pneumatic diaphragm pump, model TREBOR MODEL 110 to state pump.
3. a kind of sulfuric acid conveying device for sapphire substrate sheet pickling according to claim 1, it is characterised in that institute
It is pneumatic diaphragm valve, model CKD AMD313R-15BUP-00N4F to state transmission valve and relief valve.
4. a kind of sulfuric acid conveying device for sapphire substrate sheet pickling according to claim 1, it is characterised in that institute
It is photoelectric proximity switch, model OMRON E2K-L26MC1 to state level sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721368355.1U CN207661425U (en) | 2017-10-23 | 2017-10-23 | A kind of sulfuric acid conveying device for sapphire substrate sheet pickling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721368355.1U CN207661425U (en) | 2017-10-23 | 2017-10-23 | A kind of sulfuric acid conveying device for sapphire substrate sheet pickling |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207661425U true CN207661425U (en) | 2018-07-27 |
Family
ID=62938316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721368355.1U Active CN207661425U (en) | 2017-10-23 | 2017-10-23 | A kind of sulfuric acid conveying device for sapphire substrate sheet pickling |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207661425U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110657350A (en) * | 2019-08-21 | 2020-01-07 | 云南大红山管道有限公司 | Protection device and method for low-pressure system equipment for ore pulp pipeline transportation |
-
2017
- 2017-10-23 CN CN201721368355.1U patent/CN207661425U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110657350A (en) * | 2019-08-21 | 2020-01-07 | 云南大红山管道有限公司 | Protection device and method for low-pressure system equipment for ore pulp pipeline transportation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230103 Address after: 100102 20628, Floor 2, Building A1, No. 1, Huangchang West Road, Dougezhuang, Chaoyang District, Beijing Patentee after: Youran Walker (Beijing) Technology Co.,Ltd. Address before: 212200 new materials Industrial Park, Youfang Town, Yangzhong City, Zhenjiang City, Jiangsu Province Patentee before: JIANGSU JESHINE NEW MATERIAL Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230706 Address after: 050035 No. 369, Zhujiang Avenue, high tech Zone, Shijiazhuang, Hebei Patentee after: TUNGHSU GROUP Co.,Ltd. Address before: 100102 20628, Floor 2, Building A1, No. 1, Huangchang West Road, Dougezhuang, Chaoyang District, Beijing Patentee before: Youran Walker (Beijing) Technology Co.,Ltd. |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A sulfuric acid conveying device for sapphire substrate pickling Granted publication date: 20180727 Pledgee: Hengshui Bank Co.,Ltd. Pledgor: TUNGHSU GROUP Co.,Ltd. Registration number: Y2024980031973 |