CN207624655U - A kind of electrode plate cleaning device - Google Patents
A kind of electrode plate cleaning device Download PDFInfo
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- CN207624655U CN207624655U CN201721725675.8U CN201721725675U CN207624655U CN 207624655 U CN207624655 U CN 207624655U CN 201721725675 U CN201721725675 U CN 201721725675U CN 207624655 U CN207624655 U CN 207624655U
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- electrode plate
- connector
- cleaning device
- babinet
- support element
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Abstract
The utility model proposes a kind of electrode plate cleaning device, including babinet, support element is set in babinet, electrode plate is placed on support element, plasma nozzle is arranged in the top of babinet；The side of several electrode plates is connected with connector, and connector is connect with push-pull device at fixed, and push-pull device at fixed is used to control the reciprocating motion of connector；Several slots are set on electrode plate.There is following advantageous effect：By way of opening up fence slot on electrode plate, the circulation of reaction gas is greatly enhanced, scattered property of overflowing.And when the cleaning of multi-electrode plate, by electrode plate dislocation motion, plasma gas is made uniformly to be contacted on different fence slots, the uniformity of product significantly improves, and power source loads also have part reduction.
Description
Technical field
The utility model belongs to plasma cleaning technical field, and in particular to a kind of electrode plate cleaning device.
Background technology
Existing vacuum plasma cleaning treatment equipment is to lie in a horizontal plane in monoblock electrode plate in cleaning device, this
Structure is unfavorable for circulating, being excessive scattered for plasma gas, influences the uniformity for handling entire block, and when a large amount of electrode plate waits for clearly
When washing, processing speed is slow；The structure of full wafer plate can increase many pressure to power source loads, be forced the power supply for selecting power larger.
Utility model content
In order to solve the above technical problems, the utility model proposes a kind of electrode plate cleaning device, including babinet, in babinet
Support element is set, electrode plate is placed on support element, plasma nozzle is arranged in the top of babinet；
The side of several electrode plates is connected with connector, and connector is connect with push-pull device at fixed, and push-pull device at fixed is for controlling
The reciprocating motion of connector；
Several slots are set on electrode plate.
Preferably, push-pull device at fixed is set as the transmission device that cylinder or rack-and-pinion are connect with motor.
Preferably, slot is set as paliform, several are arranged in parallel on electrode plate.
Preferably, electrode plate is cross-linked with connector from top to bottom.
Preferably, support element is set as netted.
The utility model has following advantageous effect：By way of opening up fence slot on electrode plate, largely increase
The strong circulation of reaction gas, scattered property of overflowing.And when the cleaning of multi-electrode plate, by electrode plate dislocation motion, plasma gas is made to exist
It is uniformly contacted on different fence slots, the uniformity of product significantly improves, and power source loads also have part reduction..
Description of the drawings
It is required in being described below to embodiment in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
Attached drawing to be used is briefly described.
Fig. 1 is a kind of structural schematic diagram of electrode plate cleaning device of the utility model；
Fig. 2 is a kind of structural schematic diagram of the electrode plate of electrode plate cleaning device of the utility model；
Fig. 3 is a kind of vertical view of the support element of electrode plate cleaning device of the utility model；
Wherein, 1, electrode plate；11, fence slot；12, electrode accesses head；1 ', misplace electrode plate；2, babinet；21, support element；
3, cylinder；31, connector；4, plasma nozzle.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe.
As shown in Figure 1-Figure 3, it the utility model proposes a kind of 1 cleaning device of electrode plate, including babinet 2, is set in babinet 2
Support element 21 is set, electrode plate 1 is placed on support element 21, plasma nozzle 4 is arranged in the top of babinet 2；
The side of several electrode plates 1 is connected with connector 31, and connector 31 is connect with push-pull device at fixed, and push-pull device at fixed is used for
Control the reciprocating motion of connector 31；
Specifically, push-pull device at fixed is set as the transmission device that cylinder 3 or rack-and-pinion are connect with motor, and the present embodiment is selected
Cylinder 3 is used as the push-pull device at fixed, the output end of cylinder 3 to be connected to connector 31, and dislocation electrode plate 1 ' is connected to by connector 31
Movement, plasma nozzle 4 spray plasma gas, the table of the gas of ejection and the electrode plate 1 of lower section and the electrode plate 1 ' that misplaces
Face reacts；
Electrode plate 1 is cross-linked with connector 31 from top to bottom, i.e., one connect with connector 31 between electrode plate 1 one
Do reciprocal push-and-pull campaign.
Several slots are set on electrode plate 1；
Slot is set as paliform, several are arranged in parallel on electrode plate 1；
Since electrode plate 1 is used to connect the positive and negative anodes of power supply, the surface of electrode plate 1 without special installation requirement, therefore
The surface fluting of electrode plate 1 does not influence the normal use of electrode plate 1 and normal attribute, but can enhance between electrode plate 1 etc.
The circulation of ionic reaction gas and scattered property of overflowing；By being provided parallel to the slot of the paliform of setting, when cylinder 3 drives dislocation electrode
When plate 1 ' does alternating movement, the position between electrode plate 1 and dislocation electrode plate 1 ' constantly changes, in same vertical plane
Slot between position also constantly change, be conducive to reaction gas evenly anti-with electrode plate 1 and dislocation electrode plate 1 '
It answers.
Support element 21 is set as netted, as shown in figure 3, support element 21 will not influence the reaction of electrode plate 1 generation itself, and
The flowing for facilitating gas, does not generate negative impact.
A variety of modifications of embodiment will be apparent to those skilled in the art, determine herein
The General Principle of justice can be realized in other embodiments without departing from the spirit or scope of the present utility model.Cause
This, the utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The widest range consistent with features of novelty.
Claims (5)
1. a kind of electrode plate cleaning device, it is characterised in that：Including babinet, support element, the support element are set in the babinet
Plasma nozzle is arranged in the top of upper placement electrode plate, the babinet；
The side of several electrode plates is connected with connector, and the connector is connect with push-pull device at fixed, the push-pull device at fixed
Reciprocating motion for controlling the connector；
Several slots are set on the electrode plate.
2. a kind of electrode plate cleaning device according to claim 1, it is characterised in that:The push-pull device at fixed is set as cylinder
Or the transmission device that rack-and-pinion is connect with motor.
3. a kind of electrode plate cleaning device according to claim 1, it is characterised in that:The slot is set as paliform,
Several are arranged in parallel on the electrode plate.
4. a kind of electrode plate cleaning device according to claim 1, it is characterised in that:The electrode plate from top to bottom with institute
Connector is stated to be cross-linked.
5. a kind of electrode plate cleaning device according to claim 1, it is characterised in that:The support element is set as netted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721725675.8U CN207624655U (en) | 2017-12-12 | 2017-12-12 | A kind of electrode plate cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721725675.8U CN207624655U (en) | 2017-12-12 | 2017-12-12 | A kind of electrode plate cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207624655U true CN207624655U (en) | 2018-07-17 |
Family
ID=62822814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721725675.8U Active CN207624655U (en) | 2017-12-12 | 2017-12-12 | A kind of electrode plate cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207624655U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110252739A (en) * | 2019-07-11 | 2019-09-20 | 东莞市科路科技有限公司 | Electrode plate and plasma cleaner |
-
2017
- 2017-12-12 CN CN201721725675.8U patent/CN207624655U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110252739A (en) * | 2019-07-11 | 2019-09-20 | 东莞市科路科技有限公司 | Electrode plate and plasma cleaner |
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