CN207581935U - Rotary atomic layer deposition reactor for batch modification of hollow fiber membrane - Google Patents
Rotary atomic layer deposition reactor for batch modification of hollow fiber membrane Download PDFInfo
- Publication number
- CN207581935U CN207581935U CN201721675598.XU CN201721675598U CN207581935U CN 207581935 U CN207581935 U CN 207581935U CN 201721675598 U CN201721675598 U CN 201721675598U CN 207581935 U CN207581935 U CN 207581935U
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- CN
- China
- Prior art keywords
- cavity
- magnet
- rotation
- fibre membrane
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 33
- 238000000231 atomic layer deposition Methods 0.000 title abstract description 9
- 239000012510 hollow fiber Substances 0.000 title abstract 5
- 238000012986 modification Methods 0.000 title description 3
- 230000004048 modification Effects 0.000 title description 3
- 239000000835 fiber Substances 0.000 claims abstract description 26
- 238000007789 sealing Methods 0.000 claims abstract description 13
- 230000003993 interaction Effects 0.000 claims abstract description 4
- 229920001973 fluoroelastomer Polymers 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 6
- 239000000376 reactant Substances 0.000 abstract description 6
- 238000002474 experimental method Methods 0.000 abstract description 3
- 238000009792 diffusion process Methods 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 150000005846 sugar alcohols Polymers 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000003519 biomedical and dental material Substances 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000007385 chemical modification Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000001631 haemodialysis Methods 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000001727 in vivo Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000002715 modification method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000006213 oxygenation reaction Methods 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000010148 water-pollination Effects 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The utility model relates to a rotatory atomic layer deposition equipment towards hollow fiber membrane is modified in batches for realize the rotation and the even deposit of hollow fiber membrane in the cavity. The rotary reactor comprises a cavity and an upper cover, the top of the cavity and the upper cover are sealed through a sealing ring, and the whole device can reach the vacuum degree required by an experiment. The motor with the magnet is fixed on the cover of the cavity, and the magnet in the cavity rotates along with the rotation of the motor by utilizing the interaction force of the magnet. Thereby driving the porous rotary disc to rotate. The hollow fiber membrane is fixed on the porous rotary disc. The rotating speed of the motor is adjusted to drive the hollow fiber membrane to rotate, so that reactants pulsed into the cavity are uniformly diffused in the cavity and uniformly deposited on the surface of the membrane. The utility model discloses equipment is through rotatory sample for the reactant diffusion makes it evenly be full of whole cavity, thereby realizes the purpose of deposit modified fiber class material in batches, has advantages such as high efficiency and high yield.
Description
Technical field
The utility model patent is related to ald reactor, provide a kind of evenly controllable batch be modified it is hollow
The rotary ald reactor of fiber film surface.
Background technology
Polyalcohol stephanoporate separation material plays an important role in fields such as water process, water-oil separating, particulate matter filterings.Phase
Compared with plate membrane, hollow-fibre membrane has many advantages, such as effective filter table area of unit volume is larger, component manufacture letter
It is single, it does not need to feed and permeate spacer and pretreatment and maintenance are simpler etc..Therefore, hollow-fibre membrane is at chemical wastewater
There is potential application in reason, blood oxygenation, the biomedical material of haemodialysis and food-processing industry.It is expected in order to reach
Target needs to carry out hydrophilic modification by physics or chemical method to the performance on polymeric film material surface.But polymer
Traditional method of material surface modifying, such as chemical modification, filling-modified, blending and modifying or wait and need to use a large amount of chemistry
Reagent, modifying process is cumbersome, and modified porous material performance boost space is smaller, modified incomplete, can not realize to aperture
Precision control.Importantly, the generation of a large amount of organic wastewaters substantially increases the difficulty and economy of subsequent processes
Cost.
Atomic layer deposition（Atomic layer deposition, ALD）It is a kind of advanced ultrathin membrane deposition technique, by
Have in its reaction process from restricted, therefore obtained sedimentary has good conformality, and can realize Subnano-class
Thickness control.It uniformly conformally deposits, is increasingly becoming since it can be realized at a lower temperature in complicated 3 D pore canal
The important means that polyalcohol stephanoporate separation material is modified.
Compared with traditional membrane surface modification method, the hydrophobic film surface of hydrophilic modifying is hydrophilic through atomic layer deposition oxide
Modified, uniformity and good shape retention, hydrophily significantly increase, anti-protein contamination ability enhancing；By changing deposition time
Number, permeance property and rejection can adjust step by step, therefore before having the application of business by ALD technique modified hollow fibre membrane
Scape.
However, the ald reactor used at present is largely fixed cavity, deposition chambers are smaller, and substrate is in chamber
In vivo in static condition, dead angle is susceptible to during deposition reaction, reactant diffusion is uneven, and film surface is caused to deposit
It is uneven；And sample capacity is less, production efficiency is relatively low, limits use scope and yield.Therefore urgently exploitation is a kind of novel
Reaction cavity to solve the problems, such as that ALD is not suitable for the fiber-like material that high-volume deposits modified high filtration area.
Invention content
The utility model patent provides to solve the technical issues of above-mentioned and a kind of be suitable for high-volume to deposit modification hollow
The atomic layer deposition rotatable reactor of tunica fibrosa, can it is uniform it is efficient progress film surface hydrophilic modifying, realize separating property
Promotion.
To achieve the above object, the utility model is as follows：
A kind of rotation ald reactor modified towards hollow-fibre membrane batch, including cavity and upper cover, cavity
Top and upper cover be tightly connected by sealing ring, cavity bottom be equipped with air inlet pipe and air outlet pipe；Motor with magnet is fixed
In the top of upper cover, motor drives magnet rotors by shaft；There is same magnet in the cavity, in the interaction force of magnet
Under, the magnet in cavity is rotated with the rotation of motor；Stent is fixed on cavity wall, and magnet is fixed on branch by shaft
On frame；Turn the tip of the axis connection porous wheel, hollow-fibre membrane is suspended on porous wheel.
Wherein, the arrangement of porous wheel mesoporous is arranged for concentric circles, and hollow-fibre membrane is suspended on porous turn by raw material band
On disk.The sealing ring is fluororubber O-type sealing ring.Stent is screwed on cavity wall, and sample is facilitated to be put into and take
Go out.
Hollow-fibre membrane is fixed on turntable by the utility model patent design, by regulation motor rotating speed, drives sample
Film rotates so that the reactant of pulse into cavity is uniformly spread in the cavity, in film surface uniform deposition.Production capacity can basis
Increase cavity size and increase.It can be by adjusting rotary rpm, to adapt to different sedimentary conditions.
Advantageous effect：
1. by expanding reaction cavity, the filling area of film is improved, increases the useful load of hollow-fibre membrane, improves yield
And efficiency；
2. deposition reaction uses the principle of magnetic force induction, by rotating sample, realize that reactant is uniformly spread, make it in film
Surface uniform adsorption avoids the non-uniform problem of absorption caused by being stood due to substrate, so as to ensure the uniformity of deposition.
3. rotation avoids increasing extra stirring system in the cavity, it is ensured that reaction cavity using the principle of magnetic force induction
Leakproofness.It realizes batch production, improves production efficiency.
Description of the drawings
Fig. 1 is the front view of the utility model device.As shown in Figure 1,1：Cavity, 2：Porous wheel, 3：Magnet, 4：Sealing
Circle, 5：Upper cover, 6：Motor, 7：Shaft, 8：Stent, 9：Hollow-fibre membrane, 10：Air inlet pipe, 11：Air outlet pipe.
Fig. 2 is the left view of the utility model device.
Fig. 3 is the vertical view of the utility model device.
Fig. 4 is the porous wheel schematic diagram of the utility model device.
Specific embodiment
A kind of rotation ald reactor modified towards hollow-fibre membrane batch, including cavity（1）And upper cover
（5）, cavity（1）Top and upper cover（5）Pass through sealing ring（4）It is tightly connected, cavity（1）Bottom is equipped with air inlet pipe（10）With go out
Tracheae（11）；With magnet（3）Motor（6）It is fixed on upper cover（5）Top, motor（6）Pass through shaft（7）Band moving magnet
（3）Rotation；In cavity（1）Inside there is same magnet（3）, under the interaction force of magnet, cavity（1）Interior magnet（3）With
Motor（6）Rotation and rotate；Stent（8）It is fixed on cavity（1）On side wall, magnet（3）Pass through shaft（7）It is fixed on stent
（8）On；Shaft（7）End connection porous wheel（2）, hollow-fibre membrane（9）It is suspended on porous wheel（2）On.
Porous wheel（2）The arrangement of mesoporous is arranged for concentric circles, hollow-fibre membrane（9）Porous turn is suspended on by raw material band
Disk（2）On.Sealing ring（4）For fluororubber O-type sealing ring.Stent（8）It is screwed in cavity（1）On side wall.
First by porous wheel（2）And magnet（3）Pass through shaft（7）It is fixed on stent（8）On, by hollow-fibre membrane（9）
It is suspended on porous wheel（2）On.Again with screw by stent（8）It is fixed on cavity（1）It is interior, sealing ring（4）It is placed at the top of cavity, it will
Equipped with motor（6）Upper cover（5）It is placed on cavity（1）On, to achieve the effect that sealing.Open motor（6）Make magnet（3）Rotation,
Drive and magnet（3）Connected porous wheel（2）Rotation, hollow-fibre membrane（9）Start to rotate, be vacuumized after adjusting rotating speed
And sedimentation experiment.
When deposition starts, precursor gas passes through air inlet pipe（10）Pulse enters cavity（1）, when appropriate stop is set
Between, precursor gas is in hollow-fibre membrane（9）Stirring under be dispersed in cavity（1）It is interior, and and hollow-fibre membrane（9）
It comes into full contact with, monolayer Chemisorption occurs for film surface.After deposition reaction, excessive reactant and by-product via
Nitrogen purges, from air outlet pipe（11）Removal system, air outlet pipe are directly connected with end valve and vacuum pump, to reach experimentation lumen
Body（1）Internal vacuum ensures reactive deposition process.After experiment, upper cover is removed（5）, then remove stent（8）And cavity
（1）The screw of connection will be hung with hollow-fibre membrane（9）Porous wheel（2）It takes out.
Claims (4)
1. a kind of rotation ald reactor modified towards hollow-fibre membrane batch, which is characterized in that including cavity（1）
And upper cover（5）, cavity（1）Top and upper cover（5）Pass through sealing ring（4）It is tightly connected, cavity（1）Bottom is equipped with air inlet pipe
（10）And air outlet pipe（11）；With magnet（3）Motor（6）It is fixed on upper cover（5）Top, motor（6）Pass through shaft（7）Band
Moving magnet（3）Rotation；In cavity（1）Inside there is same magnet（3）, under the interaction force of magnet, cavity（1）Interior magnet
（3）With motor（6）Rotation and rotate；Stent（8）It is fixed on cavity（1）On side wall, magnet（3）Pass through shaft（7）It is fixed
In stent（8）On；Shaft（7）End connection porous wheel（2）, hollow-fibre membrane（9）It is suspended on porous wheel（2）On.
2. a kind of rotation ald reactor modified towards hollow-fibre membrane batch as described in claim 1, special
Sign is, porous wheel（2）The arrangement of mesoporous is arranged for concentric circles, hollow-fibre membrane（9）Porous turn is suspended on by raw material band
Disk（2）On.
3. a kind of rotation ald reactor modified towards hollow-fibre membrane batch as described in claim 1, special
Sign is, the sealing ring（4）For fluororubber O-type sealing ring.
4. a kind of rotation ald reactor modified towards hollow-fibre membrane batch as described in claim 1, special
Sign is, stent（8）It is screwed in cavity（1）On side wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721675598.XU CN207581935U (en) | 2017-12-05 | 2017-12-05 | Rotary atomic layer deposition reactor for batch modification of hollow fiber membrane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721675598.XU CN207581935U (en) | 2017-12-05 | 2017-12-05 | Rotary atomic layer deposition reactor for batch modification of hollow fiber membrane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207581935U true CN207581935U (en) | 2018-07-06 |
Family
ID=62735820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721675598.XU Withdrawn - After Issue CN207581935U (en) | 2017-12-05 | 2017-12-05 | Rotary atomic layer deposition reactor for batch modification of hollow fiber membrane |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207581935U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107815668A (en) * | 2017-12-05 | 2018-03-20 | 南京工业大学 | Rotary atomic layer deposition reactor for batch modification of hollow fiber membrane |
| CN115677358A (en) * | 2021-07-21 | 2023-02-03 | 通用电气公司 | System and method for coating ceramic fibers |
-
2017
- 2017-12-05 CN CN201721675598.XU patent/CN207581935U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107815668A (en) * | 2017-12-05 | 2018-03-20 | 南京工业大学 | Rotary atomic layer deposition reactor for batch modification of hollow fiber membrane |
| CN107815668B (en) * | 2017-12-05 | 2023-05-23 | 南京工业大学 | Rotary atomic layer deposition reactor for batch modification of hollow fiber membranes |
| CN115677358A (en) * | 2021-07-21 | 2023-02-03 | 通用电气公司 | System and method for coating ceramic fibers |
| CN115677358B (en) * | 2021-07-21 | 2024-04-05 | 通用电气公司 | System and method for coating ceramic fibers |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20180706 Effective date of abandoning: 20230523 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20180706 Effective date of abandoning: 20230523 |
|
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |