CN207634655U - A kind of magnetic fluid seal driving device for multi-chamber PECVD device - Google Patents
A kind of magnetic fluid seal driving device for multi-chamber PECVD device Download PDFInfo
- Publication number
- CN207634655U CN207634655U CN201721712564.3U CN201721712564U CN207634655U CN 207634655 U CN207634655 U CN 207634655U CN 201721712564 U CN201721712564 U CN 201721712564U CN 207634655 U CN207634655 U CN 207634655U
- Authority
- CN
- China
- Prior art keywords
- transmission shaft
- water
- shell
- magnetic fluid
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
Abstract
The utility model discloses a kind of magnetic fluid seal driving devices for multi-chamber PECVD device, including transmission shaft and shell, transmission shaft is located at installation on the part in shell, and there are two deep groove ball bearings, the deep groove ball bearing constitutes stable transmission system with transmission shaft, shell, which is located on the end face of inlet side one end, is provided with end face fluorine glue O-ring seal, device for sealing magnetic fluid is provided in shell, transmission shaft atmospheric side is connected with aqueous medium circulator, water-cooling circulating system is formed between aqueous medium circulator and transmission shaft, and NPT cutting ferrule water swivels are additionally provided on shell.The setting of the utility model water-cooling circulating system can effectively reduce transmission shaft temperature, it is ensured that transmission shaft works normally, the setting of metal o-ring, improves sealing effect, and the setting of iso standard flange improves working efficiency convenient for handling.
Description
Technical field
The utility model is related to magnetic fluid seal driving devices, and in particular to a kind of magnetic for multi-chamber PECVD device
Fluid-tight transmission.
Background technology
Traditional solar cell PECVD（Plasma enhanced chemical vapor deposition equipment）Production line has single-chamber room
PECVD device is generally only applicable to the technique research and development of the research and development institutions such as battery production manufacturer and each colleges and universities, research institute, without
Volume production can be formed；Also there is multi-chamber PECVD device, when solar cell is transferred to next cavity from a cavity, valve
The synchronous transfer of switching and solar panel is the key that production efficiency of equipment, and original traditional technology needs the transmission of multigroup complexity to fill
It sets and traditional mechanical seal structure or common magnet fluid sealing, and the production technology of cooperation complexity.Production efficiency is not
Height, and need frequent maintaining.
Device for sealing magnetic fluid, because of its long-life, without abrasion, the performances such as vacuum degree is high, the range of speeds is wide, big absolutely
Majority needs the occasion substitution tradition machinery sealing that turn seals.But single magnetic fluid sealing structure, it can not be suitable for
All application scenarios.For the process conditions in PECVD device cavity, needing adaptation complicated, device for sealing magnetic fluid must
The characteristics such as high temperature resistant, resistance to dust, resistance to high vacuum, rotating accuracy height must be provided simultaneously with.Traditional mechanical seal and common magnetic current
Body sealing is not well positioned to meet.
Utility model content
For problems of the prior art, the purpose of this utility model is that design, which provides one kind, being used for multi-chamber
The magnetic fluid seal driving device of PECVD device.
A kind of magnetic fluid seal driving device for multi-chamber PECVD device, including transmission shaft and socket are set
The shell on transmission shaft is set, the transmission shaft is an elongated shaft, enters chamber from atmosphere end across PECVD device chamber sidewall
Chamber interior, atmosphere end connect motor and synchronous pulley, and vacuum end connects driving wheel, installed on the part that transmission shaft is located in shell
There are two deep groove ball bearing, which constitutes stable transmission system with transmission shaft, and shell is located at inlet side one end
End face fluorine glue O-ring seal is provided on end face, it is characterised in that device for sealing magnetic fluid, the biography are provided in the shell
Moving axis atmospheric side is connected with aqueous medium circulator, and Water-cooling circulating system is formed between the aqueous medium circulator and transmission shaft
It unites, NPT cutting ferrule water swivels is additionally provided on the shell.
A kind of magnetic fluid seal driving device for multi-chamber PECVD device, it is characterised in that close to vacuum
Metal o-ring is installed on the deep groove ball bearing end face of side.
A kind of magnetic fluid seal driving device for multi-chamber PECVD device, it is characterised in that the shell
For the shell with iso standard flange.
A kind of magnetic fluid seal driving device for multi-chamber PECVD device, it is characterised in that the magnetic current
Body sealing device includes being socketed the neodymium iron boron permanent-magnet steel being arranged, magnetic pole positioned at enclosure interior and with transmission shaft.
A kind of magnetic fluid seal driving device for multi-chamber PECVD device, it is characterised in that the water cooling
The circulatory system includes the inlet and outlet being arranged on aqueous medium circulator, is arranged along propeller shaft length direction endoporus,
It is connected and is deep into the water service pipe of endoporus bottom with water inlet, the water outlet is connected to endoporus.
A kind of magnetic fluid seal driving device for multi-chamber PECVD device, it is characterised in that the NPT cards
It covers there are four water swivel settings, two water inlet water swivels, two water outlet water swivels, intake water swivel and corresponding water outlet water swivel
Between annular water tank is set.
Compared with traditional mechanical seal and common magnet fluid sealing, the technological merit of the utility model：
1）The axis internal water cooling circulatory system that transmission shaft and aqueous medium spinner are constituted, can extremely efficiently reduce whole
The temperature of transmission shaft so that transmission shaft can most of length stretch into the worst hot case inside apparatus cavity, also can normal work
Make, indeformable not interim card, ensures that the steady of solar panel at the uniform velocity transmits；
2）Transmission shaft, two accurate deep groove ball bearings and antifriction metal (AFM) sealing ring form a reliable and stable power train
System, rotating accuracy is high, and shaft end circle bounce control is within the scope of 0.1mm, and good dustproof effect, effectively prevents PECVD device chamber
Destruction of the indoor technique dust to magnet fluid sealing；
3）It devises iso standard flange on shell to compare with common bolt hole flange, installation and removal will be more square
Just quick, improve working efficiency.
Description of the drawings
Fig. 1 is the utility model overall structure diagram；
In figure, 1- transmission shafts, 2- shells, 3- deep groove ball bearings, the end faces 4- fluorine glue O-ring seal, 5- aqueous medium circulators,
6-NPT cutting ferrule water swivels, 7- metal o-rings, 8- neodymium iron boron permanent-magnet steels, 9- magnetic poles, 10- water inlets, 11- water outlets, 12-
Endoporus, 13- water service pipes, 14- annular water tanks.
Specific implementation mode
The utility model is described in further detail below in conjunction with Figure of description, and provides specific implementation mode.
As shown in Figure 1, a kind of magnetic fluid seal driving device for multi-chamber PECVD device of the utility model, including
Transmission shaft 1, the shell 2 with iso standard flange, end face fluorine glue O-ring seal 4, NPT cutting ferrules water swivel 6, deep groove ball bearing 3, gold
Belong to sealing ring 7, neodymium iron boron permanent-magnet steel 8, magnetic pole 9, aqueous medium spinner 5, water service pipe 13.
Wherein, transmission shaft 1 is an elongated shaft, enters chamber interior from atmosphere end across PECVD device chamber sidewall, greatly
Gas end connects motor and synchronous pulley, and vacuum end connects driving wheel, the stabilization of solar panel can be driven at the uniform velocity to be driven.Band ISO is marked
The shell 2 of quasi- flange is the shell of the device for sealing magnetic fluid, and iso standard flange is for being fixed on PECVD device chamber sidewall
On, because being iso standard flange, installation and removal are all very convenient quick.End face fluorine glue O-ring seal 3 is used for shell
Static seal between flange and PECVD device chamber sidewall, the heat-proof corrosion resistant performance guarantee of the fluorubber safety of static seal
It is reliable and stable.4 NPT cutting ferrules water swivels 6 in 2 outer circle of shell, two water inlet water swivels, two water outlet water swivels, water of intaking
Annular water tank 14 is set between connector and corresponding water outlet water swivel, and a waterway circulating being used to form inside shell 2 can be with
Effectively reduce shell 2 surface, magnetic pole 9, neodymium iron boron permanent-magnet steel 8 and magnet fluid sealing position temperature, ensure magnet fluid sealing
It can be run under 0-80 DEG C of temperature range always.
Aqueous medium spinner 5, has been internally integrated 11 two channels of water inlet 10 and water outlet, and water inlet 10 is passed through cooling water
Afterwards, into 13 inside of water service pipe being attached thereto and through to the endoporus bottom of transmission shaft 1, then further along 13 outer wall of water service pipe
Gap between the endoporus inner wall of transmission shaft 1 returns to aqueous medium spinner 9, and passes through its internal exhalant canal from water outlet
Mouth 11 flows out, to form a sufficient water-cooling circulating system of water-cooled effect so that transmission shaft 1 stretches into inside apparatus cavity
Part can also work normally under worst hot case, indeformable not interim card.
Wear-resisting metal o-ring 7, is installed on the bearing face of inlet side, is contacted with bearing inner race rotation section facet, turns
When dynamic it is not only wear-resisting but also can dust seal lead to the card of bearing for preventing the indoor technique dust of PECVD device chamber from entering bearing
Extremely.Accurate deep groove ball bearing 3 is installed on transmission shaft 1, constitutes a stable transmission system so that the shaft end of transmission shaft 1
Within the scope of 0.1mm, transmission shaft 1 and neodymium iron boron permanent-magnet steel 8, magnetic pole 9 constitute a magnetic seal circuit, make for circle bounce control
Magnetic saturation intensity, the resistance to pressure difference performance for obtaining magnet fluid sealing position are all reliable and stable.
The utility model is fixed on by shell iso standard flange on PECVD device cavity wall, 1 atmosphere end of transmission shaft peace
It fills a synchronous pulley to be connected to the motor, motor provides power and transmission shaft synchronous rotary, 1 vacuum end of transmission shaft is driven to install one
Driving wheel sends power synchronous to solar panel, drives the at the uniform velocity steady onwards transmission of solar panel.Each PECVD device chamber
Both sides have been uniformly distributed several magnetic fluid seal driving devices, before each monoblock big battery plate is driven by several driving wheels
Into, be transferred to next chamber from a chamber, without pause, transmission speed is can be fast or slow, easy to control.
Claims (6)
1. a kind of magnetic fluid seal driving device for multi-chamber PECVD device, including transmission shaft（1）And socket setting is passing
Moving axis（1）On shell（2）, the transmission shaft（1）For an elongated shaft, from atmosphere end pass through PECVD device chamber sidewall into
Enter chamber interior, atmosphere end connects motor and synchronous pulley, and vacuum end connects driving wheel, transmission shaft（1）Positioned at shell（2）Interior
There are two deep groove ball bearings for installation on part（3）, the deep groove ball bearing（3）With transmission shaft（1）Constitute stable transmission system, shell
Body（2）End face fluorine glue O-ring seal is provided on the end face of inlet side one end（4）, it is characterised in that the shell（2）It is interior
It is provided with device for sealing magnetic fluid, the transmission shaft（1）Atmospheric side is connected with aqueous medium circulator（5）, the aqueous medium
Circulator（5）With transmission shaft（1）Between form water-cooling circulating system, the shell（2）On be additionally provided with NPT cutting ferrule water swivels
（6）.
2. a kind of magnetic fluid seal driving device for multi-chamber PECVD device as described in claim 1, it is characterised in that
Close to the deep groove ball bearing of inlet side（3）Metal o-ring is installed on end face（7）.
3. a kind of magnetic fluid seal driving device for multi-chamber PECVD device as described in claim 1, it is characterised in that
The shell（2）For the shell with iso standard flange.
4. a kind of magnetic fluid seal driving device for multi-chamber PECVD device as described in claim 1, it is characterised in that
The device for sealing magnetic fluid includes being located at shell（2）Internal and and transmission shaft（1）It is socketed the neodymium iron boron permanent-magnet steel of setting
（8）, magnetic pole（9）.
5. a kind of magnetic fluid seal driving device for multi-chamber PECVD device as described in claim 1, it is characterised in that
The water-cooling circulating system includes being arranged in aqueous medium circulator（5）On water inlet（10）And water outlet（11）, along transmission shaft
（1）The endoporus of length direction setting（12）With water inlet（10）It is connected and is deep into endoporus（12）The water service pipe of bottom（13）, institute
State water outlet（11）With endoporus（12）Connection.
6. a kind of magnetic fluid seal driving device for multi-chamber PECVD device as described in claim 1, it is characterised in that
The NPT cutting ferrules water swivel（6）There are four settings, two water inlet water swivels, two water outlet water swivels, intake water swivel and correspondence
Water outlet water swivel between annular water tank is set（14）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721712564.3U CN207634655U (en) | 2017-12-11 | 2017-12-11 | A kind of magnetic fluid seal driving device for multi-chamber PECVD device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721712564.3U CN207634655U (en) | 2017-12-11 | 2017-12-11 | A kind of magnetic fluid seal driving device for multi-chamber PECVD device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207634655U true CN207634655U (en) | 2018-07-20 |
Family
ID=62862254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721712564.3U Active CN207634655U (en) | 2017-12-11 | 2017-12-11 | A kind of magnetic fluid seal driving device for multi-chamber PECVD device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207634655U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114060526A (en) * | 2020-08-07 | 2022-02-18 | 勤友光电股份有限公司 | Transmission device |
-
2017
- 2017-12-11 CN CN201721712564.3U patent/CN207634655U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114060526A (en) * | 2020-08-07 | 2022-02-18 | 勤友光电股份有限公司 | Transmission device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203286900U (en) | Cooling structure for heating furnace cantilever roller | |
| CN207634655U (en) | A kind of magnetic fluid seal driving device for multi-chamber PECVD device | |
| CN105927302B (en) | Magnetic driving natural gas pipe generator | |
| CN105485027A (en) | Short-wheelbase sand-prevention horizontal submersible tubular type axis-flow pump | |
| CN105508285B (en) | A kind of single-stage high-speed centrifugal air blower magnetic liquid sealing structure | |
| CN203625463U (en) | Vacuum deposition system and rotational feed-in device thereof | |
| CN205565965U (en) | Ring type brushless motor and adopt motor -driven pump of this motor | |
| CN103161749A (en) | High-power plastic lining magnetic pump | |
| CN209787022U (en) | Cooling structure of permanent magnet speed regulator | |
| CN204852354U (en) | New installation of sealed heat transfer of reinforcing magnetic fluid | |
| CN217518869U (en) | Self-balancing heavy-duty stainless steel magnetic pump | |
| CN202673703U (en) | High-revolving-speed magnetic-transmission tangent flow pump | |
| CN102367799A (en) | Spiral pipe pump | |
| CN207884420U (en) | A kind of Double shaft-extension submersible machine being suitable for the complete deep alignment Magnetic driving in sea | |
| CN205260647U (en) | Water -cooling high -temperature bearing seat | |
| CN204391958U (en) | A kind of oil cooling structure of servomotor | |
| CN211039684U (en) | Magnetic fluid sealing transmission device with vacuumizing channel | |
| CN203114664U (en) | Magnetic transmission non-leakage centrifugal fan | |
| CN209370085U (en) | Centrifugal cryogenic liquid pump | |
| CN203175986U (en) | Petrochemical pump cover | |
| CN209041553U (en) | The mixed rotary sealing appts of a kind of air-liquid, electricity | |
| CN208586348U (en) | A kind of sputtering coating equipment workpiece rotating frame dynamic sealing drive mechanism | |
| CN102886503B (en) | Cooling roller device for preparing nanocrystalline | |
| CN106787608B (en) | Magnetic transmission device of titanium tetrachloride reactor | |
| CN220617521U (en) | Novel water-cooling transmission device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181219 Address after: 313300 Liangshan High-tech Industrial Park, Anji Economic Development Zone, Diipu Street, Anji County, Huzhou City, Zhejiang Province Patentee after: Zhejiang Micromagnetic Precision Technology Co., Ltd. Address before: 310012 Room 501, Yitai science and technology building, 76 Gu Cui Road, Xihu District, Hangzhou, Zhejiang Patentee before: Hangzhou Vico magnetoelectric Technology Co. Ltd. |
|
| TR01 | Transfer of patent right | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 313300 Liangshan high tech Industrial Park, Anji Economic Development Zone, Diepu street, Anji County, Huzhou City, Zhejiang Province Patentee after: Zhejiang micromagnetic Precision Technology Co.,Ltd. Address before: 313300 Liangshan high tech Industrial Park, Anji Economic Development Zone, Diepu street, Anji County, Huzhou City, Zhejiang Province Patentee before: Zhejiang Micromagnetic Precision Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |