CN207624666U - A kind of energy saver of semiconductor production line - Google Patents
A kind of energy saver of semiconductor production line Download PDFInfo
- Publication number
- CN207624666U CN207624666U CN201721272262.9U CN201721272262U CN207624666U CN 207624666 U CN207624666 U CN 207624666U CN 201721272262 U CN201721272262 U CN 201721272262U CN 207624666 U CN207624666 U CN 207624666U
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- babinet
- fixedly connected
- semiconductor production
- pipe
- production line
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Abstract
The utility model discloses a kind of energy savers of semiconductor production line, including babinet and active box 16, the left side of the babinet, which is run through, air inlet pipe, the left end of air inlet pipe is installed with the outer machine of cold wind, it is fixedly connected with filter screen between the both sides of the cabinet wall, and it is located between the both sides of cabinet wall on the right side of filter screen and is fixedly connected with disinfection network, it is communicated with heating tube on the right side of the suction disc, the bottom of the water tank, which is run through, vertical tube, the bottom end of the vertical tube is located at one end outside water tank and runs through babinet and extend to the inside of babinet, the vertical tube extends to one end of box house and is fixedly connected with the bottom of cabinet wall, the utility model is related to semiconductor production energy-saving equipment technical fields.The energy saver of the semiconductor production line, gas after cooling can cool down to the place of needs, while may be used as compression and being dusted to device and other purposes.Using very convenient, apparatus structure is simple, highly practical.
Description
Technical field
The utility model is related to semiconductor production energy-saving equipment technical field, specially a kind of semiconductor production line it is energy saving
Device.
Background technology
Semiconductor refers to material of the electric conductivity between conductor and insulator under room temperature.Semiconductor is in radio, TV
It has a wide range of applications on machine and thermometric, if diode is exactly the device using semiconductor fabrication.Semiconductor refers to that one kind is led
Can electrically be controlled, range can from insulator to the material between conductor, no matter from science and technology or economic development from the perspective of,
The importance of semiconductor be all it is very huge, today most electronic product, as computer, mobile phone or number record
Core cell in sound machine all has extremely close association, common semi-conducting material to have silicon, germanium, GaAs with semiconductor
Deng, and silicon is even more most influential one kind in business application in various semi-conducting materials.
The application of semiconductor is very extensive, and for semiconductor during production, air-cooler needs air blast always, machine outer in this way
More heat is just will produce, but during existing semiconductor production, this heat is not utilized, direct emission,
Not only very waste of resource, it is not energy-efficient but also not environmentally.
Utility model content
In view of the deficiencies of the prior art, the utility model provides a kind of energy saver of semiconductor production line, solves
During existing semiconductor production, this heat is not utilized, direct emission, not only very waste of resource, not energy-efficient
And not environmentally the problem of.
In order to achieve the above object, the utility model is achieved by the following technical programs：A kind of semiconductor production line
Energy saver, including babinet and active box, the left side of the babinet, which is run through, air inlet pipe, and the left end of the air inlet pipe is fixedly mounted
There is the outer machine of cold wind, is fixedly connected with filter screen between the both sides of the cabinet wall, and be located between the both sides of cabinet wall
It is fixedly connected with disinfection network on the right side of strainer, is located between the both sides of the cabinet wall on the right side of disinfection network and is fixedly connected with suction
Plate is communicated with heating tube on the right side of the suction disc, water tank is fixedly connected at the top of the babinet, the bottom of the water tank is run through
There are vertical tube, the bottom end of the vertical tube to be located at one end outside water tank and run through babinet and extend to the inside of babinet, the vertical tube extends
It is fixedly connected to one end of box house with the bottom of cabinet wall.
Preferably, the right end of the heating tube runs through babinet and extends to the outside of babinet, and the right end of the heating tube connects
It is connected with communicating pipe, and is provided with booster pump on communicating pipe.
Preferably, the right end of the communicating pipe has been respectively communicated with the first promotion pipe and second by isocon and has pushed pipe, and
First pushes pipe to be pushed with second is respectively arranged with the first solenoid valve and second solenoid valve on pipe.
Preferably, the top and bottom on the left of the active box push pipe and the second promotion pipe to be connected to first respectively, and
Vibrating bin is slidably connected between the both sides of movable chamber interior wall, and damping has been fixedly connected at the top and bottom of the vibrating bin
Block.
Preferably, the right side of the active box is communicated with gas cabinet by transverse tube, and the right side of the gas cabinet, which is run through, drop
The bottom of warm plate, the gas chamber interior wall is fixedly connected with exhaust fan, and the gas outlet of the exhaust fan is communicated with hose, described soft
One end of pipe runs through gas cabinet and extends to the outside of gas cabinet, and one end that the hose extends to outside gas cabinet is communicated with spray
Head.
Preferably, the vertical tube is arranged in a crossed manner with heating tube, and air duct slats hole is offered at the top of the gas cabinet.
Advantageous effect
The utility model provides a kind of energy saver of semiconductor production line.Has following advantageous effect：
(1), the energy saver of the semiconductor production line, being run through by the left side of babinet has air inlet pipe, the air inlet pipe
Left end is installed with the outer machine of cold wind, and filter screen, and the two of cabinet wall are fixedly connected between the both sides of the cabinet wall
It is located on the right side of filter screen between side and is fixedly connected with disinfection network, the right side of disinfection network is located between the both sides of the cabinet wall
It is fixedly connected with suction disc, heating tube is communicated on the right side of the suction disc, water tank, the water are fixedly connected at the top of the babinet
The bottom of case, which is run through, vertical tube, and the bottom end of the vertical tube is located at one end outside water tank and runs through babinet and extend to the inside of babinet,
The vertical tube extends to one end of box house and is fixedly connected with the bottom of cabinet wall, can be effectively by the hot gas of generation
It is collected, gas can be filtered and be sterilized, prevent from impacting semiconductor production, can be heated, half-and-half
The heat needed in conductor production process carries out a degree of supply.
(2), the energy saver of the semiconductor production line through babinet and extends to the outer of babinet by the right end of heating tube
The right end in portion, the heating tube is communicated with communicating pipe, and booster pump is provided on communicating pipe, and the right end of the communicating pipe is by dividing
Flow tube has been respectively communicated with the first promotion pipe and second pushes pipe, and is respectively arranged with first on the first promotion pipe and the second promotion pipe
Solenoid valve and second solenoid valve, the top and bottom on the left of the active box push pipe and the second promotion Guan Lian with first respectively
It is logical, and vibrating bin is slidably connected between the both sides of movable chamber interior wall, it has been fixedly connected at the top and bottom of the vibrating bin
Snubber block, the gas after heating can provide power, provide energy for the device that needs to swing or vibrate, reduce the energy
Consumption.
(3), the energy saver of the semiconductor production line is communicated with gas cabinet, institute by the right side of active box by transverse tube
The right side of gas cabinet is stated through thering is temperature lowering board, the bottom of the gas chamber interior wall to be fixedly connected with exhaust fan, the exhaust fan
Gas outlet is communicated with hose, and one end of the hose runs through gas cabinet and extends to the outside of gas cabinet, and the hose extends to
One end outside gas cabinet is communicated with nozzle, and gas after cooling can cool down to the place of needs, may be used as simultaneously
Compression is dusted to device and other purposes, and use is very convenient, and apparatus structure is simple, highly practical.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model entirety；
Fig. 2 is the structural schematic diagram of the utility model vertical tube and heating tube；
Fig. 3 is the structural schematic diagram of the utility model gas cabinet.
In figure：1- babinets, 2- air inlet pipe, 3- cold wind outer machine, 4- filter screens, 5- disinfection networks, 6- suction discs, 7- heating tubes, 8-
Vertical tube, 9- water tanks, 10- communicating pipes, 11- booster pumps, 12- first push pipe, the first solenoid valves of 13-, 14- second push manage,
15- second solenoid valves, 16- active box, 17- vibrating bins, 18- snubber blocks, 19- gas cabinets, 20- exhaust fans, 21- hoses, 22-
Nozzle, 23- temperature lowering boards.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.
- 3 are please referred to Fig.1, the utility model provides a kind of technical solution：A kind of energy saver of semiconductor production line, packet
Babinet 1 and active box 16 are included, the left side of babinet 1, which is run through, air inlet pipe 2, and the left end of air inlet pipe 2 is installed with the outer machine 3 of cold wind,
It is fixedly connected with filter screen 4 between the both sides of 1 inner wall of babinet, gas is filtered, and is located between the both sides of 1 inner wall of babinet
The right side of filter screen 4 is fixedly connected with disinfection network 5, carries out disinfection to gas, and disinfection network 5 is located between the both sides of 1 inner wall of babinet
Right side be fixedly connected with suction disc 6, facilitate gas to enter heating tube 7, the right side of suction disc 6 is communicated with heating tube 7, vertical tube 8 with plus
Heat pipe 7 is arranged in a crossed manner, it is ensured that can be heated up to vertical tube 8, the top of gas cabinet 19 offers air duct slats hole, facilitates row
It puts, the top of babinet 1 is fixedly connected with water tank 9, and through having into bucket, the bottom of water tank 9, which is run through, vertical tube 8 at the top of water tank 9,
The bottom end of vertical tube 8 is located at 9 outside one end of water tank through babinet 1 and extends to the inside of babinet 1, and vertical tube 8 extends to inside babinet 1
One end be fixedly connected with the bottom of 1 inner wall of babinet, the right end of heating tube 7 is through babinet 1 and extends to the outside of babinet 1, adds
The right end of heat pipe 7 is communicated with communicating pipe 10, and booster pump 11 is provided on communicating pipe 10, is pressurized to gas, communicating pipe 10
Right end by isocon be respectively communicated with the first promotion pipe 12 and second push pipe 14, and first push pipe 12 and second push
It is respectively arranged with the first solenoid valve 13 and second solenoid valve 15 on pipe 14, the top and bottom in 16 left side of active box are respectively with first
It pushes pipe 12 to be connected to the second promotion pipe 14, and vibrating bin 17, active box is slidably connected between the both sides of 16 inner wall of active box
Sliding rail compatible with vibrating bin 17 is offered on 16 inner wall, the top and bottom of vibrating bin 17 have been fixedly connected with snubber block
18, the right side of active box 16 is communicated with gas cabinet 19 by transverse tube, and the right side of gas cabinet 19, which is run through, temperature lowering board 23, gas cabinet 19
The bottom of inner wall is fixedly connected with exhaust fan 20, and the gas outlet of exhaust fan 20 is communicated with hose 21, and gas is run through in one end of hose 21
Body case 19 and the outside for extending to gas cabinet 19, one end that hose 21 extends to outside gas cabinet 19 are communicated with nozzle 22, can be with
Effectively the hot gas of generation is collected, gas can be filtered and be sterilized, prevent from causing shadow to semiconductor production
It rings, can be heated, a degree of supply is carried out to the heat needed in semiconductor production process, the gas after heating can
To provide power, energy is provided for the device that needs to swing or vibrate, reduces the consumption of the energy, gas after cooling can
Cooled down with the place to needs, while may be used as compression and device being dusted and other purposes, use are very square
Just, apparatus structure is simple, highly practical.
In use, air inlet pipe 2 and the air outlet of machine outside cold wind 3 are fixed so that the hot wind that the outer machine 3 of cold wind is discharged by into
Tracheae 2 enters inside babinet 1, passes sequentially through the filtering of filter screen 4 and disinfection network 5 sterilizes, then entered by suction disc 6 and heated
Pipe 7, heating tube 7 heat vertical tube 8 so that and heat shifts, and then gas is pressurized by communicating pipe 10 through booster pump 12,
It has a rest and opens the first solenoid valve 13 and second solenoid valve 15 so that gas push vibrating bin 17 up and down reciprocatingly moves inside active box 16
Dynamic, then snubber block 18 enters by transverse tube inside gas cabinet 19 its damping, and when needing cooling, pumping opens temperature lowering board 23, makes
Gas after cooling is obtained by air duct slats hole, is blowed, when being dusted, exhaust fan 20 is opened so that gas passes through soft
Pipe 21 and nozzle 22 spray.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also include other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions.By sentence " including one ... the element limited, it is not excluded that
There is also other identical elements in the process, method, article or apparatus that includes the element ".
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is appreciated that can these embodiments be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of energy saver of semiconductor production line, including babinet (1) and active box (16), it is characterised in that：The babinet
(1) left side, which is run through, air inlet pipe (2), and the left end of the air inlet pipe (2) is installed with the outer machine (3) of cold wind, the babinet (1)
It is fixedly connected with filter screen (4) between the both sides of inner wall, and is located at the right side of filter screen (4) between the both sides of babinet (1) inner wall
It is fixedly connected with disinfection network (5), is located between the both sides of babinet (1) inner wall on the right side of disinfection network (5) and is fixedly connected with suction
Plate (6) is communicated with heating tube (7) on the right side of the suction disc (6), water tank (9), institute is fixedly connected at the top of the babinet (1)
The bottom of water tank (9) is stated through having vertical tube (8), the bottom end of the vertical tube (8) to be located at the external one end of water tank (9) through babinet (1)
And the inside of babinet (1) is extended to, it is solid that the vertical tube (8) extends to the internal one end of babinet (1) and the bottom of babinet (1) inner wall
Fixed connection.
2. a kind of energy saver of semiconductor production line according to claim 1, it is characterised in that：The heating tube (7)
Right end through babinet (1) and extend to the outside of babinet (1), the right end of the heating tube (7) is communicated with communicating pipe (10), and
Booster pump (11) is provided on communicating pipe (10).
3. a kind of energy saver of semiconductor production line according to claim 2, it is characterised in that：The communicating pipe (10)
Right end the first promotion pipe (12) and second be respectively communicated with by isocon push pipe (14), and first pushes pipe (12) and the
It is respectively arranged with the first solenoid valve (13) and second solenoid valve (15) on two promotion pipes (14).
4. a kind of energy saver of semiconductor production line according to claim 1, it is characterised in that：The active box (16)
The top and bottom in left side push pipe (12) and second that pipe (14) is pushed to be connected to first respectively, and the two of active box (16) inner wall
Vibrating bin (17) is slidably connected between side, and snubber block (18) has been fixedly connected at the top and bottom of the vibrating bin (17).
5. a kind of energy saver of semiconductor production line according to claim 1, it is characterised in that：The active box (16)
Right side gas cabinet (19) is communicated with by transverse tube, the right side of the gas cabinet (19) is through having temperature lowering board (23), the gas
The bottom of case (19) inner wall is fixedly connected with exhaust fan (20), and the gas outlet of the exhaust fan (20) is communicated with hose (21), institute
One end of hose (21) is stated through gas cabinet (19) and extends to the outside of gas cabinet (19), the hose (21) extends to gas
The external one end of body case (19) is communicated with nozzle (22).
6. a kind of energy saver of semiconductor production line according to claim 5, it is characterised in that：The vertical tube (8) with
Heating tube (7) is arranged in a crossed manner, and air duct slats hole is offered at the top of the gas cabinet (19).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721272262.9U CN207624666U (en) | 2017-09-29 | 2017-09-29 | A kind of energy saver of semiconductor production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721272262.9U CN207624666U (en) | 2017-09-29 | 2017-09-29 | A kind of energy saver of semiconductor production line |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207624666U true CN207624666U (en) | 2018-07-17 |
Family
ID=62825944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721272262.9U Active CN207624666U (en) | 2017-09-29 | 2017-09-29 | A kind of energy saver of semiconductor production line |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207624666U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113161258A (en) * | 2021-01-08 | 2021-07-23 | 浙江旭盛电子有限公司 | Monocrystalline silicon polished wafer heat treatment device |
-
2017
- 2017-09-29 CN CN201721272262.9U patent/CN207624666U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113161258A (en) * | 2021-01-08 | 2021-07-23 | 浙江旭盛电子有限公司 | Monocrystalline silicon polished wafer heat treatment device |
| CN113161258B (en) * | 2021-01-08 | 2023-12-12 | 浙江旭盛电子有限公司 | Monocrystalline silicon polished wafer heat treatment device |
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