CN207623709U - A kind of soda acid chemistry supply system board - Google Patents
A kind of soda acid chemistry supply system board Download PDFInfo
- Publication number
- CN207623709U CN207623709U CN201721662121.8U CN201721662121U CN207623709U CN 207623709 U CN207623709 U CN 207623709U CN 201721662121 U CN201721662121 U CN 201721662121U CN 207623709 U CN207623709 U CN 207623709U
- Authority
- CN
- China
- Prior art keywords
- platform body
- area
- supply system
- soda acid
- acid chemistry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of soda acid chemistry supply system boards, including platform body, it is provided with man-machine picture and control button in front of platform body, it is provided with tub area in front of board, pipeline area is arranged in platform body rear, it is provided with the automatically controlled area installed convenient for control panel on the left of platform body, sampling area is provided on the left of automatically controlled area states the bottom of platform body and be provided with leakage detector.By the above-mentioned means, the utility model layout is in picturesque disorder, beautiful and generous, switch gate is arranged in tub area, and for replacing tub and repair, switch gate is arranged in pipeline area, for installation pipeline and repair, is easier to operate.The utility model convenient disassembly, is provided with leakage-proof disc below platform body, to prevent board Drug leakage, generates pollution or endangers operator.
Description
Technical field
The utility model is related to chemicals supply system fields, more particularly to a kind of soda acid chemistry supply system machine
Platform.
Background technology
Continuing to develop with China's semicon industry, chip production line has also started increasingly scale in China,
Purpose is to realize impurity, the particulate on chip such as to clean.And as manufacture of semiconductor front end chemicals supply system,
Board is made by being delivered to after the filter filtering in board in stoste in accumulator tank, it is defeated to be related to a variety of hazardous chemicals
It send and applies, such acid-base class chemicals all has high harmfulness, strong corrosive.
But existing chemicals supply system, the safety being unable in effective guarantee transmission process cannot automatically control original
The conveying of liquid, and it is not provided with leak-proof measure, leakage is be easy to cause but without detecting/warning, is polluted and is injured.
Utility model content
For the utility model mainly solving the technical problems that providing a kind of soda acid chemistry supply system board, layout is straggly
There is cause, beautiful and generous, switch gate is arranged in pipeline area, for installation pipeline and repair, is easier to operate.Board integral demounting side
Just, the bottom of platform body is provided with leakage detector, to prevent leakage in board, generates pollution or endanger operator.
In order to solve the above technical problems, the technical solution that the utility model uses is：A kind of soda acid chemistry confession is provided
It answers system board, including platform body, the platform body to be welded by square steel, plank is installed outside platform body,
Plank is welded using PP magnetic blanks；The platform body front is provided with the tub area for placing original liquid box, in platform body
It is provided with filter-fan unit above tub area；The platform body rear is provided with pipeline area, the platform body back side pair
The position in pipeline area is answered to be provided with pipeline area switch gate, pipeline area switch gate is equipped with pipeline area primary filter；The board
Left side is provided with the automatically controlled area of control panel installation, and sampling area is provided on the left of automatically controlled area；The bottom of the platform body is arranged
There is leakage detector；The front of the platform body is provided with man-machine interface and control button.
Further, the platform body left side is provided with automatically controlled area's switch gate and sampling area switch gate.
Further, the platform body left side is provided with sampling valve and sampling window with sampling area opposite position.
Further, the front of the platform body is provided with the front door opposite with tub area, and transparent part for front sight is provided on front door
With front door primary filter.
Further, the upper surface of described platform body is provided with three color alarm lamps.
Further, it is provided with movable bracket below the platform body, the lower end of the movable bracket is provided with idler wheel.
The utility model has the beneficial effects that：The utility model layout is in picturesque disorder, beautiful and generous, pipeline area setting switch
Door is easier to operate for installation pipeline and repair.Board integral demounting is convenient, is provided with and lets out in the bottom of platform body
Reveal detector, to prevent leakage in board, generates pollution or endanger operator.
Description of the drawings
Fig. 1 is a kind of stereochemical structure signal of one preferred embodiment of soda acid chemistry supply system board of the utility model
Figure；
Fig. 2 is a kind of main structure diagram of shown soda acid chemistry supply system board；
Fig. 3 is a kind of side structure schematic view of shown soda acid chemistry supply system board；
Fig. 4 is a kind of backsight structural representation of shown soda acid chemistry supply system board.
The label of each component is as follows in attached drawing：1, platform body；2, ventilation device；3, front door；4, automatically controlled area's switch gate；5、
Sampling area switch gate；6, back door.
Specific implementation mode
The preferred embodiment of the utility model is described in detail below in conjunction with the accompanying drawings, so that the advantages of the utility model
It can be easier to be readily appreciated by one skilled in the art with feature, it is apparent clear to be made to the scope of protection of the utility model
Define.
It please refers to Fig.1 to Fig.4, the utility model embodiment includes：
A kind of soda acid chemistry supply system board, including platform body 1,1 left front portion of the platform body are provided with peace
The tub area of original liquid box is put, tub area rear is provided with pipeline area, filter-fan unit 2, board sheet are provided with above tub area
The left side of body 1 is provided with automatically controlled area install convenient for control panel and convenient for the sampling area of sampling, and automatically controlled area is located at sampling area left side,
Ontology left side is provided with automatically controlled area's switch gate 4 and sampling area switch gate 5, and leakage-proof disc is arranged in the bottom in platform body pipeline area.
Platform body is welded using the square steel of 40*40mm, and board plank is welded using PP magnetic blanks.Tub and pipeline area phase
Mutually independent, automatically controlled area and pipeline area are mutual indepedent, are easily installed, repair and prevent acid gas from leaking into automatically controlled area.Platform body is set
It is equipped with front door 3 corresponding with tub area, form and primary filter are provided on front door 3, platform body is provided with and pipeline
Primary filter is arranged on back door 6 in the corresponding back door 6 in area.Movable bracket is provided with below platform body, movable bracket is adopted
It is welded with plank, simple for process, bottom four corners are welded using angle steel and shelf, when having saved used when many processing
Between, it is convenient to dismounting board, is also convenient for the installation in clack box, the lower end of the movable bracket is provided with 180 ° of idler wheel.
The utility model layout is in picturesque disorder, beautiful and generous, and switch gate is arranged in pipeline area, for installation pipeline and repairs,
It is easier to operate.The utility model convenient disassembly is provided with leakage detector, to prevent board liquid in the bottom of platform body
Leakage generates pollution or endangers operator.
The above description is only the embodiments of the present invention, and it does not limit the scope of the patent of the present invention, every
Equivalent structure made based on the specification and figures of the utility model is applied directly or indirectly in other relevant technologies
Field is equally included in the patent within the scope of the utility model.
Claims (6)
1. a kind of soda acid chemistry supply system board, including platform body, it is characterised in that：The platform body passes through square steel
It is welded, plank is installed outside platform body, plank is welded using PP magnetic blanks；The platform body front setting
There is the tub area for placing original liquid box, is located in platform body above tub area and is provided with filter-fan unit；The platform body
Rear is provided with pipeline area, and the position that the platform body back side corresponds to pipeline area is provided with pipeline area switch gate, pipeline area switch gate
It is equipped with pipeline area primary filter；It is provided with the automatically controlled area of control panel installation on the left of the board, is arranged on the left of automatically controlled area
There is sampling area；The bottom of the platform body is provided with leakage detector；The front of the platform body is provided with man-machine interface
And control button.
2. a kind of soda acid chemistry supply system board according to claim 1, it is characterised in that：The platform body is left
Side is provided with automatically controlled area's switch gate and sampling area switch gate.
3. a kind of soda acid chemistry supply system board according to claim 1, it is characterised in that：The platform body is left
Side is provided with sampling valve and sampling window with sampling area opposite position.
4. a kind of soda acid chemistry supply system board according to claim 1, it is characterised in that：The platform body
Front is provided with the front door opposite with tub area, and transparent part for front sight and front door primary filter are provided on front door.
5. a kind of soda acid chemistry supply system board according to claim 1, it is characterised in that：The platform body
It is provided with three color alarm lamps above.
6. a kind of soda acid chemistry supply system board according to claim 1, it is characterised in that：Under the platform body
Side is provided with movable bracket, and the lower end of the movable bracket is provided with idler wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721662121.8U CN207623709U (en) | 2017-12-04 | 2017-12-04 | A kind of soda acid chemistry supply system board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721662121.8U CN207623709U (en) | 2017-12-04 | 2017-12-04 | A kind of soda acid chemistry supply system board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207623709U true CN207623709U (en) | 2018-07-17 |
Family
ID=62825221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721662121.8U Expired - Fee Related CN207623709U (en) | 2017-12-04 | 2017-12-04 | A kind of soda acid chemistry supply system board |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207623709U (en) |
-
2017
- 2017-12-04 CN CN201721662121.8U patent/CN207623709U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180717 Termination date: 20211204 |