CN207637771U - Seeking border - Google Patents
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- CN207637771U CN207637771U CN201721671155.3U CN201721671155U CN207637771U CN 207637771 U CN207637771 U CN 207637771U CN 201721671155 U CN201721671155 U CN 201721671155U CN 207637771 U CN207637771 U CN 207637771U
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- clamping
- mounting platform
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- driving
- holder
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a kind of seeking border, including：Holder, clamping part and the sensor that pedestal, one end are fixed on the base, clamping part include：Mounted on the other end of holder mounting platform, two semicircular clamping holders being slidably mounted on mounting platform, multiple pinch wheels being rotatably installed in respectively on two clamping holders, on mounting platform and step up carriage drive with two and connect for drive two clamping holders close and separate clampings driving unit, the rotation driving unit that on mounting platform is used to that all pinch wheels to be driven to rotate；Wherein, two clamping holders are parallel to mounting platform and are located at same level, two recessed sides of clamping holder are opposite, form a circle, when clamping driving unit drives two clamping holders close and is separate, two clamping holders of driving move identical distance in the opposite direction simultaneously, the seeking border of the utility model have the advantages that look for it is former rapidly, manufacturing cost it is low.
Description
Technical field
The utility model belongs to semiconductor production processing technique field, and in particular to a kind of seeking border.
Background technology
Wafer is needed in the production line by hundreds of processes, in order to ensure that the acceptance rate of every procedure, wafer are wanted
It is continuous to carry out looking for original, seek side, positioning.Existing seeking border wafer is typically all to be placed on vacuum cup, and vacuum cup can be with
It is mobile, optical instrument centering is combined by wafer rotation, seeks side.The prior art has the following disadvantages：1, it is put in wafer
Center can be just found after needing rotation after setting on seeking border, needs to position adjusting more than twice every time, not only waste time, and
And axis lifts wafer and three thimbles can be made to collide repeatedly, causes breakage.2, manufacturing cost is high.
Utility model content
The utility model be to solve the above-mentioned problems and carry out, and it is an object of the present invention to provide one kind look for it is former rapid, be manufactured into
This low seeking border.
The utility model provides a kind of seeking border, which is characterized in that including：
Pedestal；
Holder, one end are fixed on the base；
Clamping part, including：Mounted on the other end of the holder mounting platform, two to be slidably mounted on the installation flat
Semicircular clamping holder on platform multiple are rotatably installed in two pinch wheels clamped on holder, are mounted on institute respectively
It states on mounting platform and is connect with two clamping carriage drives for driving two clamping holders close and separate
Clamp driving unit, the rotation driving unit on the mounting platform for driving all pinch wheels rotations；With
And
Sensor is mounted on the mounting platform, side is sought for wafer；
Wherein, two clamping holders are parallel to the mounting platform and are located at same level, two clampings
The recessed side of holder is opposite, forms a circle,
When the clamping driving unit drives two clamping holders close and is separate, two clamping holders are driven
Identical distance is moved in the opposite direction simultaneously,
The clamping driving unit drives two clamping holders close to each other, and the pinch wheels clamp wafer,
The center location of wafer is the position in the center of circle of two circles for clamping holder composition, and the rotation driving unit drives institute
Pinch wheels rotation is stated, the pinch wheels drive wafer rotation, described when notch on a wafer passes through the sensor sense
Sensor detects the position of notch.
Further, it in seeking border provided by the utility model, can also have the feature that：Wherein, the clamping
Driving unit includes：Mounted on the mounting platform first motor, with the first motor be drivingly connected threaded rod and
Two be separately fixed at two it is described clamp holder on movable blocks, wherein on the threaded rod be arranged two sections of screw pitch it is identical and
Oppositely oriented screw thread, two movable blocks are connect with two sections of screw threads on the threaded rod respectively.
Further, it in seeking border provided by the utility model, can also have the feature that：Wherein, the clamping
Driving unit includes also two supporting members being fixed on the mounting platform, and the both ends of the threaded rod are rotatablely installed respectively
On two supporting members.
Further, it in seeking border provided by the utility model, can also have the feature that：Wherein, the clamping
Driving unit also includes positioning member, and the positioning member is fixed on the mounting platform and positioned at two sections of the threaded rod
Between screw thread.
Further, it in seeking border provided by the utility model, can also have the feature that：Wherein, the clamping
Driving unit includes also limit component, is fixed on the mounting platform, relatively close for limiting two clamping holders
Minimum range.
Further, it in seeking border provided by the utility model, can also have the feature that：Wherein, the rotation
Driving unit includes：With the pinch wheels correspond and be separately fixed in the shaft of the pinch wheels the first driving wheel,
At least one tensioning wheel being slidably mounted on the mounting platform, with the tensioning wheel correspond and both ends be separately fixed at
The tensioning wheel and all first driving wheels are sequentially connected by the tensioning wheel and elastic component on the mounting platform
Belt or chain and the second motor for driving first driving wheel and the tensioning wheel to rotate.
Further, it in seeking border provided by the utility model, can also have the feature that：Wherein, the rotation
Driving unit also includes：It is multiple to be fixed on the mounting platform and be driven with the tensioning wheel, all first driving wheels
Connection is for changing the belt or the deflecting roller in chain drive direction.
Further, it in seeking border provided by the utility model, can also have the feature that：Wherein, seeking border is also
Including：A groove is arranged on the pedestal for camera, the Quick Response Code for detecting wafer, and the camera is mounted on the groove
It is interior, one first circular through hole is set on the mounting platform, and first circular through hole is located at two clamping holder compositions
Circle underface, the groove is located at the underface of first circular through hole, and the diameter of first circular through hole is more than
The diameter of wafer.
Further, it in seeking border provided by the utility model, can also have the feature that：Wherein, seeking border is also
Including：Platform rotates driving portion, for driving the clamping part rotation to carry out defects detection to the positive and negative of wafer, including：
Shaft, output end and the shaft drive connection that rotational installation is fixedly connected on the bracket and with the mounting platform
The third motor for driving wheel unit and installation to be drivingly connected on the base and with the input terminal of the driving wheel unit.
Further, it in seeking border provided by the utility model, can also have the feature that：Wherein, the clamping
Portion also includes：Shell, the second circular through hole is arranged on the shell, and the central axes of first circular through hole are justified with described second
The central axes of shape through-hole overlap, and the diameter of second circular through hole is more than the diameter of wafer,
The top side face of the shell be provided with the one-to-one slide opening of the pinch wheels, the direction of the slide opening with it is described
Direction when pinch wheels move is identical, and the slide opening is located on the track that the corresponding pinch wheels move.
Further, it in seeking border provided by the utility model, can also have the feature that：Wherein, the sensing
Device is fibre optical sensor, and the optical fiber of the light sensor is located in two circles for clamping holder composition, and from the circle
The center of circle distance be more than wafer radius.
The utility model has the following advantages that：
Seeking border involved by the utility model will be rotatablely installed on two semicircular clamping holders and clamp
Wheel, driving two semicircular clampings holders it is relatively close and far from wafer is clamped when, using clamping driving unit simultaneously
Two clamping holders of driving move identical distance in the opposite direction, and therefore, two semicircular clamping holders are mutually remote
From it is close when, two it is semicircular clamp holders symmetry axis it is constant, composition circle the center of circle it is also constant, so, work as crystalline substance
When disk is clamped wheel clamping, the center of circle is looked in the wafer center of circle it has been determined that need not rotate again, and rotation driving unit driving is all
Pinch wheels rotate so that wafer rotates, and sensor carries out wafer to seek side, need not use other optical instruments again, because
This, the seeking border of the utility model look for it is former it is rapid, manufacturing cost is low.
Description of the drawings
Fig. 1 is the structural schematic diagram of seeking border in the embodiments of the present invention；
Fig. 2 is the structural schematic diagram for the seeking border for removing shell in the embodiments of the present invention；
Fig. 3 is the vertical view of Fig. 2；
Fig. 4 is the structural schematic diagram of limit component in the embodiments of the present invention；
Fig. 5 is the front view of Fig. 4；
Fig. 6 is the enlarged drawing that A is marked in Fig. 2；
Fig. 7 is the structural schematic diagram for another angle of seeking border for removing shell in the embodiments of the present invention；
Fig. 8 is the structural schematic diagram of mounting platform in the embodiments of the present invention；
Fig. 9 is the structural schematic diagram of clamping part shell in the embodiments of the present invention；
Figure 10 is the structural schematic diagram of another angle of clamping part shell in the embodiments of the present invention.
Specific implementation mode
In order to make the technical means, creative features, achievement of purpose, and effectiveness of the utility model be easy to understand, with
Lower embodiment combination attached drawing is specifically addressed the seeking border of the utility model.
As shown in Figure 1 and Figure 2, seeking border 100 includes：Pedestal 10, holder 20, clamping part 30 and sensor 40.Holder 20
One end is fixed on pedestal 10, and clamping part 30 is mounted on the other end of holder 20, and the peace of sensor 40 turns on clamping part 30.
In the present embodiment, it is provided with a groove 11 on pedestal 10, in groove 11 is used to that camera (not shown) to be installed,
Camera is for reading wafer ID.
As shown in Fig. 2, clamping part 30 includes：31, two clamping holders 32 of mounting platform, multiple pinch wheels 33 are clamped and are driven
Moving cell 34, rotation driving unit 35.
Mounting platform 31 is mounted on the one end of holder 20 far from pedestal 10, is seen with the direction in Fig. 2, and mounting platform 31 is installed
In the upper end of holder 20.As shown in figure 8, in the present embodiment, the first circular through hole 311 is provided among mounting platform 31, the
One circular through hole 311 is located at the underface of the circle of two clamping holders 32 composition, and groove 11 is located at the first circular through hole 311
Underface, the diameter of the first circular through hole 311 are more than the diameter of the wafer of equipment maximum gauge that can be detected, work as wafer
When 200 clamped wheels 33 clamp, camera is mounted on the ID that wafer can be read on groove 11, solves the prior art and is detecting
The problem of wafer ID can not be read downward in the process.In the present embodiment, it is disposed adjacent with the first circular through hole 311
One rectangular through-hole 312, rectangular through-hole 312 are the installation spaces stayed for the second motor 355, the rectangular through-hole 312 as needed into
Row setting.
As shown in Figure 2 and Figure 3, two clamping holders 32 are slidably mounted on mounting platform 31, and two clamping holders 32 are half
Circle is parallel to mounting platform 31 and is located at same level, and two recessed sides of clamping holder 32 are oppositely arranged, therefore, two
A clamping holder 32 forms a circle.As shown in Figure 2, Figure 3, Figure 4, in the present embodiment, two are provided on mounting platform 31
To sliding rail 321, each holder 32 that clamps is slidably mounted on a pair of of sliding rail 321.
Each clamp is rotatablely installed at least one pinch wheels 33 on holder 32, in the present embodiment, each clamps holder
Three pinch wheels 33 are respectively mounted on 32, as shown in figure 4, being respectively provided with a circle groove in each pinch wheels 33, wafer is clamped wheel
When 33 clamping, wafer is stuck on groove, and wafer is avoided to tilt.
Driving unit 34 is clamped for driving two clamping holders 32 close to each other and separate, driving unit 34 is clamped and drives
When two clamping holders 32 move, two clamping holders 32 is driven to move identical distance in the opposite direction simultaneously, to two
When a clamping holder 32 is close to each other or separate, the symmetry axis of two clamping holders 32 is constant, therefore, in two clamping holders
32 when close to each other or separate, and the center location of two clamping holders 32 composition is constant, to seek side when wafer is mounted on
When device 100, the position in the wafer center of circle determines, for the position in the center of circle of two clamping holders 32 composition.
As shown in Figure 2 and Figure 3, in the present embodiment, clamping driving unit 34 includes：First motor 341, threaded rod 342,
Two movable blocks 343, supporting member 344 and positioning member 345, limit component 346.
First motor 341 is mounted on mounting platform 31.Threaded rod 342 is fixed on the motor shaft of first motor 341, spiral shell
Be provided with two sections of screw threads on rasp bar 342, two sections of screw threads it is oppositely oriented, and screw pitch is identical.Two movable blocks 343 respectively with screw thread
Two sections of screw threads on bar 342 match, and two movable blocks 343 are threadedly coupled with threaded rod 342, and are connected to two sections of screw threads
On, when threaded rod 342 rotates, distance mobile to opposite both direction and movement is identical respectively for two movable blocks 343.Two
A movable block 343 is separately fixed at one end of two clamping holders 32, when two movable blocks 343 move, drives two clampings
Holder 32 moves.
In the present embodiment, supporting member 344 and positioning member 345, supporting member 344 are additionally provided on mounting platform 31
It is fixed on mounting platform 31, and positioned at two sections of threaded rod 342, two sections of threaded rod 342 are rotatably installed in two branch respectively
It supports on component 344, is used to support threaded rod 342.Positioning member 345 is fixed on mounting platform 31, and positioned at threaded rod 342
Among two sections of screw threads, the distance of two 32 Distance positioning components 345 of clamping holder is identical.Positioning member 345 is used for whole in design
The position that the symmetry axis between two clamping holders 32 is determined when a equipment determines the position in equipment center of circle when detecting wafer
Set, and equipment after a period of use, two clamping holders 32 can be calibrated, it is ensured that whole device determine circle
The position of the heart is constant.
As shown in Figure 4, Figure 5, limit component 346 is fixed on mounting platform 31, for limiting two 32 phases of clamping holder
To close minimum range, avoid clipping broken wafer when aid wafer.Limit component 346 includes：Limit switch 361, " L "
365, two, spring, 366, two fixed blocks 367 of sliding rail of sliding block 362, pressing plate 363, adjusting screw rod 364, two of shape.
Two fixed blocks 367 are fixed on mounting platform 31, and the both ends of two sliding rails 366 are respectively fixed on two fixations
On block 367, the both ends of adjusting screw rod 364 are rotatably installed in respectively on two fixed blocks 367, the flanging sliding peace of sliding block 362
It is threadedly coupled on two sliding rails 361, and with adjusting screw rod 364, two springs 365 are respectively sleeved at two sliding rails 366
On, adjusting screw rod 364 rotates the position that can adjust sliding block 362, to adjust two minimum ranges stepped up between holder 32,
Reach and not only wafer was clamped but also will not be damaged caused by clamping force is excessive.Pressing plate 363 is fixed on two fixed blocks 367,
The sliding block 362 that position is adjusted is fixed.Limit switch 361 is mounted on another flanging of sliding block 362.Sliding block 362 is pacified
The flanging of dress limit switch 361 and two one end for stepping up holder 32 point-blank, are seen with the direction of Fig. 3, are added with two
The upper end of locking bracket 32 on the same line, therefore, when two are stepped up that holder 32 is relatively close to clamp wafer, with Fig. 3
Direction see that the upper end for stepping up holder 32 on the left side can touch limit switch 361, when the upper end for stepping up holder 32 on the left side
When touching limit switch 361, first motor 341 i.e. stop driving two step up holder 32 continue it is close to each other, to avoid by
Wafer clips broken.
Rotation driving unit 35 is for driving all pinch wheels 33 to rotate, to drive wafer to rotate.As Fig. 2, Fig. 3,
Shown in Fig. 6, rotation driving unit 35 includes：Multiple first driving wheels 351, at least one tensioning wheel 352, at least one elastic structure
Part 353, belt or chain 354, the second motor 355, multiple deflecting rollers 356.
Multiple first driving wheels 351 are corresponded with multiple pinch wheels 33, are separately fixed at corresponding pinch wheels 33
In shaft.
Tensioning wheel 352 is slidably mounted on mounting platform 31, in the present embodiment, two tensioning wheels 352, peace is arranged altogether
Sliding rail 3521 is fixed on assembling platform 31, tensioning wheel 352 is slidably mounted on sliding rail 3521.Belt or chain 354 will own
First driving wheel 351 and tensioning wheel 352 are sequentially connected.
Elastic component 353 is corresponded with tensioning wheel 352, and in the present embodiment, tensioning wheel 352 is two, elastic component
353 be also two.The both ends of each elastic component 353 are separately mounted on corresponding tensioning wheel 352 and mounting platform 31,
Between adjusting two clamping holders 32 apart from when, tensioning wheel 352 along sliding rail 3521 slide so that belt or chain
354 keep good drive connection between all first driving wheels 351 and tensioning wheel 352 always.In the present embodiment, elastic
Component 353 is spring.
Second motor 355 is for driving all first driving wheels 351 and tensioning wheel 352 to rotate.In the present embodiment, second
Motor 355 is fixed therein on a clamping holder 32, on the motor shaft of the second motor 355 and the clamping holder 32 one of them
The shaft of pinch wheels 33 is drivingly connected.Second motor 355 is run, and the shaft of pinch wheels 33 connected to it is driven to rotate, fixed
The first driving wheel 351 in the shaft rotates therewith, and belt or chain 354 drive remaining first driving wheel 351 and tensioning
352 rotation of wheel.
Certainly, the second motor 355 can also be fixed on mounting platform 31, and one is fixed on the motor shaft of the second motor 355
Driving wheel, the driving wheel are sequentially connected by belt or chain 354 with all first driving wheels 351 and tensioning wheel 352.
In the present embodiment, rotation driving unit 35 includes also multiple deflecting rollers 356, and deflecting roller 356 is for changing belt
Or the transmission direction of chain 354 so that the driving contact area between belt or chain 354 and the first driving wheel 351 increases
Greatly, belt or chain 354 in transmission process is avoided to skid.The quantity of deflecting roller 356 is arranged as required to, in this implementation
In example, each first driving wheel 351 corresponds to a deflecting roller 356, and deflecting roller 356 is by belt or chain 354 by each
Angle when the first driving wheel 351, tensioning wheel 352 between belt or chain 354 is respectively less than 90 °.
In the present embodiment, clamping part 30 also includes shell 36, and 31, two clamping holders 32 of mounting platform clamp driving
Unit 34, rotation driving unit 35 are respectively positioned in shell 36.As shown in Figure 9, Figure 10, the centre of shell 36 is provided with the second circle
Through-hole 361, the diameter of the second circular through hole 361 are more than the diameter of equipment wafer that can be detected, 361 He of the second circular through hole
The central axes of first circular through hole 311 overlap.The top side face of shell 36 be provided with 33 one-to-one slide opening 362 of pinch wheels,
The direction when direction of slide opening 362 is moved with pinch wheels 33 is identical, and each slide opening 362 is located at corresponding pinch wheels 33 and moves
Track on, i.e., the sliding in the corresponding slide opening 362 when pinch wheels 33 move.
In the present embodiment, seeking border 100 also includes that platform rotates driving portion 50.Platform rotation driving portion 50 is for driving
Clamping part 30 rotates, to which the convenient positive and negative to wafer carries out defects detection.
As shown in Fig. 2, platform rotation driving portion 50 includes：Shaft 51, driving wheel unit 52 and third motor 53.Installation
Platform 31 is fixed on one end of shaft 51, and shaft 51 is rotatably installed on holder 20, in the present embodiment, shaft 51 and holder 20
Rotation is provided with bearing between contact position.The output end and shaft 51 for driving wheel unit 52 are drivingly connected, driving wheel unit 52
Input terminal is drivingly connected with third motor 53.In the present embodiment, driving wheel unit 52 includes the driving of multiple drive connections
Wheel.Third motor 53 is mounted in pedestal 10, and third motor 53 is run, by driving force by driving wheel unit 52 to pass to shaft
51, the rotation of shaft 51 drives mounting platform 31 to rotate.
As shown in Fig. 2, Fig. 7, sensor 40 is mounted on mounting platform 31, and side is sought for wafer.In the present embodiment,
Sensor 40 is fibre optical sensor, and the optical fiber of fibre optical sensor is located in the circle of two clamping holders 32 composition, and distance two
The distance for clamping the center of circle for the circle that holder 32 forms is more than the radius of wafer.When installing shell 36, optical fiber is located at shell 36
In second circular through hole 361, close to the side wall of shell 36, and the distance in the center of circle of the circle of two clamping holders 32 of distance composition is big
In the radius of wafer.
The seeking border course of work：
When wafer is put into seeking border 10 and is detected, the initial positions of two clamping holders 32 be far from state, therefore,
After wafer is put between pinch wheels 33, clamping the driving of driving unit 34, to clamp holder 32 close to each other, and wafer is pressed from both sides
Tightly, the center location of wafer determines, for the position in the center of circle of the circle of two clamping holders 32 composition.Rotate driving unit 35
Pinch wheels 33 are driven to rotate, to drive wafer to rotate, when the notch of wafer passes through sensor 40, sensor sense 40 is answered
Side is sought to notch realization.Camera 60 reads wafer ID by the first circular through hole 311 and the second circular through hole 361
It takes, read operation is convenient.
When needing to carry out defects detection to wafer, platform rotates driving portion 50 and clamping section 30 is driven to rotate, you can to crystalline substance
Disk positive and negative is detected.
The above embodiment is the preferred case of the utility model, is not intended to limit the scope of protection of the utility model.
Claims (11)
1. a kind of seeking border, which is characterized in that including：
Pedestal；
Holder, one end are fixed on the base；
Clamping part, including：Mounted on the other end of the holder mounting platform, two be slidably mounted on the mounting platform
Semicircular clamping holder, it is multiple be rotatably installed in respectively two it is described clamp holder on pinch wheels, be mounted on the peace
The clamping for driving two clamping holders close and separate is connect on assembling platform and with two clamping carriage drives
Driving unit, the rotation driving unit on the mounting platform for driving all pinch wheels rotations；And
Sensor is mounted on the mounting platform, side is sought for wafer,
Wherein, two clamping holders are parallel to the mounting platform and are located at same level, two clamping holders
Recessed side is opposite, forms a circle,
When the clamping driving unit drives two clamping holders close and is separate, two clamping holders of driving are simultaneously
Identical distance is moved in the opposite direction,
The clamping driving unit drives two clamping holders close to each other, and the pinch wheels clamp wafer, wafer
The center location of piece is the position in the center of circle of two circles for clamping holder composition, and the rotation driving unit drives the folder
Bearing up pulley rotates, and the pinch wheels drive wafer rotation, when notch on a wafer passes through the sensor sense, the sensing
Device detects the position of notch.
2. seeking border according to claim 1, it is characterised in that：
The clamping driving unit includes：It is drivingly connected mounted on the first motor of the mounting platform, with the first motor
Threaded rod and two be separately fixed at two it is described clamp holder on movable blocks,
Wherein, two sections of screw pitch identical and oppositely oriented screw thread is set on the threaded rod, two movable blocks respectively with institute
State two sections of screw threads connection on threaded rod.
3. seeking border according to claim 2, it is characterised in that：
The clamping driving unit also includes two supporting members being fixed on the mounting platform, the both ends of the threaded rod
It is rotatably installed in respectively on two supporting members.
4. seeking border according to claim 2, it is characterised in that：
The clamping driving unit also includes positioning member, and the positioning member is fixed on the mounting platform and positioned at described
Between two sections of screw threads of threaded rod.
5. seeking border according to claim 2, it is characterised in that：
The clamping driving unit includes also limit component, is fixed on the mounting platform, for limiting two clampings
The relatively close minimum range of holder.
6. seeking border according to claim 1, it is characterised in that：
The rotation driving unit includes：It corresponds and is separately fixed in the shaft of the pinch wheels with the pinch wheels
First driving wheel, at least one tensioning wheel being slidably mounted on the mounting platform and tensioning wheel one-to-one correspondence and two
End is separately fixed at the tensioning wheel and elastic component on the mounting platform, passes the tensioning wheel and all described first
Belt or chain that driving wheel is sequentially connected and the second electricity for driving first driving wheel and the tensioning wheel to rotate
Machine.
7. seeking border according to claim 6, it is characterised in that：
The rotation driving unit also includes：It is multiple be fixed on the mounting platform and with the tensioning wheel, all described
One driving wheel is sequentially connected for changing the belt or the deflecting roller in chain drive direction.
8. seeking border according to claim 1, which is characterized in that further include：
A groove is arranged on the pedestal for camera, the Quick Response Code for detecting wafer, and the camera is mounted on the groove
It is interior,
One first circular through hole is set on the mounting platform, and first circular through hole is located at two clamping holder compositions
Circle underface, the groove is located at the underface of first circular through hole, and the diameter of first circular through hole is more than
The diameter of wafer.
9. seeking border according to claim 8, which is characterized in that further include：
Platform rotates driving portion, for driving the clamping part rotation to carry out defects detection to the positive and negative of wafer, including：Turn
The drive of shaft, output end and shaft drive connection that dynamic installation is fixedly connected on the bracket and with the mounting platform
The third motor that driving wheel unit and installation are drivingly connected on the base and with the input terminal of the driving wheel unit.
10. seeking border according to claim 8, which is characterized in that further include：
The clamping part also includes：The second circular through hole, the central axes of first circular through hole are arranged on the shell in shell
It being overlapped with the central axes of second circular through hole, the diameter of second circular through hole is more than the diameter of wafer,
The top side face of the shell is provided with and the one-to-one slide opening of the pinch wheels, the direction of the slide opening and the clamping
Direction when wheel is mobile is identical, and the slide opening is located on the track that the corresponding pinch wheels move.
11. seeking border according to claim 1, it is characterised in that：
The sensor is fibre optical sensor, and the optical fiber of the sensor is located in two circles for clamping holder composition, and
It is more than the radius of wafer with a distance from the center of circle of the circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721671155.3U CN207637771U (en) | 2017-12-05 | 2017-12-05 | Seeking border |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721671155.3U CN207637771U (en) | 2017-12-05 | 2017-12-05 | Seeking border |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207637771U true CN207637771U (en) | 2018-07-20 |
Family
ID=62855863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721671155.3U Active CN207637771U (en) | 2017-12-05 | 2017-12-05 | Seeking border |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207637771U (en) |
-
2017
- 2017-12-05 CN CN201721671155.3U patent/CN207637771U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Room 202, Building 1, 555 Wanfang Road, Minhang District, Shanghai, 201100 Patentee after: Shanghai Han's Fuchuang Technology Co.,Ltd. Address before: Room 202, Building 1, 555 Wanfang Road, Minhang District, Shanghai, 201100 Patentee before: SHANGHAI FORTREND TECHNOLOGY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |